JP2003333872A5 - - Google Patents

Download PDF

Info

Publication number
JP2003333872A5
JP2003333872A5 JP2002140429A JP2002140429A JP2003333872A5 JP 2003333872 A5 JP2003333872 A5 JP 2003333872A5 JP 2002140429 A JP2002140429 A JP 2002140429A JP 2002140429 A JP2002140429 A JP 2002140429A JP 2003333872 A5 JP2003333872 A5 JP 2003333872A5
Authority
JP
Japan
Prior art keywords
vibration
drive
state detection
detection means
vibration state
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002140429A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003333872A (ja
JP4125041B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002140429A priority Critical patent/JP4125041B2/ja
Priority claimed from JP2002140429A external-priority patent/JP4125041B2/ja
Publication of JP2003333872A publication Critical patent/JP2003333872A/ja
Publication of JP2003333872A5 publication Critical patent/JP2003333872A5/ja
Application granted granted Critical
Publication of JP4125041B2 publication Critical patent/JP4125041B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2002140429A 2002-05-15 2002-05-15 積層振動型アクチュエータの駆動装置 Expired - Fee Related JP4125041B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002140429A JP4125041B2 (ja) 2002-05-15 2002-05-15 積層振動型アクチュエータの駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002140429A JP4125041B2 (ja) 2002-05-15 2002-05-15 積層振動型アクチュエータの駆動装置

Publications (3)

Publication Number Publication Date
JP2003333872A JP2003333872A (ja) 2003-11-21
JP2003333872A5 true JP2003333872A5 (enExample) 2005-10-06
JP4125041B2 JP4125041B2 (ja) 2008-07-23

Family

ID=29701317

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002140429A Expired - Fee Related JP4125041B2 (ja) 2002-05-15 2002-05-15 積層振動型アクチュエータの駆動装置

Country Status (1)

Country Link
JP (1) JP4125041B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4630676B2 (ja) * 2005-01-25 2011-02-09 キヤノン株式会社 駆動装置
JP5161436B2 (ja) * 2005-07-05 2013-03-13 ペンタックスリコーイメージング株式会社 超音波モータ駆動装置
JP2011120415A (ja) * 2009-12-07 2011-06-16 Murata Mfg Co Ltd 駆動システム
JP5854631B2 (ja) * 2011-04-27 2016-02-09 キヤノン株式会社 駆動制御方法、雲台装置、ステージおよびアクチュエータ
JP6592993B2 (ja) 2015-07-07 2019-10-23 セイコーエプソン株式会社 圧電駆動装置及びロボット

Similar Documents

Publication Publication Date Title
US7701115B2 (en) Drive unit
CA2161412C (en) Low voltage bender piezo-actuators
JP2714261B2 (ja) 振動子および振動装置
JP3402816B2 (ja) 超音波モータの駆動回路
JP5587418B2 (ja) アクチュエータ
JP4794897B2 (ja) 超音波モータ
JP2005168281A5 (enExample)
JP2005354787A5 (enExample)
JP4795162B2 (ja) 超音波モータ及び超音波モータの振動検出方法
JP2010233316A (ja) 超音波モータ
CN106664040A (zh) 超声致动器
JP2003333872A5 (enExample)
JP4795158B2 (ja) 超音波モータ
JP4814948B2 (ja) 振動型アクチュエータの制御装置
JP3126563B2 (ja) 振動型モータの駆動装置
JPH10304687A (ja) 振動型アクチュエータの駆動装置および振動型アクチュエータを駆動源とする装置
JP4125041B2 (ja) 積層振動型アクチュエータの駆動装置
JP2000136844A5 (enExample)
JP2008236820A (ja) 駆動装置
JP5074674B2 (ja) 積層圧電素子および振動波モータ
JP2011072129A (ja) 超音波モータ
JPH03253267A (ja) 超音波モータ
JP3587068B2 (ja) 圧電アクチュエータ
Colin et al. Compact and Low-Frequency Vibration Energy Scavenger using the longitudinal excitation of a piezoelectric bar
JP2013044610A (ja) 振動検知装置