JP2003303758A5 - - Google Patents

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Publication number
JP2003303758A5
JP2003303758A5 JP2002107652A JP2002107652A JP2003303758A5 JP 2003303758 A5 JP2003303758 A5 JP 2003303758A5 JP 2002107652 A JP2002107652 A JP 2002107652A JP 2002107652 A JP2002107652 A JP 2002107652A JP 2003303758 A5 JP2003303758 A5 JP 2003303758A5
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Japan
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sample
height
charged particle
particle beam
unit
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JP2002107652A
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English (en)
Japanese (ja)
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JP2003303758A (ja
JP3969640B2 (ja
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Publication of JP2003303758A5 publication Critical patent/JP2003303758A5/ja
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Publication of JP3969640B2 publication Critical patent/JP3969640B2/ja
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JP2002107652A 2002-04-10 2002-04-10 荷電粒子ビーム描画装置およびそれを用いた描画方法 Expired - Fee Related JP3969640B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002107652A JP3969640B2 (ja) 2002-04-10 2002-04-10 荷電粒子ビーム描画装置およびそれを用いた描画方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002107652A JP3969640B2 (ja) 2002-04-10 2002-04-10 荷電粒子ビーム描画装置およびそれを用いた描画方法

Publications (3)

Publication Number Publication Date
JP2003303758A JP2003303758A (ja) 2003-10-24
JP2003303758A5 true JP2003303758A5 (enrdf_load_stackoverflow) 2005-05-26
JP3969640B2 JP3969640B2 (ja) 2007-09-05

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JP2002107652A Expired - Fee Related JP3969640B2 (ja) 2002-04-10 2002-04-10 荷電粒子ビーム描画装置およびそれを用いた描画方法

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JP (1) JP3969640B2 (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5087258B2 (ja) * 2005-11-04 2012-12-05 株式会社ニューフレアテクノロジー 荷電粒子ビーム描画方法、荷電粒子ビーム描画装置、位置ずれ量計測方法及び位置計測装置
JP5129535B2 (ja) * 2007-09-28 2013-01-30 株式会社ニューフレアテクノロジー フォトマスク高さ測定方法及び高さ測定装置を有する電子線描画装置
JP2009124024A (ja) * 2007-11-16 2009-06-04 Nuflare Technology Inc 電子線描画装置
JP5203992B2 (ja) * 2008-03-25 2013-06-05 株式会社ニューフレアテクノロジー 電子ビーム描画装置及び電子ビーム描画方法
JP5662816B2 (ja) * 2011-01-31 2015-02-04 株式会社ニューフレアテクノロジー 荷電粒子ビーム描画装置
EP3588531B1 (en) * 2018-06-25 2020-10-14 FEI Company Multi-beam charged particle imaging apparatus
US11257657B2 (en) * 2020-02-18 2022-02-22 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam device with interferometer for height measurement

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