JP2003329828A - Liquid material ejecting method, liquid material ejecting apparatus, color filter manufacturing method, color filter, liquid crystal display, electroluminescence device, plasma display panel manufacturing method, and plasma display - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid material ejecting method, a liquid material ejecting apparatus or the like, in which uniform electro-optic characteristics, etc., in the planar direction are obtained. <P>SOLUTION: In these liquid material ejecting method and liquid material ejecting apparatus, etc., a plurality of liquid materials are successively ejected toward a substrate from respective nozzle rows while vertically scanning the droplet ejection head or the substrate, and the positions of ejection start and end points for the plurality of liquid materials are set different from each other or the position of one of them is set different. This manner prevents end portions of areas of the substrate, in which the plurality of liquid materials are applied, from being overlapped with each other, or makes the overlapping of the end portions of the areas applied with the liquid materials small. With such a liquid material ejecting method, therefore, variations in amount of the applied liquid materials in the planar direction can be reduced. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid material discharge method, a liquid material discharge device, a color filter manufacturing method and a color filter, a liquid crystal display device, an electroluminescent device manufacturing method and an electroluminescent device, and a plasma display. The present invention relates to a panel manufacturing method and a plasma display panel.

More specifically, the present invention relates to a liquid material ejection method, a liquid material ejection device, a color filter manufacturing method and a color filter, and a liquid crystal display, which can obtain a coated article having uniform electro-optical characteristics in a planar direction. The present invention relates to a device, a method for manufacturing an electroluminescent device, an electroluminescent device, a method for manufacturing a plasma display panel, and a plasma display panel.

[0003]

2. Description of the Related Art In recent years, an electro-optical device such as a liquid crystal device (hereinafter may be referred to as an LCD) in a display portion of an electronic device such as a mobile phone or a portable computer.
Display devices such as an electroluminescence device (hereinafter sometimes referred to as an EL device) and a plasma display panel (hereinafter sometimes referred to as a PDP) are widely used, paying attention to their thin film property and light weight. Or
It is being considered.

Further, full-color display is desired in each of these display devices. For example, in LCDs, full-color display is achieved by passing light modulated by a liquid crystal layer through a color filter arranged on the advancing surface. Has been achieved. This color filter can be used, for example, on a surface of a glass substrate or a plastic substrate,
It is configured by regularly arranging dot-shaped filter elements corresponding to (red), G (green), and B (blue) in a predetermined array.

In manufacturing such a color filter, a photolithography method is generally used, but the manufacturing process is complicated, or a large amount of color filter material or photoresist corresponding to each color is used. However, there is a problem in that the manufacturing cost is high and the load on the environmental conditions is large because it is consumed.

Therefore, in order to solve such manufacturing problems and environmental problems, a method of manufacturing a filter element of a color filter by a so-called inkjet method has been proposed. For example, in FIG. 31A, as shown in FIG. 31B, a plurality of filter elements 303 are formed in the inner area of the plurality of panel areas 302 set on the surface of the motherboard 301 based on the inkjet method. Imagine a case. That is, FIG.
As shown in FIG. 1C, a droplet discharge head 306 in which nozzle rows 304 are arranged is prepared. Next, the droplet discharge head 306 is connected to the arrow A1 and the arrow A in FIG.
As shown in FIG. 2, one panel region 302 is main-scanned a plurality of times (twice in the example shown in FIG. 31), while a plurality of nozzles 304 selectively ejects a color filter material during that time. Thus, the filter element 303 can be formed at a predetermined position.

However, it has been found that the discharge amount of the color filter material varies depending on the positions of the plurality of nozzles 304 in the droplet discharge head 306. More specifically, as shown in FIG. 32, the nozzle row 3
It is known that the nozzles 304 have a material discharge characteristic (Q characteristic) that the discharge amount of the nozzles 304 at both ends is large and that the central portion is small.

Therefore, when the nozzle row 304 is scanned a plurality of times in the vertical direction, as shown in FIG. 33 (a), the nozzles 304 at both ends of the nozzle row 305 have a large discharge amount and the nozzles 304 in the middle portion. Of the color filter tends to be relatively small, and the filter element 3 of the color filter
In the case of forming No. 03, as shown in FIG. 33B, it was observed that a streak with a high color density was recognized at the end (P1). Therefore, the obtained color filter has a problem that the light transmission characteristics are likely to be non-uniform in the plane direction.

Therefore, when the color filter material is applied to the portion to be colored on the transparent substrate while scanning the droplet discharge head or the substrate in the vertical direction, the portion to be colored at the boundary portion of the scanning region and the boundary. There is disclosed a method of manufacturing a color filter, which is characterized in that the colored portion is formed such that the amount of material to be applied is different between the colored portion other than the colored portion (see Patent Document 1 below).

More specifically, as shown in FIG. 34, when the droplet discharge heads 351a to 351c are scanned in the vertical direction as shown by an arrow 354 while applying materials to a plurality of portions to be colored, The substrate 352 has a plurality of scanning regions 353a, 353b, 3 and 3 whose colored regions are parallel to the scanning direction of the head.
A portion to be colored (line indicated by symbol A) at least at the boundary between adjacent scanning regions while being divided into 53c.
And the portions to be colored (353a, 353b,
(Region represented by 353c), the manufacturing method of the color filter is set so that the amount of applied material is different.

[0011]

[Patent Document 1] Japanese Patent Laid-Open No. 2000-89017

[0012]

However, in the conventional method of manufacturing a color filter described above, although the head operation or the like is delicately set so that the amount of material to be applied is different depending on the place to be colored, the surrounding environmental conditions and the However, there was a problem that the control of the operation of the head was not in time when the type of material, the viscosity, etc. changed significantly.

Therefore, conversely, the amount of applied material is greatly different between the colored portion at the boundary of the scanning region in the color filter and the colored portion other than the boundary, and the light transmission characteristics in the plane direction are not good. In some cases, the uniformity was rather large.

The inventor of the present invention has made extensive studies in view of the above problems, and as a result, while scanning the droplet discharge head or the substrate in the vertical direction, a liquid substance of substantially the same amount as in the prior art is used. It has been found that even when applied, it is possible to control the amount of material in the colored part by adjusting the position of the end of the nozzle row and the like to make the position of the discharge start part or the discharge end part of the liquid material different. The present invention has been completed.

That is, an object of the present invention is to provide a liquid material ejecting method, a liquid material ejecting apparatus, a color filter manufacturing method and a color filter, and a liquid crystal display that can obtain a coated product having uniform light transmission characteristics in a plane direction. A device, a method for manufacturing an electroluminescent device and an electroluminescent device, and a method for manufacturing a plasma display panel and a plasma display panel.

[0016]

According to the present invention, there is provided a liquid material ejection method using a liquid droplet ejection head, wherein a plurality of liquid materials are ejected while the liquid droplet ejection head or the substrate is vertically scanned. A liquid material characterized in that the liquid is sequentially discharged from the corresponding nozzle rows to the substrate, and the positions of the discharge start portion and the discharge end portion of the liquid material or one of them is made different. Is provided, and the above-mentioned problems can be solved.

That is, even when the liquid substance is applied in substantially the same amount as in the conventional case using the droplet discharge head, the liquid substance is applied so that the positions of the discharge start portion and the discharge end portion are shifted. As a result, it is possible to prevent the ends of the application regions made of a plurality of liquid substances on the substrate from overlapping with each other, or to reduce the overlap of the ends of these application regions.

Therefore, according to such a liquid material ejection method, the variation in the application amount of the liquid material in the plane direction is reduced, so that the uniform light emission in the plane direction is achieved without changing the application performance of the droplet ejection head. It is possible to obtain a coated article having transmission characteristics and the like.

The means for making the positions of the discharge start portion and the discharge end portion of the liquid material different is not particularly limited, and eight modes as shown in Table 1 described later are typical. However, a droplet discharge head including a nozzle row as shown in FIG. 2 is used, and the nozzle row is divided into three parts, for example, left, center, and right corresponding to the number of liquid substances, and the droplet discharge head is formed. The positions of the discharge start portion and the discharge end portion of the three kinds of liquids may be made different by the operation control of.

Further, in carrying out the liquid material discharge method of the present invention, the liquid material is discharged by changing the positions of both ends of the nozzle row or one of the positions in a one-dimensional or two-dimensional direction. It is preferable that the positions of the start portion and the discharge end portion, or either one of them, be different.

With this arrangement, the positions of the discharge start portions or discharge end portions of a plurality of liquid substances on the substrate can be made different by merely adjusting the positions of both ends of the nozzle row.

Further, in carrying out the liquid material discharge method of the present invention, it is preferable to make the discharge widths of a plurality of liquid materials substantially equal.

By carrying out in this manner, for example, the positions of the discharge start portion and the discharge end portion of the liquid substance on the substrate can be made different by simply using a droplet discharge head of a simple structure having substantially the same discharge width. it can.

In carrying out the liquid material discharge method of the present invention, a plurality of droplet discharge heads are prepared, and
It is preferable that the ejection widths of the liquid material are substantially equalized by making the dimension widths of the nozzle rows in the direction orthogonal to the scanning direction in the droplet ejection head substantially equal.

By carrying out in this manner, the positions of the discharge start portions or the discharge end portions of the plurality of liquid substances on the substrate can be made different by simply preparing a plurality of droplet discharge heads of a simple structure having substantially the same dimensional width. be able to. In addition, since a plurality of droplet discharge heads are provided, it is possible to perform fine operation in correspondence with the type of liquid material.
It becomes easier to adjust the position of the discharge start portion or the discharge end portion of the liquid material.

In carrying out the liquid material discharge method of the present invention, a plurality of liquid material discharge widths are made different, and the position of the liquid material discharge start portion or the liquid material discharge end portion is substantially changed. It is preferable to match with.

By carrying out in this manner, it is possible to reduce the overlap of the end portions of the application regions made of a plurality of liquid substances on the substrate and to form the liquid non-application portion on only one side of the substrate.

Further, in carrying out the liquid material discharge method of the present invention, a plurality of droplet discharge heads are prepared, and
It is preferable that the ejection widths of the plurality of liquid substances be made different by making the dimension widths of the nozzle rows in the direction orthogonal to the scanning direction in the plurality of liquid droplet ejection heads different.

In this way, by changing the dimensional width of the droplet discharge head and operating the droplet discharge head as in the conventional case, the positions of the discharge start portion and the discharge end portion of the liquid substance on the substrate can be changed. be able to.

Further, in carrying out the liquid material discharge method of the present invention, when the end portion of the substrate is coated using the nozzle array, the nozzle array corresponding to the area other than the area of the substrate is not used, and It is preferable to use the corresponding nozzle rows in the area of the substrate.

By carrying out in this manner, it is possible to reduce the formation of the non-application portion where the plurality of liquid substances are not applied at the end portion of the substrate.

Another aspect of the present invention is a liquid material ejection device having a liquid droplet ejection head, wherein the liquid droplet ejection head is provided with nozzle rows corresponding to a plurality of liquid materials, and In order to sequentially eject a plurality of liquid substances from the nozzle row while scanning the ejection head or the substrate in the vertical direction, and to make the positions of the ejection start part and the ejection end part of the liquid substance, or one of the positions different. Is a liquid material ejecting device.

That is, even when the liquid material is applied in the vertical direction by using the liquid droplet ejection head and the substantially same amount of the liquid material is applied as in the conventional case, the control portion controls the ejection start portion or the ejection of the liquid material. By adjusting the positions of the end portions so as to be displaced, it is possible to prevent the positions of the end portions of the application regions corresponding to the plurality of liquid substances from overlapping with each other, or to reduce the overlapping of these positions.

Therefore, according to such a liquid material ejecting apparatus, the variation in the amount of application of the liquid material in the plane direction is reduced, so that the uniform light irradiation in the plane direction can be achieved without changing the application performance of the droplet ejection head. It is possible to obtain a coated article having transmission characteristics and the like.

Further, in forming the liquid material discharge device of the present invention, it is preferable that the droplet discharge heads are arranged in a direction that intersects obliquely with the moving direction of the droplet discharge heads.

With this structure, the interval at which the liquid material is discharged can be made narrower than the actual interval between the nozzle rows, and a finer coating material can be obtained. Further, with this configuration, when a plurality of droplet discharge heads are provided, interference between adjacent droplet discharge heads is prevented,
As a result, the size can be reduced. Further, with this configuration, even if the size of the substrate is changed to some extent, the entire substrate can be coated by appropriately changing the intersecting angle of the droplet discharge heads.

Further, in constructing the liquid material discharge device of the present invention, it is preferable that nozzle arrays corresponding to a plurality of liquid materials are arranged in one droplet discharge head.

With this structure, a simple structure can be obtained in which the positions of the discharge start portion and the discharge end portion corresponding to a plurality of liquid substances do not overlap with each other while the operation itself of the droplet discharge head is simplified. It is possible to provide the discharging device.

Further, in constructing the liquid material discharge device of the present invention, it is preferable that nozzle rows corresponding to a plurality of liquid materials are provided corresponding to a plurality of droplet discharge heads, respectively.

According to this structure, by preparing a plurality of droplet discharge heads having a simple structure having substantially the same dimensional width, the positions of the discharge start portions or discharge end portions of the plurality of liquid substances on the substrate are overlapped. It is possible to provide a discharge device that can obtain a coated material that does not become defective. Further, since there are a plurality of droplet discharge heads, it is possible to perform fine operation in accordance with the type of liquid material, which makes it easier to adjust the position of the discharge start portion or discharge end portion of a plurality of liquid materials. Become.

Further, according to another aspect of the present invention, while the droplet discharge head or the substrate is scanned in the vertical direction, a plurality of color filter materials are sequentially discharged from the nozzle rows corresponding to the respective color filter materials. A color filter manufacturing method and a color filter obtained from the method, wherein the positions of the discharge start portion and the discharge end portion of the working material are made different from each other, or either one of the positions is made different.

By carrying out in this way, since the variation in the coating amount of the color filter material in the plane direction becomes small, a color having a uniform light transmission characteristic in the plane direction without changing the coating performance of the droplet discharge head. You can get a filter.

Another aspect of the present invention is a liquid crystal display device provided with any one of the color filters described above.

Since the color filter having uniform light transmission characteristics in the plane direction is used as described above, it is possible to recognize a color image with stable luminance in the plane direction.

Further, according to another aspect of the present invention, while scanning the droplet discharge head or the substrate in the vertical direction, a plurality of electroluminescent materials are sequentially discharged from the corresponding nozzle rows, and the electroluminescent material is also discharged. The method for manufacturing an electroluminescence device, characterized in that the positions of the ejection start part and the ejection end part, or any one of the positions are made different, and an electroluminescence device obtained therefrom.

By carrying out in this way, since the variation in the coating amount of the electroluminescent material in the plane direction becomes small, the electroluminescence having uniform EL emission characteristics in the plane direction can be obtained without changing the coating performance of the droplet discharge head. The device can be obtained.

Further, according to another aspect of the present invention, while the droplet discharge head or the substrate is scanned in the vertical direction, a plurality of plasma light emitting materials are sequentially discharged from the corresponding nozzle rows, and the plasma light emitting material is also discharged. And a plasma display panel obtained from the method for manufacturing a plasma display panel, characterized in that the positions of the discharge start portion and the discharge end portion, or any one of them are different.

By carrying out in this way, the variation in the coating amount of the plasma light emitting material in the plane direction becomes small, so that the plasma display having uniform plasma emission characteristics in the plane direction without changing the coating performance of the droplet discharge head. You can get a panel.

The method of manufacturing the plasma display panel and the structure of the plasma display panel obtained from the method are not particularly limited. For example, the structure of the plasma display panel 170 shown in FIG. 20 is used. You can

Further, in the liquid material discharging method of the present invention, while scanning a plurality of nozzle rows or substrates in a predetermined direction, different liquid materials corresponding to the respective nozzle rows are discharged onto the substrate. And a scanning step of sequentially ejecting, in the scanning step, a region in which each nozzle row passes through the substrate overlaps a part of a region in which the other nozzle rows pass through the substrate, The positions of both ends of the nozzle row are different from the positions of both ends of the other nozzle row in the direction orthogonal to the predetermined direction.

Furthermore, in the liquid material discharging method of the present invention, while scanning a plurality of nozzle rows or substrates in a predetermined direction, different liquid materials respectively corresponding to the plurality of nozzle rows are discharged onto the substrate. And a scanning step of sequentially ejecting, in the scanning step, a region in which each nozzle row passes through the substrate overlaps a part of a region in which the other nozzle rows pass through the substrate, The position of the first end portion in the nozzle row is substantially the same as the position of the first end portion in the other nozzle rows in the direction orthogonal to the predetermined direction, and the second end in each nozzle row is Is different from the positions of the other second ends of the nozzle rows in the direction orthogonal to the predetermined direction.

Another method for discharging a liquid material of the present invention is
While scanning the first, second and third nozzle rows or the substrate in a predetermined direction, a first liquid material, a second liquid material and a third liquid material are respectively discharged from the first, second and third nozzle rows. And a scanning step of sequentially ejecting the liquid material onto the substrate, wherein in the scanning step, the areas where the first, second, and third nozzle rows pass through the substrate are mutually uniform. Positions of both ends of the first, second, and third nozzle rows that overlap each other are different from each other in a direction orthogonal to the predetermined direction.

Further, according to another method of ejecting a liquid material of the present invention, the first, second and third nozzle rows are scanned while scanning the first, second and third nozzle rows or the substrate in a predetermined direction. And a scanning step of sequentially ejecting a first liquid material, a second liquid material, and a third liquid material onto the substrate, respectively, in the scanning step. And the regions where the third nozzle row passes through the substrate partially overlap each other, and the positions of the first end portions of the first, second, and third nozzle rows are in the direction orthogonal to the predetermined direction. , Substantially the same, said first, second and third
The positions of the second ends of the nozzle rows are different from each other in the direction orthogonal to the predetermined direction.

The above-mentioned liquid material discharging method, liquid material discharging device, color filter manufacturing method and color filter,
In a liquid crystal display device, a method for manufacturing an electroluminescent device and an electroluminescent device, and a method for manufacturing a plasma display panel and a plasma display, a plurality of liquid droplet ejection heads are integrated as a unit in a state where they are arranged and fixed in a predetermined arrangement mode. It is preferable to use

In this case, there may be a case where a plurality of droplet discharge heads arranged so as to form a substantially integrated nozzle row in the unit. In this case, there is a configuration in which the nozzles are arranged continuously (at equal intervals) in a substantially integrated nozzle row. This configuration can be realized by arranging a plurality of droplet discharge heads alternately staggered in the scanning direction. In addition, there is a configuration in which a plurality of ejection widths t are arranged with a predetermined interval s interposed in a substantially integrated nozzle row. When using this configuration, it is preferable that the interval s is the same as the ejection width t. When carrying out the present invention, a plurality of units as described above are provided, and between the substantially integrated nozzle rows in these plurality of units, a discharge start portion and a discharge end portion are mutually provided,
Alternatively, it is preferable to make either one of them different from each other.

When a plurality of droplet discharge heads are provided in the unit, a plurality of nozzle rows may be provided in each droplet discharge head. In this case, it is preferable that the plurality of nozzle rows have different ejection start portions and ejection end portions, or at least one of them.

Further, in the case where a plurality of droplet discharge heads are provided in the unit, the discharge start portion and the discharge end portion, or any one of them, may be different between the droplet discharge heads. Is preferred.

[0058]

BEST MODE FOR CARRYING OUT THE INVENTION A liquid material discharge method, a liquid material discharge device, a color filter manufacturing method and a color filter, a liquid crystal display device using a color filter, an electroluminescent device manufacturing method, and electroluminescence according to the present invention. Embodiments relating to an apparatus, a plasma display panel, and a manufacturing method thereof will be specifically described with reference to the drawings as appropriate.

[First Embodiment] As shown in FIG. 1, the first embodiment is a method for ejecting a liquid material using a droplet ejection head 22, in which the droplet ejection head 22 or the substrate 2 is used. While scanning in the vertical direction, a plurality of liquid substances are sequentially ejected from the corresponding nozzle rows 27 onto the substrate 2, and the ejection start part and the ejection end part of the liquid substance are either or not positioned. This is a method for ejecting a liquid material, which is characterized in that one position is made different.

Hereinafter, the requirements of the discharge mechanism, the plurality of liquid substances, the substrate and the discharge method which constitute the first embodiment will be specifically described.

1. Discharging Mechanism and Discharging Method (1) Discharging Mechanism As the discharging mechanism used in the first embodiment, for example, a plurality of liquid substances in a system using a piezoelectric element,
That is, it is preferable to eject at least two liquid substances of the same or different kinds from the nozzle rows corresponding to each. More specifically, FIGS. 1A and 1B
As shown in FIG. 2, the nozzle row 27 shown in FIG. 2 is provided with a plurality of liquid substances 8, for example, three types of color filter materials corresponding to RGB pixels or YMC pixels by utilizing the bending deformation of the piezoelectric element 41. A method of discharging by the droplet discharge head 22 thus formed is preferable. Note that FIG. 1A is a perspective view including a partial cutout of the droplet discharge head 22 provided with the nozzle row 27, and FIG. 1B is a line JJ shown in FIG. FIG. 3 is a cross-sectional view of the droplet discharge head 22 provided with the nozzle row 27 when cut by, and FIG. 2 is a perspective view of the droplet discharge head 22 shown in FIGS. 1A and 1B and its perspective view. It is a partially enlarged view of a nozzle row.

In the case of such a system using the droplet discharge head 22, the liquid substance flowing into the droplet discharge head 22 from the direction of the arrow 28 in FIG.
By the piezoelectric element 41 provided above the nozzle array 27, regardless of the type of solvent or the like contained in the liquid,
It can be stably ejected as minute droplets.

In addition, other methods can be used as long as a plurality of minute liquid substances can be ejected sequentially. For example, a so-called heating method in which a material is discharged by utilizing bubbles generated by heating can be preferably used in the first embodiment.

(2) Droplet Ejecting Head and Nozzle Row □ Droplet Ejecting Head In the first embodiment, for example, as shown in FIGS. 3 to 6, a plurality of droplet ejecting heads 22 are prepared, and a plurality of droplet ejecting heads are provided. It is preferable to provide the nozzle row 27 corresponding to the liquid material. For example, a plurality of droplet discharge heads respectively corresponding to color filter materials of RGB pixels or YMC pixels are prepared, and each droplet discharge head is
A nozzle row for ejecting a material corresponding to RGB pixels or YMC pixels is provided.

With this structure, the nozzle rows corresponding to a plurality of liquid substances can be drawn extremely finely only by performing a predetermined operation while appropriately controlling the droplet discharge heads corresponding thereto by the CPU or the like. be able to. Therefore, for example, when three droplet discharge heads are prepared corresponding to the evaporation characteristics of a plurality of liquid substances, one droplet discharge head is operated once to apply the liquid substance once, and It is easy to operate the droplet discharge head in the same manner to apply the liquid material twice so that the liquid droplet discharge head can be similarly operated to apply the liquid material in the same manner three times.

Further, when a plurality of droplet discharge heads are prepared, the discharge widths of a plurality of liquid substances can be substantially changed only by making the dimension widths of the plurality of droplet discharge heads in the direction orthogonal to the scanning direction substantially equal. Can be equal to each other. Therefore, by making the positions of the discharge start portion and the discharge end portion of the plurality of liquid substances different or one of them, the variation in the coating amount due to the difference in the coating position in the planar direction is reduced, and so-called Q characteristics are expressed. Without doing so, uniform electro-optical characteristics can be obtained in the obtained coating material.

On the other hand, in the first embodiment, as shown in FIG.
As shown in FIGS.
Nozzle row 27 corresponding to a plurality of liquid substances prepared individually
It is also preferable to provide.

With this structure, the coating device can be made compact as a whole. For example, one droplet discharge head is prepared, and three nozzle rows corresponding to the three liquid substances are provided in the droplet discharge head, so that droplet discharge is performed as compared with the case where three droplet discharge heads are prepared. Not only can the area occupied by the head be reduced, but the area occupied by the drive device or the like corresponding to the droplet discharge head can also be reduced.

When one droplet discharge head is prepared and nozzle rows corresponding to a plurality of liquid substances are provided, as will be described later, the discharge widths of a plurality of liquid substances can easily be made substantially equal. be able to. Therefore, it is possible to easily shift the positions of the discharge end portions of the liquid material only by shifting the positions of the discharge start portions corresponding to the plurality of liquid materials so as not to overlap each other. In FIGS. 7A to 7D, L
This is indicated by the fact that the straight lines of 1, L2, L3, L4, L6, and L7 are inclined and displayed.

Discharge Width In the first embodiment, as shown in FIG. 3 or FIG. 7A, it is preferable that the discharge widths of the nozzle rows corresponding to the plurality of liquid substances are substantially equal to each other.

For example, as shown in FIG. 3, when the ejection width in the first liquid material nozzle row is t1 (mm), the second liquid material nozzle row and the third liquid material nozzle row The ejection width in each nozzle row is set to t1 (mm).

With this structure, the positions (P1, P2, P3) of the discharge start portions corresponding to a plurality of liquid substances are formed.
The positions (P4, P5, P6) of the discharge end portions of the liquid material can also be correspondingly shifted by merely shifting so as not to overlap each other.

Therefore, a large amount of the liquid substance is not repeatedly applied at the ejection start portion and the ejection end portion, and the variation in the application amount between the plurality of liquid substances in the plane direction is reduced. Therefore, it is possible to obtain uniform electro-optical characteristics and the like in the obtained coated product.

On the other hand, in the first embodiment, as shown in FIGS. 4 to 6 or FIGS. 7B to 7D, the ejection widths in the nozzle rows corresponding to a plurality of liquid substances may be different from each other. preferable.

For example, as shown in FIG. 5, when the ejection width in the first liquid material nozzle row is t (mm), the ejection width in the second liquid material nozzle row is 1.2.
Xt (mm), and the ejection width in the nozzle row for the third liquid material is 1.4 x t (mm).

With this configuration, even if the positions (P7) of the discharge start portions corresponding to a plurality of liquid substances are matched, the positions (P8, P9, P, P8, P9, P) of the discharge end portions of the liquid substances are matched.
10) can be shifted corresponding to the ejection width in the nozzle row. Therefore, a large amount of liquid material is not repeatedly applied at the discharge end portion,
The variation in the applied amount of the liquid substance in the plane direction is reduced. Therefore, it is possible to effectively prevent the color unevenness from being observed at the boundary between the adjacent scanning regions, and as a result, it is possible to obtain uniform electro-optical characteristics.

□ Position of End of Nozzle Row In the first embodiment, different positions of both ends or any one of the positions of the nozzle row corresponding to a plurality of liquid substances are different from each other in the discharge start portion and the discharge end portion described later. However, it is preferable to make them different as shown in FIGS. 3 to 7, for example.

According to this structure, it is possible to use all the nozzle holes in the nozzle row to make the positions of the discharge start portion and the discharge end portion of the plurality of liquid substances different from each other.

3 and 4 show an example in which the positions of both ends of the nozzle row are different in a plurality of droplet discharge heads, and FIGS. 5 and 6 show a plurality of droplet discharge heads. 7 is an example in which the positions of one end of the nozzle row are made different, and FIG. 7 is an example in which the positions of both ends of the nozzle row are made different in one droplet discharge head.

(4) Discharge start portion and discharge end portion In the first embodiment, as shown in FIGS. 3 to 7, the positions of the discharge start portion and the discharge end portion of a plurality of liquid substances, or either one of them. It is characterized by different positions. For example, in the case of FIG. 3, the positions of P1, P2, and P3 as the ejection start portions are different among the plurality of droplet ejection heads, and P4 and P as the ejection start portions are different.
The positions of P5 and P6 are also different.

On the contrary, the reason for such a construction is that, when the positions of the discharge start portion and the discharge end portion of a plurality of liquid substances are the same, due to the material discharge characteristic (Q characteristic) as described above, This is because a plurality of liquid substances, for example, RGB color filter materials are repeatedly applied in large amounts at the ejection start portion and the ejection end portion. Therefore, when the positions of the ejection start portion and the ejection end portion are the same, the variation in the coating amount due to the difference in the position in the plane direction becomes large, and color unevenness is observed at the boundary between adjacent scanning regions, or in the plane direction. This is because the light transmission characteristics and the like may become uneven.

Further, when the positions of the discharge start portion and the discharge end portion of a plurality of liquid substances are made to differ from each other, for example, the magnitude of the difference is divided by the discharge width by the number of liquid substances to be applied. A value is preferable.

For example, three kinds of liquid substances, for example, RGB
When a color filter material corresponding to pixels is prepared and the ejection width is set to 3t (mm), the ejection width (3t) is divided by the number of liquid substances (3 pieces) to be applied, and the deviation amount is t (mm ) Is preferable. When carried out in this manner, the discharge start portion and the discharge end portion of the plurality of liquid substances are evenly arranged in the applied substance,
The variation in the coating amount in the plane direction is further reduced.

Further, the magnitude of the deviation at the discharge start portion and the discharge end portion of the plurality of liquid substances is specifically set to 0.1 to 10.
A value within the range of 50 mm is preferable. The reason for this is that if the size of the deviation is less than 0.1 mm, color unevenness may be observed at the boundary between adjacent scanning areas, while if it exceeds 50 mm, any liquid material is applied. This is because the area of the non-coated portion that is not covered may increase.

Therefore, the amount of deviation at the discharge start portion and the discharge end portion of a plurality of liquid substances is 0.2 to 30.
It is more preferable to set the value within the range of mm, and 0.3 to
It is more preferable to set the value within the range of 15 mm.

Not only in the first embodiment, but also in other embodiments described later, the position of the discharge start portion of the plurality of liquid substances is substantially the same as when the discharge of the plurality of liquid substances is started. It means the printing position (starting point) of the coating material that has been printed and applied. Further, in the case where all the nozzle holes in the nozzle row are used in applying the liquid material, the position of the ejection start portion substantially coincides with the position of the end portion of the nozzle row.

Similarly, the position of the discharge end portion of the plurality of liquid materials means the printing position (end point) of the applied material substantially applied by printing at the time when the discharge of the plurality of liquid materials is completed. . In addition, when applying all the nozzle holes in the nozzle row when applying the liquid material,
The position of the ejection end portion substantially coincides with the position of the end portion of the nozzle row.

Further, as shown in FIGS. 3 to 7, a small distance is usually provided from the edge of the liquid droplet ejection head to the position of the nozzle row. And the position of the discharge end portion can be the edge portions at both ends of the droplet discharge head.

Further, in the first embodiment, as an example of a configuration in which the positions of the discharge start portion and the discharge end portion of the plurality of liquid substances are made different, the number of liquid droplet discharge heads and the liquid substance are set. From the relationship of the ejection width, the modes shown in Table 1 below can be mentioned. For easy understanding of the configuration example, reference drawing numbers corresponding to the configuration example are also shown.

[0090]

[Table 1]

2. Plural liquids (1) types The plural liquids are not particularly limited in type,
For example, pigment ink, dye ink, color filter material (sometimes referred to as filter element material),
An electroluminescent material (including a hole transporting material, an electron transporting material, and the like), a plasma light emitting material, and the like can be given.

Further, a plurality of kinds of liquid substances are appropriately selected, and the amount of solvent and the like are determined.
It is preferable to set the value within the range of 30 mPa · s (measurement temperature: 25 °, the same applies hereinafter).

The reason for this is that the solution viscosity is 1 mPa ·
This is because if the value is less than s, it may be difficult to form a thick film in the coated material, while if the solution viscosity exceeds 30 mPa · s, the nozzle portion may be clogged or evenly distributed. This is because it may be difficult to form a coated article having a thickness. Therefore, since the balance between the thickening of the coated material and the uniformity of the thickness of the coated material becomes better, a plurality of types of the liquid material and the like are appropriately selected and the solution viscosity is 2 to 10 mPa · s.
It is more preferable to set the value within the range of 3 to 8 mPa
It is more preferable to set the value within the range of s.

The solution viscosities of a plurality of liquid substances are
It is also preferable to select it appropriately according to the application of the coated product.
For example, when a color filter is prepared, it is desired to increase the solution viscosity to 6 to 8 because it is desired to increase the film thickness because of the color purity.
It is more preferable to set the value within the range of mPa · s.

(2) Application Material There is no particular limitation on the type of application material composed of a plurality of liquid materials, and for example, a color filter material (which may be referred to as a filter element material) as described later. And a light emitting medium in an electroluminescent device, a light emitting medium (phosphor) in a plasma display panel, and the like.

3. The substrate on which the liquid material is applied is not particularly limited, but it is preferable to use, for example, a polyester film, a polysulfone film, a polypropylene film, a cellulose acetate film, a TAC film, a glass substrate, a ceramic substrate, or the like.

Although the thickness of the substrate is not particularly limited, it is preferably set to a value within the range of 10 μm to 5 mm, for example.

[Second Embodiment] Next, a second embodiment according to the present invention will be described with reference to FIGS. This embodiment is characterized in that a plurality of droplet discharge heads are arranged in a predetermined manner and used as one droplet discharge unit. Usually, the shape, array pattern, size (area), etc. of a film structure (planar pattern) to be formed by discharging droplets are different depending on the use, type, form, etc. of a manufacturing target (substrate, etc.). In order to form such various dimensional structures, preparing a droplet discharge head corresponding to each manufacturing object causes an increase in manufacturing cost and also causes deterioration of manufacturing efficiency. Become. Therefore, in the present embodiment, a plurality of droplet discharge heads are arranged in a predetermined manner and used integrally to form a nozzle array according to the shape, array pattern, size, etc. of the manufacturing target. .

(Structural Example 1) In Structural Example 1 shown in FIG. 8, a plurality of droplet discharge heads 22 are mounted on the sub-carriage 25. The droplet discharge head 22 is basically configured in the same manner as the droplet discharge head described in the first embodiment. Each droplet discharge head 22 is provided with a plurality of nozzles 27 as described above, and these nozzles 27 are arranged in a predetermined direction to form a nozzle row 28. The illustrated example shows an example in which two rows of nozzle rows 28 are formed in each of the droplet discharge heads 22. Here, one droplet discharge nozzle 2
The number of nozzle rows 28 provided in 2 is 2 as in the illustrated example.
The number of rows is not limited to one, and may be one or three or more.

The plurality of droplet discharge heads 22 are fixed to the sub-carriage 25, and are used in the same manner as one droplet discharge head shown in FIGS. 3 to 6 of the first embodiment. To be Also in the usage mode, the individual droplet discharge heads 2 with respect to the scanning direction (main scanning direction) and the direction (sub-scanning direction) orthogonal to this scanning direction.
The posture of No. 2 is used in the state set similarly to the first embodiment. When the formation pitch of the plurality of nozzles 27 (nozzle cycle of the nozzle row 28) formed on the droplet discharge head 22 does not match the manufacturing target, the arrangement direction of the nozzle rows 28 is orthogonal to the scanning direction. It can also be used in a posture inclined at a predetermined inclination angle (normally more than 0 degree and less than 90 degrees, typically 60 degrees or less) with respect to the direction.

The plurality of droplet discharge heads 22 are arranged in a direction (horizontal direction in the drawing) orthogonal to the scanning direction (vertical direction in the drawing). Further, they are arranged at different positions as seen in the scanning direction. More specifically, the rows of the droplet discharge heads 22 arranged in the scanning direction are arranged in two rows when viewed in the scanning direction.
Further, when viewed in a direction orthogonal to the scanning direction, the droplet discharge heads 22 are alternately arranged before and after the scanning direction. The nozzles 27 provided in the plurality of droplet discharge heads 22 are arranged on the sub-carriage 25 as a whole at equal intervals in the direction orthogonal to the scanning direction.

Generally, the nozzle 27 cannot be provided in the vicinity of the end of the droplet discharge head 22 due to structural restrictions.
Even if it could be provided, the ejection characteristics would be significantly deteriorated. Therefore, a region in which the nozzles 27 are not formed exists near the end of the droplet discharge head 22. Therefore, when the plurality of droplet discharge heads 22 are linearly arranged, A region where the nozzle 27 does not exist is formed in a portion where the ends of the above are adjacent to each other. Therefore, by arranging the plurality of droplet discharge heads 22 in an alternating manner as described above, the plurality of droplet discharge heads 22
The nozzles 27 are arranged at equal intervals in the direction orthogonal to the scanning direction.

In the present embodiment, by arranging the droplet ejection heads 22 having the ejection width t, the ejection width 25t obtained by integrating all the ejection widths t of the plurality of droplet ejection heads 22 is obtained. In the illustrated example, the ejection widths t of the nozzle rows 28 of the plurality of droplet ejection heads 22 are all the same, but different ejection widths t may be provided. Further, the nozzles 27 may be arranged continuously over the plurality of droplet discharge heads 22 regardless of the configuration of each of the plurality of droplet discharge heads 22.

The sub-carriage 25 to which the plurality of droplet discharge units 22 are attached as described above is, for example,
It is incorporated in a head unit 26 of a third embodiment, which will be described later, and moves in a scanning direction (main scanning direction X) and a direction (sub-scanning direction Y) orthogonal thereto by the relative driving of the head unit 26 with respect to a manufacturing target (substrate). To be done.

FIG. 9 shows the relative positional relationship between the droplet discharge heads 22 when the droplet discharge heads 22 are used when a plurality of pairs of the droplet discharge heads 22 arranged as described above are provided. Not shown is the target of production. Here, the set of droplet discharge heads 22 shown in FIG. 8 will be referred to as droplet discharge units 25A, 25B, and 25C. These plurality of droplet discharge units 25A, 25B, 25C
Are used in a posture in which the nozzle arrays 28 are arranged in the same direction.

In the illustrated example, the droplet discharge units 25A, 2A
5B and 25C all include the same shape of the droplet discharge head 22 and have the same arrangement mode. Further, each of the droplet discharge units 25A, 25B, 25C,
The ejection widths t1 and t of the individual droplet ejection heads 22 as a whole
Discharge width 25t1, 25t2, 25t obtained by adding 2 and t3
Equipped with 3. Here, in the illustrated example, each ejection width t
1 to t3 are the same as each other, and therefore the ejection width 25t1
.About.25t3 are also identical to each other. Then, the plurality of droplet discharge units 25A, 25B, and 25C configured as described above, when viewed in a direction orthogonal to the scanning direction, positions P21 to P23 of their discharge start portions.
Are arranged so that they are different from each other. Further, in the present embodiment, the plurality of droplet discharge units 25A, 25B, 25C are provided.
Are arranged so that the positions P24 to P26 of the discharge end portions are different from each other.

As shown in FIG. 9, the droplet discharge units 25A, 25B and 25C configured as described above respectively have positions P21 to P23 of the discharge start portion and position P of the discharge end portion.
By using 24 to P26 differently, the same effect as in the first embodiment can be obtained, and a larger number of droplets can be ejected by one scanning, which improves productivity. Can be made. Moreover, since it is possible to use the existing droplet discharge heads 22 in appropriate combination according to the manufacturing target, it is possible to improve the adaptability to the manufacturing target.

The above-mentioned droplet discharge units 25A, 2
5B and 25C can also be individually applied to a common manufacturing target (substrate). For example, after the above-described manufacturing target is processed by using the droplet discharging device including the droplet discharging unit 25A, the manufacturing target is set in the droplet discharging device including the droplet discharging unit 25B and the processing is performed. It is just like doing it. Further, these droplet discharge units 25A, 25B, 25C can be applied to the above-mentioned manufacturing object at the same time. For example, a plurality of droplet discharge units are all mounted integrally, and droplets are discharged from each unit in parallel at the same time.

In addition, the above-mentioned droplet discharge units 25A, 2
5B and 25C have the same ejection width 25t1 to 25t3
However, the ejection widths 25t1 to 25t3 may be different from each other. In this case, the plurality of droplet discharge units 25A, 25B, 25C
The ejection widths 25t1 to 25t3 may be arranged to have the same relative positional relationship as the ejection widths of the plurality of droplet ejection heads 22 shown in FIGS. 4 to 6 of the first embodiment. That is, both the positions of the discharge start portion and the discharge end portion are different (corresponding to FIG. 4), and the position of the discharge start portion is the same but the position of the discharge end portion is different (corresponding to FIG. 5). ), The position of the discharge start portion is different, but the position of the discharge end portion is the same (corresponding to FIG. 6).

(Structural Example 2) Next, a structural example 2 will be described with reference to FIGS. In this configuration example 2, as shown in FIG. 10, a plurality of droplet discharge heads 22 are arranged in a line in a direction orthogonal to the scanning direction (sub-scanning direction Y). A space is provided between the nozzles at both ends of each of the arranged droplet discharge heads 22. That is,
In the configuration example 2, unlike the configuration example 1, the nozzles 27 do not have a continuous and integrated ejection width, and the ejection width t by the nozzle rows 28 provided in the individual droplet ejection heads 22 is the interval s. Are separated from each other. This interval s is preferably the same as the ejection width t of the droplet ejection head 22 as in the illustrated example. It should be noted that the point that the plurality of droplet discharge heads 22 are mounted on the common sub-carriage 25 is the above-mentioned configuration example
Is the same as.

FIG. 11 shows a plurality of droplet discharge units 25D, 25E, which are constructed as shown in FIG.
It shows a relative positional relationship between 25F. Also in the configuration example 2, as in the configuration example 1 described above, the plurality of droplet discharge units 25D, 25E, and 25F have the discharge widths t1 and t.
2, t3 and intervals s1, s2, s3. here,
As in the illustrated example, the discharge widths t1 to t3 between the droplet discharges.
May be the same as each other, and the intervals s1 to s3 may be the same. Further, in the illustrated example, the ejection width and the number of intervals arranged in the direction orthogonal to the scanning direction are also the same among the units. Further, the positions P21 to
P23 is a plurality of droplet discharge units 25D, 25E, 2
They are arranged at positions different from each other with respect to 5F. Furthermore, a plurality of droplet discharge units 25D, 25E, 25F
The discharge end positions P24 to P26 are also different from each other.

As described above, each droplet discharge unit 25D,
In each of 25E and 25F, a space is provided between the droplet discharge heads 22, so that the area 11 to be manufactured (corresponding to a color filter forming area described later) is scanned as shown in FIG. In a scanning step (indicated by a downward arrow in the drawing) ST1 for scanning in the direction, the portion k corresponding to the interval s is left unprocessed. Therefore, in addition to the above-mentioned scanning step ST1, δY = t = in the direction perpendicular to the scanning direction of the droplet discharge unit.
The scanning step ST2 is performed in a state where the scanning step ST2 is performed.
Here, in the illustrated example, the scanning directions in the scanning step ST1 and the scanning step ST2 are opposite to each other. Thereby, for example, after performing the scanning step ST1 on the outward path, the backward scanning step ST2 can be performed on the return path. However, the scanning step ST2 may be performed in the same direction as the scanning step ST1. In addition, the method shown in FIG. 17 described later (method in which the scanning step is slightly shifted in the sub-scanning direction Y and repeated)
However, although the number of required scanning steps is increased, the processing can be performed as it is.

(Structure Example 3) Next, Structure Example 3 will be described with reference to FIG. In this configuration example 3, FIG.
The droplet discharge head 22 having the same structure as the droplet discharge head shown in FIG. That is, the droplet discharge head 22 includes a plurality of nozzle rows 28A arranged in the scanning direction,
28B and 28C, and these nozzle rows 28A and 28
B and 28C are arranged at positions displaced in the direction orthogonal to the scanning direction. In the illustrated example, similarly to the structure shown in FIG. 7A, the nozzle rows 28A, 28B, 28C have the same ejection widths ta, tb, tc, and both the ejection start portion and the ejection end portion are different from each other. Are arranged as follows. However, the ejection widths ta, tb, and tc of the nozzle rows may be different from each other, and the nozzle rows may be formed in the positional relationship shown in FIGS. 7B to 7D. That is, the ejection widths of the nozzle rows are different from each other, and the positions of the ejection start portion and the ejection end portion are different (corresponding to FIG. 7B). The positions of the parts are different (corresponding to FIG. 7C), and the positions of the discharge start parts are different, but the positions of the discharge end parts are different (corresponding to FIG. 7D). In addition, also in the configuration example 3, each droplet discharge head 22 is mounted on the common sub-carriage 25.

Similar to the configuration example 1, the droplet discharge heads 22 are arranged so as to be staggered in the scanning direction in the direction orthogonal to the scanning direction. At this time, the nozzle rows 28A of each droplet discharge head 22 are continuous with each other in a direction orthogonal to the scanning direction without a gap, the nozzle rows 28B are continuous in the same direction without a gap, and the nozzle rows 28C are the same without a gap. A plurality of droplet discharge heads 2 so as to be continuous in the direction.
Two are arranged relative to each other. With such a configuration, in this configuration example, the ejection width 25t in which the positions of the ejection start portion and the ejection end portion are different by one droplet ejection unit
a, 25tb, 25tc are provided.
Here, the positions of one of the discharge start portion and the discharge end portion may be different from each other, and the other may be the same.

In this configuration example 3, each droplet discharge head 22
Since a plurality of nozzle rows 28A, 28B, 28C having different positions of the discharge start portion or the discharge end portion are provided in
The same effect as in the above configuration example can be obtained by scanning only one unit equipped with this set of droplet discharge heads. The droplet discharge unit 22 of the configuration example 3 is
Like one droplet discharge unit shown in the above configuration example 2,
You may arrange in a line with a space | interval mutually. Even in this case, the same effect as that of the above configuration example can be obtained with only one unit.

(Structure Example 4) Next, Structure Example 4 will be described with reference to FIGS. The configuration example 4 is similar to the configuration examples 1 to 3 in that the plurality of droplet discharge units 22 'are arranged in a predetermined positional relationship, but between the plurality of droplet discharge units 22'. The positions of the discharge start portion and the discharge end portion are different from each other.

That is, in the example shown in FIG. 14, although the ejection widths of the plurality of droplet ejection heads 22 'are all the same, they are arranged so that their positions are displaced from each other in the arrangement direction of the nozzles 27, and the ejection start portion is arranged. And the position of the discharge end portion are different between the droplet discharge heads 22 '. Further, in the example shown in FIG.
Nozzle row 28 provided in A ', 22B', 22C '
A ', 28B', and 28C 'have different ejection widths, the positions of the ejection start portions are all the same, but the positions of the ejection end portions are different from each other. In this case, the positions of the discharge start parts are different, but the positions of the discharge end parts may be the same, or both the positions of the discharge start part and the discharge end part may be different. Good. Also in this configuration example 4, the positions of the discharge start portion or the discharge end portion are different between the plurality of droplet discharge heads, so that the same effect as the above configuration example can be obtained.

As described above, according to the present invention, when a plurality of nozzle rows having a plurality of droplet ejection nozzles relatively eject in the scanning direction to eject droplets, the ejection start portion of each nozzle row is ejected. Alternatively, the positions of the discharge end portions are made different from each other. For example, as in the above-described first embodiment, the end positions of a plurality of droplet discharge heads each having a nozzle row are made different from each other, or a plurality of nozzles provided in one droplet discharge head. The positions of the ends of the rows may be different from each other. Further, as in the above configuration example, in the case of configuring an integrated droplet discharge unit in which a plurality of droplet discharge heads are relatively fixed in a predetermined positional relationship, a plurality of droplet discharge units are used. The positions of the ejection start portion or the ejection end portion between the plurality of droplet ejection units are made different from each other, or the ejection start portion or the ejection end portion of the plurality of droplet ejection heads in one droplet ejection unit is different. Different positions, or a plurality of nozzle rows are provided in each of the plurality of droplet discharge heads in one droplet discharge unit, and the positions of the discharge start portion or the discharge end portion of these plurality of nozzle rows are mutually changed. Can be different.

[Third Embodiment] The third embodiment is an apparatus for ejecting a liquid material having a droplet ejection head as schematically shown in FIG. A plurality of liquid substances are sequentially discharged while scanning in the direction, and a nozzle row for changing the position of the discharge start portion and the discharge end portion of the plurality of liquid substances, or any one of them is provided in the droplet discharge head. It is an apparatus for ejecting a liquid material characterized by being provided.

Hereinafter, the description of the same contents as those in the first embodiment will be omitted as appropriate, and the different points of the liquid material discharge device in the third embodiment will be mainly described.

1. The discharge mechanism method in the third embodiment can also have the same method as that in the first embodiment, and thus the description thereof is omitted here.

2. Liquid Material In the third embodiment as well, the same content of liquid material as in the first embodiment can be used, and therefore description thereof is omitted here.

3. Ejection Device The ejection device 16 according to the third embodiment is, as shown in FIG. 16, a head unit 2 including a droplet ejection head 22.
6, a head position control device 17 for controlling the position of the head 22, a substrate position control device 18 for controlling the position of the mother substrate, and the head 22 in the scanning direction (main operation direction X) with respect to the mother substrate. ), A main scanning driving device 19 for moving the head 22 in the main scanning direction, a sub-scanning driving device 21 for moving the head 22 in the sub-scanning direction (sub-scanning direction Y) with respect to the mother substrate, and a mother. A substrate supply device (not shown) for externally supplying a substrate to a predetermined work position in the droplet discharge device 16, and the droplet discharge device 1.
A control device (not shown) that controls the overall control of 6.
It is preferable to have and respectively.

Hereinafter, assuming the case where a color filter is mainly manufactured, each structure and action of the ejection device 16 will be described.

(1) Droplet Discharging Head □ Structure In the third embodiment, the head 22 preferably has an internal structure as shown in FIGS. 1 (a) and 1 (b).

Specifically, the head 22 includes, for example, a nozzle plate 29 made of stainless steel and a diaphragm 3 facing the nozzle plate 29.
It is preferable to have 1 and the some partition member 32 which joins them together. A plurality of material chambers 33 and a liquid pool 34 are formed by the partition member 32 between the nozzle plate 29 and the vibration plate 31, and a passage is provided between the plurality of material chambers 33 and the liquid pool 34. 38 to communicate with each other.

A material supply hole 36 is formed at an appropriate position of the diaphragm 31, and the material supply device 3 is inserted into the material supply hole 36.
7 will be connected. This material supply device 37 is
One of the filter element materials (M), eg RGB
The material supply hole 3 is a liquid material of the filter element material (M) corresponding to the R pixel of the pixels or the filter element material (M) corresponding to the Y pixel of the YMC pixels.
Supply to 6. Then, the supplied filter element material fills the liquid pool 34 and further fills the material chamber 33 through the passage 38.

The nozzle plate 29 has a material chamber 3
A nozzle row 27 for jetting the filter element material (M) from 3 in the form of a jet is provided. And
A material pressing body 39 is attached to the rear surface of the surface of the diaphragm 31 where the material chamber 33 is formed so as to correspond to the material chamber 33. As shown in FIG. 1B, this material pressurizing body 39 preferably has a piezoelectric element 41 and a pair of electrodes 42a and 42b which sandwich the piezoelectric element 41.

The piezoelectric element 41 has a function of bending and deforming by the energization of the electrodes 42a and 42b so as to project to the outside indicated by the arrow C, thereby increasing the volume of the material chamber 33. Therefore, the filter element material (M) corresponding to the increased volume is stored in the liquid pool 3
4 through the passage 38 to the material chamber 33.

Next, when the energization of the piezoelectric element 41 is released, the piezoelectric element 41 and the diaphragm 31 return to their original shape. As a result, the material chamber 33 also returns to its original volume, so that the pressure of the filter element material (M) inside the material chamber 33 rises and the filter element material (M) from the nozzle row 27 to the mother substrate 12 is increased. Droplet 8
Will be gushing out.

Relationship between Droplet Ejection Head and Nozzle Row of Liquid Material In the third embodiment, as shown in FIG. 7, the nozzle row 27 corresponding to a plurality of liquid materials ejects one droplet. It is preferable that the head 22 is appropriately arranged.

For example, the first liquid nozzle row, the second
When the nozzle row for the liquid material and the nozzle row for the third liquid material are provided,
In one droplet discharge head, three rows corresponding to each of them are arranged, or the first to third nozzle rows are arranged side by side in the lateral direction, or a combination thereof.

According to this structure, a droplet discharge head and a drive system device for the droplet discharge head are prepared, and a coating material in which the positions of the discharge start portion and the discharge end portion corresponding to a plurality of liquid substances do not overlap is obtained. be able to. Therefore, a discharge device that can obtain a coated material in which the positions of the discharge start portions or discharge end portions of a plurality of liquid substances on the substrate do not overlap with each other or the overlap of these portions is small, and has a simple structure as a whole Can be provided.

Further, with this configuration, even when a plurality of liquid substances are ejected simultaneously, since there is only one droplet ejection head, the droplet ejection heads may come into contact with each other during operation, There is no risk of collision.

It is preferable that the plurality of nozzle rows provided in one droplet discharge head are arranged at substantially equal intervals. With this configuration, it is possible to accurately form a coated article having a regular predetermined pattern.

Further, it is preferable that the droplet discharge head has a generally rectangular shape and that a plurality of nozzle rows are arranged along the edge of the long piece. With such a configuration, the droplet discharge head can be downsized, and a coating material having a regular predetermined pattern can be accurately formed.

Furthermore, it is preferable that the shapes and the numbers of the plurality of nozzle rows provided in one droplet discharge head and corresponding to the plurality of liquid substances are substantially the same and the same. With such a configuration, the arrangement of the plurality of nozzle rows in the droplet discharge head is facilitated, and the discharge amounts of the plurality of liquid substances are made uniform, respectively, and the coating material having a regular predetermined pattern is formed. Can be formed with high precision.

On the other hand, in the third embodiment, as shown in FIGS. 3 to 6, the nozzle row 27 corresponding to a plurality of liquid substances.
It is also preferable to provide each of the plurality of droplet discharge heads 22 in association with each other. For example, when a nozzle row for the first liquid material, a nozzle row for the second liquid material, and a nozzle row for the third liquid material are provided, the nozzle rows for the three liquid materials are made to correspond to each other. The first droplet discharge head, the second droplet discharge head, and the third droplet discharge head are provided.

According to this structure, by preparing a plurality of droplet discharge heads having substantially the same dimensional width corresponding to the number of the liquid substances, the discharge start portion or the discharge end portion of the plurality of liquid substances on the substrate can be formed. It is possible to provide a discharging device that can obtain coated objects whose positions do not overlap each other.

Further, since there are a plurality of droplet discharge heads, the liquid discharge heads can be individually operated according to the type of liquid material. Therefore, the positions of the discharge start portion or discharge end portion of a plurality of liquid materials can be adjusted. Will be even easier.

Even when nozzle rows corresponding to a plurality of liquid substances are provided corresponding to a plurality of droplet discharge heads, respectively, as in the case of providing one droplet discharge head, a plurality of nozzles are provided. It is preferable that the rows are arranged at substantially equal intervals, and the droplet discharge head is formed into a generally long rectangular shape, and a plurality of nozzle rows are arranged along the edge of the long piece. It is preferable that the shapes and the numbers of the plurality of nozzle rows are substantially the same and the same.

Further, as shown in FIG. 17, it is preferable that the droplet discharge heads 22 are arranged so as to be inclined. That is, it is preferable that the droplet discharge heads 22 are arranged in a direction that intersects obliquely with respect to a direction (sub-scanning direction Y) perpendicular to the moving direction (main scanning direction X). Specifically, the tilt angle (θ) shown in FIG. 17 is preferably set to a value within the range of 1 to 60 °, more preferably set to a value within the range of 10 to 50 °, and more preferably 20 to 45 °. It is more preferable to set the value within the range.

With this structure, the actual interval for discharging one liquid material (denoted by δ in FIG. 17) is the interval between nozzle rows corresponding to one liquid material (L / in FIG. 17).
Notated as 3. ) Can be narrower than. Therefore, a finer drawing pattern can be obtained on a coated object such as a color filter as shown in FIG.

Further, with this structure, even when a plurality of droplet discharge heads are provided, it is possible to prevent interference between adjacent droplet discharge heads.
Therefore, the size of the droplet discharge head can be reduced.

Further, by constructing in this way,
Even if the size of the substrate changes a little, the entire substrate can be coated by appropriately changing the angle at which the droplet discharge heads intersect. That is, when the size of the substrate is relatively large, it is possible to apply a plurality of liquid substances to the entire substrate by making the tilt angle θ relatively small. On the other hand, even when the size of the substrate is relatively small, the tilt angle θ is made relatively large so that a plurality of liquid substances can be applied to the entire substrate without replacing the droplet discharge head. Is possible.

(2) Substrate Position Control Device and Substrate Supply Device □ Substrate Position Control Device In the third embodiment, the substrate position control device 18 shown in FIG. 16 includes a table 49 for mounting a mother substrate. It is preferable to have a θ motor 51 for rotating the table 49 in a plane as indicated by an arrow θ.

The main scanning drive device 19 shown in FIG.
Is an X guide rail 52 extending in the main scanning direction X, and an X slider 53 incorporating a pulse-driven linear motor.
And preferably. With this configuration,
When the built-in linear motor operates, the X slider 53 can move in parallel in the main scanning direction along the X guide rail 52.

Further, the sub-scanning drive device 21 shown in FIG.
Is a Y guide rail 54 extending in the sub-scanning direction Y, and a Y slider 56 incorporating a pulse-driven linear motor.
And preferably. With this configuration, the Y slider 56 is configured to move along the Y guide rail 54 in the sub-scanning direction Y when the built-in linear motor operates.
It becomes possible to move parallel to.

□ Substrate Supply Device In the third embodiment, although not shown, a substrate supply device is provided, and the substrate supply device includes a substrate accommodation unit for accommodating a mother substrate, and a robot for conveying the mother substrate. It is preferable to have

Here, the robot includes a base placed on an installation surface such as a floor or the ground, an elevator shaft that moves up and down with respect to the base, and a first arm that rotates about the elevator shaft.
It is preferable to have a second arm that rotates with respect to the first arm, and a suction pad provided on the lower surface of the tip of the second arm.

(3) Control Unit In the third embodiment, the control device as a control unit is a computer main body unit containing a processor, a keyboard as an input device, and a CRT (Cathode-Ray) as a display device. Tube) display.

Here, as shown in FIG. 18, the processor is a CPU (Central Processing) for performing arithmetic processing.
Unit) 69 and a memory for storing various information, that is, an information storage medium 71. Then, the CPU 69 performs control for ejecting ink, that is, the filter element material 13 to a predetermined position on the mother substrate according to program software stored in the memory which is the information storage medium 71.

The head position control device 1 shown in FIG.
7, the substrate position control device 18, the main scanning drive device 19, the sub-scanning drive device 21, and each device of the head drive circuit for driving the piezoelectric element 41 in the head 22, as shown in FIG. Interface 73 and bus 74
It is preferably connected to the CPU 69 via.

Further, since the control is easy, the substrate supply device 23, the input device 67, the CRT display 6
It is preferable that each of the electronic balance 78, the electronic balance 78, the cleaning device 77, and the capping device 76 is also connected to the CPU 69 via the input / output interface 73 and the bus 74.

As shown in FIG. 18, the CPU 69, as a concrete function realizing section, performs a cleaning calculating section for performing a cleaning process and a capping calculation for realizing a capping process. It is preferable to have a unit, a weight measurement calculation unit that performs calculation for realizing weight measurement using an electronic balance, and a drawing calculation unit that performs calculation for drawing a material by droplet ejection.

That is, the drawing calculation unit controls the drawing start position calculation unit for setting the head 22 to the initial position for drawing and the control for scanning and moving the head 22 in the main scanning direction X at a predetermined speed. A main scanning control calculation unit for calculation,
A sub-scanning control calculation unit that calculates control for shifting the mother substrate in the sub-scanning direction Y by a predetermined sub-scanning amount, and the head 22.
A nozzle discharge control calculation unit that performs a calculation for controlling which of the plurality of nozzle rows 27 in the nozzle array 27 is operated to discharge ink, that is, a filter element material,
It is preferable to have

(4) Other Components Further, in the third embodiment, it is below the locus of the head that is driven by the main scanning drive device to move in the main scanning,
It is preferable to dispose the capping device and the cleaning device on one side of the sub-scanning drive device. Further, it is preferable to dispose an electronic balance at the other side position of the sub-scanning drive device.

Here, the cleaning device is a device for cleaning the head. In addition, the electronic balance measures the weight of the droplets of the material ejected from each nozzle row in the head,
A device that measures each nozzle. The capping device is a device for preventing the nozzle row from drying when the head is in the standby state.

Further, in the vicinity of the head, a head camera for facilitating the position alignment is preferably provided so as to move integrally with the head. Also, the board camera supported by the supporting device provided on the base is
It is preferable that the mother board is arranged at a position where an image can be taken.

[Fourth Embodiment] The fourth embodiment is a method of manufacturing a color filter, in which a plurality of color filter materials are sequentially ejected from respective nozzle rows corresponding to the plurality of color filter materials. It is characterized in that the positions of the discharge start portion and the discharge end portion of the material, or either one of them, are made different.

Hereinafter, description of the same contents as in the first to third embodiments will be omitted as appropriate, and the description will focus on the differences in the method of manufacturing the color filter and the color filter in the fourth embodiment.

1. Method of Manufacturing Color Filter (1) Formation of Partition Walls FIG. 19 schematically shows a method of manufacturing the color filter 1 in the order of steps. Then, in the fourth embodiment, first, the partition walls 6 are formed on the surface of the mother substrate 12 with a resin material having no light-transmitting property in a grid pattern when viewed in the direction of arrow B.

The grid hole portion 7 in this grid pattern corresponds to a region where the filter element 3 will be formed in the future, that is, a filter element forming region. Therefore, in order to obtain a good resolution, it is preferable that the planar dimension of each filter element forming region 7 formed by the partition wall 6 when viewed from the direction of the arrow B is, for example, 30 μm × 100 μm. .

Further, the partition wall 6 preferably has a function of blocking the flow of the filter element material 13 as a liquid material supplied to the filter element formation region 7 and a function of a black mask.

Therefore, in order to form the partition wall 6 with high accuracy and to increase its mechanical strength, it is formed by, for example, the photolithography method, and if necessary, it is heated by using a heater or an oven, It is preferable to heat-set the filter element material 13 or the like.

(2) Formation of Filter Element Next, also in the fourth embodiment, filter element materials corresponding to RGB pixels, YMC pixels, etc. are sequentially ejected from the nozzle rows corresponding thereto, respectively, and at the same time, these plural colors are used. The positions of the discharge start portion and the discharge end portion of the filter element material, or any one of them are made different.

That is, as shown in FIG. 19B, R
The droplets 8 of the filter element material 13 corresponding to GB pixels or YMC pixels are arranged so that the respective droplets 8 are arranged so that the positions of the discharge start portion and the discharge end portion, or either one of them are different. 7
To fill each filter element forming region 7 with the filter element material 13 to form a filter element.

As a preferable means for changing the positions of the discharge start portion and the discharge end portion, from the relationship between the number of droplet discharge heads and the discharge width, Table 1 described in the first embodiment is used.
The following eight modes are listed.

Next, each filter element forming region 7
When the predetermined amount of the filter element material 13 is filled in, the mother substrate 12 is heated to about 70 ° by the heater to evaporate the solvent of the filter element material 13.

By the evaporation of the solvent, the volume of the filter element material 13 is reduced and the surface is flattened as shown in FIG. 19 (c). On the other hand, when the volume is drastically reduced, it is preferable that the supply of the droplet 8 of the filter element material 13 and the heating of the droplet 8 are repeatedly performed until a sufficient film thickness is obtained as the color filter 1. . For example, in the case of the manufacturing method of FIG. 19, it is illustrated that the process is repeated three times.

(3) Heat Treatment and Formation of Protective Film Next, in order to completely dry the formed filter element 3, it is preferable to perform heat treatment at a predetermined temperature for a predetermined time.

After that, it is preferable to form a protective film 4 as shown in FIG. 19D by using a known method such as a spin coating method, a roll coating method, a dipping method, or an ink jet method. This protective film 4
Will be formed for protection of the filter element 3 and the like and for planarization on the surface of the color filter 1.

2. Color Filter (1) Configuration The color filter 1 in the fourth embodiment is made of glass,
It is preferable that a plurality of filter elements 3 are formed in a dot pattern, in the present embodiment, in a dot matrix shape on the surface of a rectangular substrate 2 formed of plastic or the like.

Here, the filter element 3 is partitioned by the partition walls 6 formed in a grid pattern using a resin material that does not have a light-transmitting property, and also has a plurality of rectangular areas arranged in a dot matrix. Are filled with a filter element material (color filter material).

Further, these filter elements 3 are
Each one of R (red), G (green), B (blue), or Y (yellow), M (magenta), C
It is preferable that the filter element 3 is formed of a filter element material of any one color of (cyan), and the filter elements 3 of the respective colors are arranged in a predetermined array.

As the arrangement of the filter elements 3 as described above, for example, as shown in FIG. 20A, it is preferable that the arrangement is a so-called stripe arrangement, and all the columns of the matrix have the same color. In addition, FIG.
As shown in FIG. 3, in a so-called mosaic arrangement, any three filter elements 3 arranged on a vertical and horizontal straight line are R
It is preferable that the color arrangement is three colors including GB pixels. Further, in a so-called delta arrangement as shown in FIG. 20C, the filter elements 3 are arranged in different stages, and any three adjacent filter elements 3 are arranged in three colors of RGB pixels or YMC pixels. It is also preferable to have.

Although the size of the color filter 1 in the fourth embodiment is not particularly limited, for example, the diagonal length is 1.8 inches (4.57c).
It is preferable that it is a rectangle of m). Also, the size of one filter element 3 is not particularly limited, but for example, the width is 10 μm to 100 μm and the length is 5 μm.
It can be a rectangle of 0 μm to 200 μm. The spacing between the filter elements 3, so-called element pitch, can be set to 50 μm or 75 μm, for example.

Also, the color filter 1 of the fourth embodiment
Is used as an optical element for full color display in a liquid crystal display device or the like, RGB pixels or YM
It is preferable to form one pixel by using three filter elements 3 corresponding to C pixels as one unit.
Then, it is preferable to perform full color display by selectively passing light emitted from a liquid crystal display device or the like to any one of RGB pixels or YMC pixels in one pixel, or a combination thereof. .

At this time, since the partition wall 6 is made of a resin material having substantially no translucency, it can act as a black mask, so that color mixture can be prevented and contrast can be improved. This is the preferred embodiment.

The color filter 1 described above is preferably cut out from a large-sized mother substrate 12, which is a substrate as shown in FIG. 21, because the manufacturing cost is low and it is economically advantageous.

Specifically, a pattern for one color filter 1 is formed on the surface of each of the plurality of color filter formation regions 11 set in the mother substrate 12. Next, grooves for cutting are formed around the color filter forming region 11, and the mother substrate 12 is formed along the grooves.
Is preferably cut. This allows the individual substrates 2
(See FIG. 19A.) A color filter substrate is formed on which the color filter 1 is formed.

(2) Position of Absorption Peak of Light Transmittance In the color filter 1 of the fourth embodiment, as shown in FIG. 22A, light corresponding to a plurality of filter element materials (color filter materials) is used. It is preferable that the positions (S1, S2, S3) of the absorption peak of the transmittance are made different within the coating width of the droplet discharge head.

In FIG. 22A, the horizontal axis indicates the measurement position, and the points from the starting point to the sixth point on the horizontal axis correspond to the coating width in one scan of the droplet discharge head. . The vertical axis represents the light transmittance T (%) of the color filter 1 and is a value measured by a luminance meter.

Further, in FIG. 22B, when the absorption peak positions (S4) of the light transmittances corresponding to the plurality of filter element materials are coincident with each other within the coating width of the droplet discharge head, that is, The measurement results of the conventional color filter are shown for comparison.

By making the positions of the variations in the light transmittance different in this way, the distribution of the film thickness in the plane direction becomes small, and as a result, a color filter having uniform light transmission characteristics in the plane direction can be obtained. it can.
Further, with this configuration, it is possible to reduce the color mixture at the boundary line between the adjacent coating areas.

By adjusting the positions of the ends of the nozzle row,
The positions (S1, S2, S3) of variations in light transmittance corresponding to a plurality of filter element materials can be made different by simply changing the positions of the discharge start portion or the discharge end portion. That is, it is less likely that a plurality of filter element materials, for example, filter element materials corresponding to RGB pixels will be overlaid and thickly applied at the ejection start portion or the ejection end portion, which is the end portion of the application region, and in the plane direction. Because it is relatively evenly distributed,
A color filter having a uniform light transmission characteristic can be obtained.

3. Modified Example of Color Filter Manufacturing Apparatus Further, as a modified example of the color filter manufacturing apparatus in the fourth embodiment, unlike the above-described configuration, main scanning is performed by moving the mother substrate 12, and sub scanning is performed by moving the head 22. It is also preferable to perform a scan.

Further, in the fourth embodiment, the head 2
The head 22 is moved along the surface of the mother substrate 12 by relatively moving at least one of the two, such as moving the mother substrate 12 without moving 2 or moving the mother substrate 12 in the opposite direction. It is also preferable that the structure is relatively movable.

Further, regarding the structure of the nozzle row 27,
It is preferable to use the heads 22 that are arranged substantially in a straight line and arranged in two rows at substantially equal intervals, but the number of nozzle rows arranged is not limited to two rows. It is also preferable to have a plurality of rows of 3 or more.

4. Example of use of color filter Further, it is preferable to configure a liquid crystal display device by using the obtained color filter.

The configuration and manufacturing method of such a liquid crystal display device are as follows.
The content can be a known general content, but as an example, a liquid crystal display device 170 as shown in FIG. 23 is preferable. That is, in the liquid crystal display device 170, the first deflection plate 175, the first substrate 174, the reflection film 182, the first electrode 181, and the first alignment plate 18 are arranged from below.
0, a liquid crystal 179, a second alignment plate 178, a second electrode 177, a color filter 176, and a second substrate 17.
2 and the first deflection plate 171 are laminated to form a sealing material 173.
Therefore, it is preferable to have a structure in which the periphery is sealed. The drive I mounted around the liquid crystal display device 170
By C183, a passive method of a simple matrix, an active method using a TFD (Thin Film Diode) element as a switching element, or a TFT (Thin Film Transistor).
It is preferable to operate the liquid crystal 179 to perform full-color display by an active method or the like using a stor element as a switching element. Further, the backlight 18 is provided below the first deflection plate 175 so that a clearer image can be obtained.
It is more preferable to provide 6,187.

Further, the liquid crystal display device 170 may be of a semi-transmissive reflection type as shown in FIG. 23, or may be of a transmission type in which a substrate is provided with a light transmitting portion. May be a perfect reflection type.

[Fifth Embodiment] The fifth embodiment is a method of manufacturing an electroluminescence device using a droplet discharge head, in which a plurality of electroluminescence materials are sequentially discharged from nozzle rows corresponding to the respective electroluminescence materials. In addition to the above, the positions of the discharge start portion and the discharge end portion of the plurality of electroluminescent materials, or any one of the positions is made different.

Hereinafter, description of the same contents as those of the first to fourth embodiments will be omitted as appropriate, and the description will focus on the differences in the manufacturing method of the electroluminescent device and the electroluminescent device obtained therefrom.

1. Manufacturing Method of Electroluminescent Device As shown in the schematic driving circuit of FIG. 24, a process procedure for manufacturing an active matrix type electroluminescent display device will be described.

(1) Pretreatment First, as shown in FIG. 25A, the transparent display substrate 10
For 2, tetraethoxysilane
It is preferable to form a base protective film (not shown) made of a silicon oxide film by a plasma CVD (Chemical Vapor Deposition) method using a raw material gas such as e: TEOS) or oxygen gas.

At this time, the thickness of the base protective film is set to about 2,000.
It is preferable to set the value within the range of ˜5,000 Å.

Next, the temperature of the display substrate 102 is set to about 350.
Then, the semiconductor film 120a which is an angstrom amorphous silicon film is formed on the surface of the base protection film by plasma CVD. At that time, it is preferable to set the thickness of the silicon film to a value within the range of about 300 to 700 angstroms.

After that, it is preferable that the semiconductor film 120a be subjected to a crystallization process such as laser annealing or solid phase growth to crystallize the semiconductor film 120a into a polysilicon film.

(2) Formation of TFT Next, in the fifth embodiment, as shown in FIG. 25B, the semiconductor film 120a is patterned to form an island-shaped semiconductor film 120b.

That is, the gate insulating film 121a made of a silicon oxide film or a nitride film is formed on the surface of the display substrate 102 provided with the semiconductor film 120b by the plasma CVD method using TEOS, oxygen gas or the like as a source gas. At that time, the thickness of the gate insulating film is set to about 600 to 150.
It is preferable to set the value within the range of 0 angstrom.

The semiconductor film 120b serves as the channel region and the source / drain region of the current thin film transistor 110, but at a different cross-sectional position, it serves as the channel region and the source / drain region of the switching thin film transistor 109 (not shown). Is also formed. That is, in the manufacturing process shown in FIG. 25, two types of switching thin film transistors 109 and current thin film transistors 110 are formed at the same time, but since they are formed in the same procedure, only the current thin film transistor 110 will be described below, and the switching thin film transistor 109 will be described. The description will be omitted.

Then, as shown in FIG. 25C, a conductive film of aluminum, tantalum, or the like is formed by a sputtering method and then patterned to form a gate electrode 110A.

In this state, impurities such as phosphorus ions at high temperature are implanted to the semiconductor film 120b to form the gate electrode 11.
Source / drain region 110 in self-alignment with 0A
It is preferable to form a and 110b. The portion into which the impurities have not been introduced becomes the channel region 110c.

Next, as shown in FIG. 25D, after forming an interlayer insulating film 122, contact holes 123,
124, and these contact holes 123, 12 are formed.
Relay electrodes 126 and 127 are embedded and formed in the wiring 4.

Further, as shown in FIG. 25E, the signal line 104, the common power supply line 105, and the scanning line 103 (not shown in FIG. 25) are formed on the interlayer insulating film 122.

Then, it is preferable that the interlayer insulating film 130 is formed so as to cover the upper surface of each wiring, and the contact hole 132 is formed at a position corresponding to the relay electrode 126. After forming the ITO film so as to fill the inside of the contact hole 132, the ITO film is patterned to form the source / drain region 110a at a predetermined position surrounded by the signal line 104, the common power supply line 105 and the scanning line 103. The pixel electrode 111 to be electrically connected is formed.

(3) Discharging Electroluminescent Material Next, in the fifth embodiment, as shown in FIG. 26, a plurality of electroluminescent materials are discharged onto the display substrate 102 on which the pretreatment is performed.

That is, a plurality of electroluminescent materials are sequentially discharged from the corresponding nozzle rows, and the positions of the discharge start portion and discharge end portion of the plurality of electroluminescent materials or one of them is made different. As described above, for example, the positions of both ends of the nozzle row or one of the positions is made different in the one-dimensional or two-dimensional direction, and the electroluminescent material is ejected.

By forming the light emitting layer from the electroluminescent material as described above, the discharge start portion and the discharge end portion do not overlap with each other or are reduced, and uniform electroluminescence characteristics in the plane direction, for example, due to a difference in film thickness. An electroluminescence display device with less color change can be configured.

Here, as shown in FIG. 26A, the hole injection layer 1 corresponding to the lower layer portion of the light emitting element 140 is oriented with the upper surface of the preprocessed display substrate 102 facing upward.
Electroluminescent material 140A for forming 13A, eg polyphenylene vinylene, 1,1-
Bis- (4-N, N-ditolylaminophenyl) cyclohexane, tris (8-hydroxyquinolinol) aluminum, etc. were ejected using an ink jet type coating device, and within a predetermined position area surrounded by the step 135. Apply selectively.

The electroluminescent material 140A is preferably a precursor in a state of being dissolved in a solvent as a functional liquid material.

Then, as shown in FIG. 26B, heating or light irradiation is carried out to evaporate the solvent contained in the electroluminescent material 140A,
A solid thin hole injection layer 113A is formed on the pixel electrode 111. Then, FIGS. 26A and 26B are repeated a necessary number of times to form the hole injection layer 113A having a sufficient thickness dimension as shown in FIG. 26C.

Next, as shown in FIG. 27A, the light emitting element 113 is placed with the upper surface of the display substrate 102 facing upward.
An electroluminescent material 140B for forming the organic semiconductor film 113B, for example, cyanopolyphenylenevinylene, polyphenylenevinylene,
Polyalkylphenylene is discharged by an inkjet method, and this is selectively applied in the region surrounded by the step 135.

The electroluminescent material 140B is preferably an organic fluorescent material dissolved in a solvent as the functional liquid material.

Then, as shown in FIG. 27B, heating or light irradiation is carried out to evaporate the solvent contained in the electroluminescent material 140B,
A solid thin organic semiconductor film 11 is formed on the hole injection layer 113A.
Form 3B.

The operations shown in FIGS. 27A and 27B are repeated a plurality of times to form an organic semiconductor film 113B having a sufficient thickness as shown in FIG. 27C, and the hole injection layer is formed. It is preferable that the electroluminescence light emitting element 113 is configured by 113A and the organic semiconductor film 113B.

(3) Formation of Reflective Electrode Finally, in the fifth embodiment, as shown in FIG. 27D, the reflective electrode (counter electrode) 112 is formed on the entire surface of the display substrate 102 or in a stripe pattern. To do. That is,
By forming the reflective electrode in this manner, the electroluminescent device 101 having a sandwich structure can be manufactured.

3. Modified Example of Electroluminescent Device As a modified example of the electroluminescent manufacturing device in the fifth embodiment, three types of light emitting pixels corresponding to RGB pixels or YMC pixels are formed in a striped shape, or as described above. , By the drive IC,
Any structure such as an active matrix type display device provided with a transistor for controlling a current flowing through a light emitting layer for each pixel, or a passive matrix type display device can be preferably adopted.

[Sixth Embodiment] Next, a display device according to a sixth embodiment of the present invention will be described with reference to the drawings. FIG. 29
Shows an exploded perspective view of the plasma display panel 500, and FIG. 30 shows a basic conceptual diagram of the plasma display panel 500 of the present embodiment. The plasma display panel 500 of the present embodiment includes the same color filter 1 as the color filter 1 described in the third embodiment, and the color filter 1 is arranged on the observation side. There is. That is, the color filter 1 includes the substrate 2, the filter element (coloring layer) 3, the partition wall 6, and the protective layer 4.

The plasma display panel 500 includes a glass substrate 501 arranged to face each other, the color filter 1 described above, and a discharge display section 5 formed between them.
It is roughly composed of 10. The discharge display unit 510 is formed by collecting a plurality of discharge chambers 516.
Among them, the three discharge chambers 516 are arranged so as to form one pixel. Therefore, each discharge chamber 516 is provided so as to correspond to each filter element 3 (3R, 3G, 3B) of the color filter 1 described above.

Address electrodes 511 are formed in stripes on the upper surface of the (glass) substrate 501 at predetermined intervals, and a dielectric layer 519 is formed so as to cover the address electrodes 511 and the upper surface of the substrate 501. Partition walls 515 are formed on the dielectric layer 519 between the address electrodes 511 and 511 and along the address electrodes 511. The partition 515 is also partitioned at a predetermined position in the longitudinal direction in the direction orthogonal to the address electrode 511 at predetermined intervals (not shown), and is basically adjacent to the left and right sides in the width direction of the address electrode 511. Rectangular regions partitioned by the barrier ribs and the barrier ribs extending in a direction orthogonal to the address electrodes 511 are formed, and discharge chambers 516 are formed so as to correspond to these rectangular regions. One pixel is composed of three pairs. In addition, a phosphor 517 is formed inside the rectangular region defined by the partition wall 515.

Next, on the color filter 1 side, a plurality of display electrodes 512 are arranged in a direction orthogonal to the address electrodes 511.
Are formed in stripes at predetermined intervals, a dielectric layer 513 is formed so as to cover them, and a protective film 514 made of MgO or the like is further formed. In addition, in FIG.
For convenience of illustration, the extending direction of the display electrode 512 is different from the actual direction. The substrate 501 and the substrate 2 of the color filter 1
Are attached to each other so that the address electrodes 511 and the display electrodes 512 face each other so as to be orthogonal to each other.
A discharge chamber 516 is formed by exhausting a space portion surrounded by the substrate 501, the partition wall 515, and the protective film 514 formed on the color filter 1 side to fill the rare gas. The display electrode 5 formed on the color filter 1 side
Two 12 are formed in each discharge chamber 516.

The address electrode 511 and the display electrode 512 are connected to an AC power supply (not shown), and by energizing each electrode, the fluorescent material is excited and emits white light in the discharge display section 510 at a required position, and this emission light is emitted. Color display can be performed by viewing through the color filter 1.

In the present embodiment, each discharge chamber 516
The phosphor 517 in the inside may be formed by using the above-described droplet discharge method or droplet discharge device. Further, in the plasma display panel 500 of the present embodiment, an example is shown in which the color filter 1 shown in the second embodiment is provided, but instead of providing this color filter 1, the fluorescence in each discharge chamber 516 is changed. The body 517 may emit colored fluorescence such as R, G, and B. Also in this case, by the above-mentioned droplet discharge method or droplet discharge device,
A substrate for a plasma display device can be formed by discharging a liquid material for forming a phosphor onto a region (a portion that should become the discharge chamber 516) partitioned by the partition wall 515.

[Other Embodiments] The present invention has been described above with reference to the preferred embodiments.
The present invention is not limited to the sixth embodiment, and includes the following modifications, and embodiments having any other specific structure and shape within the range in which the object of the present invention can be achieved. Can be provided.

That is, the discharge method and the like of the present invention are applied to the above-described color filter and its manufacturing apparatus, a liquid crystal display device including the color filter and its manufacturing apparatus,
The electroluminescence device and the manufacturing device thereof, or the plasma display device and the manufacturing device thereof are not limited to the FED (Field Emission Display), the electrophoretic device,
It can be used for various electro-optical devices such as a thin cathode ray tube and a CRT (Cathode-Ray Tube).

Further, the discharge method and the like of the present invention can be used in the manufacturing process of various substrates included in the electro-optical device.

For example, in order to form an electric wiring of a printed circuit board, a manufacturing process of ejecting a liquid metal or a conductive material to form a metal wiring, a manufacturing process of forming a fine microlens, and a coating on a substrate. A process of applying a resist to only a necessary portion, a manufacturing process of forming a convex portion or a minute white pattern that scatters light on a transparent substrate, DN
A (deoxyribonucleic acid) chip has RNA (ri
bonucleic acid: ribonucleic acid) to produce a fluorescently labeled probe, a sample, antibody, DNA (deoxyribonucleic acid), etc. are ejected onto a dot-shaped position on a substrate to form a biochip. It can also be used in the manufacturing process for forming.

According to the present invention, a plurality of liquid substances are sequentially ejected from the respective nozzle rows, and the ejection start part and the ejection end part of the plurality of liquid substances are made different from each other. A color filter capable of obtaining uniform electro-optical characteristics in a planar direction, a liquid crystal display device using the same, an electroluminescence device having a uniform thickness of a fluorescent medium, and a plasma display panel having a uniform thickness of a light emitting medium. It has become possible to provide it efficiently.

Therefore, the liquid crystal display device and the like obtained by the present invention can be used in personal computers, mobile phones, PH
S (Personal Handyphone System), electronic notebook, pager, POS (Point of Sales) terminal, IC card, mini disk player, liquid crystal projector, engineering workstation, word processor, TV,
Viewfinder type or monitor direct view type video tape recorder, electronic desk calculator, car navigation system,
It can be suitably used for electro-optical devices such as touch panel devices, watches, and game machines.

[Brief description of drawings]

FIG. 1 is a schematic view of a droplet discharge head of the present invention. (A) It is a perspective view containing a partial notch. (B) It is a JJ sectional view.

FIG. 2 is a diagram provided for explaining a nozzle row in the droplet discharge head of the present invention.

FIG. 3 is a diagram provided for explaining the relationship between the droplet discharge head (nozzle row) of the present invention and the positions of the discharge start portion and discharge end portion of a plurality of liquid substances (No. 1).

FIG. 4 is a diagram (part 2) provided for explaining the relationship between the droplet discharge head (nozzle row) of the present invention and the positions of the discharge start portion and discharge end portion of a plurality of liquid substances.

FIG. 5 is a diagram (3) provided for explaining the relationship between the droplet discharge head (nozzle row) of the present invention and the positions of the discharge start portion and the discharge end portion of a plurality of liquid substances.

FIG. 6 is a diagram provided for explaining the relationship between the droplet discharge head (nozzle row) of the present invention and the positions of the discharge start portion and discharge end portion of a plurality of liquid substances (Part 4).

FIG. 7 is a diagram provided for explaining the relationship between the droplet discharge head (nozzle row) of the present invention and the positions of the discharge start portion and discharge end portion of a plurality of liquid substances (Part 5).

FIG. 8 is a configuration diagram of a droplet discharge unit showing a configuration example 1 of a second embodiment.

FIG. 9 is an explanatory diagram showing a usage mode of the configuration example 1;

FIG. 10 is a configuration diagram of a droplet discharge unit showing a configuration example 2 of the second embodiment.

FIG. 11 is an explanatory diagram showing a usage mode of Configuration Example 2;

FIG. 12 is an explanatory diagram showing a scanning method of a second configuration example.

FIG. 13 is a configuration diagram of a droplet discharge unit showing a configuration example 3 of the second embodiment.

FIG. 14 is a configuration diagram of a droplet discharge unit showing configuration example 4 of the second embodiment.

FIG. 15 is a configuration diagram showing another example of the configuration example 4;

FIG. 16 is a diagram showing an example of a liquid crystal display device.

FIG. 17 is a schematic diagram of an apparatus of the present invention.

FIG. 18 is a schematic view of a modified example of the droplet discharge head (nozzle row) of the present invention.

FIG. 19 is a diagram provided for explaining the operation of the device of the present invention.

FIG. 20 is a diagram provided for explaining a manufacturing process of the color filter.

FIG. 21 is a diagram showing an arrangement example of color elements in a color filter.

FIG. 22 is a diagram provided for explaining a mother substrate in a color filter manufacturing process.

FIG. 23 is a diagram showing the relationship between the measurement position on the color filter and the light transmittance. (A) An example of measurement in the color filter of the present invention. (B) An example of measurement in a conventional color filter.

FIG. 24 is a diagram showing a drive circuit in an active matrix electroluminescent display device.

FIG. 25 is a diagram (part 1) provided for explaining a manufacturing process of the electroluminescence device.

FIG. 26 is a diagram (part 2) provided for explaining a manufacturing process of the electroluminescence device.

FIG. 27 is a diagram (part 3) provided for explaining a manufacturing process of the electroluminescent device.

FIG. 28 is a diagram provided for explaining an outline of a structure of a PDP.

FIG. 29 is an exploded perspective view showing the structure of the plasma display panel of the sixth embodiment.

FIG. 30 is a vertical sectional view of a sixth embodiment.

FIG. 31 is a diagram provided for explaining the operation of the droplet discharge head (nozzle row) in the conventional color filter manufacturing process.

FIG. 32 is a diagram provided for explaining the internal structure of a conventional droplet discharge head (nozzle row).

FIG. 33 is a diagram provided for explaining the Q characteristic in the conventional droplet discharge head (nozzle row).

FIG. 34 is a diagram provided for explaining the relationship between the operation of the droplet discharge head (nozzle row) and the boundary line in the conventional color filter manufacturing process.

[Explanation of symbols]

1: Color filter 8: Droplet 12: Substrate (mother substrate) 16: Discharge device (droplet discharge device) 17: Head position control device 18: Substrate position control device 19: Main scanning drive device 21: Sub-scanning drive device 22: Droplet ejection head 23: Substrate supply device 27: Nozzle row 41: Piezoelectric element 101: Active matrix drive circuit 170: Liquid crystal display device 183: Drive IC 186,187: Backlight

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) G09F 9/00 338 B41J 3/04 101Z 5G435 F term (reference) 2C056 EA04 EC75 FA15 FB01 HA07 HA22 2H048 BA02 BA11 BA55 BA64 BB02 BB41 BB42 2H091 FA02 FA35 FC01 FC29 FD04 GA11 GA13 LA15 4D075 AC06 AC09 AC73 AC88 AC93 CA48 CB07 CB08 DA04 DA06 DB13 DB14 DB33 DB36 DB55 DC19 DC21 DC24 EA07 EC07 EC11 EC17 4F041 AA02 BAA12 BA13 BA13 A13 BA13 BA13 BA13 A13 BA13 BA13 A13 BA13 BA13 CC12 GG12 KK05 KK10 LL07 LL08 LL15 (54) [Title of Invention] Liquid material discharging method, liquid material discharging device, color filter manufacturing method and color filter, liquid crystal display device, electroluminescent device manufacturing method and electroluminescent device , Along with plastic Ma display panel manufacturing method and a plasma display

Claims (22)

[Claims] 1. A method of ejecting a liquid substance using a droplet ejection head, wherein a plurality of liquid substances are ejected from a nozzle row corresponding to each of them onto a substrate while scanning the droplet ejection head or the substrate. A method for discharging a liquid material, characterized in that the liquid is sequentially discharged, and the positions of the discharge start portion and the discharge end portion of the liquid material are made different from each other. 2. The position of the discharge start portion and the discharge end portion of the liquid material, or any one of them, by making the positions of both ends of the nozzle row, or any one of them, different in one-dimensional or two-dimensional directions. The method for discharging a liquid material according to claim 1, wherein one of the positions is different. 3. The method for discharging a liquid material according to claim 1, wherein the discharge widths of the liquid material are made substantially equal. 4. The ejection width of the liquid material is adjusted by preparing a plurality of the droplet ejection heads and making the dimension widths of the nozzle rows in the direction intersecting the scanning direction of the droplet ejection heads substantially equal to each other. The liquid material discharging method according to claim 3, wherein the liquid materials are substantially equal to each other. 5. The discharge width of the liquid material is made different, and the position of the discharge start portion of the liquid material or the position of the discharge end portion of the liquid material is substantially matched. 2. The method for discharging a liquid material according to item 2. 6. A plurality of the droplet discharge heads are prepared, and the dimensional widths of the nozzle rows of the droplet discharge heads in the direction intersecting the scanning direction are made different so that the discharge width of the liquid material is made different. The method for discharging a liquid material according to claim 5, characterized in that. 7. When applying the edge portion of the substrate using the nozzle row, the nozzle row corresponding to the area other than the area of the substrate is not used, and the nozzle row corresponding to the area of the substrate is used. The method for discharging a liquid material according to claim 1 or 2, characterized in that. 8. A liquid material ejecting apparatus having a liquid droplet ejecting head, wherein the liquid droplet ejecting head is provided with nozzle rows corresponding to a plurality of liquid materials, and while scanning the liquid droplet ejecting head or the substrate. A plurality of liquid substances are sequentially ejected from the corresponding nozzle rows, and a control unit is provided for varying the positions of the ejection start part and the ejection end part of the liquid substance or one of the positions. Liquid material discharge device. 9. The liquid material ejection apparatus according to claim 8, wherein the liquid droplet ejection heads are arranged obliquely with respect to the scanning direction of the liquid droplet ejection heads. 10. The liquid material ejecting apparatus according to claim 8, wherein the nozzle rows corresponding to the plurality of liquid materials are arranged in one droplet ejecting head. 11. The liquid material ejecting apparatus according to claim 8, wherein a nozzle row corresponding to the plurality of liquid material is provided corresponding to each of the plurality of liquid droplet ejecting heads. 12. A method of manufacturing a color filter using a droplet discharge head, wherein a plurality of color filter materials are applied from respective nozzle rows while scanning the droplet discharge head or the substrate in the vertical direction. A method for manufacturing a color filter, which comprises sequentially ejecting, and differentiating a position of an ejection start portion and an ejection end portion of the color filter material, or one of the positions. 13. A color filter obtained by the method for producing a color filter according to claim 12. 14. A liquid crystal display device comprising the color filter according to claim 13. 15. A method of manufacturing an electroluminescence device using a droplet discharge head, wherein a plurality of electroluminescent materials are sequentially discharged from respective nozzle rows while scanning the droplet discharge head or the substrate. The manufacturing method of the electroluminescent device, characterized in that the positions of the discharge start portion and the discharge end portion of the electroluminescent material, or any one of them are made different. 16. An electroluminescent device obtained by the method for manufacturing an electroluminescent device according to claim 15. 17. A method of manufacturing a plasma display panel using a droplet discharge head, wherein a plurality of plasma light emitting materials are sequentially discharged from corresponding nozzle rows while scanning the droplet discharge head or the substrate. A method of manufacturing a plasma display panel, characterized in that the positions of the discharge start portion and the discharge end portion of the plasma light-emitting material, or any one of them is made different. 18. A plasma display panel obtained by the method for producing a plasma display panel according to claim 17. 19. A method of discharging a liquid material, comprising scanning a plurality of nozzle rows or a substrate in a predetermined direction,
A scanning step of sequentially ejecting different liquid substances corresponding to each other from the plurality of nozzle rows onto the substrate, in the scanning step, a region where each nozzle row passes through the substrate. However, other nozzle rows overlap a part of the region that passes through the substrate, and the positions of both ends in each nozzle row are the positions of both ends in the other nozzle row in the direction orthogonal to the predetermined direction. And a method of discharging a liquid material, which is different from 20. A method of discharging a liquid material, comprising scanning a plurality of nozzle rows or a substrate in a predetermined direction,
A scanning step of sequentially ejecting different liquid substances corresponding to each other from the plurality of nozzle rows onto the substrate, in the scanning step, a region where each nozzle row passes through the substrate. However, the other of the nozzle rows overlaps a part of the area that passes through the substrate, and the position of the first end of each of the nozzle rows is the same as that of the other nozzle rows in the direction orthogonal to the predetermined direction. The position of the second end portion in each nozzle row is substantially the same as the position of one end portion, and the position of the second end portion in each of the other nozzle rows in the direction orthogonal to the predetermined direction. And a method of discharging a liquid material, which is different from 21. A method for ejecting a liquid material, comprising scanning the first, second and third nozzle rows or the substrate in a predetermined direction while respectively scanning the first, second and third nozzle rows. A scanning step of sequentially ejecting a first liquid material, a second liquid material, and a third liquid material onto the substrate, wherein in the scanning step, the first, second, and third liquid materials are provided. Of the nozzle rows passing through the substrate partially overlap each other, and positions of both ends of the first, second, and third nozzle rows are different from each other in a direction orthogonal to the predetermined direction. And a method of discharging a liquid material. 22. A method of ejecting a liquid material, comprising scanning the first, second and third nozzle rows or the substrate in a predetermined direction while respectively scanning the first, second and third nozzle rows. A scanning step of sequentially ejecting a first liquid material, a second liquid material, and a third liquid material onto the substrate, wherein in the scanning step, the first, second, and third liquid materials are provided. Areas where the nozzle rows pass through the substrate partially overlap each other, and the positions of the first end portions of the first, second, and third nozzle rows are substantially in the direction orthogonal to the predetermined direction. And the positions of the second end portions of the first, second and third nozzle rows are different from each other in the direction orthogonal to the predetermined direction.