JP2004186186A5 - - Google Patents

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Publication number
JP2004186186A5
JP2004186186A5 JP2002347828A JP2002347828A JP2004186186A5 JP 2004186186 A5 JP2004186186 A5 JP 2004186186A5 JP 2002347828 A JP2002347828 A JP 2002347828A JP 2002347828 A JP2002347828 A JP 2002347828A JP 2004186186 A5 JP2004186186 A5 JP 2004186186A5
Authority
JP
Japan
Prior art keywords
active layer
insulating film
groove
layer
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2002347828A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004186186A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002347828A priority Critical patent/JP2004186186A/ja
Priority claimed from JP2002347828A external-priority patent/JP2004186186A/ja
Publication of JP2004186186A publication Critical patent/JP2004186186A/ja
Publication of JP2004186186A5 publication Critical patent/JP2004186186A5/ja
Abandoned legal-status Critical Current

Links

JP2002347828A 2002-11-29 2002-11-29 半導体装置およびその製造方法 Abandoned JP2004186186A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002347828A JP2004186186A (ja) 2002-11-29 2002-11-29 半導体装置およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002347828A JP2004186186A (ja) 2002-11-29 2002-11-29 半導体装置およびその製造方法

Publications (2)

Publication Number Publication Date
JP2004186186A JP2004186186A (ja) 2004-07-02
JP2004186186A5 true JP2004186186A5 (cg-RX-API-DMAC7.html) 2005-09-02

Family

ID=32750898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002347828A Abandoned JP2004186186A (ja) 2002-11-29 2002-11-29 半導体装置およびその製造方法

Country Status (1)

Country Link
JP (1) JP2004186186A (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5348364B2 (ja) * 2007-08-27 2013-11-20 サンケン電気株式会社 ヘテロ接合型電界効果半導体装置

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