JP2004029007A - 磁界検出センサ - Google Patents

磁界検出センサ Download PDF

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Publication number
JP2004029007A
JP2004029007A JP2003129163A JP2003129163A JP2004029007A JP 2004029007 A JP2004029007 A JP 2004029007A JP 2003129163 A JP2003129163 A JP 2003129163A JP 2003129163 A JP2003129163 A JP 2003129163A JP 2004029007 A JP2004029007 A JP 2004029007A
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JP
Japan
Prior art keywords
magnetic
layer
sensor
magnetic field
ferromagnetic
Prior art date
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Pending
Application number
JP2003129163A
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English (en)
Japanese (ja)
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JP2004029007A5 (https=
Inventor
Manish Sharma
マニシュ・シャーマ
Frederick Perner
フレデリック・パーナー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hewlett Packard Development Co LP
Original Assignee
Hewlett Packard Development Co LP
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Filing date
Publication date
Application filed by Hewlett Packard Development Co LP filed Critical Hewlett Packard Development Co LP
Publication of JP2004029007A publication Critical patent/JP2004029007A/ja
Publication of JP2004029007A5 publication Critical patent/JP2004029007A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00—Galvanomagnetic devices
    • H10N50/10—Magnetoresistive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
  • Magnetic Heads (AREA)
JP2003129163A 2002-05-14 2003-05-07 磁界検出センサ Pending JP2004029007A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/146,176 US20030214762A1 (en) 2002-05-14 2002-05-14 Magnetic field detection sensor

Publications (2)

Publication Number Publication Date
JP2004029007A true JP2004029007A (ja) 2004-01-29
JP2004029007A5 JP2004029007A5 (https=) 2006-06-22

Family

ID=29269749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003129163A Pending JP2004029007A (ja) 2002-05-14 2003-05-07 磁界検出センサ

Country Status (6)

Country Link
US (1) US20030214762A1 (https=)
EP (1) EP1363134A3 (https=)
JP (1) JP2004029007A (https=)
KR (1) KR20030088355A (https=)
CN (1) CN1487501A (https=)
TW (1) TW200306431A (https=)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008059833A1 (en) * 2006-11-15 2008-05-22 Alps Electric Co., Ltd. Magnetic detector and electronic device
WO2008075610A1 (ja) * 2006-12-20 2008-06-26 Alps Electric Co., Ltd. 磁気検出装置
WO2008093699A1 (ja) * 2007-02-02 2008-08-07 Alps Electric Co., Ltd. 磁気検出装置及びその製造方法
WO2008099662A1 (ja) * 2007-01-31 2008-08-21 Alps Electric Co., Ltd. 磁気検出装置
WO2008132992A1 (ja) * 2007-04-18 2008-11-06 Alps Electric Co., Ltd. 磁気検出装置
WO2009096093A1 (ja) * 2008-01-30 2009-08-06 Hitachi Metals, Ltd. 角度センサ、その製造方法及びそれを用いた角度検知装置
US7723984B2 (en) 2005-09-30 2010-05-25 Tdk Corporation Magnetic sensor and current sensor
US7868613B2 (en) 2006-10-31 2011-01-11 Tdk Corporation Magnetic sensor and manufacturing method thereof

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002198583A (ja) * 2000-12-26 2002-07-12 Hitachi Ltd 強磁性トンネル型磁気抵抗効果素子及び磁気ヘッド
DE102005060713B4 (de) 2005-12-19 2019-01-24 Austriamicrosystems Ag Magnetfeldsensoranordnung und Verfahren zur berührungslosen Messung eines Magnetfeldes
US7715156B2 (en) * 2007-01-12 2010-05-11 Tdk Corporation Tunnel magnetoresistive effect element and thin-film magnetic head with tunnel magnetoresistive effect read head element
US20090059444A1 (en) * 2007-08-30 2009-03-05 Freescale Semiconductor, Inc. Methods and structures for an integrated two-axis magnetic field sensor
US8829901B2 (en) * 2011-11-04 2014-09-09 Honeywell International Inc. Method of using a magnetoresistive sensor in second harmonic detection mode for sensing weak magnetic fields
US8786987B2 (en) * 2012-04-27 2014-07-22 Seagate Technology Llc Biased two dimensional magnetic sensor
JP6083690B2 (ja) 2012-05-11 2017-02-22 公立大学法人大阪市立大学 力率計測装置
US8991250B2 (en) * 2012-09-11 2015-03-31 The United States Of America As Represented By Secretary Of The Navy Tuning fork gyroscope time domain inertial sensor
US8953284B1 (en) * 2013-11-20 2015-02-10 HGST Netherlands B.V. Multi-read sensor having a narrow read gap structure
EP2963435B1 (en) * 2014-07-01 2017-01-25 Nxp B.V. Differential lateral magnetic field sensor system with offset cancelling and implemented using silicon-on-insulator technology
EP2966453B1 (en) * 2014-07-11 2018-10-31 Crocus Technology MLU based accelerometer using a magnetic tunnel junction
DE102014011245B3 (de) * 2014-08-01 2015-06-11 Micronas Gmbh Magnetfeldmessvorrichtung
US10809320B2 (en) * 2015-04-29 2020-10-20 Everspin Technologies, Inc. Magnetic field sensor with increased SNR
DE102015007190B4 (de) * 2015-06-09 2017-03-02 Micronas Gmbh Magnetfeldmessvorrichtung
US10128311B2 (en) * 2017-03-17 2018-11-13 Toshiba Memory Corporation Magnetic memory device
US11574758B2 (en) * 2021-05-07 2023-02-07 Globalfoundries Singapore Pte. Ltd. Magnetic field sensor using different magnetic tunneling junction (MTJ) structures
KR102655502B1 (ko) 2021-09-28 2024-04-09 서울대학교산학협력단 상보형 센서 일체형 인터페이스 회로 및 상보형 센서 일체형 차동 인터페이스 회로

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5751521A (en) * 1996-09-23 1998-05-12 International Business Machines Corporation Differential spin valve sensor structure
US5737157A (en) * 1996-10-09 1998-04-07 International Business Machines Corporation Disk drive with a thermal asperity reduction circuitry using a magnetoresistive sensor
US5748399A (en) * 1997-05-13 1998-05-05 International Business Machines Corporation Resettable symmetric spin valve
JP2002522866A (ja) * 1998-08-14 2002-07-23 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ スピントンネル接合素子を具える磁界センサ
US6259586B1 (en) * 1999-09-02 2001-07-10 International Business Machines Corporation Magnetic tunnel junction sensor with AP-coupled free layer
US6469926B1 (en) * 2000-03-22 2002-10-22 Motorola, Inc. Magnetic element with an improved magnetoresistance ratio and fabricating method thereof
US20010036103A1 (en) * 2000-04-28 2001-11-01 Brug James A. Solid-state memory with magnetic storage cells

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7723984B2 (en) 2005-09-30 2010-05-25 Tdk Corporation Magnetic sensor and current sensor
US7868613B2 (en) 2006-10-31 2011-01-11 Tdk Corporation Magnetic sensor and manufacturing method thereof
JP5174676B2 (ja) * 2006-11-15 2013-04-03 アルプス電気株式会社 磁気検出装置及び電子機器
WO2008059833A1 (en) * 2006-11-15 2008-05-22 Alps Electric Co., Ltd. Magnetic detector and electronic device
WO2008075610A1 (ja) * 2006-12-20 2008-06-26 Alps Electric Co., Ltd. 磁気検出装置
JP5006339B2 (ja) * 2006-12-20 2012-08-22 アルプス電気株式会社 磁気検出装置
WO2008099662A1 (ja) * 2007-01-31 2008-08-21 Alps Electric Co., Ltd. 磁気検出装置
JP5184380B2 (ja) * 2007-01-31 2013-04-17 アルプス電気株式会社 磁気検出装置
JP5015966B2 (ja) * 2007-02-02 2012-09-05 アルプス電気株式会社 磁気検出装置及びその製造方法
WO2008093699A1 (ja) * 2007-02-02 2008-08-07 Alps Electric Co., Ltd. 磁気検出装置及びその製造方法
WO2008132992A1 (ja) * 2007-04-18 2008-11-06 Alps Electric Co., Ltd. 磁気検出装置
WO2009096093A1 (ja) * 2008-01-30 2009-08-06 Hitachi Metals, Ltd. 角度センサ、その製造方法及びそれを用いた角度検知装置
US8564282B2 (en) 2008-01-30 2013-10-22 Hitachi Metals, Ltd. Angle sensor, angle sensor manufacturing method, and angle detection device using the angle sensor

Also Published As

Publication number Publication date
US20030214762A1 (en) 2003-11-20
CN1487501A (zh) 2004-04-07
EP1363134A2 (en) 2003-11-19
TW200306431A (en) 2003-11-16
EP1363134A3 (en) 2005-04-27
KR20030088355A (ko) 2003-11-19

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