JP2003327471A - Piezoelectric ceramic - Google Patents

Piezoelectric ceramic

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Publication number
JP2003327471A
JP2003327471A JP2002135308A JP2002135308A JP2003327471A JP 2003327471 A JP2003327471 A JP 2003327471A JP 2002135308 A JP2002135308 A JP 2002135308A JP 2002135308 A JP2002135308 A JP 2002135308A JP 2003327471 A JP2003327471 A JP 2003327471A
Authority
JP
Japan
Prior art keywords
piezoelectric ceramic
quality factor
mechanical quality
manganese
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002135308A
Other languages
Japanese (ja)
Inventor
Kazuo Shoji
和男 荘司
Yutaka Sugaya
豊 菅谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toko Inc
Original Assignee
Toko Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toko Inc filed Critical Toko Inc
Priority to JP2002135308A priority Critical patent/JP2003327471A/en
Publication of JP2003327471A publication Critical patent/JP2003327471A/en
Pending legal-status Critical Current

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Abstract

<P>PROBLEM TO BE SOLVED: To provide a piezoelectric ceramic capable of decreasing dielectric constant and increasing mechanical quality factor Qm and free from causing environmental problems due to lead. <P>SOLUTION: The piezoelectric ceramic consists essentially of a ceramic expressed by a general formula (Sr<SB>1-x</SB>Ca<SB>x</SB>)<SB>1-y</SB>Nd<SB>2y/3</SB>Bi<SB>2</SB>Ta<SB>2</SB>O<SB>9</SB>where (x) is in a composition range of 0<x<1 and (y) is in a composition range of 0≤y≤0.3 and contains <0.5 wt.% (not including 0) manganese expressed in terms of MnCO<SB>3</SB>. <P>COPYRIGHT: (C)2004,JPO

Description

【発明の詳細な説明】 【0001】 【発明の属する技術分野】本発明は、セラミックレゾネ
ータ、セラミックフィルタ、温度センサ等に用いられる
圧電セラミックスに関するものである。 【0002】 【従来の技術】従来の圧電セラミックスに、PZTと呼
ばれるPbZrO−PbTiO固溶体のMPB(m
orphotropic phase boundar
y)近傍組成系のものがある。この様な組成系の圧電セ
ラミックスは、安価で電気特性が良いために、様々な電
子部品に用いられている。 【0003】 【発明が解決しようとする課題】しかしながら、この種
の圧電セラミックスは、鉛を大量に含有しているため、
製造過程の焼成溶融等の熱処理の際に大気中に鉛が放出
されたり、電子部品の形で市場に出回った後、これら電
子部品が廃棄される際にも土壌中に鉛が放出されたりし
て鉛の環境に与える影響が問題となり、工業的利用が禁
止又は制限されるようになってきている。また、近年、
電気信号のアナログからデジタルへの変換が急速に行わ
れており、電子部品の使用範囲が高周波領域に広がりつ
つある。しかしながら、前述の様な圧電セラミックス
は、比誘電率が1000以上と大きく、機械的品質係数
Qmが2500以下と小さいため、高周波帯域で使用さ
れる電子部品に用いることができなかった。 【0004】本発明は、比誘電率を小さくかつ、機械的
品質係数Qmを大きくすることができると共に、鉛によ
る環境上の問題が発生しない圧電セラミックスを提供す
ることを目的とする。 【0005】 【課題を解決するための手段】本発明の圧電セラミック
スは、ビスマス層状構造強誘電体の一種であるSr−B
i−Ta系セラミックの組成を改良することにより前述
の課題を解決するものである。すなわち、本発明の圧電
セラミックスは、一般式(Sr1−xCa 1−y
2y/3BiTaで表され、xが0<x<
1、yが0≦y≦0.3の組成範囲にあるセラミックス
を主成分とし、かつマンガンをMnCOに換算して
0.5wt%未満(0を含まず)含有する。 【0006】 【発明の実施の形態】Sr−Bi−Ta系セラミックス
のSrの一部をCaで置換し、マンガンを添加すること
により、機械的品質係数Qmが向上する。さらに、Sr
とCaの一部をNdで置換することにより、結晶構造の
ひずみが増加し、円板の広がり振動の電気機械結合係数
Kpが向上する。また、Ndが焼結助剤として働き、機
械的品質係数Qmが向上することがある。この時、キュ
リー温度Tcは常に350℃以上であり、リフロー炉を
通過させた際に、減極などの問題は生じない。 【0007】 【実施例】以下、本発明の実施例について説明する。ま
ず、本発明による圧電セラミックスの製造方法について
説明する。SrCO 、CaCO、Nd、Bi
、Ta、MnCOの原料粉末を所定の組
成となるように秤量し、ボールミル等を用いて7時間湿
式混合した。これらの混合粉末を800〜1000℃で
仮焼し、この仮焼物をボールミル等を用いて7時間湿式
粉砕した。この粉砕物を乾燥した後、これにPVA等の
バインダーを加えて造粒し、これを成形し、焼成するこ
とにより本発明による材料を得た。 【0008】本発明による圧電セラミックスの特性の測
定は、乾燥した粉砕物にPVA等のバインダーを1〜3
wt%加えて造粒し、これを直径15mm、厚さ1〜
2.5mmの円板になる様に100MPaの圧力でプレ
ス成形し、最高保持温度が1100〜1350℃、この
最高保持温度の保持時間が2時間となる様に焼成して円
板状の磁器とし、この円板状の磁器を厚さが0.2〜2
mmになる様に研磨した後、両面に銀電極を形成し、次
いで、絶縁オイル中において、温度が100〜250
℃、電界が5〜12kV/mm、時間が1〜30分の条
件で分極処理をして評価サンプルを得て行った。この特
性の測定は、共振・反共振法を利用して円板の広がり振
動の電気機械結合係数Kpと機械的品質係数Qmを算出
した。さらに、比誘電率の温度変化を測定し、キュリー
温度Tcを算出した。 【0009】図1は、(Sr1−xCa1−yNd
2y/3BiTaにおいて、Caの置換量x、
Ndの置換量y、マンガンの添加量zを変えたときの円
板の広がり振動の電気機械結合係数Kp、機械的品質係
数Qm、キュリー温度Tc、焼成温度を表にまとめたも
のである。なお、試料Noの*印は本発明の範囲外のも
のであることを示している。本発明の圧電セラミックス
は、xが0<x<1、yが0≦y≦0.3、zが0<z
<0.5の範囲内で比誘電率が200以下となった。ま
た、Caの置換量xを増加させるとキュリー温度Tcが
大きくなる傾向が得られた。さらに、マンガンを0<z
<0.5の範囲で添加するとマンガンを添加しないもの
に比べて機械的品質係数Qmが大きくなり、マンガンの
添加量zが0.5wt%になると絶縁抵抗が低下して分
極が困難になるために、マンガンを添加しないものに比
べて機械的品質係数Qmが小さくなった。特に、Caの
置換量xが0.8のものにマンガンを0.2wt%添加
したところ、機械的品質係数Qmが10000を超える
傾向が得られ、従来のものよりも大幅に改善することが
できた。またさらに、Ndの置換量yを増加させるとキ
ュリー温度Tcが小さくなるが、電気機械結合係数Kp
が大きくなる傾向が得られた。この時、Ndの置換量y
が0.3以下であれば電子部品を電子機器のプリント基
板等に半田付けする際のリフローの温度でも消極しない
実用的なキュリー温度Tcを得ることができた。また、
Ndが焼結助剤として働き、機械的品質係数Qmをさら
に向上できることがある。 【0010】この様に、Caの置換量xが0<x<1、
Ndの置換量yが0≦y≦0.3、マンガンの添加量z
が0<z<0.5の範囲で、良好な機械的品質係数Qm
を得ることができた。 【0011】 【発明の効果】本発明によれば、比誘電率が小さく、機
械的品質係数Qmの大きい圧電セラミックスを得ること
ができる。また、本発明の圧電セラミックスは、鉛を含
有しないので、製造過程や電子部品が廃棄される際に鉛
が放出されることがなく、環境上の問題が生じることも
ない。
DETAILED DESCRIPTION OF THE INVENTION [0001] TECHNICAL FIELD The present invention relates to a ceramic resonator.
Data, ceramic filters, temperature sensors, etc.
It relates to piezoelectric ceramics. [0002] 2. Description of the Related Art Conventional piezoelectric ceramics are called PZT.
PbZrO3-PbTiO3MPB of solid solution (m
orphotropic phase boundary
y) There are those having a near composition system. A piezoelectric cell of such a composition system
Lamix is inexpensive and has good electrical characteristics.
Used for child parts. [0003] SUMMARY OF THE INVENTION However, this kind of
Because piezoelectric ceramics contain a large amount of lead,
Release of lead into the atmosphere during heat treatment such as firing and melting in the manufacturing process
After they are sold or marketed in the form of electronic components,
Lead is released into the soil even when child components are discarded.
The effect of lead on the environment is a problem, and industrial use is prohibited.
Are being stopped or restricted. In recent years,
Rapid conversion of electrical signals from analog to digital
And the use range of electronic components is expanding to the high frequency range.
There are two. However, piezoelectric ceramics as described above
Has a large relative dielectric constant of 1000 or more and a mechanical quality factor
Since Qm is as small as 2500 or less, it is used in the high frequency band.
Could not be used for electronic components. [0004] The present invention provides a low dielectric constant and mechanical
The quality factor Qm can be increased and lead
To provide piezoelectric ceramics that do not cause environmental problems
The porpose is to do. [0005] SUMMARY OF THE INVENTION The piezoelectric ceramic of the present invention
Is Sr-B, a kind of bismuth layered structure ferroelectric.
By improving the composition of the i-Ta based ceramic,
It is intended to solve the problem. That is, the piezoelectric of the present invention
Ceramics have the general formula (Sr1-xCax) 1-yN
d2y / 3Bi2Ta2O9Where x is 0 <x <
Ceramics in which 1, y is in the composition range of 0 ≦ y ≦ 0.3
With manganese as MnCO3Converted to
Contains less than 0.5 wt% (excluding 0). [0006] DESCRIPTION OF THE PREFERRED EMBODIMENTS Sr-Bi-Ta ceramics
Part of Sr is replaced with Ca and manganese is added
Thereby, the mechanical quality factor Qm is improved. Furthermore, Sr
And a part of Ca is substituted with Nd,
The strain increases and the electromechanical coupling coefficient of the spreading vibration of the disk
Kp is improved. In addition, Nd acts as a sintering aid,
The mechanical quality factor Qm may be improved. At this time,
Ree temperature Tc is always 350 ° C. or higher,
When passing through, no problem such as depolarization occurs. [0007] Embodiments of the present invention will be described below. Ma
Regarding the manufacturing method of the piezoelectric ceramics according to the present invention
explain. SrCO 3, CaCO3, Nd2O3, Bi
2O3, Ta2O5, MnCO3Raw material powder
And weighed for 7 hours using a ball mill or the like.
Formula mixed. At 800-1000 ° C
Calcination, and this calcined product is wet-processed for 7 hours using a ball mill or the like.
Crushed. After drying this pulverized material, PVA
Add a binder, granulate, mold and bake.
This gave the material according to the invention. [0008] The measurement of the characteristics of the piezoelectric ceramics according to the present invention.
The dry pulverized material is coated with a binder such as PVA from 1 to 3
wt% and granulated.
Press with 100MPa pressure to make a 2.5mm disc.
And the maximum holding temperature is 1100-1350 ° C.
Baking so that the holding time at the maximum holding temperature is 2 hours
A plate-shaped porcelain, and the disc-shaped porcelain having a thickness of 0.2 to 2
mm, and then form silver electrodes on both sides.
In insulating oil, the temperature is 100-250.
° C, an electric field of 5 to 12 kV / mm, and a time of 1 to 30 minutes.
An evaluation sample was obtained by performing a polarization treatment on the subject. This feature
Is measured by using the resonance / anti-resonance method.
Calculate the dynamic electromechanical coupling coefficient Kp and mechanical quality coefficient Qm
did. Furthermore, the temperature change of the relative permittivity is measured and the Curie
The temperature Tc was calculated. FIG. 1 shows (Sr1-xCax)1-yNd
2y / 3Bi2Ta2O9In the formula, the substitution amount x of Ca,
The circle when the substitution amount y of Nd and the addition amount z of manganese are changed
Electromechanical coupling coefficient Kp for spread vibration of plate, mechanical quality
Several Qm, Curie temperature Tc and firing temperature are summarized in the table.
It is. In addition, * mark of sample No. is outside the scope of the present invention.
It indicates that Piezoelectric ceramic of the present invention
X is 0 <x <1, y is 0 ≦ y ≦ 0.3, and z is 0 <z
The relative dielectric constant became 200 or less within the range of <0.5. Ma
Also, when the substitution amount x of Ca is increased, the Curie temperature Tc is increased.
A tendency to increase was obtained. In addition, manganese is reduced to 0 <z
When added in the range of <0.5, manganese is not added
The mechanical quality factor Qm is larger than
When the addition amount z becomes 0.5 wt%, the insulation resistance is lowered and the
The poles are difficult, so compared to those without manganese added
In all cases, the mechanical quality factor Qm was small. In particular, Ca
Add 0.2wt% of manganese to the replacement amount x 0.8
As a result, the mechanical quality factor Qm exceeds 10,000
Trends that can be significantly improved
did it. Further, when the substitution amount y of Nd is increased,
Temperature Tc decreases, but the electromechanical coupling coefficient Kp
Tended to increase. At this time, the substitution amount y of Nd
Is less than 0.3, the electronic components are
Does not depolarize even at the reflow temperature when soldering to a board etc.
A practical Curie temperature Tc was obtained. Also,
Nd acts as a sintering aid, further increasing the mechanical quality factor Qm.
Can be improved. Thus, the substitution amount x of Ca is 0 <x <1,
The substitution amount y of Nd is 0 ≦ y ≦ 0.3, and the addition amount of manganese z
Is in the range of 0 <z <0.5, and a good mechanical quality factor Qm
Could be obtained. [0011] According to the present invention, the relative dielectric constant is small,
Obtaining piezoelectric ceramics with large mechanical quality factor Qm
Can be. Further, the piezoelectric ceramic of the present invention contains lead.
Do not have lead in the manufacturing process or when electronic components are discarded.
Is not released and may cause environmental problems.
Absent.

【図面の簡単な説明】 【図1】 本発明の圧電セラミックスの特性を説明する
ための特性の表である。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a table of characteristics for explaining characteristics of a piezoelectric ceramic of the present invention.

Claims (1)

【特許請求の範囲】 【請求項1】 一般式 (Sr1−xCa1−yNd2y/3BiTa
で表され、xが0<x<1、yが0≦y≦0.3の組成
範囲にあるセラミックスを主成分とし、かつマンガンを
MnCOに換算して0.5wt%未満(0を含まず)
含有することを特徴とする圧電セラミックス。
[Claims] 1. The general formula (Sr1-xCax)1-yNd2y / 3Bi2Ta2
O9 Where x is 0 <x <1 and y is 0 ≦ y ≦ 0.3
The main component is ceramics in the range, and manganese is
MnCO3Less than 0.5 wt% (excluding 0)
A piezoelectric ceramic characterized by containing.
JP2002135308A 2002-05-10 2002-05-10 Piezoelectric ceramic Pending JP2003327471A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002135308A JP2003327471A (en) 2002-05-10 2002-05-10 Piezoelectric ceramic

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002135308A JP2003327471A (en) 2002-05-10 2002-05-10 Piezoelectric ceramic

Publications (1)

Publication Number Publication Date
JP2003327471A true JP2003327471A (en) 2003-11-19

Family

ID=29697664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002135308A Pending JP2003327471A (en) 2002-05-10 2002-05-10 Piezoelectric ceramic

Country Status (1)

Country Link
JP (1) JP2003327471A (en)

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