JP2004133280A5 - - Google Patents
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- Publication number
- JP2004133280A5 JP2004133280A5 JP2002298975A JP2002298975A JP2004133280A5 JP 2004133280 A5 JP2004133280 A5 JP 2004133280A5 JP 2002298975 A JP2002298975 A JP 2002298975A JP 2002298975 A JP2002298975 A JP 2002298975A JP 2004133280 A5 JP2004133280 A5 JP 2004133280A5
- Authority
- JP
- Japan
- Prior art keywords
- optical switching
- layer
- interference
- switching element
- support layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims 20
- 229910052751 metal Inorganic materials 0.000 claims 4
- 239000002184 metal Substances 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 3
- 239000010409 thin film Substances 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 239000010408 film Substances 0.000 claims 1
- 238000000059 patterning Methods 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002298975A JP4000980B2 (ja) | 2002-10-11 | 2002-10-11 | 光スイッチング素子およびその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002298975A JP4000980B2 (ja) | 2002-10-11 | 2002-10-11 | 光スイッチング素子およびその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004133280A JP2004133280A (ja) | 2004-04-30 |
| JP2004133280A5 true JP2004133280A5 (cg-RX-API-DMAC10.html) | 2005-10-20 |
| JP4000980B2 JP4000980B2 (ja) | 2007-10-31 |
Family
ID=32288243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002298975A Expired - Fee Related JP4000980B2 (ja) | 2002-10-11 | 2002-10-11 | 光スイッチング素子およびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4000980B2 (cg-RX-API-DMAC10.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6930709B1 (en) | 1997-12-04 | 2005-08-16 | Pentax Of America, Inc. | Integrated internet/intranet camera |
| JP6446895B2 (ja) * | 2014-08-01 | 2019-01-09 | セイコーエプソン株式会社 | デジタル・マイクロミラー・デバイス、デジタル・マイクロミラー・デバイスの製造方法、及び電子機器 |
-
2002
- 2002-10-11 JP JP2002298975A patent/JP4000980B2/ja not_active Expired - Fee Related