JP2004311961A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2004311961A JP2004311961A JP2004045711A JP2004045711A JP2004311961A JP 2004311961 A JP2004311961 A JP 2004311961A JP 2004045711 A JP2004045711 A JP 2004045711A JP 2004045711 A JP2004045711 A JP 2004045711A JP 2004311961 A JP2004311961 A JP 2004311961A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 26
- 150000004767 nitrides Chemical class 0.000 claims abstract description 6
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 26
- 230000000694 effects Effects 0.000 abstract description 21
- 238000009413 insulation Methods 0.000 abstract 4
- 239000010408 film Substances 0.000 description 120
- 239000010410 layer Substances 0.000 description 55
- 239000000758 substrate Substances 0.000 description 15
- 229910002704 AlGaN Inorganic materials 0.000 description 12
- 230000007423 decrease Effects 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000005669 field effect Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000002109 crystal growth method Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/511—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures
- H01L29/513—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures the variation being perpendicular to the channel plane
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
【解決手段】 窒化物半導体を用いたHFET構造10の表面に設けられたSi3N4膜41Aと、Si3N4膜41Aに形成されたAl2O3膜41Bと、Al2O3膜41Bに形成されたゲート電極42とを備えた。この構造によって、高利得が得られる10nm未満の膜厚のゲート絶縁膜を用いて、安定なドレイン電流と、十分なゲートリーク電流の低減効果とが実現される。この結果、薄層の絶縁ゲート40を用いた高利得・大電流の絶縁ゲートHFETを実現することができる。
【選択図】 図1
Description
N. Maeda, T. Saitoh,K. Tsubaki, T. Nishida and N. Kobayashi; JapaneseJournal of Applied Physics 38 (1999) L987.
(I)絶縁膜と基板表面との間に界面準位が存在すると、ドレイン電流の不安定性(交流動作における電流低減)が発生する。このため、このような効果の少ない適切な絶縁膜を選択する必要がある。
(II)高い利得を得るためには、絶縁性の高い(禁制帯幅の大きい)適切な絶縁膜を用いて、絶縁膜厚を低減することが望ましい。
請求項2の発明は、請求項1記載の半導体装置において、前記Si3N4膜の膜厚が0.28〜3nmであることを特徴とする。
請求項3の発明は、請求項1または2に記載の半導体装置において、前記Al2O3膜の膜厚が2〜7nmであることを特徴とする。
請求項4の発明は、請求項2または3に記載の半導体装置において、前記Si3N4膜の膜厚は、成膜条件が原子層レベルで制御されて形成されていることを特徴とする。
11 SiC基板
12 AlGaNバッファー層
13 GaN層
14 AlGaN層
20 ソース電極
30 ドレイン電極
40 絶縁ゲート
41 2層絶縁膜
42 ゲート電極
41 2層絶縁膜
41A Si3N4膜
41B Al2O3膜
Claims (4)
- 窒化物半導体を用いたHFET構造(10)の表面に設けられたSi3N4膜(41A)と、
前記Si3N4膜(41A)に形成されたAl2O3膜(41B)と、
前記Al2O3膜(41B)に形成されたゲート電極(42)と、
を備えたことを特徴とする半導体装置。 - 前記Si3N4膜(41A)の膜厚が0.28〜3nmであることを特徴とする請求項1記載の半導体装置。
- 前記Al2O3膜(41B)の膜厚が2〜7nmであることを特徴とする請求項1または2に記載の半導体装置。
- 前記Si3N4膜(41A)の膜厚は、成膜条件が原子層レベルで制御されて形成されていることを特徴とする請求項2または3に記載の半導体装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004045711A JP4479886B2 (ja) | 2003-03-26 | 2004-02-23 | 半導体装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003084352 | 2003-03-26 | ||
JP2004045711A JP4479886B2 (ja) | 2003-03-26 | 2004-02-23 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004311961A true JP2004311961A (ja) | 2004-11-04 |
JP4479886B2 JP4479886B2 (ja) | 2010-06-09 |
Family
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Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004045711A Expired - Fee Related JP4479886B2 (ja) | 2003-03-26 | 2004-02-23 | 半導体装置 |
Country Status (1)
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JP (1) | JP4479886B2 (ja) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006173294A (ja) * | 2004-12-15 | 2006-06-29 | Nippon Telegr & Teleph Corp <Ntt> | 半導体装置 |
JP2007073656A (ja) * | 2005-09-06 | 2007-03-22 | Nippon Telegr & Teleph Corp <Ntt> | 窒化物半導体を用いたヘテロ構造電界効果トランジスタ |
JP2007311740A (ja) * | 2006-04-20 | 2007-11-29 | National Institute Of Advanced Industrial & Technology | 窒化物半導体電界効果トランジスタ |
JP2008103408A (ja) * | 2006-10-17 | 2008-05-01 | Furukawa Electric Co Ltd:The | 窒化物化合物半導体トランジスタ及びその製造方法 |
JP2009503874A (ja) * | 2005-07-29 | 2009-01-29 | インターナショナル レクティファイアー コーポレイション | プログラマブルゲートを備える常時オフiii族窒化物半導体デバイス |
JP2009032796A (ja) * | 2007-07-25 | 2009-02-12 | Rohm Co Ltd | 窒化物半導体素子および窒化物半導体素子の製造方法 |
US8482035B2 (en) | 2005-07-29 | 2013-07-09 | International Rectifier Corporation | Enhancement mode III-nitride transistors with single gate Dielectric structure |
US9508822B2 (en) | 2013-03-28 | 2016-11-29 | Toyoda Gosei Co., Ltd. | Semiconductor device |
US10084052B2 (en) | 2014-09-29 | 2018-09-25 | Denso Corporation | Semiconductor device and method for manufacturing the same |
-
2004
- 2004-02-23 JP JP2004045711A patent/JP4479886B2/ja not_active Expired - Fee Related
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006173294A (ja) * | 2004-12-15 | 2006-06-29 | Nippon Telegr & Teleph Corp <Ntt> | 半導体装置 |
JP2009503874A (ja) * | 2005-07-29 | 2009-01-29 | インターナショナル レクティファイアー コーポレイション | プログラマブルゲートを備える常時オフiii族窒化物半導体デバイス |
US8084785B2 (en) | 2005-07-29 | 2011-12-27 | International Rectifier Corporation | III-nitride power semiconductor device having a programmable gate |
US8183595B2 (en) | 2005-07-29 | 2012-05-22 | International Rectifier Corporation | Normally off III-nitride semiconductor device having a programmable gate |
US8482035B2 (en) | 2005-07-29 | 2013-07-09 | International Rectifier Corporation | Enhancement mode III-nitride transistors with single gate Dielectric structure |
JP2007073656A (ja) * | 2005-09-06 | 2007-03-22 | Nippon Telegr & Teleph Corp <Ntt> | 窒化物半導体を用いたヘテロ構造電界効果トランジスタ |
JP2007311740A (ja) * | 2006-04-20 | 2007-11-29 | National Institute Of Advanced Industrial & Technology | 窒化物半導体電界効果トランジスタ |
JP2008103408A (ja) * | 2006-10-17 | 2008-05-01 | Furukawa Electric Co Ltd:The | 窒化物化合物半導体トランジスタ及びその製造方法 |
JP2009032796A (ja) * | 2007-07-25 | 2009-02-12 | Rohm Co Ltd | 窒化物半導体素子および窒化物半導体素子の製造方法 |
US9508822B2 (en) | 2013-03-28 | 2016-11-29 | Toyoda Gosei Co., Ltd. | Semiconductor device |
US10074728B2 (en) | 2013-03-28 | 2018-09-11 | Toyoda Gosei Co., Ltd. | Semiconductor device |
US10084052B2 (en) | 2014-09-29 | 2018-09-25 | Denso Corporation | Semiconductor device and method for manufacturing the same |
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JP4479886B2 (ja) | 2010-06-09 |
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