JP2003214379A5 - - Google Patents
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- Publication number
- JP2003214379A5 JP2003214379A5 JP2002267257A JP2002267257A JP2003214379A5 JP 2003214379 A5 JP2003214379 A5 JP 2003214379A5 JP 2002267257 A JP2002267257 A JP 2002267257A JP 2002267257 A JP2002267257 A JP 2002267257A JP 2003214379 A5 JP2003214379 A5 JP 2003214379A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002267257A JP4126212B2 (ja) | 2001-11-19 | 2002-09-12 | 真空ポンプ |
| EP02257646A EP1314892B2 (en) | 2001-11-19 | 2002-11-05 | Vacuum pump |
| DE60202740T DE60202740T3 (de) | 2001-11-19 | 2002-11-05 | Vakuumpumpe |
| AT02257646T ATE288036T1 (de) | 2001-11-19 | 2002-11-05 | Vakuumpumpe |
| US10/294,828 US6752588B2 (en) | 2001-11-19 | 2002-11-14 | Vacuum pump |
| KR1020020071193A KR100860179B1 (ko) | 2001-11-19 | 2002-11-15 | 진공 펌프 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001-353741 | 2001-11-19 | ||
| JP2001353741 | 2001-11-19 | ||
| JP2002267257A JP4126212B2 (ja) | 2001-11-19 | 2002-09-12 | 真空ポンプ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003214379A JP2003214379A (ja) | 2003-07-30 |
| JP2003214379A5 true JP2003214379A5 (ja) | 2005-06-30 |
| JP4126212B2 JP4126212B2 (ja) | 2008-07-30 |
Family
ID=26624604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002267257A Expired - Lifetime JP4126212B2 (ja) | 2001-11-19 | 2002-09-12 | 真空ポンプ |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6752588B2 (ja) |
| EP (1) | EP1314892B2 (ja) |
| JP (1) | JP4126212B2 (ja) |
| KR (1) | KR100860179B1 (ja) |
| AT (1) | ATE288036T1 (ja) |
| DE (1) | DE60202740T3 (ja) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4484470B2 (ja) | 2002-10-23 | 2010-06-16 | エドワーズ株式会社 | 分子ポンプ、及びフランジ |
| JP4499388B2 (ja) * | 2003-08-27 | 2010-07-07 | エドワーズ株式会社 | 分子ポンプおよび結合装置 |
| JP2006063969A (ja) * | 2004-07-30 | 2006-03-09 | Shimadzu Corp | 回転式真空ポンプ、真空装置およびポンプ接続構造 |
| US7140833B2 (en) * | 2004-11-04 | 2006-11-28 | The Boc Group, Llc | Integrated turbo/drag/regenerative pump with counter-rotating turbo blades |
| JP4609082B2 (ja) * | 2005-01-25 | 2011-01-12 | 株式会社島津製作所 | フランジおよびこのフランジを備えたターボ分子ポンプ |
| GB0520750D0 (en) | 2005-10-12 | 2005-11-23 | Boc Group Plc | Vacuum pumping arrangement |
| FR2893094B1 (fr) * | 2005-11-10 | 2011-11-11 | Cit Alcatel | Dispositif de fixation pour une pompe a vide |
| US8379834B2 (en) | 2006-01-21 | 2013-02-19 | Soundbite Communications, Inc. | Method and system for managing interactive communications campaigns |
| JP4949746B2 (ja) * | 2006-03-15 | 2012-06-13 | エドワーズ株式会社 | 分子ポンプ、及びフランジ |
| DE102006058672B4 (de) * | 2006-12-13 | 2016-09-15 | Pfeiffer Vacuum Gmbh | Anordnung mit Vakuumpumpe |
| JP5315100B2 (ja) * | 2009-03-18 | 2013-10-16 | 株式会社ニューフレアテクノロジー | 描画装置 |
| DE102009039119B4 (de) | 2009-08-28 | 2022-11-03 | Pfeiffer Vacuum Gmbh | Vakuumpumpe und Anordnung mit Vakuumpumpe |
| JP5343884B2 (ja) * | 2010-02-16 | 2013-11-13 | 株式会社島津製作所 | ターボ分子ポンプ |
| JP5738869B2 (ja) * | 2010-09-06 | 2015-06-24 | エドワーズ株式会社 | ターボ分子ポンプ |
| JP5768670B2 (ja) * | 2011-11-09 | 2015-08-26 | 株式会社島津製作所 | ターボ分子ポンプ装置 |
| DE102014104161A1 (de) * | 2014-03-26 | 2015-10-01 | Pfeiffer Vacuum Gmbh | Wälzkolbenvakuumpumpe |
| JP6736904B2 (ja) * | 2016-02-16 | 2020-08-05 | 株式会社デンソー | 駆動装置 |
| US10480520B2 (en) * | 2016-06-16 | 2019-11-19 | Scott C. Mancl | Motor-driven fan with an assembly for minimizing vibration and strain |
| JP7048210B2 (ja) * | 2017-01-20 | 2022-04-05 | エドワーズ株式会社 | 真空ポンプ装置、及び該真空ポンプ装置に用いられるポンプ本体ユニット、制御ユニット、並びにスペーサ |
| FR3077105B1 (fr) * | 2018-01-19 | 2020-02-14 | Safran Electrical & Power | Ventilateur pour un groupe de refroidissement d'aeronef |
| EP3760872B1 (de) * | 2020-07-03 | 2022-06-08 | Pfeiffer Vacuum Technology AG | Vakuumpumpe mit befestigungsvorkehrung zur anbringung der pumpe an einer befestigungsstruktur sowie pumpstand mit solch einer daran angebrachten vakuumpumpe |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4086012A (en) * | 1976-09-20 | 1978-04-25 | The United States Of America As Represented By The Secretary Of The Navy | Rotational energy absorbing coupling |
| JP3426734B2 (ja) * | 1994-10-17 | 2003-07-14 | 三菱重工業株式会社 | ターボ分子ポンプ |
| JP3879169B2 (ja) | 1997-03-31 | 2007-02-07 | 株式会社島津製作所 | ターボ分子ポンプ |
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2002
- 2002-09-12 JP JP2002267257A patent/JP4126212B2/ja not_active Expired - Lifetime
- 2002-11-05 AT AT02257646T patent/ATE288036T1/de not_active IP Right Cessation
- 2002-11-05 EP EP02257646A patent/EP1314892B2/en not_active Expired - Lifetime
- 2002-11-05 DE DE60202740T patent/DE60202740T3/de not_active Expired - Lifetime
- 2002-11-14 US US10/294,828 patent/US6752588B2/en not_active Expired - Lifetime
- 2002-11-15 KR KR1020020071193A patent/KR100860179B1/ko active IP Right Grant