JP2012202714A - Tool for appearance inspection of transparent sheet material and appearance inspection method for transparent sheet material using the same - Google Patents

Tool for appearance inspection of transparent sheet material and appearance inspection method for transparent sheet material using the same Download PDF

Info

Publication number
JP2012202714A
JP2012202714A JP2011064851A JP2011064851A JP2012202714A JP 2012202714 A JP2012202714 A JP 2012202714A JP 2011064851 A JP2011064851 A JP 2011064851A JP 2011064851 A JP2011064851 A JP 2011064851A JP 2012202714 A JP2012202714 A JP 2012202714A
Authority
JP
Japan
Prior art keywords
sheet material
transparent sheet
thread
light
camera
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011064851A
Other languages
Japanese (ja)
Other versions
JP5718116B2 (en
Inventor
Hiroyuki Ogawa
裕之 小川
Muneo Abe
宗生 阿部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bridgestone Corp
Original Assignee
Bridgestone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bridgestone Corp filed Critical Bridgestone Corp
Priority to JP2011064851A priority Critical patent/JP5718116B2/en
Publication of JP2012202714A publication Critical patent/JP2012202714A/en
Application granted granted Critical
Publication of JP5718116B2 publication Critical patent/JP5718116B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

PROBLEM TO BE SOLVED: To provide a tool for appearance inspection of a transparent sheet material and an appearance inspection method for transparent sheet material using the same that irradiate the sheet material with light for appearance inspection of the transparent sheet material and put a camera in focus on a surface of the sheet material with good reproducibility whichever of optical images by its transmitted light and reflected light is used.SOLUTION: There is provided the tool for inspection used to put the camera in focus on the surface of the transparent sheet material in a method of inspecting appearance of the transparent sheet material by irradiating the transparent sheet material with light and picking up an optical image of the transparent sheet material by the transmitted light and/or reflected light by the camera. The tool for inspection includes a rectangular frame member, which can be mounted at an appearance inspection position of the transparent sheet material in replacement with the transparent sheet material and at least one light-color thread member and/or at least one dark-color thread member extended on the frame member in level with the surface of the transparent sheet material when the frame member is mounted at the appearance inspection position.

Description

本発明は、光学フィルタ等に使用される透明シート材の外観検査に用いられる検査用治具、特にカメラの焦点をシート材の表面に合わせる際に用いられる検査用治具、及びこれを用いた外観検査方法に関する。   The present invention relates to an inspection jig used for visual inspection of a transparent sheet material used for an optical filter or the like, in particular, an inspection jig used for focusing a camera on the surface of a sheet material, and the same. The present invention relates to an appearance inspection method.

ディスプレイパネル用光学フィルタ等に使用される透明樹脂製フィルム等の透明シート材を製造する際、原料の品質又は製造プロセス等に起因する異物、スジ、凹凸、着色等の欠陥が生じる場合がある。これらの外観不良は、最終製品の性能を低下させる原因となり得るため、シート材の製造工程において、外観検査を行い、製造工程にフィードバックしたり、製品検査工程において外観検査し、不良品を排除したりする必要がある。一般に、透明シート材の外観検査を行う場合、被検査透明シート材に光を照射し、透過光又は反射光によるシート材の光学画像をカメラ等で撮像し、被検査シート材の欠陥の有無を解析する方法が良く用いられている(例えば、特許文献1)。   When manufacturing a transparent sheet material such as a transparent resin film used for an optical filter for a display panel or the like, defects such as foreign matter, streaks, unevenness, and coloring due to the quality of the raw material or the manufacturing process may occur. Since these appearance defects can cause the performance of the final product to deteriorate, appearance inspection is performed in the sheet material manufacturing process and fed back to the manufacturing process, or appearance inspection is performed in the product inspection process to eliminate defective products. It is necessary to do. In general, when visual inspection of a transparent sheet material is performed, light is irradiated to the transparent sheet material to be inspected, an optical image of the sheet material by transmitted light or reflected light is captured with a camera, etc., and the presence or absence of a defect in the inspection sheet material is checked. An analysis method is often used (for example, Patent Document 1).

特開2008−233021号公報JP 2008-233301 A

しかしながら、透明シート材の場合、対象が透明なため、シート材に光を照射し、その透過光による光学画像を利用する場合であっても、反射光による光学画像を利用する場合であってもシート材表面にカメラ等の焦点を合わせることが困難である。そのため、カメラ等の焦点の調整は操作者や検査装置によってバラつきが生じる場合があり、同一条件で検査する再現性を担保することが困難であった。   However, in the case of a transparent sheet material, since the object is transparent, even if the sheet material is irradiated with light and an optical image based on the transmitted light is used, an optical image based on reflected light is used. It is difficult to focus the camera or the like on the surface of the sheet material. Therefore, the adjustment of the focus of the camera or the like may vary depending on the operator or the inspection apparatus, and it is difficult to ensure the reproducibility of the inspection under the same conditions.

従って、本発明の目的は、透明シート材の外観検査を行うにあたり、シート材に光を照射し、その透過光による光学画像、及び反射光による光学画像のどちらを利用する場合であっても、再現性良くカメラの焦点をシート材の表面に合わせることができる透明シート材の外観検査用治具を提供することにある。   Therefore, the purpose of the present invention is to irradiate the sheet material with light when performing an appearance inspection of the transparent sheet material, and use either an optical image by the transmitted light or an optical image by the reflected light. An object of the present invention is to provide a transparent sheet material appearance inspection jig capable of focusing a camera on the surface of a sheet material with good reproducibility.

また、本発明の目的は、その検査用治具を用いた透明シート材の外観検査方法を提供することにある。   Another object of the present invention is to provide a method for inspecting the appearance of a transparent sheet material using the inspection jig.

上記目的は、透明シート材に光を照射し、透過光及び/又は反射光による透明シート材の光学画像をカメラにより撮像することにより、透明シート材の外観を検査する方法における、カメラの焦点を透明シート材の表面に合わせるために用いる検査用治具であって、透明シート材を外観検査する位置に透明シート材に換えて載置可能な矩形状の額縁部材、並びに該額縁部材を前記外観検査位置に載置したときに、前記透明シート材の表面と同一の高さになるように前記額縁部材に張られた、少なくとも1本の明色糸状部材、及び/又は少なくとも1本の暗色糸状部材を有することを特徴とする検査用治具によって達成される。透明シート材にカメラの焦点を合わせることは、対象が透明であるため、困難である。本発明の検査用治具においては、透明シート材の表面と同一の高さになるように張られた明色糸状部材及び/又は暗色糸状部材を有しているので、透過光の場合は暗色糸状部材にカメラの焦点を合わせ、反射光の場合は明色糸状部材にカメラの焦点を合わせることで、透明シート材の表面の位置に精確に焦点を合わせることができる。   The object is to focus the camera in a method for inspecting the appearance of a transparent sheet material by irradiating the transparent sheet material with light and taking an optical image of the transparent sheet material with transmitted light and / or reflected light with a camera. An inspection jig used to match the surface of a transparent sheet material, a rectangular frame member that can be placed in place of the transparent sheet material at a position for visual inspection of the transparent sheet material, and the appearance of the frame member At least one light-colored thread member and / or at least one dark-colored thread stretched on the frame member so as to have the same height as the surface of the transparent sheet material when placed at the inspection position This is achieved by an inspection jig having a member. It is difficult to focus the camera on the transparent sheet material because the object is transparent. In the inspection jig of the present invention, since the light-colored thread-like member and / or dark-colored thread-like member stretched so as to have the same height as the surface of the transparent sheet material is included, in the case of transmitted light, the dark color By focusing the camera on the thread-like member and focusing the camera on the bright-colored thread-like member in the case of reflected light, it is possible to accurately focus on the position of the surface of the transparent sheet material.

本発明の検査用治具の好ましい態様は以下の通りである。
(1)前記額縁部材に、前記明色糸状部材に対して、該明色糸状部材が張られた方向と直交する方向の前後に、前記カメラに近い位置と、遠い位置の補助用明色糸状部材が少なくとも1本ずつ張られている。補助用明色糸状部材は、好ましくは上記明色糸状部材と平行に張られている。
(2)前記額縁部材に、前記暗色糸状部材に対して、該暗色糸状部材が張られた方向と直交する方向の前後に、前記カメラに近い位置と、遠い位置の補助用暗色糸状部材が少なくとも1本ずつ張られている。補助用暗色糸状部材は、好ましくは上記暗色糸状部材と平行に張られている。
補助用の糸状部材を設けることにより、より精確にカメラの焦点を各糸状部材、即ちシート材の表面の位置に合わせることができる。
(3)(1)又は(2)において、前記明色糸状部材及び補助用明色糸状部材の前記カメラの焦点移動方向の位置の差、及び/又は前記暗色糸状部材及び補助用暗色糸状部材の前記カメラの焦点移動方向の位置の差が、0.2〜10mmである。
(4)前記額縁部材が、前記明色糸状部材及び暗色糸状部材が張られた内側額縁部材と、内側額縁部材を支持する、内側額縁部材の周囲の外側額縁部材とからなり、当該外側額縁部材の長辺の長さが前記透明シート材の幅と略同一であり、前記内側額縁部材が、前記外側額縁部材の長辺を構成する1対の板状部材に沿ってスライド移動可能に配置されている。これにより、外観検査位置において、透明シート材の幅方向のどの位置にも各糸状部材を同一条件で配置することができ、カメラの幅方向の位置に係らず、精確にカメラの焦点を各糸状部材、即ち透明シート材の表面の位置に合わせることができる。
(5)前記明色糸状部材が、白色糸状部材である。反射光の場合に、最もカメラの焦点を合わせ易い。
(6)前記暗色糸状部材が、黒色糸状部材である。透過光の場合に、最もカメラの焦点を合わせ易い。
Preferred embodiments of the inspection jig of the present invention are as follows.
(1) An auxiliary light-colored thread shape at a position close to the camera and a position far from the camera before and after a direction perpendicular to the direction in which the light-colored thread-shaped member is stretched with respect to the light-colored thread-shaped member. At least one member is stretched. The auxiliary light-colored thread member is preferably stretched in parallel with the light-colored thread member.
(2) The frame member is provided with at least auxiliary dark thread-like members at positions near and far from the camera before and after a direction perpendicular to the direction in which the dark thread-like member is stretched. It is stretched one by one. The auxiliary dark thread member is preferably stretched in parallel with the dark thread member.
By providing the auxiliary thread-like member, the camera can be more accurately focused on the position of the surface of each thread-like member, that is, the sheet material.
(3) In (1) or (2), the difference in the position of the camera in the moving direction of the focal point of the light-colored thread member and the auxiliary light-colored thread member and / or the dark-colored thread member and the auxiliary dark-colored thread member The difference in position of the camera in the direction of focus movement is 0.2 to 10 mm.
(4) The frame member includes an inner frame member on which the light-colored and dark-colored thread members are stretched, and an outer frame member around the inner frame member that supports the inner frame member, and the outer frame member. The length of the long side is substantially the same as the width of the transparent sheet material, and the inner frame member is slidably disposed along a pair of plate-like members constituting the long side of the outer frame member. ing. As a result, at the appearance inspection position, each thread-like member can be arranged at any position in the width direction of the transparent sheet material under the same conditions, and the focus of the camera is accurately adjusted regardless of the position in the width direction of the camera. It can be adjusted to the position of the surface of the member, that is, the transparent sheet material.
(5) The light-colored thread-shaped member is a white thread-shaped member. In the case of reflected light, it is easiest to focus the camera.
(6) The dark-colored thread-shaped member is a black thread-shaped member. In the case of transmitted light, it is easiest to focus the camera.

また、上記目的は、透明シート材に光を照射し、透過光及び/又は反射光による透明シート材の光学画像をカメラにより撮像することにより、透明シート材の外観を検査する方法であって、本発明の検査用治具を、透明シート材を外観検査する位置に載置し、透過光により、前記暗色糸状部材にカメラの焦点を合わせる工程、及び/又は反射光により、前記明色糸状部材にカメラの焦点を合わせる工程、並びに前記検査用治具に換えて、透明シート材を前記外観検査位置に載置し、外観検査をする工程、を含むことを特徴とする透明シート材の外観検査方法によって達成される。   Further, the above object is a method for inspecting the appearance of a transparent sheet material by irradiating the transparent sheet material with light and taking an optical image of the transparent sheet material with transmitted light and / or reflected light with a camera, The light-colored thread-like member is mounted by the step of placing the inspection jig of the present invention at a position for inspecting the appearance of the transparent sheet material and focusing the camera on the dark-colored thread-like member by transmitted light and / or reflected light. A visual inspection of the transparent sheet material, including a step of focusing the camera on the camera and a step of placing the transparent sheet material at the visual inspection position and performing an visual inspection instead of the inspection jig. Achieved by the method.

これにより、透明シート材に光を照射し、その透過光による光学画像、及び反射光による光学画像のどちらを利用する場合であっても、操作者や検査装置に係わらず、透明シート材の表面の位置に、精確にカメラの焦点を合わせて、再現性が担保された外観検査を行うことができる。   Thereby, the surface of the transparent sheet material is irradiated regardless of the operator or the inspection apparatus, regardless of whether the optical image by the transmitted light or the optical image by the reflected light is used. It is possible to perform an appearance inspection with reproducibility ensured by accurately focusing the camera on the position.

本発明の透明シート材の外観検査用治具は、外観検査位置において透明シート材の表面と同一の高さになるように明色糸状部材と暗色糸状部材が張られているので、透過光及び反射光のどちらの場合でも、カメラの焦点をシート材表面の位置に合わせることができる。従って、この検査用治具を用いる本発明の透明シート材の外観検査方法により、操作者や検査装置に係わらず、透明シート材の表面の位置に、精確にカメラの焦点を合わせて、再現性が担保された外観検査を行うことができる。   In the jig for visual inspection of the transparent sheet material of the present invention, the light-colored thread-like member and the dark-colored thread-like member are stretched so as to have the same height as the surface of the transparent sheet material at the appearance inspection position. In either case of reflected light, the camera can be focused on the surface of the sheet material. Therefore, the transparent sheet material appearance inspection method of the present invention using this inspection jig allows the camera to be accurately focused on the position of the surface of the transparent sheet material regardless of the operator or the inspection apparatus, and the reproducibility. It is possible to perform an appearance inspection that is guaranteed.

図1は、本発明の透明シート材外観検査用治具の一例を示し、図1(a)は概略平面図であり、図1(b)は、図1(a)の破線a−a’における概略断面図である。FIG. 1 shows an example of the transparent sheet material appearance inspection jig of the present invention, FIG. 1 (a) is a schematic plan view, and FIG. 1 (b) is a broken line aa ′ in FIG. 1 (a). FIG. 図2は、図1の検査用治具を用いて、透過光及び反射光によりカメラの焦点を合わせた際のモニタ波形を示した図である。FIG. 2 is a diagram showing a monitor waveform when the camera is focused by transmitted light and reflected light using the inspection jig of FIG. 図3は、本発明の透明シート材外観検査用治具の好適態様の一例を示す概略平面図である。FIG. 3 is a schematic plan view showing an example of a preferred embodiment of the transparent sheet material appearance inspection jig of the present invention. 図4は、本発明の透明シート材外観検査方法の一例を説明するための概略図である。FIG. 4 is a schematic diagram for explaining an example of the transparent sheet material appearance inspection method of the present invention.

[外観検査用治具]
本発明の透明シート材外観検査用治具は、透明シート材に光を照射し、透過光及び/又は反射光による透明シート材の光学画像をカメラにより撮像することにより、透明シート材の外観を検査する方法における、カメラの焦点を透明シート材の表面に合わせるために用いる検査用治具である。以下に、本発明の透明シート材外観検査用治具について、図面を参照しながら説明する。
[Appearance inspection jig]
The transparent sheet material appearance inspection jig of the present invention irradiates the transparent sheet material with light, and captures an optical image of the transparent sheet material by transmitted light and / or reflected light with a camera. In this inspection method, the inspection jig is used for focusing the camera on the surface of the transparent sheet material. The transparent sheet material appearance inspection jig of the present invention will be described below with reference to the drawings.

図1は本発明の透明シート材外観検査用治具の一例を示し、図1(a)は概略平面図であり、図1(b)は、図1(a)の破線a−a’における概略断面図である。図1の外観検査用治具は、透明シート材を外観検査する位置に、透明シート材に換えて載置できる矩形状の額縁部材103、額縁部材103の対向する二辺の間に一対の支持部112Wによって水平に張られた明色糸状部材としての白色糸状部材102W、及び一対の支持部112Bによって水平に張られた暗色糸状部材としての黒色糸状部材102Bを備えている。   FIG. 1 shows an example of the transparent sheet material appearance inspection jig of the present invention, FIG. 1 (a) is a schematic plan view, and FIG. 1 (b) is a broken line aa ′ in FIG. 1 (a). It is a schematic sectional drawing. 1 has a rectangular frame member 103 that can be placed in place of the transparent sheet material at a position for visual inspection of the transparent sheet material, and a pair of supports between two opposing sides of the frame member 103. The white thread member 102W as a light thread member stretched horizontally by the portion 112W and the black thread member 102B as a dark thread member stretched horizontally by the pair of support portions 112B are provided.

そして、白色糸状部材102W及び黒色糸状部材102Bは、額縁部材103を外観検査位置に載置したときに、透明シート材を外観検査位置に載置したときの透明シート材の表面と同一の高さになるように調節されている。例えば、額縁部材103を外観検査位置に載置するときに、額縁部材103の底面の位置が、透明シート材を外観検査位置に載置するときの透明シート材の底面の位置と一致する場合は、額縁部材103の底面から白色糸状部材102W及び黒色糸状部材102Bまでの高さ(H)が、透明シート材の厚さと同一になるように調節されている。額縁部材103を外観検査位置に載置するときに、額縁部材103の底面の位置が、透明シート材を外観検査位置に載置するときの透明シート材の底面の位置と一致しない場合は、その位置の差を考慮して高さ(H)を調節する。   The white thread-like member 102W and the black thread-like member 102B have the same height as the surface of the transparent sheet material when the frame member 103 is placed at the appearance inspection position and the transparent sheet material is placed at the appearance inspection position. It is adjusted to become. For example, when the frame member 103 is placed at the appearance inspection position, the position of the bottom surface of the frame member 103 matches the position of the bottom surface of the transparent sheet material when the transparent sheet material is placed at the appearance inspection position. The height (H) from the bottom surface of the frame member 103 to the white thread-like member 102W and the black thread-like member 102B is adjusted to be the same as the thickness of the transparent sheet material. When the frame member 103 is placed at the appearance inspection position, the position of the bottom surface of the frame member 103 does not match the position of the bottom surface of the transparent sheet material when the transparent sheet material is placed at the appearance inspection position. The height (H) is adjusted in consideration of the position difference.

透明シート材の外観検査をする際に、透明シート材にカメラの焦点を合わせることは、対象が透明なため、困難であり、操作者や検査装置によってバラつきが生じる場合がある。本発明の外観検査用治具を用い、透過光の場合は黒色糸状部材102Bにカメラの焦点を合わせ、反射光の場合は白色糸状部材102Wにカメラの焦点を合わせることで、操作者や検査装置に係わらず透明シート材の表面の位置に精確にカメラの焦点を合わせることができる。なお、白色糸状部材102Wでは、透過光の場合に糸状部材が見えなくなり、カメラの焦点を合わせることができなくなり、黒色系糸状部材102Bでは、反射光の場合に糸状部材が見えなくなり、カメラの焦点を合わせることができなくなる。本発明の外観検査用治具において、白色糸状部材102W及び黒色糸状部材102Bは、少なくとも1本ずつ備えられていれば良く、複数本あっても良い。カメラの焦点をより精確に合わせることができるので、白色糸状部材102W及び黒色糸状部材102Bは複数本ずつあることが好ましい。また、外観検査装置が、透過光又は反射光のみを利用する装置の場合は、白色糸状部材102W又は黒色糸状部材102Bのいずれか一方のみを備えていても良い。汎用性を考慮すると、白色糸状部材102W及び黒色糸状部材102Bの双方を備えていることが好ましい。   When inspecting the appearance of a transparent sheet material, it is difficult to focus the camera on the transparent sheet material because the object is transparent, and variations may occur depending on the operator and the inspection apparatus. By using the appearance inspection jig of the present invention, the camera and the inspection apparatus are focused by focusing the camera on the black thread-like member 102B in the case of transmitted light and focusing the camera on the white thread-like member 102W in the case of reflected light. Regardless of this, the camera can be accurately focused on the position of the surface of the transparent sheet material. In the white thread-like member 102W, the thread-like member cannot be seen in the case of transmitted light, and the camera cannot be focused. In the black thread-like member 102B, the thread-like member cannot be seen in the case of reflected light, and the focus of the camera. Cannot be matched. In the appearance inspection jig of the present invention, it is sufficient that at least one white thread-like member 102W and black thread-like member 102B are provided, and a plurality of them may be provided. Since the camera can be focused more accurately, it is preferable that there are a plurality of white thread members 102W and a plurality of black thread members 102B. When the appearance inspection apparatus is an apparatus that uses only transmitted light or reflected light, only one of the white thread-like member 102W and the black thread-like member 102B may be provided. Considering versatility, it is preferable that both the white thread-like member 102W and the black thread-like member 102B are provided.

白色糸状部材102Wは、反射光で検出可能な明色糸状部材であれば、白色でなくても良い。明色は、一般に、明度が高く、彩度が低い色調の色をいう。反射光で最も検出し易い白色が好ましい。また、黒色糸状部材102Bは、透過光で検出可能な暗色糸状部材であれば、黒色でなくても良い。暗色は、一般に、明度及び彩度が低い色調の色をいう。透過光で最も検出し易い黒色が好ましい。これらの糸状部材は、カメラの焦点を合わせることができる直径を有していれば、どのようなものでも良い。糸状部材の直径は、0.05〜0.3mmが好ましい。   The white thread-like member 102W may not be white as long as it is a light-colored thread-like member that can be detected by reflected light. A light color generally refers to a color with a high lightness and a low saturation. A white color that is most easily detected by reflected light is preferred. Further, the black thread-like member 102B may not be black as long as it is a dark thread-like member that can be detected by transmitted light. The dark color generally refers to a color having a low lightness and saturation. A black color that is most easily detected by transmitted light is preferred. These thread-like members may be anything as long as they have a diameter that allows the camera to be focused. The diameter of the thread member is preferably 0.05 to 0.3 mm.

更に、図1の外観検査用治具には、白色糸状部材102Wに対して、白色糸状部材102Wが張られた方向と直交する方向の前方側及び後方側に、それぞれ上方位置(外観検査位置に載置した際、カメラに近い位置)と下方位置(外観検査位置に載置した際、カメラに遠い位置)の補助用白色糸状部材106Wが張られている。各補助用白色糸状部材106Wは、額縁部材103に設けられた、各一対の支持部116Wによって水平に張られている。白色糸状部材102Wと補助用白色糸状部材106Wは、交差していなければ、平行でなくても良いが、どの位置でも間隔が変わらず、使用し易い点で、平行に張られていることが好ましい。   Further, in the appearance inspection jig shown in FIG. 1, an upper position (in the appearance inspection position) is set on the front side and the rear side in the direction orthogonal to the direction in which the white thread member 102W is stretched with respect to the white thread member 102W. Auxiliary white thread-like member 106W is stretched between a position close to the camera when placed and a lower position (position far from the camera when placed at the appearance inspection position). Each auxiliary white thread-like member 106 </ b> W is stretched horizontally by each pair of support portions 116 </ b> W provided on the frame member 103. The white thread-like member 102W and the auxiliary white thread-like member 106W may not be parallel as long as they do not intersect with each other. .

同様に、黒色糸状部材102Bに対して、黒色糸状部材102Bが張られた方向と直交する方向の前方側及び後方側に、それぞれ上方位置(外観検査位置に載置した際、カメラに近い位置)と下方位置(外観検査位置に載置した際、カメラに遠い位置)の補助用黒色糸状部材106Bが張られている。各補助用黒色糸状部材106Bは、額縁部材103に設けられた、各一対の支持部116Bによって水平に張られている。黒色糸状部材102Bと補助用黒色糸状部材106Bは、交差していなければ、平行でなくても良いが、どの位置でも間隔が変わらず、使用し易い点で、平行に張られていることが好ましい。   Similarly, an upper position (a position close to the camera when placed at the appearance inspection position) on the front side and the rear side in the direction orthogonal to the direction in which the black thread member 102B is stretched with respect to the black thread member 102B. The auxiliary black thread-like member 106B at the lower position (position far from the camera when placed at the appearance inspection position) is stretched. Each auxiliary black thread-like member 106 </ b> B is stretched horizontally by each pair of support portions 116 </ b> B provided on the frame member 103. The black thread-like member 102B and the auxiliary black thread-like member 106B do not have to be parallel as long as they do not intersect with each other, but are preferably stretched in parallel because the distance does not change at any position and they are easy to use. .

図2は、図1に示した検査用治具を用い、カメラの焦点位置を合わせた際のモニタ波形を示した図である。図示のように、反射光の場合は、補助用白色糸状部材106Wのモニタ波形を参照することにより、白色糸状部材102Wのモニタ波形のピークをより明瞭に把握することができる。また、透過光の場合は、補助用黒色糸状部材106Bのモニタ波形を参照することにより、黒色糸状部材102Bのモニタ波形のピークをより明瞭に把握することができる。   FIG. 2 is a diagram showing a monitor waveform when the focus position of the camera is adjusted using the inspection jig shown in FIG. As shown in the figure, in the case of reflected light, the monitor waveform peak of the white filamentous member 102W can be grasped more clearly by referring to the monitor waveform of the auxiliary white filamentous member 106W. In the case of transmitted light, the monitor waveform peak of the black thread-like member 102B can be grasped more clearly by referring to the monitor waveform of the auxiliary black thread-like member 106B.

本発明の外観検査用治具において、補助用白色糸状部材106W及び補助用黒色糸状部材106Bは、無くても良いが、上述のように、より精確に白色糸状部材102W及び黒色糸状部材102Bにカメラの焦点を合わせ易い点で、これらの補助用糸状部材を備えていることが好ましい。なお、各補助用糸状部材は複数本備えられていても良い。   In the appearance inspection jig of the present invention, the auxiliary white thread-like member 106W and the auxiliary black thread-like member 106B may be omitted, but as described above, the white thread-like member 102W and the black thread-like member 102B are more accurately connected to the camera. It is preferable that these auxiliary thread-like members are provided in terms of easy focusing. A plurality of auxiliary thread-like members may be provided.

白色糸状部材102Wと補助用白色糸状部材106Wの上下方向(即ち、カメラの焦点移動方向)の位置の差(d)、及び/又は黒色糸状部材102Bと補助用黒色糸状部材106Bの上下方向(即ち、カメラの焦点移動方向)の位置の差(d)には、特に制限は無く、焦点位置を各糸状部材に合わせる際に参照し易い間隔で設定する。好ましくは、0.2〜10mmであり、更に好ましくは0.2〜2mmである。   The difference (d) between the positions of the white thread-like member 102W and the auxiliary white thread-like member 106W in the vertical direction (that is, the camera's focal movement direction) and / or the vertical direction of the black thread-like member 102B and the auxiliary black thread-like member 106B (ie The position difference (d) in the camera's focus movement direction) is not particularly limited, and is set at an interval that can be easily referred to when the focus position is adjusted to each thread-like member. Preferably, it is 0.2-10 mm, More preferably, it is 0.2-2 mm.

また、白色糸状部材102Wと補助用白色糸状部材106Wの白色糸状部材102Wが張られた方向と直交する方向の位置の差、及び/又は黒色糸状部材102Bと補助用黒色糸状部材106Bの黒色糸状部材102Bが張られた方向と直交する方向の位置の差、には、特に制限はない。好ましくは5〜20mmであり、更に好ましくは5〜10mmである。   Further, the difference between the positions of the white thread member 102W and the auxiliary white thread member 106W in the direction perpendicular to the direction in which the white thread member 102W is stretched, and / or the black thread member of the black thread member 102B and the auxiliary black thread member 106B. There is no particular limitation on the position difference in the direction orthogonal to the direction in which 102B is stretched. Preferably it is 5-20 mm, More preferably, it is 5-10 mm.

なお、額縁部材103は、各糸状部材を張っても変形しない堅牢性を有していれば、どのような材質であっても良い。透明シート材の厚さを考慮すると、薄くても堅牢性を有する金属製が好ましい。   The frame member 103 may be made of any material as long as the frame member 103 has robustness that does not deform even when each thread-like member is stretched. In consideration of the thickness of the transparent sheet material, it is preferable to use a metal having a fastness even if it is thin.

図3は、本発明の透明シート材外観検査用治具の好適態様の一例を示す概略平面図である。図3においては、額縁部材が、内側額縁部材203及び内側額縁部材203を支持する、内側額縁部材203の周囲の外側額縁部材223で構成されている。内側額縁部材203には、図1の場合と同様に、明色糸状部材として白色糸状部材202Wが一対の支持部212Wによって水平に張られ、暗色糸状部材として黒色糸状部材202Bが一対の支持部212Bによって水平に張られている。また、補助用白色糸状部材206W、及び補助用黒色糸状部材206Bも、図1の場合と同様に設けられている。一方、外側額縁部材223は、長辺を構成する一対の板状部材223Lと、短辺を構成する一対の板状部材223Sからなり、その長辺の長さ(L)が、外観検査を行う透明シート材の幅と略同一に設定されている。そして、内側額縁部材203は、外側額縁部材223の内側に、一対の板状部材223Lに沿って矢印方向にスライド移動できるように配置されている。スライド移動の仕組みはどのような構成でも良い。例えば、板状部材223Lの側面にレール状の溝が形成され、内側額縁部材203がその溝に沿ってスライド移動する仕組みが挙げられる。また、図3においては、内側額縁部材203は、保持部材213及び留め具214により、板状部材223Lの任意の位置で、固定できるようになっている。   FIG. 3 is a schematic plan view showing an example of a preferred embodiment of the transparent sheet material appearance inspection jig of the present invention. In FIG. 3, the frame member includes an inner frame member 203 and an outer frame member 223 around the inner frame member 203 that supports the inner frame member 203. In the inner frame member 203, as in the case of FIG. 1, a white thread member 202W as a light thread member is horizontally stretched by a pair of support portions 212W, and a black thread member 202B as a dark thread member is a pair of support portions 212B. Is stretched horizontally. Further, the auxiliary white thread-like member 206W and the auxiliary black thread-like member 206B are also provided in the same manner as in FIG. On the other hand, the outer frame member 223 includes a pair of plate-like members 223L constituting long sides and a pair of plate-like members 223S constituting short sides, and the length (L) of the long sides performs an appearance inspection. It is set to be substantially the same as the width of the transparent sheet material. The inner frame member 203 is disposed inside the outer frame member 223 so as to be slidable in the arrow direction along the pair of plate-like members 223L. The slide moving mechanism may have any configuration. For example, there is a mechanism in which a rail-shaped groove is formed on the side surface of the plate-shaped member 223L, and the inner frame member 203 slides along the groove. In FIG. 3, the inner frame member 203 can be fixed at an arbitrary position of the plate-like member 223 </ b> L by the holding member 213 and the fastener 214.

図3の外観検査用治具によると、外側額縁部材223を透明シート材の外観検査位置に載置するとき、外観検査位置に透明シート材を載置するときと同様な幅で載置できる。そして、内側額縁部材203をスライド移動させ、任意の位置に配置することで、外観検査位置における透明シート材の幅方向のどの位置にも白色糸状部材202W及び黒色糸状部材202Bを同一条件で配置することができる。従って、外観検査装置のカメラの位置に係らず、同一条件で精確にカメラの焦点を各糸状部材、即ち透明シート材の表面の位置に合わせることができる。   According to the appearance inspection jig of FIG. 3, when the outer frame member 223 is placed at the appearance inspection position of the transparent sheet material, it can be placed with the same width as when the transparent sheet material is placed at the appearance inspection position. Then, the white frame member 202W and the black thread member 202B are arranged under the same conditions at any position in the width direction of the transparent sheet material at the appearance inspection position by sliding the inner frame member 203 and arranging it at an arbitrary position. be able to. Therefore, regardless of the position of the camera of the appearance inspection apparatus, the camera can be accurately focused on the position of the surface of each filamentous member, that is, the transparent sheet material, under the same conditions.

[透明シート材の外観検査方法]
本発明の透明シート材の外観検査方法は、透明シート材に光を照射し、透過光及び/又は反射光による透明シート材の光学画像をカメラにより撮像することによる検査方法であり、カメラの焦点を合わせる際に、本発明の透明シート材外観検査用治具を用いることを特徴とする。
[Appearance inspection method for transparent sheet]
The appearance inspection method for a transparent sheet material according to the present invention is an inspection method by irradiating light to a transparent sheet material and taking an optical image of the transparent sheet material by transmitted light and / or reflected light with a camera. Is used, the transparent sheet material appearance inspection jig of the present invention is used.

図4は、本発明の透明シート材の外観検査方法の一例を説明するための概略図である。図4における外観検査装置は、カメラ41、外観検査台51、及び透過光用光源61を有するか(図4(a)、(c))、及び/又はカメラ42、外観検査台52、及び反射光用光源62を有する(図4(b)、(d))。カメラ41及び/又はカメラ42は、どのようなものでも良く。通常のラインセンサカメラやエリアセンサカメラを使用することができる。外観検査台51及び/又は外観検査台52は、通常、透明シート材を搬送する搬送装置の一部に組み込まれて設けられる。透過光用光源61及び/又は反射光用光源62は、外観検査により透明シート材の欠陥を検出できる程度の明るさがあれば良い。必要に応じて、偏光処理やスリットを通した光源を用いても良い。   FIG. 4 is a schematic diagram for explaining an example of the appearance inspection method for the transparent sheet material of the present invention. 4 includes a camera 41, an appearance inspection table 51, and a transmitted light source 61 (FIGS. 4A and 4C) and / or a camera 42, an appearance inspection table 52, and a reflection. It has the light source 62 for light (FIG.4 (b), (d)). The camera 41 and / or the camera 42 may be anything. A normal line sensor camera or area sensor camera can be used. The appearance inspection table 51 and / or the appearance inspection table 52 are usually provided by being incorporated in a part of a conveying device that conveys the transparent sheet material. The light source 61 for transmitted light and / or the light source 62 for reflected light only needs to be bright enough to detect a defect in the transparent sheet material by visual inspection. You may use the light source which passed the polarization process and the slit as needed.

まず、本発明の透明シート材の外観検査用治具31を、外観検査台51に載置する。この際、透明シート材を外観検査する外観検査位置に精確に載置する。外観検査用治具31には、上述の外観検査用治具の説明と同様に、明色糸状部材として白色糸状部材32W、及び暗色糸状部材として黒色糸状部材32Bが、額縁部材33に張られている。そして、白色糸状部材32W、及び黒色糸状部材32Bのカメラの焦点移動方向(図4においては高さ方向)の位置Aは、被検査透明シート材を外観検査位置に載置したときの透明シート材の表面と同一の高さに調節されている。   First, the appearance inspection jig 31 of the transparent sheet material of the present invention is placed on the appearance inspection table 51. At this time, the transparent sheet material is accurately placed at an appearance inspection position for appearance inspection. In the appearance inspection jig 31, a white thread member 32 W as a light thread member and a black thread member 32 B as a dark thread member are stretched on the frame member 33 in the same manner as described above for the appearance inspection jig. Yes. The position A in the camera focal point moving direction (height direction in FIG. 4) of the white thread member 32W and the black thread member 32B is the transparent sheet material when the transparent sheet material to be inspected is placed at the appearance inspection position. It is adjusted to the same height as the surface.

図4(a)では、透過光光源61を備える外観検査位置において、透過光によりカメラ41の焦点を黒色糸状部材32Bに合わせる。また、図4(b)では、反射光用光源62を備える外観検査位置において、反射光によりカメラ42の焦点を白色糸状部材32Wに合わせる。これにより、各外観検査位置において、カメラの焦点を被検査透明シート材の表面の位置に再現性良く精確に合わせることができる。その後、外観検査用治具31に換えて、透明シート材11を外観検査台51の外観検査位置に載置し、透過光により外観検査し(図4(c))、及び/又は透明シート材11を外観検査台52の外観検査位置に載置し、反射光により外観検査する(図4(d))。   In FIG. 4A, the camera 41 is focused on the black thread-like member 32B by the transmitted light at the appearance inspection position including the transmitted light source 61. In FIG. 4B, the camera 42 is focused on the white thread-like member 32W by the reflected light at the appearance inspection position including the reflected light source 62. Thereby, at each appearance inspection position, the focus of the camera can be accurately adjusted with good reproducibility to the position of the surface of the transparent sheet material to be inspected. Thereafter, in place of the appearance inspection jig 31, the transparent sheet material 11 is placed at the appearance inspection position of the appearance inspection table 51, and the appearance inspection is performed by transmitted light (FIG. 4C), and / or the transparent sheet material. 11 is placed at the appearance inspection position of the appearance inspection table 52, and the appearance is inspected by reflected light (FIG. 4D).

本発明の透明シート材の外観検査方法によれば、透明シート材に光を照射し、その透過光による光学画像、及び反射光による光学画像のどちらを利用する場合であっても、操作者や検査装置に係わらず、透明シート材の表面の位置に、精確にカメラの焦点を合わせて、再現性が担保された外観検査を行うことができる。   According to the method for inspecting the appearance of a transparent sheet material of the present invention, it is possible to irradiate the transparent sheet material with light and use either an optical image by the transmitted light or an optical image by the reflected light. Regardless of the inspection device, it is possible to perform an appearance inspection with reproducibility ensured by accurately focusing the camera on the position of the surface of the transparent sheet material.

なお、本発明は上記の実施の形態の構成に限定されるものではなく、発明の要旨の範囲内で種々変形が可能である。   In addition, this invention is not limited to the structure of said embodiment, A various deformation | transformation is possible within the range of the summary of invention.

本発明により、ディスプレイ用光学フィルタ等に使用される透明シート材の製造工程又は製品検査における外観検査を、精確に行うことができ、高品質の透明シート材を提供することができる。   According to the present invention, it is possible to accurately perform an appearance inspection in a manufacturing process or product inspection of a transparent sheet material used for an optical filter for display or the like, and it is possible to provide a high-quality transparent sheet material.

11 透明シート材
31 外観検査用治具
32W、102W、202W 白色糸状部材
32B、102B、202B 黒色糸状部材
33、103 額縁部材
41、42 カメラ
51、52 外観検査台(搬送装置)
61 透過光用光源
62 反射光用光源
106W、206W 補助用白色糸状部材
106B、206B 補助用黒色糸状部材
112W、212W 白色糸状部材用支持部
112B、212B 黒色糸状部材用支持部
116W、216W 補助用白色糸状部材用支持部
116B、216B 補助用黒色糸状部材用支持部
203 内側額縁部材
213 保持部材
214 留め具
223 外側額縁部材
223L、223S 板状部材
11 Transparent sheet material 31 Appearance inspection jig 32W, 102W, 202W White thread member 32B, 102B, 202B Black thread member 33, 103 Frame member 41, 42 Camera 51, 52 Appearance inspection table (conveyance device)
61 Light source for transmitted light 62 Light source for reflected light 106W, 206W Auxiliary white thread member 106B, 206B Auxiliary black thread member 112W, 212W White thread member support part 112B, 212B Black thread member support part 116W, 216W Auxiliary white Threaded member support part 116B, 216B Auxiliary black threaded member support part 203 Inner frame member 213 Holding member 214 Fastener 223 Outer frame member 223L, 223S Plate member

Claims (8)

透明シート材に光を照射し、透過光及び/又は反射光による透明シート材の光学画像をカメラにより撮像することにより、透明シート材の外観を検査する方法における、カメラの焦点を透明シート材の表面に合わせるために用いる検査用治具であって、
透明シート材を外観検査する位置に透明シート材に換えて載置可能な矩形状の額縁部材、並びに
該額縁部材を前記外観検査位置に載置したときに、前記透明シート材の表面と同一の高さになるように前記額縁部材に張られた、少なくとも1本の明色糸状部材、及び/又は少なくとも1本の暗色糸状部材を有することを特徴とする検査用治具。
In the method of inspecting the appearance of the transparent sheet material by irradiating the transparent sheet material with light and taking an optical image of the transparent sheet material by the transmitted light and / or reflected light with the camera, the camera is focused on the transparent sheet material. An inspection jig used to match the surface,
A rectangular frame member that can be placed in place of the transparent sheet material at a position for visual inspection of the transparent sheet material, and the same surface as the surface of the transparent sheet material when the frame member is placed at the visual inspection position An inspection jig comprising at least one light-colored thread-like member and / or at least one dark-colored thread-like member stretched on the frame member so as to have a height.
前記額縁部材に、前記明色糸状部材に対して、当該明色糸状部材が張られた方向と直交する方向の前後に、前記カメラに近い位置と、遠い位置の補助用明色糸状部材が少なくとも1本ずつ張られている請求項1に記載の検査用治具。   The frame member has at least auxiliary light-colored thread members at positions near and far from the camera before and after the light-colored thread-shaped member in a direction perpendicular to the direction in which the light-colored thread member is stretched. The inspection jig according to claim 1, wherein the inspection jig is stretched one by one. 前記額縁部材に、前記暗色糸状部材に対して、当該暗色糸状部材が張られた方向と直交する方向の前後に、前記カメラに近い位置と、遠い位置の補助用暗色糸状部材が少なくとも1本ずつ張られている請求項1又は2に記載の検査用治具。   The frame member has at least one auxiliary dark thread-like member at a position close to the camera and at a position far from the camera before and after the dark thread-like member in a direction perpendicular to the direction in which the dark thread-like member is stretched. The inspection jig according to claim 1, wherein the inspection jig is stretched. 前記明色糸状部材及び補助用明色糸状部材の前記カメラの焦点移動方向の位置の差、及び/又は前記暗色糸状部材及び補助用暗色糸状部材の前記カメラの焦点移動方向の位置の差が、0.2〜10mmである請求項2又は3に記載の検査用治具。   The difference in position of the camera in the focal movement direction of the light-colored thread member and the auxiliary light-colored thread member, and / or the difference in position of the dark-colored thread member and the auxiliary dark-colored thread member in the focus movement direction of the camera, The inspection jig according to claim 2 or 3, wherein the inspection jig is 0.2 to 10 mm. 前記額縁部材が、前記明色糸状部材及び暗色糸状部材が張られた内側額縁部材と、内側額縁部材を支持する、内側額縁部材の周囲の外側額縁部材とからなり、
当該外側額縁部材の長辺の長さが前記透明シート材の幅と略同一であり、
前記内側額縁部材が、前記外側額縁部材の長辺を構成する1対の板状部材に沿ってスライド移動可能に配置されている請求項1〜4のいずれか1項に記載の検査用治具。
The frame member comprises an inner frame member on which the light-colored thread-like member and dark-colored thread-like member are stretched, and an outer frame member around the inner frame member that supports the inner frame member;
The length of the long side of the outer frame member is substantially the same as the width of the transparent sheet material,
The inspection jig according to any one of claims 1 to 4, wherein the inner frame member is slidably disposed along a pair of plate-like members constituting the long side of the outer frame member. .
前記明色糸状部材が、白色糸状部材である請求項1〜5に記載の検査用治具。   The inspection jig according to claim 1, wherein the light-colored thread-shaped member is a white thread-shaped member. 前記暗色糸状部材が、黒色糸状部材である請求項1〜6に記載の検査用治具。   The inspection jig according to claim 1, wherein the dark thread-like member is a black thread-like member. 透明シート材に光を照射し、透過光及び/又は反射光による透明シート材の光学画像をカメラにより撮像することにより、透明シート材の外観を検査する方法であって、
請求項1〜7のいずれか1項に記載の検査用治具を、透明シート材を外観検査する位置に載置し、透過光により、前記暗色糸状部材にカメラの焦点を合わせる工程、及び/又は反射光により、前記明色糸状部材にカメラの焦点を合わせる工程、並びに
前記検査用治具に換えて、透明シート材を前記外観検査位置に載置し、外観検査をする工程、
を含むことを特徴とする透明シート材の外観検査方法。
A method for inspecting the appearance of a transparent sheet material by irradiating light to the transparent sheet material and capturing an optical image of the transparent sheet material by transmitted light and / or reflected light with a camera,
Mounting the inspection jig according to any one of claims 1 to 7 at a position for visual inspection of the transparent sheet material, and focusing the camera on the dark-colored filamentous member by transmitted light; Or, the step of focusing the camera on the light-colored thread-like member by reflected light, and the step of inspecting the appearance by placing a transparent sheet material at the appearance inspection position instead of the inspection jig,
A method for inspecting the appearance of a transparent sheet material, comprising:
JP2011064851A 2011-03-23 2011-03-23 Transparent sheet material appearance inspection jig, and transparent sheet material appearance inspection method using the same Expired - Fee Related JP5718116B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011064851A JP5718116B2 (en) 2011-03-23 2011-03-23 Transparent sheet material appearance inspection jig, and transparent sheet material appearance inspection method using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011064851A JP5718116B2 (en) 2011-03-23 2011-03-23 Transparent sheet material appearance inspection jig, and transparent sheet material appearance inspection method using the same

Publications (2)

Publication Number Publication Date
JP2012202714A true JP2012202714A (en) 2012-10-22
JP5718116B2 JP5718116B2 (en) 2015-05-13

Family

ID=47183896

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011064851A Expired - Fee Related JP5718116B2 (en) 2011-03-23 2011-03-23 Transparent sheet material appearance inspection jig, and transparent sheet material appearance inspection method using the same

Country Status (1)

Country Link
JP (1) JP5718116B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020110711A1 (en) * 2018-11-27 2020-06-04 オムロン株式会社 Inspection system, inspection method, and program

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58184116A (en) * 1982-04-21 1983-10-27 Matsushita Electric Ind Co Ltd Examining method of defect on surface of light-transmittable object
JPS6423016U (en) * 1987-07-30 1989-02-07
JPH01274283A (en) * 1988-04-26 1989-11-02 Nippon Seiko Kk Pattern reader
JP2001208701A (en) * 2000-01-24 2001-08-03 Fujitsu Takamisawa Component Ltd Transparent panel inspection apparatus
JP2006329714A (en) * 2005-05-24 2006-12-07 Olympus Corp Lens inspection apparatus
JP2008171866A (en) * 2007-01-09 2008-07-24 Juki Corp Focus adjusting method of camera in mounting machine, and scaling acquiring method thereof
JP2008192861A (en) * 2007-02-06 2008-08-21 Matsushita Electric Ind Co Ltd Semiconductor inspection apparatus and method
JP2009069142A (en) * 2007-08-23 2009-04-02 Nitto Denko Corp Method for inspecting defect of laminated film and its apparatus
JP2009150792A (en) * 2007-12-21 2009-07-09 Gunze Ltd Film inspecting apparatus

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58184116A (en) * 1982-04-21 1983-10-27 Matsushita Electric Ind Co Ltd Examining method of defect on surface of light-transmittable object
JPS6423016U (en) * 1987-07-30 1989-02-07
JPH01274283A (en) * 1988-04-26 1989-11-02 Nippon Seiko Kk Pattern reader
JP2001208701A (en) * 2000-01-24 2001-08-03 Fujitsu Takamisawa Component Ltd Transparent panel inspection apparatus
JP2006329714A (en) * 2005-05-24 2006-12-07 Olympus Corp Lens inspection apparatus
JP2008171866A (en) * 2007-01-09 2008-07-24 Juki Corp Focus adjusting method of camera in mounting machine, and scaling acquiring method thereof
JP2008192861A (en) * 2007-02-06 2008-08-21 Matsushita Electric Ind Co Ltd Semiconductor inspection apparatus and method
JP2009069142A (en) * 2007-08-23 2009-04-02 Nitto Denko Corp Method for inspecting defect of laminated film and its apparatus
JP2009150792A (en) * 2007-12-21 2009-07-09 Gunze Ltd Film inspecting apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020110711A1 (en) * 2018-11-27 2020-06-04 オムロン株式会社 Inspection system, inspection method, and program

Also Published As

Publication number Publication date
JP5718116B2 (en) 2015-05-13

Similar Documents

Publication Publication Date Title
KR101721965B1 (en) Device and method for inspecting appearance of transparent substrate
JP5348765B2 (en) Method and apparatus for inspecting fine irregularities of flat transparent body
KR101311981B1 (en) Inspection device for flat display panel
TWI502186B (en) A bright spot detection device for filtering foreign matter noise and its method
KR20150085224A (en) Apparatus for inspecting a edge of substrate
TWI630380B (en) Optical member inspection method, optical product manufacturing method, and optical member inspection apparatus
JP2006220498A (en) Lens inspection device
JP5589888B2 (en) Evaluation apparatus for surface inspection apparatus and evaluation method for surface inspection apparatus
WO2015174114A1 (en) Substrate inspection device
JP2008298557A (en) Method and apparatus for inspecting optical film
JP5718116B2 (en) Transparent sheet material appearance inspection jig, and transparent sheet material appearance inspection method using the same
JP5634390B2 (en) Glass container defect inspection method and apparatus
KR20130026264A (en) Light guide plate inspecting device
JP2012242266A (en) Lens foreign matter detection device and lens foreign matter detection method
KR101197709B1 (en) Apparatus for inspecting substrate
JP2018040761A (en) Device for inspecting appearance of inspection target object
JPWO2017134958A1 (en) Sheet inspection apparatus and sheet inspection method
TWI470210B (en) Defect inspection method of optical layer part of display device
KR20130143284A (en) Back light unit inspecting apparatus and method
KR101391312B1 (en) Camera assembly for back light unit inspecting apparatus
JP5718115B2 (en) Defect inspection method for sheet material and inspection jig used therefor
KR20100084829A (en) Inspecting apparatus having line scan camera
TW200643401A (en) Automatic optical test machine for determining the defect of color non-uniformity of panels
JP5647716B2 (en) A simple telecentric lens device for micro unevenness inspection machine
JP6194659B2 (en) Resin container inspection equipment

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20140318

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20141128

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20141209

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150205

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20150224

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20150318

R150 Certificate of patent or registration of utility model

Ref document number: 5718116

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees