DE10361002A1 - Verfahren und Struktur für einen Piezoelektrisch betätigten optischen Schiebermodus-Flüssigmetallschalter - Google Patents

Verfahren und Struktur für einen Piezoelektrisch betätigten optischen Schiebermodus-Flüssigmetallschalter Download PDF

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Publication number
DE10361002A1
DE10361002A1 DE10361002A DE10361002A DE10361002A1 DE 10361002 A1 DE10361002 A1 DE 10361002A1 DE 10361002 A DE10361002 A DE 10361002A DE 10361002 A DE10361002 A DE 10361002A DE 10361002 A1 DE10361002 A1 DE 10361002A1
Authority
DE
Germany
Prior art keywords
liquid metal
coupled
layer
structure according
actuating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE10361002A
Other languages
German (de)
English (en)
Inventor
Marvin Glenn Park Wong
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of DE10361002A1 publication Critical patent/DE10361002A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3538—Optical coupling means having switching means based on displacement or deformation of a liquid
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G02B6/3552—1x1 switch, e.g. on/off switch
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3578—Piezoelectric force

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
DE10361002A 2003-04-14 2003-12-23 Verfahren und Struktur für einen Piezoelektrisch betätigten optischen Schiebermodus-Flüssigmetallschalter Withdrawn DE10361002A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/412895 2003-04-14
US10/412,895 US6961487B2 (en) 2003-04-14 2003-04-14 Method and structure for a pusher-mode piezoelectrically actuated liquid metal optical switch

Publications (1)

Publication Number Publication Date
DE10361002A1 true DE10361002A1 (de) 2004-11-11

Family

ID=32298252

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10361002A Withdrawn DE10361002A1 (de) 2003-04-14 2003-12-23 Verfahren und Struktur für einen Piezoelektrisch betätigten optischen Schiebermodus-Flüssigmetallschalter

Country Status (5)

Country Link
US (1) US6961487B2 (enExample)
JP (1) JP2004318134A (enExample)
DE (1) DE10361002A1 (enExample)
GB (1) GB2400680B (enExample)
TW (1) TW200421641A (enExample)

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* Cited by examiner, † Cited by third party
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EP3406113B1 (en) * 2016-01-20 2020-09-09 Jaquet Technology Group AG Manufacturing method for a sensing element and sensor device

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Also Published As

Publication number Publication date
US20040202411A1 (en) 2004-10-14
GB2400680B (en) 2006-09-13
GB0407170D0 (en) 2004-05-05
TW200421641A (en) 2004-10-16
JP2004318134A (ja) 2004-11-11
GB2400680A (en) 2004-10-20
US6961487B2 (en) 2005-11-01

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8127 New person/name/address of the applicant

Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US

8139 Disposal/non-payment of the annual fee