JP2003506631A - Stator ring for turbo molecular vacuum pump - Google Patents

Abstract

(57) Abstract The present invention relates to a stator ring (1) for a turbo-molecular vacuum pump, which comprises an outer distance ring (3) and a stator blade (2). In order to reduce the manufacturing and installation costs, a structure has been proposed in which the distance ring (3) is formed integrally with the stator blade (2).

Description

Detailed Description of the Invention

The present invention relates to a stator ring for a turbomolecular vacuum pump of the type provided with an outer distance ring and a stator vane.

The structure of a turbomolecular vacuum pump is similar to that of a turbine. The rotor blade rows and the stator blade rows are provided alternately with each other.

It is known that a stator and a rotor of a turbo molecular vacuum pump are provided with a stator blade row and a rotor blade row that can be separately mounted, respectively. In this case, the turbo molecular pump is assembled so that the stator vane rings and the rotor vane rings are alternately arranged one above the other. The distance ring provided between the respective rings keeps the interacting vanes out of contact with each other.

Rotors are increasingly formed integrally with the blades of the rotor. In that case, the stator vane rings must be split in order to be able to assemble a system of interacting stator vane and rotor vane rows. Usually, the stator ring consists of two stator half-rings, which are centered at a distance by a distance ring. From EP-A-478882 is known a stator for a turbomolecular vacuum pump having a configuration as described above.

A disadvantage of the prior art is the relatively large number of components in the stator package, which affects manufacturing and mounting costs.

An object of the present invention is to reduce the manufacturing costs and labor for the stator of turbomolecular vacuum pumps.

This problem is solved by integrally forming the distance ring and the stator blades of the stator blade row.

Besides reducing the parts to be manufactured and attached, the invention has yet another essential advantage, namely that relating to the heat transfer properties. The incorporation of the outer distance ring in the stator vane ring reduces the number of outer contact surfaces compared to the prior art. This significantly improves the conduction of heat transferred from the blades into the stator.

Advantageously, the stator ring, in addition to the incorporated outer distance ring,
It also has an inner ring incorporated with the vanes. This gives a very stable system, which can easily be manufactured, for example by milling.

[0010]   Next, embodiments of the present invention will be described in detail with reference to the drawings.

In the drawings, the stator half ring is designated by reference numeral 1, the stator blades are designated by reference numeral 2, the outer half ring is designated by reference numeral 3, and the inner half ring is designated by reference numeral 4. All components are integrally formed.

The illustrated stator half-ring 1 enables the assembly of a turbomolecular vacuum pump with an integrally formed rotor. Undivided stator blade rings 1 can be used even if the rotor has rotor blade rings that are not integrally formed. In the drawings, a half ring is shown as an example. What is stated in the claims is to be construed to mean that the stator ring according to the invention may be a divided stator ring or an undivided stator ring.

The outer ring 3 has a thickness which, when viewed in the axial direction, can assume the function of a distance ring. The inner ring must be located between the rotor blade rows (not shown). The height of the inner ring is correspondingly smaller.

The spacing and angle of attack of the vanes 2 of the stator half-ring according to FIGS. 1 and 2 are relatively large. Such a vane configuration is used in the inlet region of turbomolecular vacuum pumps.

In the embodiment according to FIGS. 3 and 4, the angle of attack and the blade spacing are relatively small. The vanes partially overlap each other. Such a vane configuration is used in the outlet region of turbomolecular vacuum pumps.

[Brief description of drawings]

1 is a plan view of a stator half-ring according to the invention for the inlet side of a turbomolecular vacuum pump, FIG.

FIG. 2 is a perspective view of a stator half-ring according to the invention for the inlet side of a turbomolecular vacuum pump.

FIG. 3 is a plan view of a stator half ring according to the invention defined for the compression side of a turbomolecular vacuum pump.

FIG. 4 is a perspective view of a stator half ring according to the invention defined for the compression side of a turbomolecular vacuum pump.

─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Reiner Herzer             Federal Republic of Germany Hurt Loltsin             Gstraße 93 F term (reference) 3H031 BA11 CA02 DA02 EA06 FA01                       FA03                 3H034 AA02 BB01 BB08 CC03 DD07                       DD22 EE05 EE12

Claims (3)

[Claims] 1. A stator ring for a turbomolecular vacuum pump, of the type provided with an outer distance ring (3) and a stator vane (2), the distance ring (3) and the stator. Stator ring for a turbomolecular vacuum pump, characterized in that the blades (2) are integrally formed. 2. A vane (2) extends between an outer ring (3) and an inner ring (4), the inner ring (4) likewise incorporating the stator ring (1). The stator ring according to claim 1, which is a molded component. 3. The stator ring according to claim 1, which is manufactured by milling.