JP2003239070A5 - - Google Patents

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Publication number
JP2003239070A5
JP2003239070A5 JP2002041862A JP2002041862A JP2003239070A5 JP 2003239070 A5 JP2003239070 A5 JP 2003239070A5 JP 2002041862 A JP2002041862 A JP 2002041862A JP 2002041862 A JP2002041862 A JP 2002041862A JP 2003239070 A5 JP2003239070 A5 JP 2003239070A5
Authority
JP
Japan
Prior art keywords
substrate
substrate holder
base
elastic member
holder according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002041862A
Other languages
English (en)
Japanese (ja)
Other versions
JP4441158B2 (ja
JP2003239070A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002041862A priority Critical patent/JP4441158B2/ja
Priority claimed from JP2002041862A external-priority patent/JP4441158B2/ja
Publication of JP2003239070A publication Critical patent/JP2003239070A/ja
Publication of JP2003239070A5 publication Critical patent/JP2003239070A5/ja
Application granted granted Critical
Publication of JP4441158B2 publication Critical patent/JP4441158B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2002041862A 2002-02-19 2002-02-19 基板ホルダー Expired - Fee Related JP4441158B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002041862A JP4441158B2 (ja) 2002-02-19 2002-02-19 基板ホルダー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002041862A JP4441158B2 (ja) 2002-02-19 2002-02-19 基板ホルダー

Publications (3)

Publication Number Publication Date
JP2003239070A JP2003239070A (ja) 2003-08-27
JP2003239070A5 true JP2003239070A5 (enExample) 2005-08-11
JP4441158B2 JP4441158B2 (ja) 2010-03-31

Family

ID=27782145

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002041862A Expired - Fee Related JP4441158B2 (ja) 2002-02-19 2002-02-19 基板ホルダー

Country Status (1)

Country Link
JP (1) JP4441158B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4590315B2 (ja) * 2005-06-24 2010-12-01 株式会社ホンダロック ミラーの表面処理装置
JP6233712B2 (ja) * 2014-08-27 2017-11-22 信越半導体株式会社 気相成長装置及び被処理基板の支持構造
DE102020109265A1 (de) 2020-04-02 2021-10-07 Apeva Se Substrathalter mit einer elastischen Substratauflage

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