JP2004031885A5 - - Google Patents

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Publication number
JP2004031885A5
JP2004031885A5 JP2002292580A JP2002292580A JP2004031885A5 JP 2004031885 A5 JP2004031885 A5 JP 2004031885A5 JP 2002292580 A JP2002292580 A JP 2002292580A JP 2002292580 A JP2002292580 A JP 2002292580A JP 2004031885 A5 JP2004031885 A5 JP 2004031885A5
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JP
Japan
Prior art keywords
substrate
mounting member
resin
heating
bonding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002292580A
Other languages
English (en)
Japanese (ja)
Other versions
JP4014481B2 (ja
JP2004031885A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2002292580A external-priority patent/JP4014481B2/ja
Priority to JP2002292580A priority Critical patent/JP4014481B2/ja
Priority to CNB038098040A priority patent/CN100375256C/zh
Priority to KR1020047016361A priority patent/KR100978697B1/ko
Priority to PCT/JP2003/005491 priority patent/WO2003094222A1/ja
Priority to TW92110035A priority patent/TWI237335B/zh
Publication of JP2004031885A publication Critical patent/JP2004031885A/ja
Publication of JP2004031885A5 publication Critical patent/JP2004031885A5/ja
Publication of JP4014481B2 publication Critical patent/JP4014481B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2002292580A 2002-04-30 2002-10-04 ボンディング方法およびその装置 Expired - Fee Related JP4014481B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2002292580A JP4014481B2 (ja) 2002-04-30 2002-10-04 ボンディング方法およびその装置
CNB038098040A CN100375256C (zh) 2002-04-30 2003-04-28 粘附方法及其装置
KR1020047016361A KR100978697B1 (ko) 2002-04-30 2003-04-28 본딩방법 및 그 장치
PCT/JP2003/005491 WO2003094222A1 (fr) 2002-04-30 2003-04-28 Procede de collage et dispositif de collage
TW92110035A TWI237335B (en) 2002-04-30 2003-04-29 Bonding method and apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002128468 2002-04-30
JP2002292580A JP4014481B2 (ja) 2002-04-30 2002-10-04 ボンディング方法およびその装置

Publications (3)

Publication Number Publication Date
JP2004031885A JP2004031885A (ja) 2004-01-29
JP2004031885A5 true JP2004031885A5 (zh) 2005-06-02
JP4014481B2 JP4014481B2 (ja) 2007-11-28

Family

ID=29405300

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002292580A Expired - Fee Related JP4014481B2 (ja) 2002-04-30 2002-10-04 ボンディング方法およびその装置

Country Status (5)

Country Link
JP (1) JP4014481B2 (zh)
KR (1) KR100978697B1 (zh)
CN (1) CN100375256C (zh)
TW (1) TWI237335B (zh)
WO (1) WO2003094222A1 (zh)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005347303A (ja) * 2004-05-31 2005-12-15 Canon Inc 熱圧着装置
JP4687273B2 (ja) * 2005-06-23 2011-05-25 住友電気工業株式会社 電子部品の実装方法
JP4628234B2 (ja) * 2005-09-30 2011-02-09 オプトレックス株式会社 圧着装置および圧着方法
KR100825799B1 (ko) * 2007-01-03 2008-04-29 삼성전자주식회사 다이 접착 공정의 보이드 형성을 억제하는 반도체 칩 및이를 포함하는 반도체 패키지
JP4340703B2 (ja) * 2007-11-01 2009-10-07 シャープ株式会社 半導体実装装置および半導体実装方法
KR20090066593A (ko) * 2007-12-20 2009-06-24 삼성전자주식회사 플립칩 본딩장치 및 플립칩 본딩방법
KR101119541B1 (ko) * 2009-11-30 2012-02-22 (주)멜파스 Ａｃｆ본딩을 위한 압착 장치 및 상기 압착 장치의 동작 방법
JP5496141B2 (ja) * 2011-03-30 2014-05-21 富士フイルム株式会社 電子部品の製造方法
KR101331590B1 (ko) * 2011-04-06 2013-11-20 주식회사 휴템 전자기파 가열을 이용한 웨이퍼 본더
CN102520221B (zh) * 2011-12-21 2014-02-19 中微光电子(潍坊)有限公司 一种电致发光测试电极的制作方法
TWI501828B (zh) * 2012-03-13 2015-10-01 晶片壓合裝置及方法
CH707480B1 (de) * 2013-01-21 2016-08-31 Besi Switzerland Ag Bondkopf mit einem heiz- und kühlbaren Saugorgan.
US9093549B2 (en) * 2013-07-02 2015-07-28 Kulicke And Soffa Industries, Inc. Bond heads for thermocompression bonders, thermocompression bonders, and methods of operating the same
US9659902B2 (en) * 2014-02-28 2017-05-23 Kulicke And Soffa Industries, Inc. Thermocompression bonding systems and methods of operating the same
KR102158822B1 (ko) * 2014-06-10 2020-09-22 세메스 주식회사 본딩 헤드 및 이를 포함하는 다이 본딩 장치
KR102295986B1 (ko) 2014-12-01 2021-08-31 삼성디스플레이 주식회사 칩 본딩 장치 및 칩 본딩 방법
WO2016125763A1 (ja) * 2015-02-03 2016-08-11 東レエンジニアリング株式会社 実装装置および実装方法
KR102497661B1 (ko) * 2015-02-03 2023-02-07 토레이 엔지니어링 컴퍼니, 리미티드 실장 장치 및 실장 방법
EP3382744A1 (de) 2016-02-16 2018-10-03 EV Group E. Thallner GmbH Vorrichtung zum bonden von substraten
TWI607884B (zh) * 2016-06-04 2017-12-11 Usun Technology Co Ltd Pressing method of thin film display and flexible circuit board and pressing device thereof
KR102439617B1 (ko) * 2017-06-27 2022-09-05 주식회사 미코세라믹스 본딩 헤드 및 이를 갖는 본딩 장치
CN109429438B (zh) * 2017-08-25 2020-08-14 阳程科技股份有限公司 薄膜显示器与软性电路板的压合方法及其压合装置
CN108822749B (zh) * 2018-08-20 2023-10-20 江苏省特种设备安全监督检验研究院 一种环氧树脂加热加压装置
KR101959215B1 (ko) * 2018-11-16 2019-03-19 (주)제이스텍 디스플레이 패널 또는 터치패널의 저추력 본딩장치
CN110491802B (zh) * 2019-07-16 2022-03-01 盐城瑾诚科技有限公司 用于集成电路封装过程中的散热设备
KR102604789B1 (ko) * 2020-11-30 2023-11-21 세메스 주식회사 히터 조립체 및 이를 포함하는 본딩 헤드

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1187429A (ja) * 1997-05-09 1999-03-30 Citizen Watch Co Ltd 半導体チップの実装方法
US6077382A (en) * 1997-05-09 2000-06-20 Citizen Watch Co., Ltd Mounting method of semiconductor chip
JPH11186300A (ja) * 1997-12-19 1999-07-09 Sony Corp 半導体装置の封止方法
JP3937270B2 (ja) * 1998-08-31 2007-06-27 日立化成工業株式会社 半導体装置の製造方法
JP3376968B2 (ja) * 1999-08-30 2003-02-17 ソニーケミカル株式会社 実装方法
JP3815149B2 (ja) * 1999-11-04 2006-08-30 セイコーエプソン株式会社 部品実装方法および電気光学装置の製造方法
JP2002057186A (ja) * 2000-05-31 2002-02-22 Nippon Avionics Co Ltd フリップチップ実装方法およびプリント配線板
JP3646056B2 (ja) * 2000-11-06 2005-05-11 日本アビオニクス株式会社 フリップチップ実装方法
JP4626839B2 (ja) * 2001-05-21 2011-02-09 日本電気株式会社 半導体装置の実装方法

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