JP2004117883A5 - - Google Patents

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Publication number
JP2004117883A5
JP2004117883A5 JP2002281545A JP2002281545A JP2004117883A5 JP 2004117883 A5 JP2004117883 A5 JP 2004117883A5 JP 2002281545 A JP2002281545 A JP 2002281545A JP 2002281545 A JP2002281545 A JP 2002281545A JP 2004117883 A5 JP2004117883 A5 JP 2004117883A5
Authority
JP
Japan
Prior art keywords
group
alicyclic hydrocarbon
general formula
hydrocarbon group
hydrogen atom
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002281545A
Other languages
English (en)
Japanese (ja)
Other versions
JP4031334B2 (ja
JP2004117883A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002281545A priority Critical patent/JP4031334B2/ja
Priority claimed from JP2002281545A external-priority patent/JP4031334B2/ja
Publication of JP2004117883A publication Critical patent/JP2004117883A/ja
Publication of JP2004117883A5 publication Critical patent/JP2004117883A5/ja
Application granted granted Critical
Publication of JP4031334B2 publication Critical patent/JP4031334B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2002281545A 2002-09-26 2002-09-26 ポジ型レジスト組成物 Expired - Fee Related JP4031334B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002281545A JP4031334B2 (ja) 2002-09-26 2002-09-26 ポジ型レジスト組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002281545A JP4031334B2 (ja) 2002-09-26 2002-09-26 ポジ型レジスト組成物

Publications (3)

Publication Number Publication Date
JP2004117883A JP2004117883A (ja) 2004-04-15
JP2004117883A5 true JP2004117883A5 (enrdf_load_stackoverflow) 2005-09-22
JP4031334B2 JP4031334B2 (ja) 2008-01-09

Family

ID=32275968

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002281545A Expired - Fee Related JP4031334B2 (ja) 2002-09-26 2002-09-26 ポジ型レジスト組成物

Country Status (1)

Country Link
JP (1) JP4031334B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4524207B2 (ja) * 2005-03-02 2010-08-11 富士フイルム株式会社 液浸露光用ポジ型レジスト組成物及びそれを用いたパターン形成方法
JP5314882B2 (ja) 2007-02-15 2013-10-16 東京応化工業株式会社 高分子化合物、レジスト組成物及びレジストパターン形成方法
WO2008099725A1 (ja) * 2007-02-15 2008-08-21 Tokyo Ohka Kogyo Co., Ltd. 高分子化合物、レジスト組成物及びレジストパターン形成方法
JP5542412B2 (ja) * 2009-10-28 2014-07-09 東京応化工業株式会社 ポジ型レジスト組成物、レジストパターン形成方法、高分子化合物

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