JP4441158B2 - 基板ホルダー - Google Patents

基板ホルダー Download PDF

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Publication number
JP4441158B2
JP4441158B2 JP2002041862A JP2002041862A JP4441158B2 JP 4441158 B2 JP4441158 B2 JP 4441158B2 JP 2002041862 A JP2002041862 A JP 2002041862A JP 2002041862 A JP2002041862 A JP 2002041862A JP 4441158 B2 JP4441158 B2 JP 4441158B2
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Japan
Prior art keywords
substrate
substrate holder
thin film
holding
holder
Prior art date
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Expired - Fee Related
Application number
JP2002041862A
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English (en)
Japanese (ja)
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JP2003239070A (ja
JP2003239070A5 (enExample
Inventor
武司 出口
健 川俣
順雄 和田
延好 豊原
邦彦 鵜澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
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Olympus Corp
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Publication date
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Priority to JP2002041862A priority Critical patent/JP4441158B2/ja
Publication of JP2003239070A publication Critical patent/JP2003239070A/ja
Publication of JP2003239070A5 publication Critical patent/JP2003239070A5/ja
Application granted granted Critical
Publication of JP4441158B2 publication Critical patent/JP4441158B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2002041862A 2002-02-19 2002-02-19 基板ホルダー Expired - Fee Related JP4441158B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002041862A JP4441158B2 (ja) 2002-02-19 2002-02-19 基板ホルダー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002041862A JP4441158B2 (ja) 2002-02-19 2002-02-19 基板ホルダー

Publications (3)

Publication Number Publication Date
JP2003239070A JP2003239070A (ja) 2003-08-27
JP2003239070A5 JP2003239070A5 (enExample) 2005-08-11
JP4441158B2 true JP4441158B2 (ja) 2010-03-31

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ID=27782145

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002041862A Expired - Fee Related JP4441158B2 (ja) 2002-02-19 2002-02-19 基板ホルダー

Country Status (1)

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JP (1) JP4441158B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4590315B2 (ja) * 2005-06-24 2010-12-01 株式会社ホンダロック ミラーの表面処理装置
JP6233712B2 (ja) * 2014-08-27 2017-11-22 信越半導体株式会社 気相成長装置及び被処理基板の支持構造
DE102020109265A1 (de) 2020-04-02 2021-10-07 Apeva Se Substrathalter mit einer elastischen Substratauflage

Also Published As

Publication number Publication date
JP2003239070A (ja) 2003-08-27

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