JP2003520418A5 - - Google Patents

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Publication number
JP2003520418A5
JP2003520418A5 JP2001525754A JP2001525754A JP2003520418A5 JP 2003520418 A5 JP2003520418 A5 JP 2003520418A5 JP 2001525754 A JP2001525754 A JP 2001525754A JP 2001525754 A JP2001525754 A JP 2001525754A JP 2003520418 A5 JP2003520418 A5 JP 2003520418A5
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JP
Japan
Prior art keywords
substrate
plasma processing
processing system
liner
internal space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001525754A
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English (en)
Japanese (ja)
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JP2003520418A (ja
JP4837860B2 (ja
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Priority claimed from US09/401,308 external-priority patent/US6227140B1/en
Application filed filed Critical
Publication of JP2003520418A publication Critical patent/JP2003520418A/ja
Publication of JP2003520418A5 publication Critical patent/JP2003520418A5/ja
Application granted granted Critical
Publication of JP4837860B2 publication Critical patent/JP4837860B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001525754A 1999-09-23 2000-09-11 プラズマ処理システム及び基板の処理方法 Expired - Fee Related JP4837860B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/401,308 1999-09-23
US09/401,308 US6227140B1 (en) 1999-09-23 1999-09-23 Semiconductor processing equipment having radiant heated ceramic liner
PCT/US2000/024866 WO2001022478A1 (en) 1999-09-23 2000-09-11 Semiconductor processing equipment having radiant heated ceramic liner

Publications (3)

Publication Number Publication Date
JP2003520418A JP2003520418A (ja) 2003-07-02
JP2003520418A5 true JP2003520418A5 (https=) 2007-11-08
JP4837860B2 JP4837860B2 (ja) 2011-12-14

Family

ID=23587202

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001525754A Expired - Fee Related JP4837860B2 (ja) 1999-09-23 2000-09-11 プラズマ処理システム及び基板の処理方法

Country Status (8)

Country Link
US (1) US6227140B1 (https=)
EP (1) EP1214732B1 (https=)
JP (1) JP4837860B2 (https=)
KR (1) KR100779885B1 (https=)
AU (1) AU7368300A (https=)
DE (1) DE60035056T2 (https=)
TW (1) TW492101B (https=)
WO (1) WO2001022478A1 (https=)

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