JP2003224257A - 固体撮像装置及びその製造方法 - Google Patents

固体撮像装置及びその製造方法

Info

Publication number
JP2003224257A
JP2003224257A JP2002020871A JP2002020871A JP2003224257A JP 2003224257 A JP2003224257 A JP 2003224257A JP 2002020871 A JP2002020871 A JP 2002020871A JP 2002020871 A JP2002020871 A JP 2002020871A JP 2003224257 A JP2003224257 A JP 2003224257A
Authority
JP
Japan
Prior art keywords
insulating film
film
solid
photoelectric conversion
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002020871A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003224257A5 (enExample
Inventor
Kazuo Ota
一生 太田
Atsushi Kuroiwa
淳 黒岩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP2002020871A priority Critical patent/JP2003224257A/ja
Publication of JP2003224257A publication Critical patent/JP2003224257A/ja
Publication of JP2003224257A5 publication Critical patent/JP2003224257A5/ja
Pending legal-status Critical Current

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  • Solid State Image Pick-Up Elements (AREA)
  • Light Receiving Elements (AREA)
JP2002020871A 2002-01-30 2002-01-30 固体撮像装置及びその製造方法 Pending JP2003224257A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002020871A JP2003224257A (ja) 2002-01-30 2002-01-30 固体撮像装置及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002020871A JP2003224257A (ja) 2002-01-30 2002-01-30 固体撮像装置及びその製造方法

Publications (2)

Publication Number Publication Date
JP2003224257A true JP2003224257A (ja) 2003-08-08
JP2003224257A5 JP2003224257A5 (enExample) 2005-07-07

Family

ID=27744250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002020871A Pending JP2003224257A (ja) 2002-01-30 2002-01-30 固体撮像装置及びその製造方法

Country Status (1)

Country Link
JP (1) JP2003224257A (enExample)

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