JP2004271519A5 - - Google Patents

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Publication number
JP2004271519A5
JP2004271519A5 JP2004015576A JP2004015576A JP2004271519A5 JP 2004271519 A5 JP2004271519 A5 JP 2004271519A5 JP 2004015576 A JP2004015576 A JP 2004015576A JP 2004015576 A JP2004015576 A JP 2004015576A JP 2004271519 A5 JP2004271519 A5 JP 2004271519A5
Authority
JP
Japan
Prior art keywords
inspection apparatus
laser beams
surface inspection
laser beam
emitted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004015576A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004271519A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004015576A priority Critical patent/JP2004271519A/ja
Priority claimed from JP2004015576A external-priority patent/JP2004271519A/ja
Priority to US10/775,684 priority patent/US20040169853A1/en
Publication of JP2004271519A publication Critical patent/JP2004271519A/ja
Publication of JP2004271519A5 publication Critical patent/JP2004271519A5/ja
Pending legal-status Critical Current

Links

JP2004015576A 2003-02-18 2004-01-23 表面検査装置 Pending JP2004271519A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004015576A JP2004271519A (ja) 2003-02-18 2004-01-23 表面検査装置
US10/775,684 US20040169853A1 (en) 2003-02-18 2004-02-10 Surface inspection apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003039704 2003-02-18
JP2004015576A JP2004271519A (ja) 2003-02-18 2004-01-23 表面検査装置

Publications (2)

Publication Number Publication Date
JP2004271519A JP2004271519A (ja) 2004-09-30
JP2004271519A5 true JP2004271519A5 (OSRAM) 2007-03-08

Family

ID=32911390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004015576A Pending JP2004271519A (ja) 2003-02-18 2004-01-23 表面検査装置

Country Status (2)

Country Link
US (1) US20040169853A1 (OSRAM)
JP (1) JP2004271519A (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7027916B2 (en) * 2003-12-23 2006-04-11 Honda Motor Co., Ltd. Method of formatting navigation information with varying levels of detail
US20050261829A1 (en) * 2004-05-19 2005-11-24 Honda Motor Co., Ltd. System and method for off route processing
JP4897334B2 (ja) 2006-03-31 2012-03-14 株式会社トプコン 表面検査方法及び表面検査装置
JP5324249B2 (ja) * 2009-02-10 2013-10-23 ファナック株式会社 レーザ共振器内光学部品の損傷診断装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5179422A (en) * 1991-05-15 1993-01-12 Environmental Research Institute Of Michigan Contamination detection system
US5343290A (en) * 1992-06-11 1994-08-30 International Business Machines Corporation Surface particle detection using heterodyne interferometer
US5576831A (en) * 1994-06-20 1996-11-19 Tencor Instruments Wafer alignment sensor
US6104945A (en) * 1995-08-01 2000-08-15 Medispectra, Inc. Spectral volume microprobe arrays
US5889593A (en) * 1997-02-26 1999-03-30 Kla Instruments Corporation Optical system and method for angle-dependent reflection or transmission measurement
JP3411780B2 (ja) * 1997-04-07 2003-06-03 レーザーテック株式会社 レーザ顕微鏡及びこのレーザ顕微鏡を用いたパターン検査装置
US6104481A (en) * 1997-11-11 2000-08-15 Kabushiki Kaisha Topcon Surface inspection apparatus
US6236454B1 (en) * 1997-12-15 2001-05-22 Applied Materials, Inc. Multiple beam scanner for an inspection system
JP4089798B2 (ja) * 1998-04-13 2008-05-28 株式会社トプコン 表面検査装置
JP3858571B2 (ja) * 2000-07-27 2006-12-13 株式会社日立製作所 パターン欠陥検査方法及びその装置
US7046353B2 (en) * 2001-12-04 2006-05-16 Kabushiki Kaisha Topcon Surface inspection system

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