JP2003232742A5 - - Google Patents

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Publication number
JP2003232742A5
JP2003232742A5 JP2002034196A JP2002034196A JP2003232742A5 JP 2003232742 A5 JP2003232742 A5 JP 2003232742A5 JP 2002034196 A JP2002034196 A JP 2002034196A JP 2002034196 A JP2002034196 A JP 2002034196A JP 2003232742 A5 JP2003232742 A5 JP 2003232742A5
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JP
Japan
Prior art keywords
substrate
crosspiece
transparent substrate
opening
substrate support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002034196A
Other languages
English (en)
Japanese (ja)
Other versions
JP4079651B2 (ja
JP2003232742A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002034196A priority Critical patent/JP4079651B2/ja
Priority claimed from JP2002034196A external-priority patent/JP4079651B2/ja
Publication of JP2003232742A publication Critical patent/JP2003232742A/ja
Publication of JP2003232742A5 publication Critical patent/JP2003232742A5/ja
Application granted granted Critical
Publication of JP4079651B2 publication Critical patent/JP4079651B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2002034196A 2002-02-12 2002-02-12 基板支持装置 Expired - Fee Related JP4079651B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002034196A JP4079651B2 (ja) 2002-02-12 2002-02-12 基板支持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002034196A JP4079651B2 (ja) 2002-02-12 2002-02-12 基板支持装置

Publications (3)

Publication Number Publication Date
JP2003232742A JP2003232742A (ja) 2003-08-22
JP2003232742A5 true JP2003232742A5 (zh) 2005-08-25
JP4079651B2 JP4079651B2 (ja) 2008-04-23

Family

ID=27776772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002034196A Expired - Fee Related JP4079651B2 (ja) 2002-02-12 2002-02-12 基板支持装置

Country Status (1)

Country Link
JP (1) JP4079651B2 (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI393875B (zh) * 2004-09-27 2013-04-21 Olympus Corp 基板檢測裝置之固持器及基板檢測裝置
JP5334488B2 (ja) * 2008-08-01 2013-11-06 光洋サーモシステム株式会社 ワーク支持部材およびこれを用いたワーク支持ピン位置調整方法
JP2010189093A (ja) * 2009-02-16 2010-09-02 Okamura Corp 吊り下げ搬送装置
WO2012141459A2 (ko) * 2011-04-13 2012-10-18 주식회사 테라세미콘 기판 지지용 지지유닛
KR101243309B1 (ko) 2011-04-13 2013-03-13 주식회사 테라세미콘 기판 지지용 보트, 보트를 포함하는 지지 유닛 및 지지 유닛을 사용한 기판 처리 장치
KR101490590B1 (ko) 2013-04-25 2015-02-05 주식회사 포스코 열처리용 프레임
CN103523485B (zh) * 2013-10-18 2016-01-20 台龙电子（昆山）有限公司 目检流水线
KR101682523B1 (ko) * 2015-03-26 2016-12-07 참엔지니어링(주) 기판 지지 장치

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