JP4125041B2 - 積層振動型アクチュエータの駆動装置 - Google Patents

積層振動型アクチュエータの駆動装置 Download PDF

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Publication number
JP4125041B2
JP4125041B2 JP2002140429A JP2002140429A JP4125041B2 JP 4125041 B2 JP4125041 B2 JP 4125041B2 JP 2002140429 A JP2002140429 A JP 2002140429A JP 2002140429 A JP2002140429 A JP 2002140429A JP 4125041 B2 JP4125041 B2 JP 4125041B2
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vibration
state detection
drive
type actuator
detection means
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Expired - Fee Related
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JP2002140429A
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JP2003333872A5 (enExample
JP2003333872A (ja
Inventor
禎 林
篤史 木村
健一 片岡
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Canon Inc
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Canon Inc
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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2002140429A 2002-05-15 2002-05-15 積層振動型アクチュエータの駆動装置 Expired - Fee Related JP4125041B2 (ja)

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JP2002140429A JP4125041B2 (ja) 2002-05-15 2002-05-15 積層振動型アクチュエータの駆動装置

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JP2002140429A JP4125041B2 (ja) 2002-05-15 2002-05-15 積層振動型アクチュエータの駆動装置

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JP2003333872A JP2003333872A (ja) 2003-11-21
JP2003333872A5 JP2003333872A5 (enExample) 2005-10-06
JP4125041B2 true JP4125041B2 (ja) 2008-07-23

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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4630676B2 (ja) * 2005-01-25 2011-02-09 キヤノン株式会社 駆動装置
JP5161436B2 (ja) * 2005-07-05 2013-03-13 ペンタックスリコーイメージング株式会社 超音波モータ駆動装置
JP2011120415A (ja) * 2009-12-07 2011-06-16 Murata Mfg Co Ltd 駆動システム
JP5854631B2 (ja) * 2011-04-27 2016-02-09 キヤノン株式会社 駆動制御方法、雲台装置、ステージおよびアクチュエータ
JP6592993B2 (ja) 2015-07-07 2019-10-23 セイコーエプソン株式会社 圧電駆動装置及びロボット

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JP2003333872A (ja) 2003-11-21

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