JP2004258273A5 - - Google Patents

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Publication number
JP2004258273A5
JP2004258273A5 JP2003048365A JP2003048365A JP2004258273A5 JP 2004258273 A5 JP2004258273 A5 JP 2004258273A5 JP 2003048365 A JP2003048365 A JP 2003048365A JP 2003048365 A JP2003048365 A JP 2003048365A JP 2004258273 A5 JP2004258273 A5 JP 2004258273A5
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JP
Japan
Prior art keywords
optical element
holding device
holding
optical
central axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003048365A
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English (en)
Japanese (ja)
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JP2004258273A (ja
JP3944095B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2003048365A priority Critical patent/JP3944095B2/ja
Priority claimed from JP2003048365A external-priority patent/JP3944095B2/ja
Priority to US10/789,275 priority patent/US6825998B2/en
Publication of JP2004258273A publication Critical patent/JP2004258273A/ja
Publication of JP2004258273A5 publication Critical patent/JP2004258273A5/ja
Application granted granted Critical
Publication of JP3944095B2 publication Critical patent/JP3944095B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003048365A 2003-02-26 2003-02-26 保持装置 Expired - Fee Related JP3944095B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2003048365A JP3944095B2 (ja) 2003-02-26 2003-02-26 保持装置
US10/789,275 US6825998B2 (en) 2003-02-26 2004-02-26 Retainer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003048365A JP3944095B2 (ja) 2003-02-26 2003-02-26 保持装置

Publications (3)

Publication Number Publication Date
JP2004258273A JP2004258273A (ja) 2004-09-16
JP2004258273A5 true JP2004258273A5 (https=) 2005-04-14
JP3944095B2 JP3944095B2 (ja) 2007-07-11

Family

ID=32905621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003048365A Expired - Fee Related JP3944095B2 (ja) 2003-02-26 2003-02-26 保持装置

Country Status (2)

Country Link
US (1) US6825998B2 (https=)
JP (1) JP3944095B2 (https=)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7692881B2 (en) * 2004-02-25 2010-04-06 Carl Zeiss Smt Ag Structure for use in a projection exposure system for manufacturing semiconductors
US7773070B2 (en) 2004-05-21 2010-08-10 Cypress Semiconductor Corporation Optical positioning device using telecentric imaging
US20050258346A1 (en) * 2004-05-21 2005-11-24 Silicon Light Machines Corporation Optical positioning device resistant to speckle fading
KR101249598B1 (ko) * 2004-10-26 2013-04-01 가부시키가이샤 니콘 광학 장치, 경통, 노광 장치, 및 디바이스의 제조 방법
DE102006038294B4 (de) * 2005-09-02 2012-03-08 Carl Zeiss Smt Gmbh Fassung für ein optisches Element
US7737948B2 (en) * 2005-12-20 2010-06-15 Cypress Semiconductor Corporation Speckle navigation system
DE102006000087B3 (de) * 2006-02-22 2007-08-30 Hilti Ag Optikfassung
US7728816B2 (en) * 2006-07-10 2010-06-01 Cypress Semiconductor Corporation Optical navigation sensor with variable tracking resolution
DE102006038634A1 (de) * 2006-08-17 2008-02-21 Carl Zeiss Smt Ag Halteeinrichtung für ein optisches Element mit Stützkraftausgleich
EP1901101A1 (en) * 2006-09-14 2008-03-19 Carl Zeiss SMT AG Optical element unit and method of supporting an optical element
US8441747B2 (en) * 2006-09-14 2013-05-14 Carl Zeiss Smt Gmbh Optical module with minimized overrun of the optical element
WO2010010034A1 (en) * 2008-07-21 2010-01-28 Asml Netherlands B.V. Optical element mount for lithographic apparatus
US8541727B1 (en) 2008-09-30 2013-09-24 Cypress Semiconductor Corporation Signal monitoring and control system for an optical navigation sensor
US8711096B1 (en) 2009-03-27 2014-04-29 Cypress Semiconductor Corporation Dual protocol input device
JP6109735B2 (ja) 2010-05-28 2017-04-05 ハンター ダグラス インコーポレイテッド 回転モータにより電力を供給される建築物の開口部遮蔽物
CN107762386B (zh) 2011-10-03 2019-10-18 亨特道格拉斯公司 一种建筑覆盖物总成
CA2828819C (en) 2012-10-03 2020-03-10 Hunter Douglas Inc. Methods and apparatus to control an architectural opening covering assembly
DE102014213803A1 (de) * 2014-07-16 2016-01-21 BSH Hausgeräte GmbH Anzeigevorrichtung und Haushaltsgerät mit einer solchen Anzeigevorrichtung
CN105445843A (zh) * 2014-08-22 2016-03-30 艾笛森光电股份有限公司 可拼接组合的光学元件结构
JP7061666B2 (ja) * 2017-10-30 2022-04-28 エーエスエムエル ホールディング エヌ．ブイ． 半導体フォトリソグラフィで使用するためのアセンブリ及び同一のものを製造する方法
US10989855B2 (en) * 2017-11-09 2021-04-27 AGM Automotive, LLC Illumination device for projecting light in a predetermined illumination pattern on a surface
DE102019112224A1 (de) * 2019-05-10 2020-11-12 Carl Zeiss Smt Gmbh Abstützung eines optischen Elements

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5589239A (en) * 1988-11-02 1996-12-31 Canon Kabushiki Kaisha Variable-angle optical device with optically transparent substance
US6283600B1 (en) * 1998-04-13 2001-09-04 Cooper Technologies Company Image projection fixtures
JP3631045B2 (ja) * 1999-06-16 2005-03-23 キヤノン株式会社 駆動装置、光学素子駆動装置、露光装置およびデバイス製造方法

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