JP2004271519A - 表面検査装置 - Google Patents

表面検査装置 Download PDF

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Publication number
JP2004271519A
JP2004271519A JP2004015576A JP2004015576A JP2004271519A JP 2004271519 A JP2004271519 A JP 2004271519A JP 2004015576 A JP2004015576 A JP 2004015576A JP 2004015576 A JP2004015576 A JP 2004015576A JP 2004271519 A JP2004271519 A JP 2004271519A
Authority
JP
Japan
Prior art keywords
laser beam
substrate
surface inspection
light
inspection apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004015576A
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English (en)
Japanese (ja)
Other versions
JP2004271519A5 (OSRAM
Inventor
Yoichiro Iwa
陽一郎 岩
Kazuhiro Miyagawa
一宏 宮川
Akihiko Sekine
明彦 関根
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Topcon Corp
Original Assignee
Topcon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Topcon Corp filed Critical Topcon Corp
Priority to JP2004015576A priority Critical patent/JP2004271519A/ja
Priority to US10/775,684 priority patent/US20040169853A1/en
Publication of JP2004271519A publication Critical patent/JP2004271519A/ja
Publication of JP2004271519A5 publication Critical patent/JP2004271519A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2004015576A 2003-02-18 2004-01-23 表面検査装置 Pending JP2004271519A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004015576A JP2004271519A (ja) 2003-02-18 2004-01-23 表面検査装置
US10/775,684 US20040169853A1 (en) 2003-02-18 2004-02-10 Surface inspection apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003039704 2003-02-18
JP2004015576A JP2004271519A (ja) 2003-02-18 2004-01-23 表面検査装置

Publications (2)

Publication Number Publication Date
JP2004271519A true JP2004271519A (ja) 2004-09-30
JP2004271519A5 JP2004271519A5 (OSRAM) 2007-03-08

Family

ID=32911390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004015576A Pending JP2004271519A (ja) 2003-02-18 2004-01-23 表面検査装置

Country Status (2)

Country Link
US (1) US20040169853A1 (OSRAM)
JP (1) JP2004271519A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7477373B2 (en) 2006-03-31 2009-01-13 Kabushiki Kaisha Topcon Surface inspection method and surface inspection device
JP2010186834A (ja) * 2009-02-10 2010-08-26 Fanuc Ltd レーザ共振器内光学部品の損傷診断装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7027916B2 (en) * 2003-12-23 2006-04-11 Honda Motor Co., Ltd. Method of formatting navigation information with varying levels of detail
US20050261829A1 (en) * 2004-05-19 2005-11-24 Honda Motor Co., Ltd. System and method for off route processing

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5179422A (en) * 1991-05-15 1993-01-12 Environmental Research Institute Of Michigan Contamination detection system
US5343290A (en) * 1992-06-11 1994-08-30 International Business Machines Corporation Surface particle detection using heterodyne interferometer
US5576831A (en) * 1994-06-20 1996-11-19 Tencor Instruments Wafer alignment sensor
US6104945A (en) * 1995-08-01 2000-08-15 Medispectra, Inc. Spectral volume microprobe arrays
US5889593A (en) * 1997-02-26 1999-03-30 Kla Instruments Corporation Optical system and method for angle-dependent reflection or transmission measurement
JP3411780B2 (ja) * 1997-04-07 2003-06-03 レーザーテック株式会社 レーザ顕微鏡及びこのレーザ顕微鏡を用いたパターン検査装置
US6104481A (en) * 1997-11-11 2000-08-15 Kabushiki Kaisha Topcon Surface inspection apparatus
US6236454B1 (en) * 1997-12-15 2001-05-22 Applied Materials, Inc. Multiple beam scanner for an inspection system
JP4089798B2 (ja) * 1998-04-13 2008-05-28 株式会社トプコン 表面検査装置
JP3858571B2 (ja) * 2000-07-27 2006-12-13 株式会社日立製作所 パターン欠陥検査方法及びその装置
US7046353B2 (en) * 2001-12-04 2006-05-16 Kabushiki Kaisha Topcon Surface inspection system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7477373B2 (en) 2006-03-31 2009-01-13 Kabushiki Kaisha Topcon Surface inspection method and surface inspection device
JP2010186834A (ja) * 2009-02-10 2010-08-26 Fanuc Ltd レーザ共振器内光学部品の損傷診断装置

Also Published As

Publication number Publication date
US20040169853A1 (en) 2004-09-02

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