JP2003509835A - 可干渉光源用スペックル低減システム、スペックルコントラストの低減方法、及び照明装置のスペックル低減システム - Google Patents

可干渉光源用スペックル低減システム、スペックルコントラストの低減方法、及び照明装置のスペックル低減システム

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Publication number
JP2003509835A
JP2003509835A JP2000595188A JP2000595188A JP2003509835A JP 2003509835 A JP2003509835 A JP 2003509835A JP 2000595188 A JP2000595188 A JP 2000595188A JP 2000595188 A JP2000595188 A JP 2000595188A JP 2003509835 A JP2003509835 A JP 2003509835A
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JP
Japan
Prior art keywords
pulselets
speckle
reduction system
coherent light
delay line
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
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JP2000595188A
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English (en)
Japanese (ja)
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JP2003509835A5 (enExample
Inventor
ミカロスキ，ポール，エフ．
ストーン，ブライアン，ディー．
Original Assignee
トロペル コーポレーション
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Application filed by トロペル コーポレーション filed Critical トロペル コーポレーション
Publication of JP2003509835A publication Critical patent/JP2003509835A/ja
Publication of JP2003509835A5 publication Critical patent/JP2003509835A5/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/144—Beam splitting or combining systems operating by reflection only using partially transparent surfaces without spectral selectivity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/145—Beam splitting or combining systems operating by reflection only having sequential partially reflecting surfaces
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/147—Beam splitting or combining systems operating by reflection only using averaging effects by spatially variable reflectivity on a microscopic level, e.g. polka dots, chequered or discontinuous patterns, or rapidly moving surfaces
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/48—Laser speckle optics

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Lasers (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2000595188A 1999-01-20 2000-01-19 可干渉光源用スペックル低減システム、スペックルコントラストの低減方法、及び照明装置のスペックル低減システム Pending JP2003509835A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11648299P 1999-01-20 1999-01-20
US60/116,482 1999-01-20
PCT/US2000/001261 WO2000043822A1 (en) 1999-01-20 2000-01-19 Laser illumination with speckle reduction

Publications (2)

Publication Number Publication Date
JP2003509835A true JP2003509835A (ja) 2003-03-11
JP2003509835A5 JP2003509835A5 (enExample) 2006-02-09

Family

ID=22367435

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000595188A Pending JP2003509835A (ja) 1999-01-20 2000-01-19 可干渉光源用スペックル低減システム、スペックルコントラストの低減方法、及び照明装置のスペックル低減システム

Country Status (5)

Country Link
US (1) US6191887B1 (enExample)
JP (1) JP2003509835A (enExample)
DE (1) DE10083900T1 (enExample)
GB (1) GB2362721B (enExample)
WO (1) WO2000043822A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006186046A (ja) * 2004-12-27 2006-07-13 Komatsu Ltd 光学パルスストレッチ装置およびこれを用いたパルスレーザ装置
CN104919578A (zh) * 2012-12-05 2015-09-16 科磊股份有限公司 使用激光脉冲倍增器的半导体检验及计量系统
JP2021534460A (ja) * 2018-08-22 2021-12-09 エーエスエムエル ネザーランズ ビー．ブイ． パルスストレッチャーおよび方法

Families Citing this family (110)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6631842B1 (en) 2000-06-07 2003-10-14 Metrologic Instruments, Inc. Method of and system for producing images of objects using planar laser illumination beams and image detection arrays
US6736321B2 (en) 1995-12-18 2004-05-18 Metrologic Instruments, Inc. Planar laser illumination and imaging (PLIIM) system employing wavefront control methods for reducing the power of speckle-pattern noise digital images acquired by said system
US6629641B2 (en) * 2000-06-07 2003-10-07 Metrologic Instruments, Inc. Method of and system for producing images of objects using planar laser illumination beams and image detection arrays
US7028899B2 (en) * 1999-06-07 2006-04-18 Metrologic Instruments, Inc. Method of speckle-noise pattern reduction and apparatus therefore based on reducing the temporal-coherence of the planar laser illumination beam before it illuminates the target object by applying temporal phase modulation techniques during the transmission of the plib towards the target
US7673803B2 (en) * 1998-03-24 2010-03-09 Metrologic Instruments, Inc. Planar laser illumination and imaging (PLIIM) based engine
US6959870B2 (en) * 1999-06-07 2005-11-01 Metrologic Instruments, Inc. Planar LED-based illumination array (PLIA) chips
US7136159B2 (en) * 2000-09-12 2006-11-14 Kla-Tencor Technologies Corporation Excimer laser inspection system
US8042740B2 (en) * 2000-11-24 2011-10-25 Metrologic Instruments, Inc. Method of reading bar code symbols on objects at a point-of-sale station by passing said objects through a complex of stationary coplanar illumination and imaging planes projected into a 3D imaging volume
US7140543B2 (en) * 2000-11-24 2006-11-28 Metrologic Instruments, Inc. Planar light illumination and imaging device with modulated coherent illumination that reduces speckle noise induced by coherent illumination
US7077319B2 (en) * 2000-11-24 2006-07-18 Metrologic Instruments, Inc. Imaging engine employing planar light illumination and linear imaging
US7954719B2 (en) * 2000-11-24 2011-06-07 Metrologic Instruments, Inc. Tunnel-type digital imaging-based self-checkout system for use in retail point-of-sale environments
US6693930B1 (en) * 2000-12-12 2004-02-17 Kla-Tencor Technologies Corporation Peak power and speckle contrast reduction for a single laser pulse
DE10148170A1 (de) * 2001-09-28 2003-04-17 Zeiss Carl Jena Gmbh Verfahren und Vorrichtung zur Verminderung von Speckle in einem optischen System
GB0124218D0 (en) * 2001-10-09 2001-11-28 Denselight Semiconductors Pte Folded light path for planar optical devices
US7513428B2 (en) * 2001-11-21 2009-04-07 Metrologic Instruments, Inc. Planar laser illumination and imaging device employing laser current modulation to generate spectral components and reduce temporal coherence of laser beam, so as to achieve a reduction in speckle-pattern noise during time-averaged detection of images of objects illuminated thereby during imaging operations
WO2003098316A2 (de) * 2002-05-22 2003-11-27 Carl Zeiss Sms Gmbh Optische anordnung zur homogenisierung eines zumindest teilweise kohärenten lichtfeldes
DE10245231A1 (de) * 2002-09-27 2004-04-01 Carl Zeiss Microelectronic Systems Gmbh Anordnung zur Kohärenzminderung
DE10245102A1 (de) * 2002-09-27 2004-04-08 Carl Zeiss Jena Gmbh Beleuchtungsvorrichtung
US7646533B2 (en) * 2003-02-21 2010-01-12 Kla-Tencor Technologies Corporation Small ultra-high NA catadioptric objective
US7639419B2 (en) * 2003-02-21 2009-12-29 Kla-Tencor Technologies, Inc. Inspection system using small catadioptric objective
US7672043B2 (en) * 2003-02-21 2010-03-02 Kla-Tencor Technologies Corporation Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth
US7869121B2 (en) 2003-02-21 2011-01-11 Kla-Tencor Technologies Corporation Small ultra-high NA catadioptric objective using aspheric surfaces
US7884998B2 (en) 2003-02-21 2011-02-08 Kla - Tencor Corporation Catadioptric microscope objective employing immersion liquid for use in broad band microscopy
US20050008290A1 (en) * 2003-05-15 2005-01-13 Nicolae Miron Static method for laser speckle reduction and apparatus for reducing speckle
US7184204B2 (en) * 2003-07-01 2007-02-27 Lambda Physik Ag Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime
US7841533B2 (en) * 2003-11-13 2010-11-30 Metrologic Instruments, Inc. Method of capturing and processing digital images of an object within the field of view (FOV) of a hand-supportable digitial image capture and processing system
US7035012B2 (en) * 2004-03-01 2006-04-25 Coherent, Inc. Optical pulse duration extender
EP1605311A3 (de) * 2004-06-10 2007-03-14 Carl Zeiss SMT AG Beleuchtungseinrichtung mit einem Lichtmischer zur Homogenisierung von Strahlungsverteilungen
US20060026431A1 (en) * 2004-07-30 2006-02-02 Hitachi Global Storage Technologies B.V. Cryptographic letterheads
WO2006058754A2 (en) * 2004-12-01 2006-06-08 Carl Zeiss Smt Ag Beam delivery system and projection exposure system
US7413311B2 (en) * 2005-09-29 2008-08-19 Coherent, Inc. Speckle reduction in laser illuminated projection displays having a one-dimensional spatial light modulator
EP1952493A4 (en) * 2005-11-01 2017-05-10 Cymer, LLC Laser system
US20090296758A1 (en) * 2005-11-01 2009-12-03 Cymer, Inc. Laser system
US7746913B2 (en) 2005-11-01 2010-06-29 Cymer, Inc. Laser system
US7999915B2 (en) * 2005-11-01 2011-08-16 Cymer, Inc. Laser system
US7920616B2 (en) * 2005-11-01 2011-04-05 Cymer, Inc. Laser system
US7715459B2 (en) * 2005-11-01 2010-05-11 Cymer, Inc. Laser system
US7630424B2 (en) * 2005-11-01 2009-12-08 Cymer, Inc. Laser system
US7643529B2 (en) 2005-11-01 2010-01-05 Cymer, Inc. Laser system
US7778302B2 (en) * 2005-11-01 2010-08-17 Cymer, Inc. Laser system
US7885309B2 (en) 2005-11-01 2011-02-08 Cymer, Inc. Laser system
US20090296755A1 (en) * 2005-11-01 2009-12-03 Cymer, Inc. Laser system
GB0522968D0 (en) 2005-11-11 2005-12-21 Popovich Milan M Holographic illumination device
US20070221640A1 (en) 2006-03-08 2007-09-27 Dean Jennings Apparatus for thermal processing structures formed on a substrate
GB0718706D0 (en) 2007-09-25 2007-11-07 Creative Physics Ltd Method and apparatus for reducing laser speckle
US7457330B2 (en) 2006-06-15 2008-11-25 Pavilion Integration Corporation Low speckle noise monolithic microchip RGB lasers
US20080025354A1 (en) * 2006-07-31 2008-01-31 Dean Jennings Ultra-Fast Beam Dithering with Surface Acoustic Wave Modulator
US7548364B2 (en) 2006-07-31 2009-06-16 Applied Materials, Inc. Ultra-fast beam dithering with surface acoustic wave modulator
US8665536B2 (en) * 2007-06-19 2014-03-04 Kla-Tencor Corporation External beam delivery system for laser dark-field illumination in a catadioptric optical system
US8148663B2 (en) 2007-07-31 2012-04-03 Applied Materials, Inc. Apparatus and method of improving beam shaping and beam homogenization
US20090034072A1 (en) * 2007-07-31 2009-02-05 Dean Jennings Method and apparatus for decorrelation of spatially and temporally coherent light
US20090034071A1 (en) * 2007-07-31 2009-02-05 Dean Jennings Method for partitioning and incoherently summing a coherent beam
US7653097B2 (en) * 2007-12-31 2010-01-26 Corning Incorporated Systems and methods for polarization modulation of an optical signal
US20090213350A1 (en) * 2008-02-22 2009-08-27 Nikon Corporation Coherence-reduction devices and methods for pulsed lasers
US11726332B2 (en) 2009-04-27 2023-08-15 Digilens Inc. Diffractive projection apparatus
US9335604B2 (en) 2013-12-11 2016-05-10 Milan Momcilo Popovich Holographic waveguide display
US11204540B2 (en) 2009-10-09 2021-12-21 Digilens Inc. Diffractive waveguide providing a retinal image
JP5511050B2 (ja) * 2009-10-27 2014-06-04 オリンパス株式会社 補正画像データ生成方法及び表示装置
WO2012136970A1 (en) 2011-04-07 2012-10-11 Milan Momcilo Popovich Laser despeckler based on angular diversity
US9793673B2 (en) 2011-06-13 2017-10-17 Kla-Tencor Corporation Semiconductor inspection and metrology system using laser pulse multiplier
US10670876B2 (en) 2011-08-24 2020-06-02 Digilens Inc. Waveguide laser illuminator incorporating a despeckler
EP2995986B1 (en) 2011-08-24 2017-04-12 Rockwell Collins, Inc. Data display
WO2016020630A2 (en) 2014-08-08 2016-02-11 Milan Momcilo Popovich Waveguide laser illuminator incorporating a despeckler
US8755122B2 (en) 2011-12-12 2014-06-17 Corning Incorporated Laser pulse stretching unit and method for using same
US8724203B2 (en) 2011-12-12 2014-05-13 Corning Incorporated Variable pulse stretching length by variable beamsplitter reflectivity
US20150010265A1 (en) 2012-01-06 2015-01-08 Milan, Momcilo POPOVICH Contact image sensor using switchable bragg gratings
EP2842003B1 (en) 2012-04-25 2019-02-27 Rockwell Collins, Inc. Holographic wide angle display
US9456744B2 (en) 2012-05-11 2016-10-04 Digilens, Inc. Apparatus for eye tracking
US9933684B2 (en) 2012-11-16 2018-04-03 Rockwell Collins, Inc. Transparent waveguide display providing upper and lower fields of view having a specific light output aperture configuration
US10209517B2 (en) 2013-05-20 2019-02-19 Digilens, Inc. Holographic waveguide eye tracker
US9727772B2 (en) 2013-07-31 2017-08-08 Digilens, Inc. Method and apparatus for contact image sensing
US9323071B2 (en) 2013-09-17 2016-04-26 Texas Instruments Incorporated Laser speckle reduction for uniform illumination
US9525265B2 (en) 2014-06-20 2016-12-20 Kla-Tencor Corporation Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms
WO2016020632A1 (en) 2014-08-08 2016-02-11 Milan Momcilo Popovich Method for holographic mastering and replication
US10241330B2 (en) 2014-09-19 2019-03-26 Digilens, Inc. Method and apparatus for generating input images for holographic waveguide displays
US10423222B2 (en) 2014-09-26 2019-09-24 Digilens Inc. Holographic waveguide optical tracker
US20180275402A1 (en) 2015-01-12 2018-09-27 Digilens, Inc. Holographic waveguide light field displays
WO2016113534A1 (en) 2015-01-12 2016-07-21 Milan Momcilo Popovich Environmentally isolated waveguide display
JP6867947B2 (ja) 2015-01-20 2021-05-12 ディジレンズ インコーポレイテッド ホログラフィック導波路ライダー
US9632226B2 (en) 2015-02-12 2017-04-25 Digilens Inc. Waveguide grating device
WO2016146963A1 (en) 2015-03-16 2016-09-22 Popovich, Milan, Momcilo Waveguide device incorporating a light pipe
US10591756B2 (en) 2015-03-31 2020-03-17 Digilens Inc. Method and apparatus for contact image sensing
EP3359999A1 (en) 2015-10-05 2018-08-15 Popovich, Milan Momcilo Waveguide display
CN109073889B (zh) 2016-02-04 2021-04-27 迪吉伦斯公司 全息波导光学跟踪器
EP3433659B1 (en) 2016-03-24 2024-10-23 DigiLens, Inc. Method and apparatus for providing a polarization selective holographic waveguide device
US10890707B2 (en) 2016-04-11 2021-01-12 Digilens Inc. Holographic waveguide apparatus for structured light projection
US10481408B2 (en) * 2016-09-30 2019-11-19 Christie Digital Systems (Usa), Inc. Apparatus for reducing coherence of a laser beam
US11513350B2 (en) 2016-12-02 2022-11-29 Digilens Inc. Waveguide device with uniform output illumination
WO2018129398A1 (en) 2017-01-05 2018-07-12 Digilens, Inc. Wearable heads up displays
JP7399084B2 (ja) 2017-10-16 2023-12-15 ディジレンズ インコーポレイテッド ピクセル化されたディスプレイの画像分解能を倍増させるためのシステムおよび方法
WO2019136476A1 (en) 2018-01-08 2019-07-11 Digilens, Inc. Waveguide architectures and related methods of manufacturing
KR102819207B1 (ko) 2018-01-08 2025-06-11 디지렌즈 인코포레이티드. 도파관 셀을 제조하기 위한 시스템 및 방법
KR102768598B1 (ko) 2018-01-08 2025-02-13 디지렌즈 인코포레이티드. 도파관 셀 내의 홀로그래픽 격자의 높은 처리능력의 레코딩을 위한 시스템 및 방법
WO2019136473A1 (en) 2018-01-08 2019-07-11 Digilens, Inc. Methods for fabricating optical waveguides
JP7487109B2 (ja) 2018-03-16 2024-05-20 ディジレンズ インコーポレイテッド 複屈折制御を組み込むホログラフィック導波管およびその加工のための方法
WO2020023779A1 (en) 2018-07-25 2020-01-30 Digilens Inc. Systems and methods for fabricating a multilayer optical structure
TWI704429B (zh) * 2018-08-17 2020-09-11 美商希瑪有限責任公司 減少在一脈衝光束中之光斑
WO2020149956A1 (en) 2019-01-14 2020-07-23 Digilens Inc. Holographic waveguide display with light control layer
WO2020163524A1 (en) 2019-02-05 2020-08-13 Digilens Inc. Methods for compensating for optical surface nonuniformity
EP3924759B1 (en) 2019-02-15 2025-07-30 Digilens Inc. Methods and apparatuses for providing a holographic waveguide display using integrated gratings
US20220283377A1 (en) 2019-02-15 2022-09-08 Digilens Inc. Wide Angle Waveguide Display
US20200292745A1 (en) 2019-03-12 2020-09-17 Digilens Inc. Holographic Waveguide Backlight and Related Methods of Manufacturing
CN114207492A (zh) 2019-06-07 2022-03-18 迪吉伦斯公司 带透射光栅和反射光栅的波导及其生产方法
CN110515216B (zh) * 2019-07-19 2021-03-26 四川大学 一种光强和偏振快速旋转的光场调控方法
CN114341729A (zh) 2019-07-29 2022-04-12 迪吉伦斯公司 用于使像素化显示器的图像分辨率和视场倍增的方法和设备
KR102775783B1 (ko) 2019-08-29 2025-02-28 디지렌즈 인코포레이티드. 진공 격자 및 이의 제조 방법
WO2021257001A1 (en) 2020-06-15 2021-12-23 Univerza V Ljubljani A device and a method for speckle-free laser illumination
WO2022140763A1 (en) 2020-12-21 2022-06-30 Digilens Inc. Eye glow suppression in waveguide based displays
WO2022150841A1 (en) 2021-01-07 2022-07-14 Digilens Inc. Grating structures for color waveguides
JP2024508926A (ja) 2021-03-05 2024-02-28 ディジレンズ インコーポレイテッド 真空周期的構造体および製造の方法

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3633999A (en) * 1970-07-27 1972-01-11 Richard G Buckles Removing speckle patterns from objects illuminated with a laser
DE2315658C3 (de) 1973-03-29 1980-11-20 Philips Patentverwaltung Gmbh, 2000 Hamburg Verfahren und Vorrichtung zur Verminderung oder Beseitigung der bei Laserstrahlprojektionen auftretenden Granulation
US4035068A (en) 1975-06-25 1977-07-12 Xerox Corporation Speckle minimization in projection displays by reducing spatial coherence of the image light
US4155630A (en) 1977-11-17 1979-05-22 University Of Delaware Speckle elimination by random spatial phase modulation
US4511220A (en) 1982-12-23 1985-04-16 The United States Of America As Represented By The Secretary Of The Air Force Laser target speckle eliminator
US4521075A (en) 1983-03-07 1985-06-04 Obenschain Stephen P Controllable spatial incoherence echelon for laser
US4619508A (en) 1984-04-28 1986-10-28 Nippon Kogaku K. K. Illumination optical arrangement
GB8410973D0 (en) 1984-04-30 1984-06-06 Crosfield Electronics Ltd Modifying coherent radiation
US4744615A (en) 1986-01-29 1988-05-17 International Business Machines Corporation Laser beam homogenizer
JPH0786647B2 (ja) 1986-12-24 1995-09-20 株式会社ニコン 照明装置
US5307207A (en) 1988-03-16 1994-04-26 Nikon Corporation Illuminating optical apparatus
US5274494A (en) 1991-04-25 1993-12-28 Hughes Aircraft Company Speckle suppression illuminator
US5224200A (en) 1991-11-27 1993-06-29 The United States Of America As Represented By The Department Of Energy Coherence delay augmented laser beam homogenizer
US5233460A (en) 1992-01-31 1993-08-03 Regents Of The University Of California Method and means for reducing speckle in coherent laser pulses
US5313479A (en) 1992-07-29 1994-05-17 Texas Instruments Incorporated Speckle-free display system using coherent light
US5434662A (en) 1993-12-23 1995-07-18 Hughes Aircraft Company Speckle resistant method and apparatus with chirped laser beam
US5453814A (en) 1994-04-13 1995-09-26 Nikon Precision Inc. Illumination source and method for microlithography
JPH0837139A (ja) 1994-07-21 1996-02-06 Sony Corp 露光照明装置
US5621529A (en) 1995-04-05 1997-04-15 Intelligent Automation Systems, Inc. Apparatus and method for projecting laser pattern with reduced speckle noise
US5760955A (en) 1995-04-06 1998-06-02 Philips Electronics North America Corporation Rear projection screen with reduced speckle
US5729374A (en) 1995-07-03 1998-03-17 The Regents Of The University Of California Speckle averaging system for laser raster-scan image projection
US5832006A (en) 1997-02-13 1998-11-03 Mcdonnell Douglas Corporation Phased array Raman laser amplifier and operating method therefor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006186046A (ja) * 2004-12-27 2006-07-13 Komatsu Ltd 光学パルスストレッチ装置およびこれを用いたパルスレーザ装置
CN104919578A (zh) * 2012-12-05 2015-09-16 科磊股份有限公司 使用激光脉冲倍增器的半导体检验及计量系统
JP2021534460A (ja) * 2018-08-22 2021-12-09 エーエスエムエル ネザーランズ ビー．ブイ． パルスストレッチャーおよび方法
JP7311586B2 (ja) 2018-08-22 2023-07-19 エーエスエムエル ネザーランズ ビー．ブイ． パルスストレッチャーおよび方法

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GB0117296D0 (en) 2001-09-05
WO2000043822A1 (en) 2000-07-27
US6191887B1 (en) 2001-02-20
DE10083900T1 (de) 2001-12-13
GB2362721A (en) 2001-11-28
GB2362721B (en) 2002-10-09

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