JP2004101194A5

JP2004101194A5 -

Info

Publication number: JP2004101194A5
Application number: JP2002259166A
Authority: JP
Filing date: 2002-09-04
Publication date: 2005-10-06
Anticipated expiration: 2022-09-04

Claims

An optical observation device for observing the observation object using light reflected by the observation object and light transmitted through the observation object,
First optical means for guiding light from a light source to the front surface of the object to be observed;
A retroreflective member disposed on the back side of the observation body;
Second optical means for receiving reflected light reflected by the front surface of the observation body and transmitted light reflected by the retroreflective member and transmitted through the observation body;
A polarizing unit disposed on the back side of the object to be observed, and changing a polarization state of light incident on the object to be observed from the retroreflective member;
The second optical means is an optical observation device that changes the light amount of the reflected light or the light amount of the transmitted light based on a difference in polarization state between the received reflected light and the transmitted light.

further,
A quarter-wave plate disposed as the polarizing means between the object to be observed and the retroreflective member;
A polarizing plate for linearly polarized light from the light source to the object to be observed;
The optical observation apparatus according to claim 1, wherein the second optical means has a polarizing plate that is rotatably arranged.

further,
A first quarter-wave plate disposed as the polarizing means between the object to be observed and the retroreflective member;
A polarizing plate for linearly polarized light from the light source to the object to be observed;
A second quarter-wave plate movable between the object to be observed and the second optical means on the optical path;
The first optical means and the second optical means reflect the light from the polarizing plate to the optical path to the object to be observed, and separate the light from the object to be observed based on the polarization axis of the light. The optical observation apparatus according to claim 1, further comprising a beam splitter.

The light incident on the object to be observed is linearly polarized light,
The second optical means includes polarization separation means for transmitting light having a first vibration direction and blocking light having a second vibration direction orthogonal to the first vibration direction;
The optical observation apparatus according to claim 1, wherein the polarization unit shifts the phase between the biaxial polarization components of incident light by a quarter wavelength.

further,
A third optical unit that is movably installed on the optical path between the object to be observed and the second optical unit, and that shifts the phase between the biaxial polarization components of the incident light by a quarter wavelength; The optical observation apparatus according to claim 4.

The optical observation apparatus according to claim 5, wherein the second optical unit includes a light branching unit that transmits light having the first vibration direction and reflects light having the second vibration direction.

The optical observation apparatus according to claim 6, wherein the light branching unit reflects linearly polarized light from a light source to an optical path to the object to be observed.

The light incident on the object to be observed is linearly polarized light,
The second optical means includes a polarizing plate that is movably installed so that the polarization angle can be adjusted,
The optical observation apparatus according to claim 1, wherein the polarization unit shifts the phase between the biaxial polarization components of incident light by a quarter wavelength.

An inspection apparatus that images and inspects the subject using light reflected by the subject and light transmitted through the subject,
A light source;
First optical means for guiding light from the light source to the front surface of the subject;
Retroreflective means disposed on the back side of the subject and retroreflects the light transmitted through the subject;
A polarizing means that is disposed on the back side of the subject and changes a polarization state of light incident on the subject from the retroreflective means;
Second optical means for receiving reflected light reflected by the front surface of the subject and transmitted light reflected by the retroreflecting means and transmitted again through the subject;
An imaging means for imaging the subject using the reflected light and the transmitted light;
The second optical unit is an inspection apparatus that changes the light amount of the reflected light or the light amount of the transmitted light based on a difference in polarization state between the received reflected light and the transmitted light.

An inspection method for imaging and inspecting the subject using light reflected by the subject and light transmitted through the subject,
Directing light from the light source to the subject;
Retroreflecting the light transmitted through the subject on the back surface of the subject;
Changing the polarization state of the transmitted light retroreflected on the back surface of the subject and transmitted again through the subject to a polarization state different from the polarization state of the reflected light reflected on the front surface of the subject;
Changing the amount of reflected light or the amount of transmitted light based on the difference in polarization state between the reflected light and the transmitted light; and
Imaging the reflected light;
An inspection method comprising a step of imaging the transmitted light that is retroreflected on the back surface of the subject and transmitted again through the subject.