DE19937393A1 - Statorring für eine Turbomolekularvakuumpumpe - Google Patents

Statorring für eine Turbomolekularvakuumpumpe

Info

Publication number
DE19937393A1
DE19937393A1 DE1999137393 DE19937393A DE19937393A1 DE 19937393 A1 DE19937393 A1 DE 19937393A1 DE 1999137393 DE1999137393 DE 1999137393 DE 19937393 A DE19937393 A DE 19937393A DE 19937393 A1 DE19937393 A1 DE 19937393A1
Authority
DE
Germany
Prior art keywords
stator
ring
vacuum pump
blades
turbomolecular vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE1999137393
Other languages
German (de)
English (en)
Inventor
Reiner Hoelzer
Dietmar Bonn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Priority to DE1999137393 priority Critical patent/DE19937393A1/de
Priority to PCT/EP2000/006389 priority patent/WO2001011242A1/fr
Priority to EP00951349A priority patent/EP1200742A1/fr
Priority to CA002379547A priority patent/CA2379547A1/fr
Priority to JP2001515465A priority patent/JP2003506631A/ja
Publication of DE19937393A1 publication Critical patent/DE19937393A1/de
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
DE1999137393 1999-08-07 1999-08-07 Statorring für eine Turbomolekularvakuumpumpe Ceased DE19937393A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE1999137393 DE19937393A1 (de) 1999-08-07 1999-08-07 Statorring für eine Turbomolekularvakuumpumpe
PCT/EP2000/006389 WO2001011242A1 (fr) 1999-08-07 2000-07-06 Anneau de stator pour pompe a vide turbomoleculaire
EP00951349A EP1200742A1 (fr) 1999-08-07 2000-07-06 Anneau de stator pour pompe a vide turbomoleculaire
CA002379547A CA2379547A1 (fr) 1999-08-07 2000-07-06 Anneau de stator pour pompe a vide turbomoleculaire
JP2001515465A JP2003506631A (ja) 1999-08-07 2000-07-06 ターボ分子真空ポンプのためのステータリング

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1999137393 DE19937393A1 (de) 1999-08-07 1999-08-07 Statorring für eine Turbomolekularvakuumpumpe

Publications (1)

Publication Number Publication Date
DE19937393A1 true DE19937393A1 (de) 2001-02-08

Family

ID=7917612

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1999137393 Ceased DE19937393A1 (de) 1999-08-07 1999-08-07 Statorring für eine Turbomolekularvakuumpumpe

Country Status (5)

Country Link
EP (1) EP1200742A1 (fr)
JP (1) JP2003506631A (fr)
CA (1) CA2379547A1 (fr)
DE (1) DE19937393A1 (fr)
WO (1) WO2001011242A1 (fr)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10046766A1 (de) * 2000-09-21 2002-04-11 Leybold Vakuum Gmbh Compound-Reibungsvakuumpumpe
EP1249613A1 (fr) * 2001-03-15 2002-10-16 VARIAN S.p.A. Turbine-pompe avec un étage statorique intégré avec un anneau d'espacement
EP1249612A1 (fr) * 2001-03-15 2002-10-16 VARIAN S.p.A. Procédé de fabrication d'un étage statorique pour une turbine-pompe
DE10357547A1 (de) * 2003-12-10 2005-07-07 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
EP1600639A2 (fr) * 2004-05-14 2005-11-30 LEYBOLD VACUUM GmbH Procédé de fabrication d'un étage statorique d'une pompe turbomoléculaire
EP1795756A1 (fr) * 2004-09-10 2007-06-13 BOC Edwards Japan Limited Aube fixe d'une pompe turbomoléculaire
DE102013213256A1 (de) * 2013-07-05 2015-01-08 Oerlikon Leybold Vacuum Gmbh Statorscheibe
EP1918588A3 (fr) * 2006-10-26 2015-05-20 Pfeiffer Vacuum Gmbh Disque de stator pour une pompe turbomoléculaire
GB2552793A (en) * 2016-08-08 2018-02-14 Edwards Ltd Vacuum pump
GB2557679A (en) * 2016-12-15 2018-06-27 Edwards Ltd Stator blade unit for a turbomolecular pump
WO2023213458A1 (fr) * 2022-05-05 2023-11-09 Pfeiffer Vacuum Pompe à vide turbomoléculaire et procédé d'assemblage

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5062257B2 (ja) * 2007-08-31 2012-10-31 株式会社島津製作所 ターボ分子ポンプ
JP5397138B2 (ja) * 2009-10-02 2014-01-22 株式会社島津製作所 ターボ分子ポンプ
US8709070B2 (en) 2011-05-10 2014-04-29 Abbott Cardiovascular Systems Inc. Bioabsorbable scaffold with particles providing delayed acceleration of degradation

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9013671U1 (de) * 1990-09-29 1992-01-30 Leybold AG, 6450 Hanau Stator für eine Turbomolekularvakuumpumpe

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10046766A1 (de) * 2000-09-21 2002-04-11 Leybold Vakuum Gmbh Compound-Reibungsvakuumpumpe
EP1249613A1 (fr) * 2001-03-15 2002-10-16 VARIAN S.p.A. Turbine-pompe avec un étage statorique intégré avec un anneau d'espacement
EP1249612A1 (fr) * 2001-03-15 2002-10-16 VARIAN S.p.A. Procédé de fabrication d'un étage statorique pour une turbine-pompe
US6627837B1 (en) 2001-03-15 2003-09-30 Varian S.P.A. Method of manufacturing a stator stage for a turbine pump
US6676368B2 (en) 2001-03-15 2004-01-13 Varian S.P.A. Turbine pump with a stator stage integrated with a spacer ring
DE10357547A1 (de) * 2003-12-10 2005-07-07 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE10357547B4 (de) 2003-12-10 2020-04-23 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
EP1600639A3 (fr) * 2004-05-14 2009-12-30 LEYBOLD VACUUM GmbH Procédé de fabrication d'un étage statorique d'une pompe turbomoléculaire
EP1600639A2 (fr) * 2004-05-14 2005-11-30 LEYBOLD VACUUM GmbH Procédé de fabrication d'un étage statorique d'une pompe turbomoléculaire
DE102004023961A1 (de) * 2004-05-14 2005-12-01 Leybold Vacuum Gmbh Verfahren zur Herstellung einer Turbomolekularpumpen-Statorstufe
EP1795756A1 (fr) * 2004-09-10 2007-06-13 BOC Edwards Japan Limited Aube fixe d'une pompe turbomoléculaire
US7824153B2 (en) 2004-09-10 2010-11-02 Boc Edwards Japan Limited Stator vane of turbo molecular pump
EP1795756A4 (fr) * 2004-09-10 2009-04-15 Edwards Japan Ltd Aube fixe d'une pompe turbomoléculaire
EP1918588A3 (fr) * 2006-10-26 2015-05-20 Pfeiffer Vacuum Gmbh Disque de stator pour une pompe turbomoléculaire
DE102013213256A1 (de) * 2013-07-05 2015-01-08 Oerlikon Leybold Vacuum Gmbh Statorscheibe
GB2552793A (en) * 2016-08-08 2018-02-14 Edwards Ltd Vacuum pump
US10844864B2 (en) 2016-08-08 2020-11-24 Edwards Limited Vacuum pump
GB2557679A (en) * 2016-12-15 2018-06-27 Edwards Ltd Stator blade unit for a turbomolecular pump
WO2023213458A1 (fr) * 2022-05-05 2023-11-09 Pfeiffer Vacuum Pompe à vide turbomoléculaire et procédé d'assemblage

Also Published As

Publication number Publication date
EP1200742A1 (fr) 2002-05-02
JP2003506631A (ja) 2003-02-18
CA2379547A1 (fr) 2001-02-15
WO2001011242A1 (fr) 2001-02-15

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Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
8110 Request for examination paragraph 44
R016 Response to examination communication
R002 Refusal decision in examination/registration proceedings
R003 Refusal decision now final

Effective date: 20130516