JP2003346628A - ラッチ型圧電駆動リレー及び圧電駆動リレー - Google Patents
ラッチ型圧電駆動リレー及び圧電駆動リレーInfo
- Publication number
- JP2003346628A JP2003346628A JP2003119918A JP2003119918A JP2003346628A JP 2003346628 A JP2003346628 A JP 2003346628A JP 2003119918 A JP2003119918 A JP 2003119918A JP 2003119918 A JP2003119918 A JP 2003119918A JP 2003346628 A JP2003346628 A JP 2003346628A
- Authority
- JP
- Japan
- Prior art keywords
- conductive liquid
- piezoelectric
- contact pads
- wets
- drive relay
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/06—Contacts characterised by the shape or structure of the contact-making surface, e.g. grooved
- H01H1/08—Contacts characterised by the shape or structure of the contact-making surface, e.g. grooved wetted with mercury
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H57/00—Electrostrictive relays; Piezoelectric relays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H29/00—Switches having at least one liquid contact
- H01H2029/008—Switches having at least one liquid contact using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H57/00—Electrostrictive relays; Piezoelectric relays
- H01H2057/006—Micromechanical piezoelectric relay
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
- Y10T428/256—Heavy metal or aluminum or compound thereof
Landscapes
- Micromachines (AREA)
- Contacts (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/137692 | 2002-05-02 | ||
| US10/137,692 US6927529B2 (en) | 2002-05-02 | 2002-05-02 | Solid slug longitudinal piezoelectric latching relay |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003346628A true JP2003346628A (ja) | 2003-12-05 |
| JP2003346628A5 JP2003346628A5 (enExample) | 2005-11-04 |
Family
ID=29269135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003119918A Pending JP2003346628A (ja) | 2002-05-02 | 2003-04-24 | ラッチ型圧電駆動リレー及び圧電駆動リレー |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US6927529B2 (enExample) |
| JP (1) | JP2003346628A (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7256669B2 (en) * | 2000-04-28 | 2007-08-14 | Northeastern University | Method of preparing electrical contacts used in switches |
| US6903492B2 (en) * | 2003-04-14 | 2005-06-07 | Agilent Technologies, Inc. | Wetting finger latching piezoelectric relay |
| US6903493B2 (en) * | 2003-04-14 | 2005-06-07 | Agilent Technologies, Inc. | Inserting-finger liquid metal relay |
| US6876130B2 (en) * | 2003-04-14 | 2005-04-05 | Agilent Technologies, Inc. | Damped longitudinal mode latching relay |
| US6946775B2 (en) * | 2003-04-14 | 2005-09-20 | Agilent Technologies, Inc. | Method and structure for a slug assisted longitudinal piezoelectrically actuated liquid metal optical switch |
| US6876132B2 (en) * | 2003-04-14 | 2005-04-05 | Agilent Technologies, Inc. | Method and structure for a solid slug caterpillar piezoelectric relay |
Family Cites Families (81)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2312672A (en) | 1941-05-09 | 1943-03-02 | Bell Telephone Labor Inc | Switching device |
| US2564081A (en) | 1946-05-23 | 1951-08-14 | Babson Bros Co | Mercury switch |
| GB1143822A (enExample) * | 1965-08-20 | |||
| DE1614671B2 (de) | 1967-12-04 | 1971-09-30 | Siemens AG, 1000 Berlin u. 8000 München | Lageunabhaengiges quecksilberrelais |
| US3639165A (en) | 1968-06-20 | 1972-02-01 | Gen Electric | Resistor thin films formed by low-pressure deposition of molybdenum and tungsten |
| US3600537A (en) | 1969-04-15 | 1971-08-17 | Mechanical Enterprises Inc | Switch |
| US3657647A (en) | 1970-02-10 | 1972-04-18 | Curtis Instr | Variable bore mercury microcoulometer |
| US4103135A (en) | 1976-07-01 | 1978-07-25 | International Business Machines Corporation | Gas operated switches |
| FR2392485A1 (fr) | 1977-05-27 | 1978-12-22 | Orega Circuits & Commutation | Interrupteur a contacts mouilles, et a commande magnetique |
| SU714533A2 (ru) * | 1977-09-06 | 1980-02-05 | Московский Ордена Трудового Красного Знамени Инженерно-Физический Институт | Переключающее устройство |
| FR2418539A1 (fr) | 1978-02-24 | 1979-09-21 | Orega Circuits & Commutation | Commutateur a contact liquide |
| FR2458138A1 (fr) | 1979-06-01 | 1980-12-26 | Socapex | Relais a contacts mouilles et circuit plan comportant un tel relais |
| US4419650A (en) | 1979-08-23 | 1983-12-06 | Georgina Chrystall Hirtle | Liquid contact relay incorporating gas-containing finely reticular solid motor element for moving conductive liquid |
| US4245886A (en) | 1979-09-10 | 1981-01-20 | International Business Machines Corporation | Fiber optics light switch |
| US4336570A (en) | 1980-05-09 | 1982-06-22 | Gte Products Corporation | Radiation switch for photoflash unit |
| DE8016981U1 (de) | 1980-06-26 | 1980-11-06 | W. Guenther Gmbh, 8500 Nuernberg | Quecksilber-Elektrodenschalter |
| DE3138968A1 (de) | 1981-09-30 | 1983-04-14 | Siemens AG, 1000 Berlin und 8000 München | Optische steuervorrichtung zum steuern der in einem optischen wellenleiter gefuehrten strahlung, insbesondere optischer schalter |
| DE3206919A1 (de) | 1982-02-26 | 1983-09-15 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Vorrichtung zum optischen trennen und verbinden von lichtleitern |
| US4475033A (en) | 1982-03-08 | 1984-10-02 | Northern Telecom Limited | Positioning device for optical system element |
| FR2524658A1 (fr) | 1982-03-30 | 1983-10-07 | Socapex | Commutateur optique et matrice de commutation comprenant de tels commutateurs |
| US4628161A (en) | 1985-05-15 | 1986-12-09 | Thackrey James D | Distorted-pool mercury switch |
| GB8513542D0 (en) | 1985-05-29 | 1985-07-03 | Gen Electric Co Plc | Fibre optic coupler |
| US4652710A (en) | 1986-04-09 | 1987-03-24 | The United States Of America As Represented By The United States Department Of Energy | Mercury switch with non-wettable electrodes |
| JPS62276838A (ja) | 1986-05-26 | 1987-12-01 | Hitachi Ltd | 半導体装置 |
| US4742263A (en) | 1986-08-15 | 1988-05-03 | Pacific Bell | Piezoelectric switch |
| US4804932A (en) | 1986-08-22 | 1989-02-14 | Nec Corporation | Mercury wetted contact switch |
| JPS63294317A (ja) | 1987-01-26 | 1988-12-01 | Shimizu Tekkosho:Goushi | ボデイシ−ル機 |
| US4797519A (en) | 1987-04-17 | 1989-01-10 | Elenbaas George H | Mercury tilt switch and method of manufacture |
| US5278012A (en) | 1989-03-29 | 1994-01-11 | Hitachi, Ltd. | Method for producing thin film multilayer substrate, and method and apparatus for detecting circuit conductor pattern of the substrate |
| US4988157A (en) | 1990-03-08 | 1991-01-29 | Bell Communications Research, Inc. | Optical switch using bubbles |
| FR2667396A1 (fr) | 1990-09-27 | 1992-04-03 | Inst Nat Sante Rech Med | Capteur pour mesure de pression en milieu liquide. |
| US5415026A (en) | 1992-02-27 | 1995-05-16 | Ford; David | Vibration warning device including mercury wetted reed gauge switches |
| EP0593836B1 (en) | 1992-10-22 | 1997-07-16 | International Business Machines Corporation | Near-field photon tunnelling devices |
| US5886407A (en) | 1993-04-14 | 1999-03-23 | Frank J. Polese | Heat-dissipating package for microcircuit devices |
| US5972737A (en) | 1993-04-14 | 1999-10-26 | Frank J. Polese | Heat-dissipating package for microcircuit devices and process for manufacture |
| GB9309327D0 (en) | 1993-05-06 | 1993-06-23 | Smith Charles G | Bi-stable memory element |
| JP2682392B2 (ja) | 1993-09-01 | 1997-11-26 | 日本電気株式会社 | 薄膜キャパシタおよびその製造方法 |
| GB9403122D0 (en) | 1994-02-18 | 1994-04-06 | Univ Southampton | Acousto-optic device |
| JPH08125487A (ja) | 1994-06-21 | 1996-05-17 | Kinseki Ltd | 圧電振動子 |
| FI110727B (fi) | 1994-06-23 | 2003-03-14 | Vaisala Oyj | Sähköisesti moduloitava terminen säteilylähde |
| JP3182301B2 (ja) | 1994-11-07 | 2001-07-03 | キヤノン株式会社 | マイクロ構造体及びその形成法 |
| US5675310A (en) | 1994-12-05 | 1997-10-07 | General Electric Company | Thin film resistors on organic surfaces |
| US5502781A (en) | 1995-01-25 | 1996-03-26 | At&T Corp. | Integrated optical devices utilizing magnetostrictively, electrostrictively or photostrictively induced stress |
| EP0761011B1 (en) | 1995-03-27 | 1999-07-21 | Koninklijke Philips Electronics N.V. | Method of manufacturing an electronic multilayer component |
| DE69603664T2 (de) | 1995-05-30 | 2000-03-16 | Motorola, Inc. | Hybrid-Multichip-Modul und Verfahren zur seiner Herstellung |
| US5751074A (en) | 1995-09-08 | 1998-05-12 | Edward B. Prior & Associates | Non-metallic liquid tilt switch and circuitry |
| US5732168A (en) | 1995-10-31 | 1998-03-24 | Hewlett Packard Company | Thermal optical switches for light |
| KR0174871B1 (ko) | 1995-12-13 | 1999-02-01 | 양승택 | 랫칭형 열구동 마이크로 릴레이 소자 |
| US6023408A (en) | 1996-04-09 | 2000-02-08 | The Board Of Trustees Of The University Of Arkansas | Floating plate capacitor with extremely wide band low impedance |
| JP2817717B2 (ja) | 1996-07-25 | 1998-10-30 | 日本電気株式会社 | 半導体装置およびその製造方法 |
| US5874770A (en) | 1996-10-10 | 1999-02-23 | General Electric Company | Flexible interconnect film including resistor and capacitor layers |
| US5841686A (en) | 1996-11-22 | 1998-11-24 | Ma Laboratories, Inc. | Dual-bank memory module with shared capacitors and R-C elements integrated into the module substrate |
| GB2321114B (en) | 1997-01-10 | 2001-02-21 | Lasor Ltd | An optical modulator |
| US6180873B1 (en) | 1997-10-02 | 2001-01-30 | Polaron Engineering Limited | Current conducting devices employing mesoscopically conductive liquids |
| TW405129B (en) | 1997-12-19 | 2000-09-11 | Koninkl Philips Electronics Nv | Thin-film component |
| US6021048A (en) | 1998-02-17 | 2000-02-01 | Smith; Gary W. | High speed memory module |
| US6351579B1 (en) | 1998-02-27 | 2002-02-26 | The Regents Of The University Of California | Optical fiber switch |
| DE19910375C2 (de) | 1998-03-09 | 2001-10-04 | Bartels Mikrotechnik Gmbh | Optischer Schalter und modulares Schaltsystem aus optischen Schaltelementen |
| US6207234B1 (en) | 1998-06-24 | 2001-03-27 | Vishay Vitramon Incorporated | Via formation for multilayer inductive devices and other devices |
| US6212308B1 (en) | 1998-08-03 | 2001-04-03 | Agilent Technologies Inc. | Thermal optical switches for light |
| US5912606A (en) | 1998-08-18 | 1999-06-15 | Northrop Grumman Corporation | Mercury wetted switch |
| US6323447B1 (en) | 1998-12-30 | 2001-11-27 | Agilent Technologies, Inc. | Electrical contact breaker switch, integrated electrical contact breaker switch, and electrical contact switching method |
| EP1050773A1 (en) | 1999-05-04 | 2000-11-08 | Corning Incorporated | Piezoelectric optical switch device |
| US6373356B1 (en) | 1999-05-21 | 2002-04-16 | Interscience, Inc. | Microelectromechanical liquid metal current carrying system, apparatus and method |
| US6396012B1 (en) | 1999-06-14 | 2002-05-28 | Rodger E. Bloomfield | Attitude sensing electrical switch |
| US6304450B1 (en) | 1999-07-15 | 2001-10-16 | Incep Technologies, Inc. | Inter-circuit encapsulated packaging |
| US6320994B1 (en) | 1999-12-22 | 2001-11-20 | Agilent Technolgies, Inc. | Total internal reflection optical switch |
| US6487333B2 (en) | 1999-12-22 | 2002-11-26 | Agilent Technologies, Inc. | Total internal reflection optical switch |
| DE60102450D1 (de) * | 2000-02-02 | 2004-04-29 | Raytheon Co | Kontaktstruktur für mikrorelais und rf-anwendungen |
| US6356679B1 (en) | 2000-03-30 | 2002-03-12 | K2 Optronics, Inc. | Optical routing element for use in fiber optic systems |
| US6446317B1 (en) | 2000-03-31 | 2002-09-10 | Intel Corporation | Hybrid capacitor and method of fabrication therefor |
| NL1015131C1 (nl) | 2000-04-16 | 2001-10-19 | Tmp Total Micro Products B V | Inrichting en werkwijze voor het schakelen van elektromagnetische signalen of bundels. |
| US6470106B2 (en) | 2001-01-05 | 2002-10-22 | Hewlett-Packard Company | Thermally induced pressure pulse operated bi-stable optical switch |
| JP2002207181A (ja) | 2001-01-09 | 2002-07-26 | Minolta Co Ltd | 光スイッチ |
| US6490384B2 (en) | 2001-04-04 | 2002-12-03 | Yoon-Joong Yong | Light modulating system using deformable mirror arrays |
| JP4420581B2 (ja) | 2001-05-09 | 2010-02-24 | 三菱電機株式会社 | 光スイッチおよび光導波路装置 |
| US20030035611A1 (en) | 2001-08-15 | 2003-02-20 | Youchun Shi | Piezoelectric-optic switch and method of fabrication |
| US6512322B1 (en) * | 2001-10-31 | 2003-01-28 | Agilent Technologies, Inc. | Longitudinal piezoelectric latching relay |
| US6515404B1 (en) * | 2002-02-14 | 2003-02-04 | Agilent Technologies, Inc. | Bending piezoelectrically actuated liquid metal switch |
| US6633213B1 (en) | 2002-04-24 | 2003-10-14 | Agilent Technologies, Inc. | Double sided liquid metal micro switch |
| US6559420B1 (en) | 2002-07-10 | 2003-05-06 | Agilent Technologies, Inc. | Micro-switch heater with varying gas sub-channel cross-section |
-
2002
- 2002-05-02 US US10/137,692 patent/US6927529B2/en not_active Expired - Fee Related
-
2003
- 2003-04-24 JP JP2003119918A patent/JP2003346628A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US6927529B2 (en) | 2005-08-09 |
| US20030207102A1 (en) | 2003-11-06 |
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Legal Events
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