JP2003173970A5 - - Google Patents

Info

Publication number

JP2003173970A5

JP2003173970A5 JP2002201265A JP2002201265A JP2003173970A5 JP 2003173970 A5 JP2003173970 A5 JP 2003173970A5 JP 2002201265 A JP2002201265 A JP 2002201265A JP 2002201265 A JP2002201265 A JP 2002201265A JP 2003173970 A5 JP2003173970 A5 JP 2003173970A5

Authority

JP

Japan

Prior art keywords

semiconductor film

manufacturing

rare gas

amorphous structure

film

Prior art date

2002-07-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
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• 239000004065 semiconductor Substances 0.000 claims 32
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 16
• 239000007789 gas Substances 0.000 claims 15
• 238000004519 manufacturing process Methods 0.000 claims 15
• 238000000034 method Methods 0.000 claims 13
• 229910052757 nitrogen Inorganic materials 0.000 claims 8
• BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 4
• 238000000151 deposition Methods 0.000 claims 4
• 230000008021 deposition Effects 0.000 claims 4
• 239000002184 metal Substances 0.000 claims 4
• 229910052751 metal Inorganic materials 0.000 claims 4
• 229910052786 argon Inorganic materials 0.000 claims 2
• 230000004888 barrier function Effects 0.000 claims 2
• 239000013078 crystal Substances 0.000 claims 2
• 229910052734 helium Inorganic materials 0.000 claims 2
• 229910052743 krypton Inorganic materials 0.000 claims 2
• 229910052754 neon Inorganic materials 0.000 claims 2
• 229910052756 noble gas Inorganic materials 0.000 claims 2
• 229910052724 xenon Inorganic materials 0.000 claims 2
• 230000015572 biosynthetic process Effects 0.000 claims 1
• 229910052802 copper Inorganic materials 0.000 claims 1
• 229910052737 gold Inorganic materials 0.000 claims 1
• 238000010438 heat treatment Methods 0.000 claims 1
• 229910052741 iridium Inorganic materials 0.000 claims 1
• 229910052742 iron Inorganic materials 0.000 claims 1
• 229910052759 nickel Inorganic materials 0.000 claims 1
• 229910052762 osmium Inorganic materials 0.000 claims 1
• 229910052763 palladium Inorganic materials 0.000 claims 1
• 238000005268 plasma chemical vapour deposition Methods 0.000 claims 1
• 229910052697 platinum Inorganic materials 0.000 claims 1
• 239000002994 raw material Substances 0.000 claims 1
• 229910052703 rhodium Inorganic materials 0.000 claims 1
• 229910052707 ruthenium Inorganic materials 0.000 claims 1