JP2004110019A - ポジ型感光性ペースト、それを用いたパターンの形成方法およびプラズマディスプレイの製造方法 - Google Patents
ポジ型感光性ペースト、それを用いたパターンの形成方法およびプラズマディスプレイの製造方法 Download PDFInfo
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- JP2004110019A JP2004110019A JP2003306469A JP2003306469A JP2004110019A JP 2004110019 A JP2004110019 A JP 2004110019A JP 2003306469 A JP2003306469 A JP 2003306469A JP 2003306469 A JP2003306469 A JP 2003306469A JP 2004110019 A JP2004110019 A JP 2004110019A
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- Prior art keywords
- pattern
- photosensitive paste
- exposure
- positive photosensitive
- alkali
- Prior art date
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- 150000002367 halogens Chemical class 0.000 description 3
- PZOUSPYUWWUPPK-UHFFFAOYSA-N indole Natural products CC1=CC=CC2=C1C=CN2 PZOUSPYUWWUPPK-UHFFFAOYSA-N 0.000 description 3
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| JP5495135B2 (ja) * | 2008-12-16 | 2014-05-21 | 株式会社ブイ・テクノロジー | 凸状パターン形成方法、露光装置及びフォトマスク |
| JP2014055232A (ja) * | 2012-09-12 | 2014-03-27 | Sumitomo Seika Chem Co Ltd | 金属ペースト組成物 |
| WO2014126034A1 (ja) * | 2013-02-14 | 2014-08-21 | 富士フイルム株式会社 | インクジェット塗布用感光性樹脂組成物、熱処理物及びその製造方法、樹脂パターン製造方法、液晶表示装置、有機ｅｌ表示装置、タッチパネル及びその製造方法、並びに、タッチパネル表示装置 |
| JPWO2014126034A1 (ja) * | 2013-02-14 | 2017-02-02 | 富士フイルム株式会社 | インクジェット塗布用感光性樹脂組成物、熱処理物及びその製造方法、樹脂パターン製造方法、液晶表示装置、有機ｅｌ表示装置、タッチパネル及びその製造方法、並びに、タッチパネル表示装置 |
| CN103198879A (zh) * | 2013-03-06 | 2013-07-10 | 东南大学 | 一种正性感光电极浆料及其制备方法 |
| WO2015159655A1 (ja) * | 2014-04-16 | 2015-10-22 | 東レ株式会社 | 感光性樹脂組成物、導電性パターンの製造方法、基板、素子およびタッチパネル |
| US10001704B2 (en) | 2014-04-16 | 2018-06-19 | Toray Industries, Inc. | Photosensitive resin composition, method of manufacturing conductive pattern, substrate, element, and touch panel |
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