JP2003225600A - 機能性薄膜形成装置及び形成方法 - Google Patents

機能性薄膜形成装置及び形成方法

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Publication number
JP2003225600A
JP2003225600A JP2002027022A JP2002027022A JP2003225600A JP 2003225600 A JP2003225600 A JP 2003225600A JP 2002027022 A JP2002027022 A JP 2002027022A JP 2002027022 A JP2002027022 A JP 2002027022A JP 2003225600 A JP2003225600 A JP 2003225600A
Authority
JP
Japan
Prior art keywords
substrate
solution
thin film
functional thin
plate surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002027022A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003225600A5 (enExample
Inventor
Takahiro Yamazaki
貴弘 山崎
Akihiro Shigeyama
昭宏 重山
Norio Toyoshima
範夫 豊島
Daisuke Matsushima
大輔 松嶋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Priority to JP2002027022A priority Critical patent/JP2003225600A/ja
Publication of JP2003225600A publication Critical patent/JP2003225600A/ja
Publication of JP2003225600A5 publication Critical patent/JP2003225600A5/ja
Pending legal-status Critical Current

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  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP2002027022A 2002-02-04 2002-02-04 機能性薄膜形成装置及び形成方法 Pending JP2003225600A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002027022A JP2003225600A (ja) 2002-02-04 2002-02-04 機能性薄膜形成装置及び形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002027022A JP2003225600A (ja) 2002-02-04 2002-02-04 機能性薄膜形成装置及び形成方法

Publications (2)

Publication Number Publication Date
JP2003225600A true JP2003225600A (ja) 2003-08-12
JP2003225600A5 JP2003225600A5 (enExample) 2005-08-18

Family

ID=27748670

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002027022A Pending JP2003225600A (ja) 2002-02-04 2002-02-04 機能性薄膜形成装置及び形成方法

Country Status (1)

Country Link
JP (1) JP2003225600A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005211770A (ja) * 2004-01-28 2005-08-11 Sharp Corp 基板製造装置
JP2006175411A (ja) * 2004-12-24 2006-07-06 Seiko Epson Corp 膜形成装置及び電気光学装置並びに電子機器
KR100738106B1 (ko) * 2006-02-09 2007-07-12 삼성전자주식회사 컬러 필터의 제조장치
US7681520B2 (en) 2005-06-20 2010-03-23 Seiko Epson Corporation Functional droplet coating apparatus, display, and electronic device
US7794781B2 (en) 2005-01-21 2010-09-14 Seiko Epson Corporation Film formation method, electro-optical device manufacturing method and electronic apparatus
JP2012115761A (ja) * 2010-11-30 2012-06-21 Seiko Epson Corp 印刷方法及び印刷装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005211770A (ja) * 2004-01-28 2005-08-11 Sharp Corp 基板製造装置
JP2006175411A (ja) * 2004-12-24 2006-07-06 Seiko Epson Corp 膜形成装置及び電気光学装置並びに電子機器
US7794781B2 (en) 2005-01-21 2010-09-14 Seiko Epson Corporation Film formation method, electro-optical device manufacturing method and electronic apparatus
US7681520B2 (en) 2005-06-20 2010-03-23 Seiko Epson Corporation Functional droplet coating apparatus, display, and electronic device
KR100738106B1 (ko) * 2006-02-09 2007-07-12 삼성전자주식회사 컬러 필터의 제조장치
JP2012115761A (ja) * 2010-11-30 2012-06-21 Seiko Epson Corp 印刷方法及び印刷装置

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