JP2004006332A5 - - Google Patents

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Publication number
JP2004006332A5
JP2004006332A5 JP2003120581A JP2003120581A JP2004006332A5 JP 2004006332 A5 JP2004006332 A5 JP 2004006332A5 JP 2003120581 A JP2003120581 A JP 2003120581A JP 2003120581 A JP2003120581 A JP 2003120581A JP 2004006332 A5 JP2004006332 A5 JP 2004006332A5
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JP
Japan
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Application number
JP2003120581A
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Japanese (ja)
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JP2004006332A (ja
JP4683825B2 (ja
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Priority to JP2003120581A priority Critical patent/JP4683825B2/ja
Priority claimed from JP2003120581A external-priority patent/JP4683825B2/ja
Publication of JP2004006332A publication Critical patent/JP2004006332A/ja
Publication of JP2004006332A5 publication Critical patent/JP2004006332A5/ja
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Publication of JP4683825B2 publication Critical patent/JP4683825B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003120581A 2002-04-24 2003-04-24 半導体装置およびその作製方法 Expired - Fee Related JP4683825B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003120581A JP4683825B2 (ja) 2002-04-24 2003-04-24 半導体装置およびその作製方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002123188 2002-04-24
JP2003120581A JP4683825B2 (ja) 2002-04-24 2003-04-24 半導体装置およびその作製方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010278874A Division JP5106622B2 (ja) 2002-04-24 2010-12-15 発光装置及び光源装置

Publications (3)

Publication Number Publication Date
JP2004006332A JP2004006332A (ja) 2004-01-08
JP2004006332A5 true JP2004006332A5 (uk) 2006-06-08
JP4683825B2 JP4683825B2 (ja) 2011-05-18

Family

ID=30447399

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003120581A Expired - Fee Related JP4683825B2 (ja) 2002-04-24 2003-04-24 半導体装置およびその作製方法

Country Status (1)

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JP (1) JP4683825B2 (uk)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004002587B4 (de) * 2004-01-16 2006-06-01 Novaled Gmbh Bildelement für eine Aktiv-Matrix-Anzeige
JP4884675B2 (ja) * 2004-01-26 2012-02-29 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP4489472B2 (ja) * 2004-03-19 2010-06-23 株式会社 日立ディスプレイズ 有機エレクトロルミネッセンス表示装置
KR100606817B1 (ko) 2004-04-27 2006-08-01 엘지전자 주식회사 유기 el 소자의 제조방법
TWI467702B (zh) * 2005-03-28 2015-01-01 Semiconductor Energy Lab 記憶裝置和其製造方法
JP2006294261A (ja) * 2005-04-05 2006-10-26 Fuji Electric Holdings Co Ltd 有機el発光素子およびその製造方法
JP4916859B2 (ja) * 2005-12-20 2012-04-18 株式会社半導体エネルギー研究所 半導体装置、表示装置、電子機器、及び半導体装置の製造方法
US8513678B2 (en) 2007-05-18 2013-08-20 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device
US7977678B2 (en) * 2007-12-21 2011-07-12 Semiconductor Energy Laboratory Co., Ltd. Semiconductor display device
JP4561935B2 (ja) * 2010-02-01 2010-10-13 日本電気株式会社 有機el表示装置の製造方法
US8569754B2 (en) * 2010-11-05 2013-10-29 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
JP5969216B2 (ja) * 2011-02-11 2016-08-17 株式会社半導体エネルギー研究所 発光素子、表示装置、照明装置、及びこれらの作製方法
JP6119605B2 (ja) * 2011-08-22 2017-04-26 コニカミノルタ株式会社 有機エレクトロルミネッセンス素子及び照明装置
US9234276B2 (en) 2013-05-31 2016-01-12 Novellus Systems, Inc. Method to obtain SiC class of films of desired composition and film properties
US10325773B2 (en) 2012-06-12 2019-06-18 Novellus Systems, Inc. Conformal deposition of silicon carbide films
JP7100577B2 (ja) 2016-04-22 2022-07-13 ソニーグループ株式会社 表示装置および電子機器
US9837270B1 (en) * 2016-12-16 2017-12-05 Lam Research Corporation Densification of silicon carbide film using remote plasma treatment
KR20180079503A (ko) * 2016-12-30 2018-07-11 삼성디스플레이 주식회사 도전 패턴 및 이를 구비하는 표시 장치
WO2018179212A1 (ja) * 2017-03-30 2018-10-04 シャープ株式会社 有機el表示装置および有機el表示装置の製造方法
CN112840201A (zh) 2018-10-11 2021-05-25 株式会社半导体能源研究所 传感器装置及半导体装置
US11848199B2 (en) 2018-10-19 2023-12-19 Lam Research Corporation Doped or undoped silicon carbide deposition and remote hydrogen plasma exposure for gapfill
JPWO2021225139A1 (uk) * 2020-05-08 2021-11-11

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4666722B2 (ja) * 1999-06-28 2011-04-06 株式会社半導体エネルギー研究所 El表示装置及び電子装置
JP2001043980A (ja) * 1999-07-29 2001-02-16 Sony Corp 有機エレクトロルミネッセンス素子及び表示装置
JP2001148291A (ja) * 1999-11-19 2001-05-29 Sony Corp 表示装置及びその製造方法
US6869635B2 (en) * 2000-02-25 2005-03-22 Seiko Epson Corporation Organic electroluminescence device and manufacturing method therefor
JP2001351787A (ja) * 2000-06-07 2001-12-21 Sharp Corp 有機led素子とその製造方法および有機ledディスプレイ
JP2002083689A (ja) * 2000-06-29 2002-03-22 Semiconductor Energy Lab Co Ltd 発光装置
JP2003017273A (ja) * 2001-07-05 2003-01-17 Sony Corp 表示装置および表示装置の製造方法

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