JP2003510757A - 原子プローブ - Google Patents

原子プローブ

Info

Publication number
JP2003510757A
JP2003510757A JP2000512237A JP2000512237A JP2003510757A JP 2003510757 A JP2003510757 A JP 2003510757A JP 2000512237 A JP2000512237 A JP 2000512237A JP 2000512237 A JP2000512237 A JP 2000512237A JP 2003510757 A JP2003510757 A JP 2003510757A
Authority
JP
Japan
Prior art keywords
plate
sample
detector
counter electrode
atomic probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000512237A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003510757A5 (enExample
Inventor
セレゾ、アルフレッド
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oxford University Innovation Ltd
Original Assignee
Oxford University Innovation Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oxford University Innovation Ltd filed Critical Oxford University Innovation Ltd
Publication of JP2003510757A publication Critical patent/JP2003510757A/ja
Publication of JP2003510757A5 publication Critical patent/JP2003510757A5/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285—Emission microscopes, e.g. field-emission microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP2000512237A 1997-09-16 1998-09-04 原子プローブ Pending JP2003510757A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB9719697.6A GB9719697D0 (en) 1997-09-16 1997-09-16 Atom probe
GB9719697.6 1997-09-16
PCT/GB1998/002678 WO1999014793A1 (en) 1997-09-16 1998-09-04 Atom probe

Publications (2)

Publication Number Publication Date
JP2003510757A true JP2003510757A (ja) 2003-03-18
JP2003510757A5 JP2003510757A5 (enExample) 2008-10-30

Family

ID=10819161

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000512237A Pending JP2003510757A (ja) 1997-09-16 1998-09-04 原子プローブ

Country Status (6)

Country Link
US (1) US6580069B1 (enExample)
EP (1) EP1016123B1 (enExample)
JP (1) JP2003510757A (enExample)
DE (1) DE69822315T2 (enExample)
GB (1) GB9719697D0 (enExample)
WO (1) WO1999014793A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007531218A (ja) * 2004-03-24 2007-11-01 イマゴ サイエンティフィック インストルメンツ コーポレーション レーザ原子プローブ

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4111501B2 (ja) 2001-03-26 2008-07-02 学校法人金沢工業大学 走査型アトムプローブおよび走査型アトムプローブを用いた分析方法
JP3902925B2 (ja) * 2001-07-31 2007-04-11 エスアイアイ・ナノテクノロジー株式会社 走査型アトムプローブ
CN1311221C (zh) * 2002-07-24 2007-04-18 Jpk仪器股份公司 扫描强力显微镜装置及其用途
US6762415B1 (en) 2003-04-18 2004-07-13 Imago Scientific Instruments Corporation Vacuum chamber with recessed viewing tube and imaging device situated therein
US7157702B2 (en) * 2003-06-06 2007-01-02 Imago Scientific Instruments Corporation High resolution atom probe
US6956210B2 (en) 2003-10-15 2005-10-18 Micron Tchnology, Inc. Methods for preparing samples for atom probe analysis
KR20070038089A (ko) * 2004-06-03 2007-04-09 이메이고 사이언티픽 인스트루먼츠 코포레이션 레이저 원자 탐침 방법
US7772552B2 (en) * 2004-06-21 2010-08-10 Cameca Instruments, Inc. Methods and devices for atom probe mass resolution enhancement
CN101088137B (zh) * 2004-12-21 2010-05-12 埃美格科学仪器公司 激光原子探针
GB0512411D0 (en) 2005-06-17 2005-07-27 Polaron Plc Atom probe
US20080296489A1 (en) * 2005-07-28 2008-12-04 Olson Jesse D Atom Probe Evaporation Processes
US20080083882A1 (en) * 2006-10-06 2008-04-10 Jian Bai Laser desorption assisted field ionization device and method
US10615001B2 (en) 2015-04-21 2020-04-07 Cameca Instruments, Inc. Wide field-of-view atom probe

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6079658A (ja) * 1983-10-07 1985-05-07 Hitachi Ltd 大気圧イオン化質量分析計
EP0231247B1 (en) * 1985-07-23 1990-10-10 SMITH, George David William Improvements in atom probes
JP3266995B2 (ja) 1993-07-30 2002-03-18 株式会社日立製作所 導電性部材の観察・計測方法及びその装置
US5440124A (en) * 1994-07-08 1995-08-08 Wisconsin Alumni Research Foundation High mass resolution local-electrode atom probe
US5614711A (en) * 1995-05-04 1997-03-25 Indiana University Foundation Time-of-flight mass spectrometer
US5625184A (en) * 1995-05-19 1997-04-29 Perseptive Biosystems, Inc. Time-of-flight mass spectrometry analysis of biomolecules
DE19547949C2 (de) * 1995-09-19 2000-04-06 Bruker Daltonik Gmbh Flugzeitmassenspektrometer
US5744797A (en) * 1995-11-22 1998-04-28 Bruker Analytical Instruments, Inc. Split-field interface
US5864137A (en) * 1996-10-01 1999-01-26 Genetrace Systems, Inc. Mass spectrometer
JP2939540B2 (ja) * 1998-01-30 1999-08-25 科学技術庁金属材料技術研究所長 パルス励起原子線とパルス紫外光の生成方法およびその装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007531218A (ja) * 2004-03-24 2007-11-01 イマゴ サイエンティフィック インストルメンツ コーポレーション レーザ原子プローブ

Also Published As

Publication number Publication date
US6580069B1 (en) 2003-06-17
EP1016123A1 (en) 2000-07-05
DE69822315D1 (de) 2004-04-15
GB9719697D0 (en) 1997-11-19
WO1999014793A1 (en) 1999-03-25
EP1016123B1 (en) 2004-03-10
DE69822315T2 (de) 2004-12-30

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