JP2004238263A - Piezoelectric ceramic - Google Patents

Piezoelectric ceramic Download PDF

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Publication number
JP2004238263A
JP2004238263A JP2003030464A JP2003030464A JP2004238263A JP 2004238263 A JP2004238263 A JP 2004238263A JP 2003030464 A JP2003030464 A JP 2003030464A JP 2003030464 A JP2003030464 A JP 2003030464A JP 2004238263 A JP2004238263 A JP 2004238263A
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Japan
Prior art keywords
piezoelectric ceramic
lead
quality factor
dielectric constant
mechanical quality
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Pending
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JP2003030464A
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Japanese (ja)
Inventor
Kazuo Shoji
和男 荘司
Yutaka Sugaya
豊 菅谷
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Toko Inc
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Toko Inc
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Publication date
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Priority to JP2003030464A priority Critical patent/JP2004238263A/en
Publication of JP2004238263A publication Critical patent/JP2004238263A/en
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a piezoelectric ceramic that solves a problem of adverse effects of lead to environment due to its lead containment in a large amount and also that solves a problem of being not applicable to electronic components used at a high frequency band due to its large dielectric constant and small mechanical quality factor. <P>SOLUTION: The piezoelectric ceramic is comprised of a ceramic represented by general formula:Sm<SB>x</SB>Bi<SB>3-x</SB>TiNbO<SB>9</SB>(wherein, x is a compositional range of 0<x≤0.6) as a main component. The piezoelectric ceramic can be easily polarized and can be accomplished in that the dielectric constant becomes small and the mechanical quality factor Qm becomes large. Also, the problem of environment by lead is solved. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

【0001】
【発明の属する技術分野】
本発明は、セラミックレゾネータ、セラミックフィルタ、温度センサ等に用いられる圧電セラミックスに関するものである。
【0002】
【従来の技術】
従来の圧電セラミックスに、PZTと呼ばれるPbZrO−PbTiO固溶体のMPB(morphotropic phase boundary)近傍組成系のものがある。この様な組成系の圧電セラミックスは、安価で電気特性が良いために、様々な電子部品に用いられている。
しかしながら、この種の圧電セラミックスは、鉛を大量に含有しているため、製造過程の焼成溶融等の熱処理の際に大気中に鉛が放出されたり、電子部品の形で市場に出回った後、これら電子部品が廃棄される際にも土壌中に鉛が放出されたりして鉛の環境に与える影響が問題となり、工業的利用が禁止又は制限されるようになってきている。
また、近年、電気信号のアナログからデジタルへの変換が急速に行われており、電子部品の使用範囲が高周波領域に広がりつつある。しかしながら、前述の様な圧電セラミックスは、比誘電率が1000以上と大きく、機械的品質係数Qmが2500以下と小さいため、高周波帯域で使用される電子部品に用いることができなかった。
この様な状況の中、鉛を含有せず、比誘電率が小さく、機械的品質係数Qmが大きい材料として、ビスマス層状構造強誘電体が注目されている。
【0003】
【発明が解決しようとする課題】
しかしながら、ビスマス層状構造強誘電体は、一般的に分極が困難であり、十分な圧電特性を得ることが難しかった。例えば、ビスマス層状構造強誘電体の一種であるBiTiNbOは、十分な分極をすることが困難なため、特開2002−173369号や岡崎清著,「第3版 セラミック誘電体工学」,学献社,1983.6.10,p501に記載の様に圧電特性の報告がほとんどなかった。
【0004】
本発明は、分極が容易で、比誘電率を小さくかつ、機械的品質係数Qmを大きくすることができると共に、鉛による環境上の問題が発生しない圧電セラミックスを提供することを目的とする。
【0005】
【課題を解決するための手段】
本発明の圧電セラミックスは、ビスマス層状構造強誘電体の一種であるBiTiNbOの組成を改善することにより前述の課題を解決するものである。
本発明の圧電セラミックスは、一般式SmBi3−xTiNbOで表され、xが0<x≦0.6の組成範囲にあるセラミックスを主成分とする。
【0006】
【発明の実施の形態】
BiTiNbOのBiの一部をSmで置換することにより、分極に必要な電界が小さくなり、従来よりも分極が容易になる。また、その結果、機械的品質係数Qmが向上する。
【0007】
【実施例】
以下、本発明の実施例について説明する。
まず、本発明による圧電セラミックスの製造方法について説明する。Sm、Bi、Nb、TiOの原料粉末を所定の組成となるように秤量し、ボールミル等を用いて7時間湿式混合した後、湿式粉砕した。この粉砕物を乾燥した後、これにPVA等のバインダーを加えて造粒し、これを成形し、焼成することにより本発明による材料を得た。
【0008】
本発明による圧電セラミックスの特性の測定は、乾燥した粉砕物にPVA等のバインダーを1〜3wt%加えて造粒し、これを直径15mm、厚さ1〜2.5mmの円板になる様に100MPaの圧力でプレス成形し、最高保持温度が1100〜1300℃、この最高保持温度の保持時間が2時間となる様に焼成して円板状の磁器とし、この円板状の磁器を厚さが0.2〜2mmになる様に研磨した後、両面に銀電極を形成し、次いで、絶縁オイル中において、温度が100〜250℃、電界が5〜12MV/m、時間が1〜30分の条件で分極処理をして評価サンプルを得て行った。この特性の測定は、共振・反共振法を利用して厚み縦基本振動の電気機械結合係数Ktと機械的品質係数Qmを算出した。また、比誘電率の温度変化を測定し、キュリー温度Tcを算出した。さらに、分極処理において、円板状の磁器が分極できた時の電界(すなわち、分極電界)を測定した。
【0009】
図1は、SmBi3−xTiNbOにおいて、Smの置換量xを変えたときの厚み縦基本振動の電気機械結合係数Kt、機械的品質係数Qm、分極電界(MV/m)、キュリー温度Tc、焼成温度を表にまとめたものである。なお、試料Noの*印は本発明の範囲外のものであることを示している。
本発明の圧電セラミックスは、Smの置換量xが0<x≦0.6の範囲内で、機械的品質係数Qmが6000以上、比誘電率が200以下となった。また、Smの置換量xが0のもの(すなわち従来のもの)では分極することなく絶縁破壊にいたったが、Smの置換量xを増加させるにしたがって分極に必要な電界(すなわち、分極電界)が小さくなる傾向が得られた。Smの置換量xを1にすると焼結性が低下するために、分極することなく絶縁破壊にいたった。
また、Smの置換量xを増加させるとキューリ温度Tcが低くなる傾向にあるが、電子部品を電子機器のプリント基板等に半田付けする際のリフローの温度よりも十分に高い状態にあり、半田付けによって消極することがない。
【0010】
この様にSmの置換量xが0<x≦0.6の範囲で、良好な機械的品質係数Qmを得ることができると共に、分極電界と比誘電率を小さくできた。
【0011】
なお、実施例では、BiTiNbOのBiの一部をSmで置換したが、La、Nd、Gd等の希土類金属で置換してもよい。
【0012】
【発明の効果】
本発明の圧電セラミックスは、一般式SmBi3−xTiNbOで表され、xが0<x≦0.6の組成範囲にあるセラミックスを主成分とするので、容易に分極することができると共に、比誘電率を小さくかつ、機械的品質係数Qmを大きくすることができる。また、本発明の圧電セラミックスは、鉛を含有しないので、製造過程や電子部品が廃棄される際に鉛が放出されることがなく、環境上の問題が生じることもない。
【図面の簡単な説明】
【図1】本発明の圧電セラミックスの特性を説明するための特性の表である。
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a piezoelectric ceramic used for a ceramic resonator, a ceramic filter, a temperature sensor, and the like.
[0002]
[Prior art]
As a conventional piezoelectric ceramic, there is a PbZrO 3 -PbTiO 3 solid solution called PZT having a composition near the MPB (morphotropic phase boundary). Piezoelectric ceramics having such a composition are used for various electronic components because they are inexpensive and have good electric characteristics.
However, since this kind of piezoelectric ceramics contains a large amount of lead, lead is released into the atmosphere during heat treatment such as sintering and melting in the manufacturing process, or after being marketed in the form of electronic components, Even when these electronic components are discarded, lead is released into the soil and the effect of lead on the environment becomes a problem, and industrial use has been prohibited or restricted.
In recent years, the conversion of electric signals from analog to digital has been rapidly performed, and the use range of electronic components has been expanding to a high frequency range. However, the above-described piezoelectric ceramics cannot be used for electronic components used in a high frequency band because the relative dielectric constant is as large as 1000 or more and the mechanical quality factor Qm is as small as 2500 or less.
In such a situation, a bismuth layered ferroelectric has attracted attention as a material that does not contain lead, has a small relative dielectric constant, and has a large mechanical quality factor Qm.
[0003]
[Problems to be solved by the invention]
However, bismuth layered ferroelectrics are generally difficult to polarize, and it has been difficult to obtain sufficient piezoelectric characteristics. For example, Bi 3 TiNbO 9 , a type of bismuth layered structure ferroelectric, is difficult to sufficiently polarize, and is disclosed in JP-A-2002-173369 and Kiyoshi Okazaki, “Third Edition Ceramic Dielectric Engineering,” As described in Gakudonsha, 1983.6.10, p501, there were almost no reports on piezoelectric characteristics.
[0004]
An object of the present invention is to provide a piezoelectric ceramic which can be easily polarized, has a small relative dielectric constant, can have a large mechanical quality factor Qm, and does not cause environmental problems due to lead.
[0005]
[Means for Solving the Problems]
The piezoelectric ceramic of the present invention solves the above-mentioned problem by improving the composition of Bi 3 TiNbO 9 , which is a kind of bismuth layered structure ferroelectric.
The piezoelectric ceramic of the present invention are represented by the general formula Sm x Bi 3-x TiNbO 9 , mainly composed of ceramics x is in the composition range of 0 <x ≦ 0.6.
[0006]
BEST MODE FOR CARRYING OUT THE INVENTION
By substituting a part of Bi of Bi 3 TiNbO 9 with Sm, the electric field required for polarization becomes smaller, and polarization becomes easier than before. As a result, the mechanical quality factor Qm is improved.
[0007]
【Example】
Hereinafter, examples of the present invention will be described.
First, a method for manufacturing a piezoelectric ceramic according to the present invention will be described. Raw material powders of Sm 2 O 3 , Bi 2 O 3 , Nb 2 O 5 , and TiO 2 were weighed to have a predetermined composition, wet-mixed using a ball mill or the like for 7 hours, and then wet-pulverized. After the pulverized product was dried, a binder such as PVA was added to the pulverized product, granulated, molded, and fired to obtain a material according to the present invention.
[0008]
The characteristics of the piezoelectric ceramics according to the present invention are measured by adding a binder such as PVA to the dried pulverized material in an amount of 1 to 3% by weight and granulating the dried pulverized material into a disk having a diameter of 15 mm and a thickness of 1 to 2.5 mm. Press molding at a pressure of 100 MPa, baking so that the maximum holding temperature is 1100 to 1300 ° C., and the holding time at the maximum holding temperature is 2 hours, to obtain a disc-shaped porcelain, and the disc-shaped porcelain having a thickness of Is 0.2 to 2 mm, and silver electrodes are formed on both surfaces. Then, in an insulating oil, the temperature is 100 to 250 ° C., the electric field is 5 to 12 MV / m, and the time is 1 to 30 minutes. An evaluation sample was obtained by performing a polarization treatment under the following conditions. For the measurement of this characteristic, the electromechanical coupling coefficient Kt and the mechanical quality coefficient Qm of the thickness longitudinal fundamental vibration were calculated using the resonance / antiresonance method. Further, the temperature change of the relative dielectric constant was measured, and the Curie temperature Tc was calculated. Further, in the polarization process, the electric field (ie, polarization electric field) when the disk-shaped porcelain was polarized was measured.
[0009]
1, in the Sm x Bi 3-x TiNbO 9 , the electromechanical coupling coefficient Kt of the thickness extensional fundamental vibration when changing the substitution amount x of Sm, mechanical quality factor Qm, polarization field (MV / m), Curie The temperature Tc and the firing temperature are summarized in a table. In addition, * mark of a sample No has shown that it is out of the range of the present invention.
The piezoelectric ceramic of the present invention had a mechanical quality factor Qm of 6000 or more and a relative dielectric constant of 200 or less when the substitution amount x of Sm was in the range of 0 <x ≦ 0.6. In the case where the substitution amount x of Sm is 0 (ie, the conventional one), dielectric breakdown occurred without polarization. However, as the substitution amount x of Sm was increased, the electric field required for polarization (that is, the polarization electric field) was increased. Tended to be smaller. When the substitution amount x of Sm was set to 1, the sinterability was reduced, and the dielectric breakdown occurred without polarization.
Also, when the replacement amount x of Sm is increased, the Curie temperature Tc tends to decrease, but the electronic component is in a state sufficiently higher than the reflow temperature at the time of soldering an electronic component to a printed circuit board of an electronic device. There is no depolarization by attaching.
[0010]
Thus, when the substitution amount x of Sm is in the range of 0 <x ≦ 0.6, a good mechanical quality factor Qm can be obtained, and the polarization electric field and the relative dielectric constant can be reduced.
[0011]
In the embodiment, Bi in Ti 3 NbO 9 is partially replaced with Sm, but Bi may be replaced with a rare earth metal such as La, Nd or Gd.
[0012]
【The invention's effect】
The piezoelectric ceramic of the present invention are represented by the general formula Sm x Bi 3-x TiNbO 9 , since the main component ceramics x is in the composition range of 0 <x ≦ 0.6, it is possible to easily polarized At the same time, the relative dielectric constant can be reduced and the mechanical quality factor Qm can be increased. In addition, since the piezoelectric ceramic of the present invention does not contain lead, lead is not released during the manufacturing process or when electronic components are discarded, and there is no environmental problem.
[Brief description of the drawings]
FIG. 1 is a table of characteristics for explaining characteristics of a piezoelectric ceramic of the present invention.

Claims (1)

一般式
SmBi3−xTiNbO
で表され、xが0<x≦0.6の組成範囲にあるセラミックスを主成分とすることを特徴とする圧電セラミックス。
Formula Sm x Bi 3-x TiNbO 9
Wherein x is in the composition range of 0 <x ≦ 0.6 as a main component.
JP2003030464A 2003-02-07 2003-02-07 Piezoelectric ceramic Pending JP2004238263A (en)

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Publications (1)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007217233A (en) * 2006-02-17 2007-08-30 Toko Inc Piezoelectric ceramic
CN100453501C (en) * 2005-04-28 2009-01-21 株式会社村田制作所 Piezoelectric porcelain composition and piezoelectric ceramic electronic component
CN103496973A (en) * 2013-10-07 2014-01-08 桂林理工大学 Low temperature sintered microwave dielectric ceramic BiTiNbO6 and preparation method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100453501C (en) * 2005-04-28 2009-01-21 株式会社村田制作所 Piezoelectric porcelain composition and piezoelectric ceramic electronic component
JP2007217233A (en) * 2006-02-17 2007-08-30 Toko Inc Piezoelectric ceramic
CN103496973A (en) * 2013-10-07 2014-01-08 桂林理工大学 Low temperature sintered microwave dielectric ceramic BiTiNbO6 and preparation method thereof

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