JP5556212B2 - Defect inspection method for liquid crystal panel with polarizing plate - Google Patents
Defect inspection method for liquid crystal panel with polarizing plate Download PDFInfo
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- JP5556212B2 JP5556212B2 JP2010025194A JP2010025194A JP5556212B2 JP 5556212 B2 JP5556212 B2 JP 5556212B2 JP 2010025194 A JP2010025194 A JP 2010025194A JP 2010025194 A JP2010025194 A JP 2010025194A JP 5556212 B2 JP5556212 B2 JP 5556212B2
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- liquid crystal
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- 239000004973 liquid crystal related substance Substances 0.000 title claims description 51
- 230000007547 defect Effects 0.000 title claims description 39
- 238000000034 method Methods 0.000 title claims description 17
- 238000007689 inspection Methods 0.000 title claims description 15
- 230000001678 irradiating effect Effects 0.000 claims description 7
- 230000000737 periodic effect Effects 0.000 claims description 7
- 229910052736 halogen Inorganic materials 0.000 claims description 5
- 150000002367 halogens Chemical class 0.000 claims description 5
- 239000011159 matrix material Substances 0.000 claims description 3
- 238000007796 conventional method Methods 0.000 description 4
- 206010027146 Melanoderma Diseases 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
Description
本発明は、偏光板を貼合した液晶パネルの欠陥を検査する方法に関するものである。詳しくは偏光板を貼合した液晶パネルの欠陥を、液晶パネルを駆動させない状態で、検査する方法に関するものである。 The present invention relates to a method for inspecting a defect of a liquid crystal panel bonded with a polarizing plate. Specifically, the present invention relates to a method for inspecting a defect of a liquid crystal panel bonded with a polarizing plate in a state where the liquid crystal panel is not driven.
液晶テレビなどは、液晶パネルの両面に偏光板をクロスニコルに貼合して製造される。欠陥検査は使用する原材料、主要な製造工程で得られる部材について行われるが、偏光板を貼合した液晶パネルについても行われる。
偏光板を貼合した液晶パネルの欠陥検査方法として、液晶パネルを駆動させて行う方法もあるが、電荷をかけるドライバーの搭載などが必要であり、欠陥が検出された場合に補修、やり直しをするためにドライバーの取外しなどの手間がかかる。従って、ドライバーを搭載せずに、偏光板を貼合した液晶パネルの欠陥を、液晶パネルが駆動していない状態で、検査するのが好ましい。
A liquid crystal television or the like is manufactured by laminating polarizing plates on both sides of a liquid crystal panel in crossed Nicols. The defect inspection is performed on raw materials to be used and members obtained in main manufacturing processes, but also on a liquid crystal panel on which a polarizing plate is bonded.
There is also a method of inspecting the liquid crystal panel with a polarizing plate by driving the liquid crystal panel, but it is necessary to install a driver that applies an electric charge. If a defect is detected, repair and redo it. Therefore, it takes time and effort to remove the driver. Therefore, it is preferable to inspect defects of the liquid crystal panel to which the polarizing plate is bonded without mounting the driver in a state where the liquid crystal panel is not driven.
液晶パネルが駆動していない状態で可視光が透過しないノーマルブラックの液晶である場合について、液晶パネル内の異物を検査する方法が知られている（例えば、特許文献１参照。）。この方法で液晶パネル内の異物を輝点として検出している。 There is known a method for inspecting a foreign substance in a liquid crystal panel for a normal black liquid crystal that does not transmit visible light when the liquid crystal panel is not driven (see, for example, Patent Document 1). By this method, foreign matter in the liquid crystal panel is detected as a bright spot.
しかしながら、偏光板を貼合した液晶パネルの欠陥としては、糊状物、フィルムの切屑などの異物、空気の巻き込み、切り傷など、多様であり、これらは、その形態などによって検出されないことがある。従来方法では検出が難しい、偏光板を貼合した液晶パネルの欠陥を検出できる方法が望まれている。 However, the defects of the liquid crystal panel to which the polarizing plate is bonded are various such as pastes, foreign matters such as film chips, air entrainment, cuts, and the like, which may not be detected depending on the form thereof. A method that can detect a defect in a liquid crystal panel having a polarizing plate bonded, which is difficult to detect by a conventional method, is desired.
本発明は、従来方法では検出が難しい、偏光板を貼合した液晶パネルの欠陥を、液晶パネルを駆動させない状態で、検出できる方法を提供することを目的とする。 An object of this invention is to provide the method of detecting the defect of the liquid crystal panel which stuck the polarizing plate difficult to detect with the conventional method in the state which does not drive a liquid crystal panel.
本発明者は、偏光板を貼合した液晶パネルの欠陥を、液晶パネルを駆動させない状態で検査する方法について鋭意検討した結果、近赤外線を照射して検査することによって、従来方法では検出が難しい欠陥を検出できることを見出し、発明を完成するに至った。 As a result of earnestly examining the method of inspecting the defect of the liquid crystal panel bonded with the polarizing plate in a state where the liquid crystal panel is not driven, the present inventor is difficult to detect by the conventional method by inspecting by irradiating near infrared rays. The inventors have found that defects can be detected, and have completed the invention.
すなわち本発明は、両面に偏光板をクロスニコルに貼合した液晶パネルに、液晶パネルを駆動させない状態で、一方の面から光を照射し、他方の面からの透過光を検出し、信号処理して偏光板を貼合した液晶パネルの欠陥を検査する方法において、近赤外線を照射して検査することを特徴とする偏光板を貼合した液晶パネルの欠陥検査方法である。 That is, the present invention irradiates light from one surface to a liquid crystal panel in which polarizing plates are bonded to both sides in a crossed Nicol state without driving the liquid crystal panel, detects transmitted light from the other surface, and performs signal processing. Then, in the method for inspecting a defect of a liquid crystal panel bonded with a polarizing plate, it is a defect inspection method for a liquid crystal panel bonded with a polarizing plate, characterized by irradiating near infrared rays and inspecting.
本発明の方法によって、従来方法では検出できない偏光板を貼合した液晶パネルの欠陥を、液晶パネルを駆動させない状態で、検出できるという効果を奏する。 By the method of this invention, there exists an effect that the defect of the liquid crystal panel which bonded the polarizing plate which cannot be detected with the conventional method can be detected in the state which does not drive a liquid crystal panel.
偏光板および液晶パネルは製造された時点で、通常、それぞれ欠陥検査が行われており、欠陥のない偏光板および液晶パネルを用いて貼合するものの、欠陥を検出できずに欠陥を有する偏光板や液晶パネルが紛れ込んだり、貼合時に異物や空気を巻き込んだりして、偏光板を貼合した液晶パネルに欠陥が存在することがある。 When the polarizing plate and the liquid crystal panel are manufactured, defect inspection is usually carried out, respectively, and the polarizing plate having defects without being able to detect the defect, although bonded using the polarizing plate and the liquid crystal panel without defects. Or the liquid crystal panel may be mixed in, or foreign matter or air may be involved during bonding, so that a defect may exist in the liquid crystal panel on which the polarizing plate is bonded.
偏光板は、通常、偏光フィルムの両面に保護フィルムが貼合され、その表面にプロテクトフィルム、セパレートフィルムが粘着剤を介して貼合された構成をしている。
主な欠陥としては、セパレートフィルムを剥離し、液晶パネルに偏光板を貼合する際のフィルムの切屑などの異物や空気の巻き込み、粘着剤の塊、傷付きなどである。
なお、液晶テレビなどにおいて、偏光板の上に更に位相差板、防眩フィルムなどが貼合されることがあるが、通常、これらは予め貼合して多層フィルムとし、これを液晶パネルに貼合することが多い。本発明においては、この多層フィルムを貼合した液晶パネルについても対象とする。
The polarizing plate usually has a structure in which a protective film is bonded to both surfaces of a polarizing film, and a protective film and a separate film are bonded to each surface via an adhesive.
The main defects include foreign matter such as film chips and air, adhesive lump, and scratches when the separate film is peeled off and the polarizing plate is bonded to the liquid crystal panel.
In liquid crystal televisions and the like, a retardation plate, an antiglare film, and the like may be further bonded onto the polarizing plate. Usually, these are bonded in advance to form a multilayer film, which is then bonded to the liquid crystal panel. Often match. In the present invention, a liquid crystal panel to which this multilayer film is bonded is also targeted.
欠陥検査は、偏光板を貼合した液晶パネルの一方の面から光を照射し、他方の面からの透過光（該液晶パネルを透過した透過光）を検出して行う。図１に欠陥検査装置の模式図を示す。偏光板を貼合した液晶パネル１の下方に光源２を、上方にカメラ３を配置し、偏光板を貼合した液晶パネルを移動させながら検査を行う。カメラからの信号を信号処理装置４で処理し、欠陥の有無を判断する。 The defect inspection is performed by irradiating light from one surface of the liquid crystal panel to which the polarizing plate is bonded, and detecting transmitted light (transmitted light transmitted through the liquid crystal panel) from the other surface. FIG. 1 shows a schematic diagram of a defect inspection apparatus. The light source 2 is disposed below the liquid crystal panel 1 having the polarizing plate bonded thereto, the camera 3 is disposed above, and the liquid crystal panel having the polarizing plate bonded thereto is moved for inspection. The signal from the camera is processed by the signal processing device 4 to determine whether there is a defect.
本発明においては、近赤外線を照射して検査する。この近赤外線を発する光源の例としてハロゲンランプが挙げられる。例えば色温度３５００°Ｋのハロゲンランプでは波長が約７００ｎｍ近傍をピークに３００〜７８０ｎｍの可視光及び７８０〜２０００ｎｍの近赤外光を発する。
偏光板がクロスニコルに貼合され、液晶パネルが駆動していない状態では可視光は殆ど透過しないが、近赤外線はかなり透過する。図２に偏光板がクロスニコル状態の時の光透過性（実線）を模式的に示す。
In the present invention, inspection is performed by irradiating near infrared rays. An example of a light source that emits near infrared rays is a halogen lamp. For example, a halogen lamp having a color temperature of 3500 ° K emits visible light of 300 to 780 nm and near infrared light of 780 to 2000 nm with a peak at about 700 nm.
In the state where the polarizing plate is bonded to crossed Nicols and the liquid crystal panel is not driven, the visible light hardly transmits, but the near infrared light transmits considerably. FIG. 2 schematically shows light transmittance (solid line) when the polarizing plate is in a crossed Nicol state.
透過光を検出するカメラとして、通常、ＣＣＤカメラが用いられる。ＣＣＤカメラは可視光だけでなく、近赤外線にも感度を有する。図２にＣＣＤの感度特性（破線）を模式的に示す。 As a camera for detecting transmitted light, a CCD camera is usually used. The CCD camera has sensitivity not only to visible light but also to near infrared rays. FIG. 2 schematically shows the sensitivity characteristic (broken line) of the CCD.
カメラからの信号を信号処理装置で処理し、欠陥の検出を行う。得られる信号強度に閾値を設け、それを超える場合に欠陥とする。
例えば、ベースラインを０とし、白(輝度がベースラインより高い)側、黒(輝度がベースラインより低い)側をそれぞれ３２０００階調で表現し、５０００階調を閾値とし、それぞれ５０００階調以上である場合に欠陥とする。
A signal from the camera is processed by a signal processing device to detect a defect. A threshold is set for the obtained signal intensity, and a defect is determined when the threshold is exceeded.
For example, the baseline is 0, the white (brightness is higher than the baseline) side and the black (brightness is lower than the baseline) side is expressed by 32,000 gradations each, and the gradation is 5000 gradations, and each is 5000 gradations or more. If it is
目視では確認困難であるが、ＣＣＤカメラではブラックマトリクスに由来する格子状のパターンが検出される。この格子状のパターンに対応する周期的なパターンの信号を予め信号処理装置に入力しておき、検出される周期的なパターンの信号をキャンセルしてベースラインを設定する。このベースラインからの階調を求める。
尚、用いるＣＣＤカメラの撮像素子としてはラインセンサーであってもよいし、エリアセンサーであってもよい。
Although it is difficult to confirm visually, the CCD camera detects a lattice pattern derived from the black matrix. A periodic pattern signal corresponding to the lattice pattern is input to the signal processing apparatus in advance, and the detected periodic pattern signal is canceled to set a baseline. The gradation from this baseline is obtained.
The image sensor of the CCD camera to be used may be a line sensor or an area sensor.
以下、検査方法を実施例で示すが、本発明はこの実施例に限定されるものではない。 Hereinafter, although an inspection method is shown in an example, the present invention is not limited to this example.
実施例１
図１に示すと同様に、両面に偏光板を貼合した液晶パネルの下方に光源を、上方にカメラを配置し、両面に偏光板を貼合した液晶パネルを移動させながら欠陥検査を行った。両面に偏光板を貼合した液晶パネルは上下反転させ、すなわちテレビにした場合の表面側および裏面側の両方から検査した。
光源としてハロゲンランプ、カメラとしてＣＣＤカメラを用い、信号処理装置としてOptics画像処理外観検査装置（クボテック（株）製）を用いて行った。
検査対象の偏光板を貼合した液晶パネルは、偏光板スミカラン（登録商標）（住友化学（株）製）のセパレートフィルムを除き、３７型テレビ用液晶パネルに貼合したものである。
Example 1
In the same manner as shown in FIG. 1, a light source was placed below the liquid crystal panel with the polarizing plates bonded to both sides, a camera was placed above, and the defect inspection was performed while moving the liquid crystal panel with the polarizing plates bonded to both sides. . The liquid crystal panel having polarizing plates bonded on both sides was turned upside down, that is, inspected from both the front side and the back side in the case of a television.
A halogen lamp was used as the light source, a CCD camera was used as the camera, and an Optics image processing appearance inspection device (manufactured by Kubotec Co., Ltd.) was used as the signal processing device.
The liquid crystal panel on which the polarizing plate to be inspected is bonded to a liquid crystal panel for 37-inch TV except for a separate film of polarizing plate Sumikaran (registered trademark) (manufactured by Sumitomo Chemical Co., Ltd.).
信号処理装置において、ブラックマトリクスに由来する周期的なパターンをキャンセルするために、それに対応する周期的なパターンの信号を予め入力しておき、検出される周期的なパターンの信号をキャンセルしてベースラインを設定した。
ベースラインを０とし、白側、黒側にそれぞれ３２０００階調を設定し、５０００階調を閾値とし、それぞれ５０００階調以上である場合に欠陥とした。
欠陥を検出した例を表１に示す。
In a signal processing apparatus, in order to cancel a periodic pattern derived from a black matrix, a periodic pattern signal corresponding to the black pattern is input in advance, and the detected periodic pattern signal is canceled to be a base. Set the line.
A base line was set to 0, 32000 gradations were set on each of the white side and the black side, 5000 gradations were set as threshold values, and defects were determined when 5000 gradations or more were respectively set.
Table 1 shows an example in which defects are detected.
比較例１
実施例１の欠陥を検出した例について、ハロゲンランプの代わりに可視光を発するメタルハライドランプを用いた以外は実施例１と同様に行った。
結果を表１に示す。
Comparative Example 1
About the example which detected the defect of Example 1, it carried out similarly to Example 1 except having used the metal halide lamp which emits visible light instead of a halogen lamp.
The results are shown in Table 1.
表１中、カメラ位置は、液晶パネルのどちらの面をカメラに向けて配置して検査したかを示す。モードは欠陥を黒点、または輝点として検出したかを示し、×は黒点も輝点も検出されなかったことを示す。サイズは欠陥の平面画像のピクセル数で表わす。欠陥形態は拡大鏡で見た欠陥の状況を示す。 In Table 1, the camera position indicates which side of the liquid crystal panel is placed facing the camera and inspected. The mode indicates whether the defect is detected as a black spot or a bright spot, and x indicates that neither a black spot nor a bright spot is detected. The size is represented by the number of pixels in the planar image of the defect. The defect form indicates the state of the defect viewed with a magnifying glass.
上記のとおり、近赤外線を照射して検査する（実施例１）ことによって、従来の可視光を照射して検査する（比較例１）ことによっては検出できなかった欠陥を確実に検出することができる。 As described above, by inspecting by irradiating near infrared rays (Example 1), defects that cannot be detected by inspecting by irradiating conventional visible light (Comparative Example 1) can be reliably detected. it can.
１ 偏光板を貼合した液晶パネル
２ 光源
３ カメラ
４ 信号処理装置
DESCRIPTION OF SYMBOLS 1 Liquid crystal panel which stuck the polarizing plate 2 Light source 3 Camera 4 Signal processing apparatus
Claims (3)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010025194A JP5556212B2 (en) | 2010-02-08 | 2010-02-08 | Defect inspection method for liquid crystal panel with polarizing plate |
| TW100104007A TW201132959A (en) | 2010-02-08 | 2011-02-01 | An inspection method for defect in a liquid crystal panel laminated with polarizing plates |
| CN2011800084887A CN102753960A (en) | 2010-02-08 | 2011-02-02 | Defect inspection method for LCD panel having laminated sheet polariser |
| PCT/JP2011/052670 WO2011096581A1 (en) | 2010-02-08 | 2011-02-02 | Defect inspection method for lcd panel having laminated sheet polariser |
| KR1020127020281A KR20120115531A (en) | 2010-02-08 | 2011-02-02 | Defect inspection method for lcd panel having laminated sheet polariser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010025194A JP5556212B2 (en) | 2010-02-08 | 2010-02-08 | Defect inspection method for liquid crystal panel with polarizing plate |
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| Publication Number | Publication Date |
|---|---|
| JP2011163846A JP2011163846A (en) | 2011-08-25 |
| JP5556212B2 true JP5556212B2 (en) | 2014-07-23 |
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| JP2010025194A Expired - Fee Related JP5556212B2 (en) | 2010-02-08 | 2010-02-08 | Defect inspection method for liquid crystal panel with polarizing plate |
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| JP (1) | JP5556212B2 (en) |
| KR (1) | KR20120115531A (en) |
| CN (1) | CN102753960A (en) |
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| WO (1) | WO2011096581A1 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102759532B (en) * | 2012-07-31 | 2014-11-19 | 北京华夏视科图像技术有限公司 | Infrared and visible light combined light source for transillumination |
| JP6127458B2 (en) * | 2012-11-09 | 2017-05-17 | 大日本印刷株式会社 | Pattern measuring apparatus and pattern measuring method |
| CN103439339B (en) * | 2013-09-02 | 2015-11-25 | 深圳市华星光电技术有限公司 | Be pasted with defect detecting device and the defect inspection method of the liquid crystal panel of polaroid |
| KR101697071B1 (en) * | 2014-04-18 | 2017-01-17 | 동우 화인켐 주식회사 | Method for discriminating defect of polarizing plate |
| CN104503118B (en) * | 2015-01-22 | 2017-04-26 | 合肥京东方光电科技有限公司 | Panel lead wire detection device and detection method |
| JP2019133764A (en) * | 2018-01-29 | 2019-08-08 | トヨタ自動車株式会社 | Inspection method of laminate for all-solid battery |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2003262843A (en) * | 2002-03-11 | 2003-09-19 | Seiko Epson Corp | Method and device for inspecting liquid crystal panel |
| JP2004077261A (en) * | 2002-08-16 | 2004-03-11 | Horiba Ltd | Apparatus and method for inspecting foreign substances in liquid crystal panel |
| JP3762952B2 (en) * | 2002-09-04 | 2006-04-05 | レーザーテック株式会社 | Optical apparatus and image measuring apparatus and inspection apparatus using the same |
| JP2005265503A (en) * | 2004-03-17 | 2005-09-29 | Seiko Epson Corp | Display inspection method and display inspection dvice |
| JP2006078317A (en) * | 2004-09-09 | 2006-03-23 | Seiko Epson Corp | Inspection method for body under inspection and its device |
| JP2007256106A (en) * | 2006-03-23 | 2007-10-04 | Sharp Corp | Display panel inspection device and display panel inspection method using the same |
| JP2008107100A (en) * | 2006-10-23 | 2008-05-08 | Sharp Corp | Inspection device and method of liquid crystal panel |
| JP4910939B2 (en) * | 2007-08-15 | 2012-04-04 | 凸版印刷株式会社 | Color filter inspection method and apparatus using diffraction image |
| JP5258349B2 (en) * | 2008-03-28 | 2013-08-07 | 富士フイルム株式会社 | Defect detection apparatus and method |
| JP5181125B2 (en) * | 2008-04-09 | 2013-04-10 | 日東電工株式会社 | Optical display unit inspection method and optical display unit manufacturing method using the inspection method |
| JP2010266284A (en) * | 2009-05-13 | 2010-11-25 | Micronics Japan Co Ltd | Non-lighting inspection apparatus |
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| Publication number | Publication date |
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| CN102753960A (en) | 2012-10-24 |
| KR20120115531A (en) | 2012-10-18 |
| JP2011163846A (en) | 2011-08-25 |
| WO2011096581A1 (en) | 2011-08-11 |
| TW201132959A (en) | 2011-10-01 |
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