JP2004230266A5 - - Google Patents
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- Publication number
- JP2004230266A5 JP2004230266A5 JP2003020763A JP2003020763A JP2004230266A5 JP 2004230266 A5 JP2004230266 A5 JP 2004230266A5 JP 2003020763 A JP2003020763 A JP 2003020763A JP 2003020763 A JP2003020763 A JP 2003020763A JP 2004230266 A5 JP2004230266 A5 JP 2004230266A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003020763A JP4224314B2 (ja) | 2003-01-29 | 2003-01-29 | 溶液の塗布装置及び塗布方法 |
| TW093101056A TWI367374B (en) | 2003-01-29 | 2004-01-15 | Apparatus for applying solution and method for applying solution |
| KR1020040005339A KR100966130B1 (ko) | 2003-01-29 | 2004-01-28 | 용액의 도포 장치 및 도포 방법 |
| CNB2004100078163A CN100398219C (zh) | 2003-01-29 | 2004-01-29 | 溶液涂敷装置和涂敷方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003020763A JP4224314B2 (ja) | 2003-01-29 | 2003-01-29 | 溶液の塗布装置及び塗布方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004230266A JP2004230266A (ja) | 2004-08-19 |
| JP2004230266A5 true JP2004230266A5 (ja) | 2006-03-16 |
| JP4224314B2 JP4224314B2 (ja) | 2009-02-12 |
Family
ID=32950303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003020763A Expired - Fee Related JP4224314B2 (ja) | 2003-01-29 | 2003-01-29 | 溶液の塗布装置及び塗布方法 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4224314B2 (ja) |
| KR (1) | KR100966130B1 (ja) |
| CN (1) | CN100398219C (ja) |
| TW (1) | TWI367374B (ja) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4437805B2 (ja) * | 2006-09-13 | 2010-03-24 | シャープ株式会社 | インク吐出装置及びインク吐出制御方法 |
| JP2010210870A (ja) * | 2009-03-10 | 2010-09-24 | Stanley Electric Co Ltd | 機能性薄膜、液晶表示装置および機能性薄膜成膜方法 |
| CN104511388B (zh) * | 2014-12-29 | 2017-08-04 | 深圳市华星光电技术有限公司 | 光阻涂布设备及光阻涂布方法 |
| JP6692182B2 (ja) * | 2016-02-29 | 2020-05-13 | 日本マタイ株式会社 | 機能性フィルムの製造方法 |
| JP2021153085A (ja) * | 2020-03-24 | 2021-09-30 | 株式会社Ｓｃｒｅｅｎホールディングス | パターン形成装置、パターン形成方法、および吐出データ生成方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5198471A (en) * | 1989-09-11 | 1993-03-30 | Rensselaer Polytechnic Institute | Polymer recycling by selective dissolution |
| JP3744967B2 (ja) * | 1995-06-14 | 2006-02-15 | キヤノン株式会社 | インクジェット方式によるプリント回路板の作成方法及びその装置 |
| JP3865087B2 (ja) * | 1996-10-29 | 2007-01-10 | 大日本塗料株式会社 | 基板の塗装方法 |
| JP2000251678A (ja) * | 1999-02-25 | 2000-09-14 | Canon Inc | 電子源及び画像形成装置の製造方法及び製造装置 |
| JP4797246B2 (ja) * | 2001-01-05 | 2011-10-19 | 大日本印刷株式会社 | カラーフィルタ製造用の塗布装置 |
-
2003
- 2003-01-29 JP JP2003020763A patent/JP4224314B2/ja not_active Expired - Fee Related
-
2004
- 2004-01-15 TW TW093101056A patent/TWI367374B/zh not_active IP Right Cessation
- 2004-01-28 KR KR1020040005339A patent/KR100966130B1/ko active IP Right Grant
- 2004-01-29 CN CNB2004100078163A patent/CN100398219C/zh not_active Expired - Lifetime