JP2003233188A5 - - Google Patents
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- Publication number
- JP2003233188A5 JP2003233188A5 JP2002032449A JP2002032449A JP2003233188A5 JP 2003233188 A5 JP2003233188 A5 JP 2003233188A5 JP 2002032449 A JP2002032449 A JP 2002032449A JP 2002032449 A JP2002032449 A JP 2002032449A JP 2003233188 A5 JP2003233188 A5 JP 2003233188A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- alicyclic hydrocarbon
- hydrocarbon group
- general formula
- linear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 125000002723 alicyclic group Chemical group 0.000 claims 8
- 125000000217 alkyl group Chemical group 0.000 claims 6
- 125000004432 carbon atoms Chemical group C* 0.000 claims 5
- 125000004435 hydrogen atoms Chemical group [H]* 0.000 claims 3
- 239000002253 acid Substances 0.000 claims 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims 2
- 125000002947 alkylene group Chemical group 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 125000000753 cycloalkyl group Chemical group 0.000 claims 1
- 238000004090 dissolution Methods 0.000 claims 1
- 125000004185 ester group Chemical group 0.000 claims 1
- 125000001033 ether group Chemical group 0.000 claims 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims 1
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 claims 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 claims 1
- 125000005647 linker group Chemical group 0.000 claims 1
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims 1
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 claims 1
- 125000003718 tetrahydrofuranyl group Chemical group 0.000 claims 1
- 125000001412 tetrahydropyranyl group Chemical group 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002032449A JP3907171B2 (ja) | 2002-02-08 | 2002-02-08 | ポジ型レジスト組成物 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002032449A JP3907171B2 (ja) | 2002-02-08 | 2002-02-08 | ポジ型レジスト組成物 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2003233188A JP2003233188A (ja) | 2003-08-22 |
JP2003233188A5 true JP2003233188A5 (pt) | 2005-04-07 |
JP3907171B2 JP3907171B2 (ja) | 2007-04-18 |
Family
ID=27775568
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002032449A Expired - Fee Related JP3907171B2 (ja) | 2002-02-08 | 2002-02-08 | ポジ型レジスト組成物 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3907171B2 (pt) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100821440B1 (ko) * | 2003-01-31 | 2008-04-10 | 미츠비시 레이온 가부시키가이샤 | 레지스트용 중합체 및 레지스트 조성물 |
WO2004096787A1 (ja) * | 2003-04-28 | 2004-11-11 | Mitsubishi Chemical Corporation | 多環式ラクトン化合物及び多環式ラクトン構造を有する(メタ)アクリレート化合物、並びにその製造方法 |
JP4191103B2 (ja) | 2004-07-02 | 2008-12-03 | 東京応化工業株式会社 | ポジ型レジスト組成物およびレジストパターン形成方法 |
JP5250226B2 (ja) * | 2007-09-04 | 2013-07-31 | 東京応化工業株式会社 | 高分子化合物、ポジ型レジスト組成物、およびレジストパターン形成方法 |
US8029972B2 (en) * | 2007-10-11 | 2011-10-04 | Tokyo Ohka Kogyo Co., Ltd. | Resist composition and method of forming resist pattern |
JP6959726B2 (ja) * | 2015-11-16 | 2021-11-05 | 住友化学株式会社 | 化合物、樹脂、レジスト組成物及びレジストパターンの製造方法 |
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2002
- 2002-02-08 JP JP2002032449A patent/JP3907171B2/ja not_active Expired - Fee Related