JP2003520435A5 - - Google Patents
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- Publication number
- JP2003520435A5 JP2003520435A5 JP2001552442A JP2001552442A JP2003520435A5 JP 2003520435 A5 JP2003520435 A5 JP 2003520435A5 JP 2001552442 A JP2001552442 A JP 2001552442A JP 2001552442 A JP2001552442 A JP 2001552442A JP 2003520435 A5 JP2003520435 A5 JP 2003520435A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/479,852 US6871112B1 (en) | 2000-01-07 | 2000-01-07 | Method for requesting trace data reports from FDC semiconductor fabrication processes |
| US09/479,852 | 2000-01-07 | ||
| PCT/US2000/025736 WO2001052320A2 (en) | 2000-01-07 | 2000-09-20 | A method for requesting trace data reports from fault detection controlled semiconductor fabrication processes |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003520435A JP2003520435A (ja) | 2003-07-02 |
| JP2003520435A5 true JP2003520435A5 (enExample) | 2007-10-25 |
Family
ID=23905702
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001552442A Withdrawn JP2003520435A (ja) | 2000-01-07 | 2000-09-20 | Ｆｄｃ半導体製造プロセスからトレースデータ報告を要求する方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6871112B1 (enExample) |
| EP (1) | EP1245042A2 (enExample) |
| JP (1) | JP2003520435A (enExample) |
| KR (1) | KR100734531B1 (enExample) |
| WO (1) | WO2001052320A2 (enExample) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9785140B2 (en) * | 2000-02-01 | 2017-10-10 | Peer Intellectual Property Inc. | Multi-protocol multi-client equipment server |
| WO2001065404A1 (en) * | 2000-03-02 | 2001-09-07 | Mmc Webreporter Systems.Com, Inc. | System and method for creating a book of reports over a computer network |
| US7200671B1 (en) * | 2000-08-23 | 2007-04-03 | Mks Instruments, Inc. | Method and apparatus for monitoring host to tool communications |
| JP3957475B2 (ja) * | 2001-05-18 | 2007-08-15 | 東京エレクトロン株式会社 | 基板処理装置 |
| US8180587B2 (en) | 2002-03-08 | 2012-05-15 | Globalfoundries Inc. | System for brokering fault detection data |
| US8359494B2 (en) | 2002-12-18 | 2013-01-22 | Globalfoundries Inc. | Parallel fault detection |
| KR101009384B1 (ko) * | 2003-02-18 | 2011-01-19 | 도쿄엘렉트론가부시키가이샤 | 처리시스템의 자동 구성 방법 |
| US20050021037A1 (en) * | 2003-05-29 | 2005-01-27 | Mccombs Daniel L. | Image-guided navigated precision reamers |
| US7220990B2 (en) | 2003-08-25 | 2007-05-22 | Tau-Metrix, Inc. | Technique for evaluating a fabrication of a die and wafer |
| CN101556930B (zh) * | 2003-08-25 | 2013-04-10 | 陶-梅特里克斯公司 | 用于评估半导体元件与晶片制造的技术 |
| US7110918B2 (en) | 2003-11-05 | 2006-09-19 | Shoplogix Inc. | Self-contained system and method for remotely monitoring machines |
| WO2005045713A1 (en) * | 2003-11-05 | 2005-05-19 | Shoplogix, Inc. | Self-contained system and method for remotely monitoring machines |
| US8112400B2 (en) * | 2003-12-23 | 2012-02-07 | Texas Instruments Incorporated | Method for collecting data from semiconductor equipment |
| US7146237B2 (en) * | 2004-04-07 | 2006-12-05 | Mks Instruments, Inc. | Controller and method to mediate data collection from smart sensors for fab applications |
| US7680556B2 (en) | 2004-11-15 | 2010-03-16 | Tech Semiconductor Singapore Pte. Ltd. | Method for data collection during manufacturing processes |
| US7787477B2 (en) * | 2005-07-11 | 2010-08-31 | Mks Instruments, Inc. | Address-transparent device and method |
| KR100702843B1 (ko) * | 2005-08-12 | 2007-04-03 | 삼성전자주식회사 | 로트가변 배치처리가 가능한 반도체 제조설비 및 그로트가변 배치처리방법 |
| JP5177958B2 (ja) * | 2006-03-31 | 2013-04-10 | Ｈｏｙａ株式会社 | 処理データ管理システム、磁気ディスク製造装置用の処理システム、および、磁気ディスク製造装置のデータ管理方法 |
| US20070240122A1 (en) * | 2006-04-05 | 2007-10-11 | Chiahong Chen | Method, system and program storage device for providing request trace data in a user mode device interface |
| JP2008077286A (ja) * | 2006-09-20 | 2008-04-03 | Dainippon Screen Mfg Co Ltd | 産業プロセス評価装置、産業プロセス評価方法及び産業プロセス評価プログラム |
| US20080228863A1 (en) * | 2007-03-12 | 2008-09-18 | Timothy Mackey | Systems and Methods for End-User Experience Monitoring Using A Script |
| US8572160B2 (en) * | 2007-03-12 | 2013-10-29 | Citrix Systems, Inc. | Systems and methods for script injection |
| US9021140B2 (en) * | 2007-03-12 | 2015-04-28 | Citrix Systems, Inc. | Systems and methods for error detection |
| ES2368366T3 (es) | 2007-05-07 | 2011-11-16 | Vorne Industries, Inc. | Método y sistema para ampliar las capacidades de dispositivos integrados a través de clientes de red. |
| US20150148935A1 (en) * | 2012-07-04 | 2015-05-28 | Hitachi Kokusai Electric Inc. | Substrate processing system, substrate processing apparatus, data processing method, and storage medium |
| KR20220053603A (ko) * | 2019-08-26 | 2022-04-29 | 도쿄엘렉트론가부시키가이샤 | 정보 처리 장치 및 기판 처리 방법 |
| JP7575955B2 (ja) * | 2021-01-13 | 2024-10-30 | キヤノン株式会社 | 制御装置、システム、リソグラフィ装置、物品の製造方法、制御方法及びプログラム |
| KR20230162280A (ko) | 2022-05-20 | 2023-11-28 | (주)미소정보기술 | 전 과정을 모듈화하여 연결한 워크플로우가 구비된 fdc 시스템 및 그 처리방법 |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5413883A (en) | 1977-07-04 | 1979-02-01 | Hitachi Ltd | Abnormalness detector of automatic controller |
| JPS6248850A (ja) | 1985-08-28 | 1987-03-03 | Hitachi Eng Co Ltd | 公衆回線結合リモ−ト障害デ−タ収集装置 |
| US4861419A (en) * | 1987-08-04 | 1989-08-29 | Texas Instruments Incorporated | Apparatus and method for production process diagnosis using dynamic time warping |
| JPH0322064A (ja) | 1989-06-19 | 1991-01-30 | Nec Corp | 計算機通信システム |
| US5121335A (en) * | 1990-02-09 | 1992-06-09 | Hughes Aircraft Company | Method and apparatus for verifying microcircuit fabrication procedure |
| DE4113556C3 (de) * | 1990-04-26 | 2000-02-24 | Mazda Motor | Produktionseinrichtung zum Steuern von Produktionsvorgängen und Produktionssteuerverfahren für Produktionsvorgänge |
| US5196997A (en) * | 1991-01-22 | 1993-03-23 | International Business Machines Corporation | Method and apparatus for quality measure driven process control |
| JPH0793233A (ja) | 1993-09-20 | 1995-04-07 | Fujitsu Ltd | ファームウェア・トレースデータ取得方式 |
| US5625816A (en) | 1994-04-05 | 1997-04-29 | Advanced Micro Devices, Inc. | Method and system for generating product performance history |
| US5576629A (en) * | 1994-10-24 | 1996-11-19 | Fourth State Technology, Inc. | Plasma monitoring and control method and system |
| US5751581A (en) | 1995-11-13 | 1998-05-12 | Advanced Micro Devices | Material movement server |
| KR100207468B1 (ko) | 1996-03-07 | 1999-07-15 | 윤종용 | 웨이퍼의 결함분석 시스템 |
| JP3699776B2 (ja) * | 1996-04-02 | 2005-09-28 | 株式会社日立製作所 | 電子部品の製造方法 |
| TWI249760B (en) * | 1996-07-31 | 2006-02-21 | Canon Kk | Remote maintenance system |
| US5859964A (en) * | 1996-10-25 | 1999-01-12 | Advanced Micro Devices, Inc. | System and method for performing real time data acquisition, process modeling and fault detection of wafer fabrication processes |
| JPH11119992A (ja) | 1997-10-09 | 1999-04-30 | Nec Eng Ltd | ファームウェアのトレース制御装置 |
| EP0932195A1 (en) | 1997-12-30 | 1999-07-28 | International Business Machines Corporation | Method and system for semiconductor wafer fabrication process real-time in-situ supervision |
| JP4603131B2 (ja) * | 1999-06-28 | 2010-12-22 | 株式会社ハイニックスセミコンダクター | 半導体製造システムの工程レシピ再設定装置及び工程レシピ再設定方法 |
| US6577323B1 (en) * | 1999-07-01 | 2003-06-10 | Honeywell Inc. | Multivariable process trend display and methods regarding same |
| US6697691B1 (en) * | 2000-01-03 | 2004-02-24 | Advanced Micro Devices, Inc. | Method and apparatus for fault model analysis in manufacturing tools |
| US6465263B1 (en) * | 2000-01-04 | 2002-10-15 | Advanced Micro Devices, Inc. | Method and apparatus for implementing corrected species by monitoring specific state parameters |
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2000
- 2000-01-07 US US09/479,852 patent/US6871112B1/en not_active Expired - Fee Related
- 2000-09-20 EP EP00965181A patent/EP1245042A2/en not_active Withdrawn
- 2000-09-20 WO PCT/US2000/025736 patent/WO2001052320A2/en not_active Ceased
- 2000-09-20 JP JP2001552442A patent/JP2003520435A/ja not_active Withdrawn
- 2000-09-20 KR KR1020027008330A patent/KR100734531B1/ko not_active Expired - Fee Related