JP2003506631A - ターボ分子真空ポンプのためのステータリング - Google Patents

ターボ分子真空ポンプのためのステータリング

Info

Publication number
JP2003506631A
JP2003506631A JP2001515465A JP2001515465A JP2003506631A JP 2003506631 A JP2003506631 A JP 2003506631A JP 2001515465 A JP2001515465 A JP 2001515465A JP 2001515465 A JP2001515465 A JP 2001515465A JP 2003506631 A JP2003506631 A JP 2003506631A
Authority
JP
Japan
Prior art keywords
stator
ring
vacuum pump
stator ring
turbo molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001515465A
Other languages
English (en)
Japanese (ja)
Inventor
ボン ディートマー
ヘルツァー ライナー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of JP2003506631A publication Critical patent/JP2003506631A/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
JP2001515465A 1999-08-07 2000-07-06 ターボ分子真空ポンプのためのステータリング Pending JP2003506631A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19937393.0 1999-08-07
DE1999137393 DE19937393A1 (de) 1999-08-07 1999-08-07 Statorring für eine Turbomolekularvakuumpumpe
PCT/EP2000/006389 WO2001011242A1 (fr) 1999-08-07 2000-07-06 Anneau de stator pour pompe a vide turbomoleculaire

Publications (1)

Publication Number Publication Date
JP2003506631A true JP2003506631A (ja) 2003-02-18

Family

ID=7917612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001515465A Pending JP2003506631A (ja) 1999-08-07 2000-07-06 ターボ分子真空ポンプのためのステータリング

Country Status (5)

Country Link
EP (1) EP1200742A1 (fr)
JP (1) JP2003506631A (fr)
CA (1) CA2379547A1 (fr)
DE (1) DE19937393A1 (fr)
WO (1) WO2001011242A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009028099A1 (fr) * 2007-08-31 2009-03-05 Shimadzu Corporation Pompe turbomoléculaire
JP2011074903A (ja) * 2009-10-02 2011-04-14 Shimadzu Corp ターボ分子ポンプ

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10046766A1 (de) * 2000-09-21 2002-04-11 Leybold Vakuum Gmbh Compound-Reibungsvakuumpumpe
EP1249612B1 (fr) * 2001-03-15 2004-01-28 VARIAN S.p.A. Procédé de fabrication d'un étage statorique pour une turbine-pompe
EP1249613B1 (fr) 2001-03-15 2004-01-28 VARIAN S.p.A. Turbine-pompe avec un étage statorique intégré avec un anneau d'espacement
DE10357547B4 (de) * 2003-12-10 2020-04-23 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE102004023961A1 (de) * 2004-05-14 2005-12-01 Leybold Vacuum Gmbh Verfahren zur Herstellung einer Turbomolekularpumpen-Statorstufe
JP4676731B2 (ja) * 2004-09-10 2011-04-27 エドワーズ株式会社 ターボ分子ポンプ固定翼及び真空ポンプ
DE102006050565A1 (de) * 2006-10-26 2008-04-30 Pfeiffer Vacuum Gmbh Statorscheibe für eine Turbomolekularpumpe
US8709070B2 (en) 2011-05-10 2014-04-29 Abbott Cardiovascular Systems Inc. Bioabsorbable scaffold with particles providing delayed acceleration of degradation
DE102013213256A1 (de) * 2013-07-05 2015-01-08 Oerlikon Leybold Vacuum Gmbh Statorscheibe
GB2552793A (en) * 2016-08-08 2018-02-14 Edwards Ltd Vacuum pump
GB2557679A (en) * 2016-12-15 2018-06-27 Edwards Ltd Stator blade unit for a turbomolecular pump
FR3135306B1 (fr) * 2022-05-05 2024-05-10 Pfeiffer Vacuum Pompe à vide turbomoléculaire et procédé d’assemblage

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9013671U1 (de) * 1990-09-29 1992-01-30 Leybold AG, 6450 Hanau Stator für eine Turbomolekularvakuumpumpe
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009028099A1 (fr) * 2007-08-31 2009-03-05 Shimadzu Corporation Pompe turbomoléculaire
JP2011074903A (ja) * 2009-10-02 2011-04-14 Shimadzu Corp ターボ分子ポンプ

Also Published As

Publication number Publication date
EP1200742A1 (fr) 2002-05-02
CA2379547A1 (fr) 2001-02-15
DE19937393A1 (de) 2001-02-08
WO2001011242A1 (fr) 2001-02-15

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