JP2004160336A5 - - Google Patents

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Publication number
JP2004160336A5
JP2004160336A5 JP2002328073A JP2002328073A JP2004160336A5 JP 2004160336 A5 JP2004160336 A5 JP 2004160336A5 JP 2002328073 A JP2002328073 A JP 2002328073A JP 2002328073 A JP2002328073 A JP 2002328073A JP 2004160336 A5 JP2004160336 A5 JP 2004160336A5
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JP
Japan
Prior art keywords
substrate
liquid material
film forming
head
forming apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2002328073A
Other languages
English (en)
Japanese (ja)
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JP2004160336A (ja
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Publication date
Application filed filed Critical
Priority to JP2002328073A priority Critical patent/JP2004160336A/ja
Priority claimed from JP2002328073A external-priority patent/JP2004160336A/ja
Publication of JP2004160336A publication Critical patent/JP2004160336A/ja
Publication of JP2004160336A5 publication Critical patent/JP2004160336A5/ja
Withdrawn legal-status Critical Current

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JP2002328073A 2002-11-12 2002-11-12 膜形成装置及び膜形成方法、有機ｅｌ装置の製造方法、並びに液体吐出装置 Withdrawn JP2004160336A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002328073A JP2004160336A (ja) 2002-11-12 2002-11-12 膜形成装置及び膜形成方法、有機ｅｌ装置の製造方法、並びに液体吐出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002328073A JP2004160336A (ja) 2002-11-12 2002-11-12 膜形成装置及び膜形成方法、有機ｅｌ装置の製造方法、並びに液体吐出装置

Publications (2)

Publication Number Publication Date
JP2004160336A JP2004160336A (ja) 2004-06-10
JP2004160336A5 true JP2004160336A5 (https=) 2005-10-27

Family

ID=32806477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002328073A Withdrawn JP2004160336A (ja) 2002-11-12 2002-11-12 膜形成装置及び膜形成方法、有機ｅｌ装置の製造方法、並びに液体吐出装置

Country Status (1)

Country Link
JP (1) JP2004160336A (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4728629B2 (ja) * 2004-11-29 2011-07-20 株式会社東芝 インクジェット塗布装置及びインクジェット塗布方法
JP5327690B2 (ja) * 2007-11-09 2013-10-30 セイコーエプソン株式会社 成膜装置および成膜方法
JP4864041B2 (ja) * 2008-04-30 2012-01-25 パナソニック株式会社 有機デバイスの製造装置
JP2022090638A (ja) * 2020-12-07 2022-06-17 三菱ケミカル株式会社 有機ｅｌ表示パネルの製造装置、製造システム、有機ｅｌ表示パネルの製造方法、および有機ｅｌ表示パネル

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5687471A (en) * 1979-12-17 1981-07-16 Matsushita Electric Ind Co Ltd Coating process
JP2576447B2 (ja) * 1987-06-12 1997-01-29 オムロン株式会社 回転型カセット装填装置
JPH01151972A (ja) * 1987-12-09 1989-06-14 Fuji Photo Film Co Ltd スピンコーティング装置
JPH03214722A (ja) * 1990-01-19 1991-09-19 Fujitsu Ltd レジスト塗布装置
JP3318968B2 (ja) * 1992-07-21 2002-08-26 日本電気硝子株式会社 陰極線管用パネルの表面に被膜を形成する方法及び装置
JP3782279B2 (ja) * 1999-04-08 2006-06-07 東京エレクトロン株式会社 膜形成方法及び膜形成装置

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