CA2379547A1 - Anneau de stator pour pompe a vide turbomoleculaire - Google Patents

Anneau de stator pour pompe a vide turbomoleculaire Download PDF

Info

Publication number
CA2379547A1
CA2379547A1 CA002379547A CA2379547A CA2379547A1 CA 2379547 A1 CA2379547 A1 CA 2379547A1 CA 002379547 A CA002379547 A CA 002379547A CA 2379547 A CA2379547 A CA 2379547A CA 2379547 A1 CA2379547 A1 CA 2379547A1
Authority
CA
Canada
Prior art keywords
stator
ring
vacuum pump
blades
turbomolecular vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002379547A
Other languages
English (en)
Inventor
Dietmar Bonn
Rainer Holzer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2379547A1 publication Critical patent/CA2379547A1/fr
Abandoned legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

L'invention concerne un anneau de stator (1) conçu pour une pompe à vide turbomoléculaire, comportant un anneau d'écartement extérieure (3) et des ailettes de stator (2). Afin de diminuer les coûts de fabrication et de montage, ledit anneau d'écartement (3) et lesdites ailettes de stator (2) sont d'un seul tenant.
CA002379547A 1999-08-07 2000-07-06 Anneau de stator pour pompe a vide turbomoleculaire Abandoned CA2379547A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19937393.0 1999-08-07
DE1999137393 DE19937393A1 (de) 1999-08-07 1999-08-07 Statorring für eine Turbomolekularvakuumpumpe
PCT/EP2000/006389 WO2001011242A1 (fr) 1999-08-07 2000-07-06 Anneau de stator pour pompe a vide turbomoleculaire

Publications (1)

Publication Number Publication Date
CA2379547A1 true CA2379547A1 (fr) 2001-02-15

Family

ID=7917612

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002379547A Abandoned CA2379547A1 (fr) 1999-08-07 2000-07-06 Anneau de stator pour pompe a vide turbomoleculaire

Country Status (5)

Country Link
EP (1) EP1200742A1 (fr)
JP (1) JP2003506631A (fr)
CA (1) CA2379547A1 (fr)
DE (1) DE19937393A1 (fr)
WO (1) WO2001011242A1 (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10046766A1 (de) * 2000-09-21 2002-04-11 Leybold Vakuum Gmbh Compound-Reibungsvakuumpumpe
EP1249612B1 (fr) * 2001-03-15 2004-01-28 VARIAN S.p.A. Procédé de fabrication d'un étage statorique pour une turbine-pompe
EP1249613B1 (fr) 2001-03-15 2004-01-28 VARIAN S.p.A. Turbine-pompe avec un étage statorique intégré avec un anneau d'espacement
DE10357547B4 (de) * 2003-12-10 2020-04-23 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE102004023961A1 (de) * 2004-05-14 2005-12-01 Leybold Vacuum Gmbh Verfahren zur Herstellung einer Turbomolekularpumpen-Statorstufe
JP4676731B2 (ja) * 2004-09-10 2011-04-27 エドワーズ株式会社 ターボ分子ポンプ固定翼及び真空ポンプ
DE102006050565A1 (de) * 2006-10-26 2008-04-30 Pfeiffer Vacuum Gmbh Statorscheibe für eine Turbomolekularpumpe
JP5062257B2 (ja) * 2007-08-31 2012-10-31 株式会社島津製作所 ターボ分子ポンプ
JP5397138B2 (ja) * 2009-10-02 2014-01-22 株式会社島津製作所 ターボ分子ポンプ
US8709070B2 (en) 2011-05-10 2014-04-29 Abbott Cardiovascular Systems Inc. Bioabsorbable scaffold with particles providing delayed acceleration of degradation
DE102013213256A1 (de) * 2013-07-05 2015-01-08 Oerlikon Leybold Vacuum Gmbh Statorscheibe
GB2552793A (en) * 2016-08-08 2018-02-14 Edwards Ltd Vacuum pump
GB2557679A (en) * 2016-12-15 2018-06-27 Edwards Ltd Stator blade unit for a turbomolecular pump
FR3135306B1 (fr) * 2022-05-05 2024-05-10 Pfeiffer Vacuum Pompe à vide turbomoléculaire et procédé d’assemblage

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9013671U1 (de) * 1990-09-29 1992-01-30 Leybold AG, 6450 Hanau Stator für eine Turbomolekularvakuumpumpe
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps

Also Published As

Publication number Publication date
EP1200742A1 (fr) 2002-05-02
JP2003506631A (ja) 2003-02-18
DE19937393A1 (de) 2001-02-08
WO2001011242A1 (fr) 2001-02-15

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Legal Events

Date Code Title Description
FZDE Discontinued