JP3259677B2 - Piezoelectric ceramic composition - Google Patents

Piezoelectric ceramic composition

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Publication number
JP3259677B2
JP3259677B2 JP03571598A JP3571598A JP3259677B2 JP 3259677 B2 JP3259677 B2 JP 3259677B2 JP 03571598 A JP03571598 A JP 03571598A JP 3571598 A JP3571598 A JP 3571598A JP 3259677 B2 JP3259677 B2 JP 3259677B2
Authority
JP
Japan
Prior art keywords
piezoelectric ceramic
ceramic composition
composition
coupling coefficient
electromechanical coupling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP03571598A
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Japanese (ja)
Other versions
JPH11228227A (en
Inventor
雅彦 木村
智之 小川
陽 安藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP03571598A priority Critical patent/JP3259677B2/en
Priority to TW088102454A priority patent/TW429636B/en
Priority to US09/251,573 priority patent/US6093339A/en
Priority to DE19906835A priority patent/DE19906835C2/en
Priority to KR1019990005393A priority patent/KR100282598B1/en
Priority to DE19964243A priority patent/DE19964243C2/en
Priority to CN99102465A priority patent/CN1089736C/en
Publication of JPH11228227A publication Critical patent/JPH11228227A/en
Application granted granted Critical
Publication of JP3259677B2 publication Critical patent/JP3259677B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、圧電磁器組成物
に関するもので、特に、圧電セラミックフィルタ、圧電
セラミック発振子などの圧電セラミック素子のための材
料として有用な圧電磁器組成物に関するものである。
The present invention relates to a piezoelectric ceramic composition, and more particularly to a piezoelectric ceramic composition useful as a material for a piezoelectric ceramic element such as a piezoelectric ceramic filter or a piezoelectric ceramic oscillator.

【0002】[0002]

【従来の技術】圧電セラミックフィルタなどの圧電セラ
ミック素子に用いられる圧電磁器組成物として、チタン
酸ジルコン酸鉛(Pb(Tix Zr1-x )O3 )あるい
はチタン酸鉛(PbTiO3 )を主成分とする圧電磁器
組成物が広く用いられている。このようなチタン酸ジル
コン酸鉛あるいはチタン酸鉛を主成分とする圧電磁器組
成物は、その製造過程において、一般的に鉛酸化物が用
いられるのであるが、この鉛酸化物の蒸発のため、製品
の均一性が低下する。
As a piezoelectric ceramic composition used for the piezoelectric ceramic element such Background Art Piezoelectric ceramic filters, mainly lead zirconate titanate (Pb (Ti x Zr 1- x) O 3) or lead titanate (PbTiO 3) Piezoelectric ceramic compositions as components are widely used. In such a piezoelectric ceramic composition containing lead zirconate titanate or lead titanate as a main component, lead oxide is generally used in the production process, but due to evaporation of the lead oxide, Product uniformity decreases.

【0003】これに対して、組成式:(K1-x-y Nax
Liy )NbO3 等で表されるニオブ酸カリウムナトリ
ウムリチウムを主成分とする圧電磁器組成物は、鉛酸化
物を含有しないため、上述のような問題に遭遇しない。
また、ニオブ酸カリウムナトリウムリチウムを主成分と
する圧電磁器組成物の中には、電気機械結合係数Kp
大きく、圧電セラミックフィルタおよび圧電セラミック
発振子等の材料として有望であると考えられるものが存
在する。
On the other hand, a composition formula: (K 1-xy Na x
Li y ) A piezoelectric ceramic composition mainly composed of potassium sodium lithium niobate represented by NbO 3 or the like does not contain lead oxide, and thus does not encounter the above-described problems.
Further, in the piezoelectric ceramic composition composed mainly of potassium sodium niobate lithium, electromechanical coupling coefficient K p is large, it is what is considered to be promising as a material such as a piezoelectric ceramic filters and piezoelectric ceramic oscillator Exists.

【0004】しかしながら、このようなニオブ酸カリウ
ムナトリウムリチウムを主成分とする圧電磁器組成物
は、チタン酸ジルコン酸鉛あるいはチタン酸鉛に比べ
て、比誘電率が小さいため、圧電セラミックフィルタあ
るいは圧電セラミック発振子等の材料として用いる場
合、これら圧電セラミックフィルタあるいは圧電セラミ
ック発振子等を備える回路とのインピーダンスマッチン
グが良好でなく、回路設計の困難を伴う場合がある。
However, such a piezoelectric ceramic composition containing potassium sodium lithium niobate as a main component has a smaller relative dielectric constant than lead zirconate titanate or lead titanate, and therefore a piezoelectric ceramic filter or piezoelectric ceramic When used as a material for an oscillator or the like, impedance matching with a circuit provided with such a piezoelectric ceramic filter or a piezoelectric ceramic oscillator or the like is not good, and circuit design may be difficult.

【0005】[0005]

【発明が解決しようとする課題】この発明は、ニオブ酸
カリウムナトリウムリチウムを主成分とする圧電磁器組
成物が遭遇する上記課題を解決するためになされたもの
で、比誘電率を1000以上に増大させ、鉛を含有せ
ず、かつ、実用上十分な電気機械結合係数KP (25%
以上)を示す、圧電磁器組成物を提供しようとすること
を目的としている。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems encountered in piezoelectric ceramic compositions containing potassium sodium lithium niobate as a main component, and has a dielectric constant of 1000 or more. And contains no lead and has a sufficient electromechanical coupling coefficient K P (25%
The present invention aims to provide a piezoelectric ceramic composition which shows the above.

【0006】[0006]

【課題を解決するための手段】この発明は、上述した技
術的課題を解決するため、一般式:(1−n)(K1-
x-y Nax Liy m (Nb1-z Taz )O3 −nM1
M2O3 で表される組成物を主成分とする、圧電磁器組
成物であって、上記一般式において,M1は2価の金属
元素からなり、M2は4価の金属元素からなり、また、
x、y、z、m、およびnは、それぞれ、 0.1≦x、 y≦0.3、 x+y<0.75、 0≦z≦0.3、 0.98≦m≦1.0、および 0<n<0.1 の条件を満たすことを特徴としている。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned technical problems by the general formula: (1-n) (K 1-
xy Na x Li y) m ( Nb 1-z Ta z) O 3 -nM1
As a main component a composition represented by M2O 3, a piezoelectric ceramic composition, in the above general formula, M1 consists bivalent metal element, M2 consists of tetravalent metal elements, also,
x, y, z, m and n are respectively 0.1 ≦ x, y ≦ 0.3, x + y <0.75, 0 ≦ z ≦ 0.3, 0.98 ≦ m ≦ 1.0, And 0 <n <0.1.

【0007】上述したx、y、z、m、およびnの各範
囲の限定理由は、次のとおりである。xおよびyに関し
て、それぞれ、0.1≦xおよびy≦0.3と限定する
のは、これらの範囲を外れると、良好な焼結体を得るこ
とができないためである。また、x+y<0.75とす
るのは、0.75≦x+yでは、電気機械結合係数K P
が25%より小さくなり、圧電セラミックフィルタ、圧
電セラミック発振子などの材料としての利用が困難とな
るためである。
The above-described ranges of x, y, z, m, and n
The reasons for limiting the box are as follows. x and y
Respectively, to limit 0.1 ≦ x and y ≦ 0.3
The reason is that if it is out of these ranges, a good sintered body can be obtained.
Because you can't do that. Also, let x + y <0.75.
The reason is that when 0.75 ≦ x + y, the electromechanical coupling coefficient K P
Is less than 25%, the piezoelectric ceramic filter, pressure
It is difficult to use it as a material for electroceramic oscillators.
That's because.

【0008】また、zに関して、0≦z≦0.3とする
のは、この範囲を外れると、キュリー点が200℃以下
に低下し、当該圧電磁器組成物をもって構成された素子
の温度安定性の点で問題が生じるためである。また、m
に関して、0.98≦m≦1.0とするのは、この範囲
を外れると、分極処理が困難になるためである。
[0008] With respect to z, 0 ≦ z ≦ 0.3 means that if the value is outside this range, the Curie point drops to 200 ° C. or less, and the temperature stability of the element constituted by the piezoelectric ceramic composition is reduced. This is because a problem arises in the point. Also, m
The reason why 0.98 ≦ m ≦ 1.0 is that if it is out of this range, the polarization treatment becomes difficult.

【0009】また、nに関して、0<n<0.1とする
のは、nが0.1以上の場合には、電気機械結合係数K
P が25%より小さくなり、圧電セラミックフィルタ、
圧電セラミック発振子などの材料としての利用が困難と
なるためである。この発明において、好ましくは、上記
一般式中のM1は、Mg、Ca、Sr、およびBaから
なる群から選ばれた少なくとも1種からなり、また、M
2は、Ti、Zr、Sn、およびHfからなる群から選
ばれた少なくとも1種からなる。
Further, regarding n, 0 <n <0.1 means that when n is 0.1 or more, the electromechanical coupling coefficient K
P is less than 25%, piezoelectric ceramic filter,
This is because it becomes difficult to use the piezoelectric ceramic oscillator as a material. In the present invention, preferably, M1 in the above general formula is at least one selected from the group consisting of Mg, Ca, Sr, and Ba;
2 is at least one selected from the group consisting of Ti, Zr, Sn, and Hf.

【0010】[0010]

【実施例】まず、出発原料として、K2 CO3 、Na2
CO3 、Li2 CO3 、Nb2 5 、Ta2 5 、Ca
CO3 、SrCO3 、BaCO3 、TiO2 、Zr
2 、およびSnO2 を用意し、これらの原料を、一般
式:(1−n)(K1-x-y Na x Liy m (Nb1-z
Taz )O3 −nM1M2O3 において表1に示すよう
な組成となるように秤取して、ボールミルを用いて約4
時間アルコール中で湿式混合し、得られた混合物を乾燥
した後、700℃〜900℃の温度で仮焼した。次い
で、これら乾燥混合物を粗粉砕した後、有機バインダを
適量加えてボールミルを用いて4時間湿式粉砕し、40
メッシュのふるいを通して粒度調整を行なった。
EXAMPLE First, K was used as a starting material.TwoCOThree, NaTwo
COThree, LiTwoCOThree, NbTwoO Five, TaTwoOFive, Ca
COThree, SrCOThree, BaCOThree, TiOTwo, Zr
OTwo, And SnOTwoPrepare these raw materials, general
Formula: (1-n) (K1-xyNa xLiy)m(Nb1-z
Taz) OThree-NM1M2OThreeAs shown in Table 1
Weighed to obtain a suitable composition and used a ball mill for about 4
Wet mix in alcohol for hours and dry the resulting mixture
After that, it was calcined at a temperature of 700C to 900C. Next
After coarsely pulverizing these dry mixtures, the organic binder is removed.
Add an appropriate amount and wet crush for 4 hours using a ball mill.
The particle size was adjusted through a mesh sieve.

【0011】次に、粒度調整された粉体を1000kg
/cm2 の圧力で直径12mm、厚さ1.2mmの円板
に成形した後、1050℃〜1300℃の温度で、通常
の焼成方法を用いて焼成を行ない、円板状の磁器を得
た。次いで、これら磁器円板の両主面に、通常の方法に
より、銀ペーストを塗布焼付けして銀電極を形成した
後、50℃〜150℃の絶縁オイル中で2〜10kV/
mmの直流電圧を10〜30分間印加して分極処理を施
し、試料となる圧電磁器円板を得た。
Next, 1000 kg of the powder whose particle size has been adjusted
After molding into a disk having a diameter of 12 mm and a thickness of 1.2 mm at a pressure of / cm 2 , firing was performed at a temperature of 1050 ° C. to 1300 ° C. using a normal firing method to obtain a disk-shaped porcelain. . Next, a silver paste is applied and baked on both main surfaces of these porcelain disks by a usual method to form silver electrodes, and then 2 to 10 kV / in an insulating oil at 50 ° C. to 150 ° C.
A DC voltage of 10 mm was applied for 10 to 30 minutes to perform polarization treatment, and a piezoelectric ceramic disk as a sample was obtained.

【0012】次いで、各試料について、比誘電率、電気
機械結合係数KP 、およびキュリー点を測定した。その
結果も表1に示されている。
Next, the relative permittivity, the electromechanical coupling coefficient K P , and the Curie point of each sample were measured. The results are also shown in Table 1.

【0013】[0013]

【表1】 [Table 1]

【0014】表1において、試料番号に*を付したもの
は、この発明の範囲外のものである。表1において、
0.1≦x、y≦0.3、x+y<0.75、0≦z≦
0.3、0.98≦m≦1.0、0<n<0.1の各条
件をすべて満たす試料、すなわち試料番号に*が付され
ていないこの発明の実施例にかかる試料については、す
べて、比誘電率が1000以上であり、また、電気機械
結合係数KP が25%以上であり、さらに、キュリー点
が200℃を超える、というように良好な特性を示して
いる。
In Table 1, samples with an asterisk (*) are out of the scope of the present invention. In Table 1,
0.1 ≦ x, y ≦ 0.3, x + y <0.75, 0 ≦ z ≦
For samples satisfying all the conditions of 0.3, 0.98 ≦ m ≦ 1.0, and 0 <n <0.1, that is, samples according to the examples of the present invention in which sample numbers are not marked with *, All show good characteristics such as a relative dielectric constant of 1000 or more, an electromechanical coupling coefficient K P of 25% or more, and a Curie point exceeding 200 ° C.

【0015】これに対して、0.1≦xまたはy≦0.
3の条件を満足しない試料14および15では、焼結不
良が生じている。また、上述の0.1≦xまたはy≦
0.3の条件を満足するが、x+y<0.75を満足し
ない試料1では、電気機械結合係数KP が22.0%と
なり、25%以上の電気機械結合係数KP を達成し得な
い。また、この試料1では、比誘電率が850となり、
1000以上の比誘電率を達成していない。
On the other hand, 0.1 ≦ x or y ≦ 0.
Samples 14 and 15 that do not satisfy the condition 3 have sintering failure. In addition, the above-mentioned 0.1 ≦ x or y ≦
In Sample 1, which satisfies the condition of 0.3 but does not satisfy x + y <0.75, the electromechanical coupling coefficient K P is 22.0%, and the electromechanical coupling coefficient K P of 25% or more cannot be achieved. . In this sample 1, the relative dielectric constant was 850,
Dielectric constant of 1000 or more is not achieved.

【0016】また、0≦z≦0.3を満足しない試料3
2では、キュリー点が160℃となり、200℃を超え
るキュリー点を実現し得ない。また、0.98≦m≦
1.0の条件を満足しない試料37では、所望の分極を
達成し得ない。また、0<n<0.1の条件を満足しな
い試料のうち、nが0.1以上の試料5、9、13、1
9、23、27、31、36、40、43、46および
49では、電気機械結合係数KP が25%より小さくな
っている。また、nが0となる試料2、6、10、1
6、20、24、28および33では、1000以上の
比誘電率を達成していない。
Sample 3 not satisfying 0 ≦ z ≦ 0.3
In Curie point 2, the Curie point is 160 ° C., and a Curie point exceeding 200 ° C. cannot be realized. Also, 0.98 ≦ m ≦
The sample 37 that does not satisfy the condition of 1.0 cannot achieve the desired polarization. Also, among the samples that do not satisfy the condition of 0 <n <0.1, the samples 5, 9, 13, and 1 where n is 0.1 or more.
In 9, 23, 27, 31, 36, 40, 43, 46 and 49, the electromechanical coupling coefficient K P is smaller than 25%. Samples 2, 6, 10, 1 where n is 0
6, 20, 24, 28, and 33 did not achieve a relative dielectric constant of 1000 or more.

【0017】以上、この発明を実施例に関連して説明し
たが、この発明の範囲内にある圧電磁器組成物は、この
ような実施例に限定されるものではなく、この発明の趣
旨を逸脱しない範囲で、種々に組成を変えることができ
る。たとえば、上述した実施例では、M1として、C
a、BaおよびSrの少なくとも1種が用いられ、M2
として、Ti、ZrおよびSnの少なくとも1種が用い
られたが、M1については、その他、Mgが用いられて
も、また、M2については、Hfが用いられても、同等
の効果が得られることが確認されている。また、M1に
ついては、その他の2価の金属元素が用いられ、M2に
ついては、その他の4価の金属元素が用いられてもよ
い。
Although the present invention has been described with reference to the embodiments, the piezoelectric ceramic composition falling within the scope of the present invention is not limited to such embodiments, but departs from the spirit of the present invention. The composition can be variously changed within a range not to do. For example, in the embodiment described above, M1 is C
a, Ba and Sr are used, and M2
At least one of Ti, Zr and Sn was used, but for M1, the same effect can be obtained even if Mg is used and M2 is Hf. Has been confirmed. For M1, another divalent metal element may be used, and for M2, another tetravalent metal element may be used.

【0018】[0018]

【発明の効果】以上のように、この発明によれば、比誘
電率が1000以上で、電気機械結合係数KP が25%
以上で、また、キュリー点が200℃を超えるといった
良好な特性を示す、圧電磁器組成物を得ることができ、
この圧電磁器組成物を用いて、圧電セラミックフィル
タ、圧電セラミック発振子などの圧電セラミック素子を
有利に作製することができる。
As described above, according to the present invention, the relative dielectric constant is 1000 or more, and the electromechanical coupling coefficient K P is 25%.
As described above, a piezoelectric ceramic composition exhibiting good properties such as a Curie point exceeding 200 ° C. can be obtained,
Using this piezoelectric ceramic composition, a piezoelectric ceramic element such as a piezoelectric ceramic filter or a piezoelectric ceramic oscillator can be advantageously produced.

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平9−165262(JP,A) 特開 平7−82024(JP,A) 特開 昭59−88322(JP,A) 特開 昭51−5600(JP,A) 特開 昭49−33907(JP,A) 特開 昭48−81096(JP,A) 特開 昭48−38483(JP,A) (58)調査した分野(Int.Cl.7,DB名) C04B 35/495 - 35/499 H01L 41/187 ──────────────────────────────────────────────────続 き Continuation of front page (56) References JP-A-9-165262 (JP, A) JP-A-7-82024 (JP, A) JP-A-59-88322 (JP, A) JP-A-51- 5600 (JP, A) JP-A-49-33907 (JP, A) JP-A-48-81096 (JP, A) JP-A-48-38483 (JP, A) (58) Fields investigated (Int. 7 , DB name) C04B 35/495-35/499 H01L 41/187

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 一般式:(1−n)(K1-x-y Nax
y m (Nb1-zTaz )O3 −nM1M2O3 で表
される組成物を主成分とする、圧電磁器組成物。ただ
し、M1は2価の金属元素、M2は4価の金属元素、 0.1≦x y≦0.3 x+y<0.75 0≦z≦0.3 0.98≦m≦1.0 0<n<0.1。
1. The general formula: (1-n) (K 1-xy Na x L)
i y) m (as a main component a composition represented by Nb 1-z Ta z) O 3 -nM1M2O 3, the piezoelectric ceramic composition. Here, M1 is a divalent metal element, M2 is a tetravalent metal element, and 0.1 ≦ xy ≦ 0.3 x + y <0.750 0 ≦ z ≦ 0.3 0.98 ≦ m ≦ 1.00. <N <0.1.
【請求項2】 前記M1は、Mg、Ca、Sr、および
Baからなる群から選ばれた少なくとも1種であり、前
記M2は、Ti、Zr、Sn、およびHfからなる群か
ら選ばれた少なくとも1種である、請求項1に記載の圧
電磁器組成物。
2. The M1 is at least one selected from the group consisting of Mg, Ca, Sr, and Ba, and the M2 is at least one selected from the group consisting of Ti, Zr, Sn, and Hf. The piezoelectric ceramic composition according to claim 1, which is one kind.
JP03571598A 1998-02-18 1998-02-18 Piezoelectric ceramic composition Expired - Fee Related JP3259677B2 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP03571598A JP3259677B2 (en) 1998-02-18 1998-02-18 Piezoelectric ceramic composition
TW088102454A TW429636B (en) 1998-02-18 1999-02-12 Piezoelectric ceramic composition
US09/251,573 US6093339A (en) 1998-02-18 1999-02-17 Piezoelectric ceramic composition
KR1019990005393A KR100282598B1 (en) 1998-02-18 1999-02-18 Piezoelectric Ceramic Composition
DE19906835A DE19906835C2 (en) 1998-02-18 1999-02-18 Piezoelectric ceramic composition
DE19964243A DE19964243C2 (en) 1998-02-18 1999-02-18 New piezoelectric ceramic composition useful for piezoelectric ceramic filters and oscillators
CN99102465A CN1089736C (en) 1998-02-18 1999-02-23 Piezoelectric ceramic composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03571598A JP3259677B2 (en) 1998-02-18 1998-02-18 Piezoelectric ceramic composition

Publications (2)

Publication Number Publication Date
JPH11228227A JPH11228227A (en) 1999-08-24
JP3259677B2 true JP3259677B2 (en) 2002-02-25

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008143160A1 (en) 2007-05-16 2008-11-27 National Institute Of Advanced Industrial Science And Technology Piezoelectric ceramic, and piezoelectric, dielectric, and pyroelectric elements using the piezoelectric ceramic

Families Citing this family (35)

* Cited by examiner, † Cited by third party
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