JP2003333872A5 - - Google Patents

Claims (10)

Vibration in which an electro-mechanical energy conversion element is sandwiched between elastic bodies, and a drive vibration is formed in the drive section of the end face of each elastic body by applying a drive signal to the drive element section of the electro-mechanical energy conversion element In the driving device of the laminated vibration type actuator in which a plurality of bodies are arranged in the axial direction, and a contact body is press-clamped between the driving portions facing each other between the vibrating bodies,
Each electrical of the plurality of vibrators - a drive circuit section for outputting a drive signal of a single frequency driving element portion of mechanical energy conversion element, at least one of the vibration state detection means for detecting a vibration state of each of the vibrating member A drive device for a laminated vibration type actuator, comprising a control circuit unit that controls an output signal to the drive circuit unit in accordance with a vibration state detection signal output from one vibration state detection means . Vibration in which an electro-mechanical energy conversion element is sandwiched between elastic bodies, and a drive vibration is formed in the drive section of the end face of each elastic body by applying a drive signal to the drive element section of the electro-mechanical energy conversion element In the driving device of the laminated vibration type actuator in which a plurality of bodies are arranged in the axial direction, and a contact body is press-clamped between the driving portions facing each other between the vibrating bodies,
A drive circuit unit that outputs a drive signal of a single frequency to the drive element unit of each electro-mechanical energy conversion element of the plurality of vibrators, and an output of a vibration state detector that detects a vibration state of each vibrator. a resonance frequency detection means for detecting a resonance frequency of the plurality of vibrators based, at least one vibration state detection signal of the output of the vibration state detection means in accordance with the resonance frequency detected by the resonant frequency detecting means and then selecting means for selecting and driving the laminated vibration-type actuator, characterized in that it comprises a control circuit section for controlling the output signal to the driving circuit unit in accordance with the vibration state detection signal selected by said selection means apparatus. The control circuit unit outputs an output signal to the drive circuit unit according to the vibration state detection signal of the vibration state detection unit corresponding to the plurality of vibration bodies having a higher resonance frequency among the plurality of vibration bodies. laminating the vibration type actuator driving apparatus according to claim 1 or 2, characterized in that control. Among the vibration state detection means in a plurality of vibration bodies, at least one of vibration state detection means other than the vibration state detection means used for controlling the drive circuit unit is fixed to ground or potential. 4. A drive device for a laminated vibration actuator according to claim 1, 2, or 3. Among the plurality of vibrators according to claim 1, 2, 3 or 4, characterized in that a vibrator having a vibration state detection means to be used in the control of the drive circuit portion to the end portion of the stacked vibration-type actuator A drive device for a laminated vibration actuator according to 1. Among the plurality of vibrators, to any one of claims 1 to 4, characterized in that the vibrator is arranged in the center portion of the stacked vibration-type actuator having a vibration state detection means to be used in the control of the drive circuit section A drive device for the laminated vibration type actuator according to the description. Among the plurality of vibrators, the vibrating body having a vibration state detection means to be used in the control of the drive circuit portion, claim 1, characterized in that a greater load is placed on the output end of the combined side 5. A drive device for a vibration type actuator according to any one of 4 above. 5. The driving apparatus for a multilayer vibration actuator according to claim 1, wherein the plurality of vibration bodies are arranged from an end of the multilayer vibration actuator in descending order of resonance frequency. 5. The driving apparatus for a laminated vibration actuator according to claim 1, wherein the plurality of vibrating bodies are arranged from the center of the laminated vibration actuator in descending order of resonance frequency. The vibration state detection means is an electro-mechanical energy conversion element. The vibration state detection means that is not used for controlling the drive circuit unit and whose potential is not fixed is a voltage applied to the laminated vibration type actuator. laminating the vibration type actuator driving device according to any one of claims 1 to Rukoto characterized used for driving 9.