JP2003202494A5 - - Google Patents
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- Publication number
- JP2003202494A5 JP2003202494A5 JP2002200695A JP2002200695A JP2003202494A5 JP 2003202494 A5 JP2003202494 A5 JP 2003202494A5 JP 2002200695 A JP2002200695 A JP 2002200695A JP 2002200695 A JP2002200695 A JP 2002200695A JP 2003202494 A5 JP2003202494 A5 JP 2003202494A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002200695A JP4228130B2 (ja) | 2001-11-05 | 2002-07-10 | 投影光学系、露光装置及びデバイスの製造方法 |
| TW091124319A TW588223B (en) | 2001-11-05 | 2002-10-22 | Projection optical system and exposure device |
| CNB021466696A CN100483172C (zh) | 2001-11-05 | 2002-11-01 | 投影光学系统，曝光装置以及设备的制造方法 |
| KR1020020068092A KR20030038427A (ko) | 2001-11-05 | 2002-11-05 | 투영 광학계, 노광 장치 및 디바이스의 제조 방법 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001-339424 | 2001-11-05 | ||
| JP2001339424 | 2001-11-05 | ||
| JP2002200695A JP4228130B2 (ja) | 2001-11-05 | 2002-07-10 | 投影光学系、露光装置及びデバイスの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003202494A JP2003202494A (ja) | 2003-07-18 |
| JP2003202494A5 true JP2003202494A5 (ja) | 2008-03-21 |
| JP4228130B2 JP4228130B2 (ja) | 2009-02-25 |
Family
ID=26624347
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002200695A Expired - Fee Related JP4228130B2 (ja) | 2001-11-05 | 2002-07-10 | 投影光学系、露光装置及びデバイスの製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4228130B2 (ja) |
| KR (1) | KR20030038427A (ja) |
| CN (1) | CN100483172C (ja) |
| TW (1) | TW588223B (ja) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005017734A (ja) * | 2003-06-26 | 2005-01-20 | Nikon Corp | 投影光学系、露光装置、およびデバイス製造方法 |
| JP4779394B2 (ja) * | 2005-03-23 | 2011-09-28 | 株式会社ニコン | 投影光学系、露光装置、および露光方法 |
| JP2010091751A (ja) | 2008-10-07 | 2010-04-22 | Canon Inc | 投影光学系及び露光装置 |
| CN102486569B (zh) * | 2010-12-01 | 2014-06-18 | 上海微电子装备有限公司 | 一种投影物镜系统 |
| CN103105666B (zh) * | 2011-11-10 | 2015-04-15 | 上海微电子装备有限公司 | 一种曝光投影物镜 |
| CN103364928B (zh) * | 2012-03-31 | 2015-09-30 | 上海微电子装备有限公司 | 一种投影物镜光学系统 |
| CN107664809B (zh) * | 2016-07-29 | 2019-11-26 | 上海微电子装备（集团）股份有限公司 | 一种投影物镜 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3819048B2 (ja) * | 1995-03-15 | 2006-09-06 | 株式会社ニコン | 投影光学系及びそれを備えた露光装置並びに露光方法 |
| JP3864399B2 (ja) * | 1996-08-08 | 2006-12-27 | 株式会社ニコン | 投影露光装置及び該投影露光装置に用いられる投影光学系並びにデバイス製造方法 |
| JP2000056219A (ja) * | 1998-08-11 | 2000-02-25 | Nikon Corp | 投影光学系 |
| JP2001051193A (en) * | 1999-06-03 | 2001-02-23 | Nikon Corp | Projection optical system projection exposing device provided with the system and manufacture of device |
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2002
- 2002-07-10 JP JP2002200695A patent/JP4228130B2/ja not_active Expired - Fee Related
- 2002-10-22 TW TW091124319A patent/TW588223B/zh active
- 2002-11-01 CN CNB021466696A patent/CN100483172C/zh not_active Expired - Fee Related
- 2002-11-05 KR KR1020020068092A patent/KR20030038427A/ko not_active Application Discontinuation