JP2003170303A - Cutting tool made of surface coated cemented carbide having hard coating layer exerting high heat resistance - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cutting tool made of surface coated cemented carbide of which hard coating layer exerts high heat resistance. <P>SOLUTION: The hard coating layer comprising a lower layer a and an upper layer b is physically deposited on a surface of WC based cemented carbide substrate or carbo-nitriding titanium based cermet substrate. The lower layer has an average layer thickness of 0.5 to 5 μm, has a composition that is represented by the formula (Ti<SB>1-(</SB>X<SB>+</SB>Y<SB>)</SB>AlXSiY)N and satisfies atomic ratio X: 0.20 to 0.50, Y: 0.15 to 0.30 in the measurement by an Auger spectroscopic analysis device of a central part in the thickness direction, and indicates a texture where amorphous silicon nitride having a skeleton structure (frame structure) surrounds complex nitride particles of hyperfine crystal Ti-Al-Si in the observation by a transmission electron microscope. The upper layer has an average layer thickness of 0.5 to 5 μm, has a composition that is represented by the formula (Al<SB>1-</SB>ZSiZ)N and satisfies atomic ratio Z: 0.15 to 0.30 in the measurement by the Auger spectroscopic analysis device, and indicates a texture where amorphous silicon nitride having a skeleton structure surrounds complex nitride particles of hyperfine crystal Al-Si. <P>COPYRIGHT: (C)2003,JPO

Description

DETAILED DESCRIPTION OF THE INVENTION [0001] BACKGROUND OF THE INVENTION The present invention relates to the generation of high heat
Excellent hard coating layer for high-speed cutting of accompanying steel and cast iron
Demonstrate heat resistance to prevent wear progress due to overheating.
Surface coating that enables longer service life
Regarding cemented carbide cutting tools (hereinafter referred to as coated carbide tools)
Is what you do. [0002] 2. Description of the Related Art Generally, cutting tools include various types of steel and cast iron.
For turning or planing of work materials such as
Throw-away heads that are detachably attached to
And drills used for drilling and cutting the work material.
Tools and miniature drills, as well as face milling of the work material
Solid type end used for groove processing, shoulder processing, etc.
Domill, etc.
Removably attached to the solid type end mill
Similarly, a slow-away end mill tool that performs cutting
Which is known. [0003] Tungsten carbide is used as a cutting tool.
(Hereinafter referred to as WC) base cemented carbide or titanium carbonitride
Substrate made of base cermet (hereinafter referred to as TiCN)
(Hereinafter, these are collectively referred to as a carbide substrate)
(A) having an average layer thickness of 0.5 to 5 μm and a composition formula: (T
i_1-XAl_X) When represented by N,
X: 0.3 in atomic ratio as measured by a G. spectrometer.
Ti-Al composite nitride satisfying 0 to 0.70
Lower layer represented by (Ti, Al) N], (b)
Aluminum nitride having an average layer thickness of 0.5 to 5 μm
(Hereinafter, referred to as AlN), the lower layer,
And a hard coating layer consisting of an upper layer
Coated carbide tools are known, and the coated carbide tools
In the above, the lower layer of the hard coating layer constituting the
It has excellent high-temperature hardness and heat resistance, and the upper layer has excellent heat.
Since it has conductivity, it can be used for various types of steel and cast iron.
When used for continuous or interrupted cutting, the upper layer
Combined with excellent heat dissipation, the lower layer is excellent
It is also well known that it exhibits excellent wear resistance.
You. [0004] Furthermore, the above coated carbide tool is
1 is a kind of a physical vapor deposition apparatus schematically shown in FIG.
The above-mentioned carbide substrate is loaded into the ion plating system
Then, the inside of the apparatus is heated with a heater to, for example, an atmosphere of 0.13 Pa.
After heating to a temperature of 400 ° C. as a vacuum,
Electrode and Ti-Al alloy having predetermined composition and metal A
of the cathode electrode (evaporation source)
During the period, for example, under the conditions of a voltage: 35 V and a current: 90 A,
Discharge, and at the same time, nitrogen
The gas was introduced and the pressure of the reaction atmosphere was set to 1 Pa.
A bias voltage of, for example, -150 V is applied to the carbide substrate.
Under the added conditions, the surface of the cemented carbide substrate is
(Ti, Al) N layer as part layer and Al as upper layer
It is also known to be manufactured by depositing an N layer.
You. [0005] On the other hand, cutting in recent years
Need to save labor and energy and reduce costs
There is a strong demand, and with this, the cutting process has improved the performance of the cutting machine
In conjunction with this, there is a tendency to increase the speed, but
For hard tools, this can be done under normal conditions such as steel or cast iron.
There is no problem when used for cutting of
When used under cutting conditions, the heat generated during cutting is extremely high.
Al constituting the upper layer of the hard coating layer
The heat dissipation effect of the N layer sufficiently satisfies the temperature rise of the hard coating layer.
The foot cannot be prevented and the temperature of such a hard coating layer
Is relatively short because the increase in
At present, the service life is reached in hours. [0006] Means for Solving the Problems Accordingly, the present inventors have
In view of the above, the hardness of the conventional coated carbide tool
Focusing on the coating layer, especially for temperature rise during high-speed cutting
To develop a hard coating layer that exhibits excellent wear resistance
As a result of the research, (A) a constituent layer of the hard coating layer of the conventional coated carbide tool;
S (Ti, Al) N layer and AlN layer
i, and the composition formula: (Ti_{1- (X + Y)}Al_XSi_Y)
When represented by N, Auger spectroscopy at the center in the thickness direction
X: 0.20 to 0.5 in atomic ratio as measured by the apparatus.
0, Y: T having a composition satisfying 0.15 to 0.30
i-Al-Si composite nitride [hereinafter, (Ti, Al, S
i) N]] layer, and the composition formula: (Al_1-ZSi_Z) N
In the case of, the Auger spectrum at the center in the thickness direction
As measured by an analyzer, the atomic ratio was Z: 0.15 to 0.5.
Al-Si composite nitride having a composition satisfying 30
Under (Al, Si) N) layers.
(Ti, Al, Si) N layer and (Al, Si) N layer
Formation, for example by an arc ion plating device
In this case, the bias voltage applied to the carbide substrate and the
And the pressure of the nitrogen atmosphere which is the reaction atmosphere,
Heating temperature is kept relatively high, for example, 500 ° C
Relatively high, for example -300V bias
The operation was performed under the conditions of a voltage and a nitrogen atmosphere pressure of 10 Pa.
The (Ti, Al, Si) N layer and the (Al,
Each of the Si) N layers was observed by a transmission electron microscope.
Ultra-fine crystal Ti-Al-Si composite nitride particles [hereinafter, referred to as
(Ti, Al, Si) N crystal grains]
Crystalline Al-Si composite nitride particles [hereinafter, (Al, Si)
N crystal grains] also have a skeleton structure (skeleton structure)
Amorphous silicon nitride (hereinafter referred to as amorphous SiN)
To have a surrounding organization. (B) the (Ti, Al, Si) N layer of (a) and
The (Al, Si) N layer constitutes this (Ti, Al,
Si) N crystal grains and (Al, Si) N crystal grains are S
not only has excellent heat resistance due to i content
And the amorphous SiN having a skeleton structure
With excellent heat resistance, the hard coating layer itself
The thermal properties are further improved, thus forming this hard coating layer.
Coated carbide tools made of steel, especially steel and cast iron
Hard coating layer even when used for high speed cutting with high heat generation
Exhibits excellent heat resistance and wear due to overheating of itself
Since the progress is suppressed, the wear resistance is further improved,
To achieve stable cutting performance over a period of time.
When. The research results shown in (a) and (b) above were obtained.
It is. The present invention has been made based on the above research results.
(A) 0.5% on the surface of the cemented carbide substrate.
Having an average layer thickness of ５5 μm and a composition formula: (Ti_{1- (X + Y)}A
l_XSi_Y) When expressed by N, the
X: 0.20 by atomic ratio as measured by a spectrophotometer.
To 0.50, Y: 0.15 to 0.30
Observation with a transmission electron microscope revealed that (Ti-A
l-Si) N crystal fine particles with skeleton structure (skeleton structure)
Shows the structure surrounded by the amorphous SiN (Ti, A
(b) 0.5 to 5 μm
It has an average layer thickness and has a composition formula: (Al_1-ZSi_Z) N
, The Auger spectrometer at the center in the thickness direction
By atomic ratio, Z: 0.15 to 0.30
Have the same composition, and also by transmission electron microscopy
Observation shows that (Al-Si) N crystal grains have a skeleton structure
Shows a structure surrounded by amorphous SiN (Al, S
i) Upper layer made of N, lower part of (a) and (b) above
Layer and a hard coating layer consisting of an upper layer
, A hard coated layer that exhibits excellent heat resistance
The tool has features. Next, in the coated carbide tool of the present invention,
The composition of the lower layer and the upper layer constituting the hard coating layer,
Further, the reason for limiting the average layer thickness as described above will be described.
You. (A) Lower layer of hard coating layer In the (Ti, Al, Si) N layer constituting the lower layer,
In some cases, Ti, Al and a part of Si
High toughness, excellent high-temperature hardness and heat resistance by Al, and
It has much higher heat resistance due to some Si (T
i-Al-Si) N crystal grains are formed, and the remaining S
i has a skeleton structure with extremely excellent heat resistance
Which form amorphous SiN and therefore have a composition
Formula: (Ti _{1- (X + Y)}Al_XSi_Y) The X value of N is the atomic ratio (hereinafter
The same applies to (Ti-Al-Si) below 0.2.
To ensure desired high-temperature hardness and heat resistance for N crystal fine particles
And if the Y value is less than 0.15, especially immediately
Of amorphous SiN skeleton structure with improved heat resistance
Is insufficient, and it is difficult to further improve the heat resistance.
On the other hand, even if the X value exceeds 0.5, the skeleton structure
Formation is suppressed and the desired excellent heat resistance
Property cannot be ensured, and the Y value is 0.30
If it exceeds, the strength of the hard coating layer sharply decreases,
The reason that chipping easily occurs on the cutting blade due to the cause
X value is 0.2-0.5 and Y value is 0.15-0.30
It was decided. When the average thickness of the lower layer is less than 0.5 μm,
Ensure that the desired excellent wear resistance is maintained over a long period of time.
If the average layer thickness exceeds 5 μm,
Since chipping is likely to occur on the blade, the average layer
The thickness was determined to be 0.5-5 μm. (B) Upper layer of hard coating layer In the (Al, Si) N layer constituting the upper layer,
Al with a part of Si having excellent thermal conductivity (heat dissipation)
Solid solution in N to improve its heat resistance, excellent
(Al-Si) N crystal grains with excellent thermal conductivity and heat resistance
And the remaining Si is also very good
Of amorphous SiN with skeleton structure with excellent heat resistance
Therefore, if the Z value is less than 0.15,
Skeleton structure with excellent heat resistance
Insufficient formation of crystalline SiN and desired excellent heat resistance
If the Z value exceeds 0.30,
Originally, the excellent thermal conductivity of AlN suddenly decreases
The Z value is set to 0.15 to 0.30
Was. If the average thickness of the upper layer is less than 0.5 μm,
The above properties of the component layer cannot be made sufficient.
If the average layer thickness exceeds 5 μm, chipping will occur on the cutting edge.
The average layer thickness is 0.5 to 5 μm
m. [0010] DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, a coated carbide tool of the present invention
Will be specifically described with reference to examples. (Example 1) As raw material powders,
WC powder, TiC powder, ZrC powder, V
C powder, TaC powder, NbC powder, Cr_ThreeC_TwoPowder, T
Prepare iN powder, TaN powder, and Co powder, and
Raw material powder is blended to the composition shown in Table 1 and
100 hours after wet mixing with a dry mill and drying.
a into a green compact at the pressure of a
b. Vacuum in a vacuum at a temperature of 1400 ° C for 1 hour.
After sintering, add R: 0.05 honing to the cutting edge.
The chip of ISO standard and CNMG120408
Carbide substrates A1 to A10 made of WC-based cemented carbide having a shape
Was formed. In addition, as raw material powders,
TiCN having an average particle size of 2 μm (by weight ratio TiC /
TiN = 50/50) powder, Mo_TwoC powder, ZrC powder
Powder, NbC powder, TaC powder, WC powder, Co powder,
And Ni powder were prepared, and these raw material powders are shown in Table 2.
For 24 hours with a ball mill
And after drying, press into a green compact at a pressure of 100 MPa
The green compact is molded in a nitrogen atmosphere of 2 kPa at a temperature of:
Sintered at 1500 ° C for 1 hour, after sintering, cutting edge
Honing process of R: 0.03 to the part
TiC with chip shape of case-MGG120408
Carbide substrates B1 to B6 made of N-based cermet were formed. Next, these super-hard substrates A1 to A10 and
And ultrasonic cleaning of each of B1 to B6 in acetone
Then, in the dry state, the usual arc also illustrated in FIG.
Attached to the ion plating system while the cathode
As an electrode (evaporation source), Ti-
Place Al-Si alloy and Al-Si alloy at predetermined positions in the device
Attach, and also attach Bombard cleaning metal Ti.
While evacuating the inside of the apparatus and maintaining the vacuum at 0.5 Pa,
After heating the inside of the device to 500 ° C with a heater,
-1000V DC via on a carbide substrate rotating on
A voltage is applied to the metal Ti of the cathode electrode and the anode.
An arc discharge is generated between the electrode and the
The body surface is cleaned with Ti bombard, and then the reaction gas is
Nitrogen gas is introduced as a source to make a reaction atmosphere of 10 Pa.
And a DC bias voltage of -300 V
A pressure is applied to the cathode electrode (the Ti-Al-S
i alloy or Al-Si alloy) and the anode electrode
An arc discharge is generated, so that the surface of the super hard substrate is
The target composition and target layer thickness (Ti,
A lower layer composed of an (Al, Si) N layer and (Al, Si)
Deposit a hard coating layer consisting of an upper layer composed of N layers
As a result, FIG. 2A is a schematic perspective view, and FIG.
The coated carbide tool of the present invention having a shape shown in a schematic longitudinal sectional view
Of the surface coated cemented carbide alloy of the present invention
(Hereinafter referred to as coated carbide tips) 1 to 16
Manufactured respectively. For the purpose of comparison, the above-mentioned super-hard substrate A1
~ A10 and each of B1-B6 in acetone
In an ultrasonically cleaned and dried state, also illustrated in FIG.
Attached to a normal arc ion plating system
Various cathode components (evaporation source)
The Ti-Al alloy and metal Al
First, wear the metal Ti for bombarding.
While evacuating the chamber and maintaining the vacuum at 0.5 Pa,
After heating the inside of the device to 500 ° C with a
Apply a DC bias voltage of -1000 V to the cathode
Arc discharge between the metal Ti of the electrode and the anode electrode
And then clean the super hard substrate surface with Ti bomber
Then, introduce nitrogen gas as a reaction gas into the device.
A reaction atmosphere of 4 Pa and -1
Under the condition that a DC bias voltage of 50 V is applied,
Anode electrode (the Ti-Al alloy or metal Al) and an anode
Arc discharge between the electrode and the
On the surface of the substrate, the target composition and the target layer thickness shown in Table 5
A lower layer composed of a (Ti, Al) N layer and an AlN layer
By depositing a hard coating layer consisting of the upper layer
Made of conventional surface coated cemented carbide as conventional coated carbide tool
Throwaway tips (hereinafter referred to as conventional coated carbide tips)
U) 1 to 16 were produced respectively. Next, the coated carbide tips 1 to 1 according to the present invention will be described.
6 and conventional coated carbide tips 1 to 16
Screwed to the tip of a tool steel tool with a fixing jig
State Work material: JIS SCM440 round bar, Cutting speed: 350 m / min. , Cut: 1.5 mm, Feed: 0.2 mm / rev. , Cutting time: 10 minutes, Dry high-speed continuous turning test of alloy steel under the conditions of Work material: JIS S50C with 4 longitudinal grooves at regular intervals in the length direction
Round bar, Cutting speed: 300 m / min. , Cut: 1.5 mm, Feed: 0.2 mm / rev. , Cutting time: 5 minutes, High-speed intermittent turning test of carbon steel under various conditions
To Work material: 4 vertical grooves at equal intervals in the length direction of JIS / FC300
Round bar, Cutting speed: 250 m / min. , Cut: 1.5 mm, Feed: 0.3 mm / rev. , Cutting time: 5 minutes, A dry high-speed intermittent turning test of cast iron under the conditions
The flank wear width of the cutting edge is also measured in the turning
Was. Table 6 shows the measurement results. [0015] [Table 1] [0016] [Table 2] [0017] [Table 3][0018] [Table 4] [0019] [Table 5][0020] [Table 6] (Example 2) As raw material powder, average particle size:
Medium coarse WC powder with 5.5 μm, fine with 0.8 μm
Granular WC powder, 1.3 μm TaC powder, 1.2 μm
NbC powder, 1.2 μm ZrC powder, 2.3 μm
m Cr_ThreeC_TwoPowder, 1.5 μm VC powder, 1.0 μm
μm of (Ti, W) C powder and 1.8 μm of Co
Powders are prepared, and these raw material powders are shown in Table 7 respectively.
And then add wax and acetone
After mixing in a ball mill for 24 hours and drying under reduced pressure,
Press molding into various compacts of specified shape at 0MPa pressure
Then, these green compacts are placed in a vacuum atmosphere of 6 Pa at 7 ° C. /
At a temperature rise rate of 1370-1470 ° C.
Temperature, hold at this temperature for 1 hour, and then
Sintered to 8mm, 13mm and 26mm diameter
Three kinds of round bar sintered bodies for forming a cemented carbide substrate were formed,
Table 7 shows the three types of round rod sintered bodies
The diameter x length of the cutting edge is 6mm x 1
3mm, 10mm x 22mm, and 20mm x 45m
Carbide substrate C-1 to C-8 for end mill having dimension of m
Was manufactured respectively. Next, these cemented carbide substrates C-1 to C-8
Are ultrasonically cleaned in acetone and dried.
And a normal arc ion play also illustrated in FIG.
And the above-mentioned Example 1 was placed on these surfaces.
Under the same conditions, the target composition and target layer thickness shown in Table 8
(Ti, Al, Si) N layer and a lower layer (A
Hard coating layer consisting of an upper layer composed of (1, Si) N layers
By vapor deposition, FIG.
(B) has a shape shown in a schematic cross-sectional view of the cutting blade portion
Made of the surface-coated cemented carbide of the present invention as the coated carbide tool of the present invention
End mill (hereinafter referred to as coated carbide end mill of the present invention)
1 to 8 were produced respectively. For the purpose of comparison, the above-mentioned cemented carbide substrate C-
Each of 1 to C-8 was ultrasonically washed in acetone and dried.
In the dry state, a normal arc nozzle also illustrated in FIG.
Charge the on-plating device and apply
Manufacturing conditions of conventional coated carbide tips 1 to 16 in Example 1
Target composition and target layer shown in Table 9 under the same conditions as
Lower layer composed of thick (Ti, Al) N layer and AlN layer
Depositing a hard coating layer consisting of an upper layer composed of
The conventional surface-coated cemented carbide as a conventional coated carbide tool
Gold end mills (hereinafter referred to as conventional coated carbide end mills)
C) 1 to 8 were produced respectively. Next, the coated carbide end mill 1 of the present invention will be described.
-8 and conventional coated carbide end mills 1-8
Bright coated carbide end mills 1-3 and conventional coated carbide end mills
For mills 1-3, Work material: Plane dimensions: 100 mm x 250 mm, thickness: 5
0mm JIS / SNCM439 plate material, Cutting speed: 160 m / min. , Groove depth (cut): 3 mm Table feed: 650 mm / min, High-speed groove cutting test of alloy steel under the conditions of
Coated carbide end mills 4-6 and conventional coated carbide end mills
For 4-6, Work material: Plane dimensions: 100 mm x 250 mm, thickness: 5
0mm JIS FC300 plate material, Cutting speed: 180 m / min. , Groove depth (cut): 5 mm, Table feed: 600mm / min, -Speed high-speed groove cutting test of cast iron under the conditions of
Carbide end mills 7, 8 and conventional coated carbide end mills
About 7,8, Work material: Plane dimensions: 100 mm x 250 mm, thickness: 5
0mm JIS SUS304 plate, Cutting speed: 60 m / min. , Groove depth (cut): 10 mm, Table feed: 150 mm / min, Dry high-speed groove cutting test of stainless steel under the conditions of the
Each time, and in any of the groove cutting tests,
The surface wear amount reaches 0.1 mm, which is the standard of service life
The cutting groove length up to was measured. Tables 8 and 9 show the measurement results.
Each is shown. [0025] [Table 7] [0026] [Table 8][0027] [Table 9] (Example 3)
Diameter 8mm (for forming super hard substrate C-1 to C-3), 13m
m (for forming the super-hard substrate C-4 to C-6), and 26 mm
Three types of round bar sintered bodies (for forming carbide substrates C-7 and C-8)
From these three types of round bar sintered bodies by grinding
The diameter x length of the forming part is 4mm x 13mm (carbide
Substrates D-1 to D-3), 8 mm x 22 mm (Carbide substrate D
-4 to D-6), and 16 mm × 45 mm (carbide substrate)
D-7, D-8) Carbide substrate for drill D-
1 to D-8 were produced respectively. Next, these super-hard substrates D-1 to D-8
The same as above, ultrasonically washed in acetone and dried
Normal arc ion plating illustrated in FIG.
The above-mentioned Example 1 was placed on the surface of the super-hard substrate after being charged into the apparatus.
Target composition and target shown in Table 10 under the same conditions as
A lower layer composed of a (Ti, Al, Si) N layer having a thickness of
A hard coating composed of an upper layer composed of an (Al, Si) N layer
FIG. 4 (a) is a schematic front view showing a state in which a cover layer is deposited.
The shape shown in the schematic cross-sectional view of the groove forming portion in FIG.
Surface-coated super alloy of the present invention as coated carbide tool of the present invention having
Hard alloy drill (hereinafter referred to as coated carbide drill of the present invention)
1 to 8 were produced respectively. For the purpose of comparison, the above-mentioned carbide substrate D-
1 to D-8 were ultrasonically washed in acetone and dried.
In the dry state, a normal arc nozzle also illustrated in FIG.
Charge the on-plating device and apply
Manufacturing conditions of conventional coated carbide tips 1 to 16 in Example 1
Target composition and target shown in Table 11 under the same conditions as
A lower layer composed of a (Ti, Al) N layer having a layer thickness and AlN
A hard coating layer consisting of an upper layer consisting of
With the conventional surface-coated carbide as a conventional coated carbide tool
Alloy drill (hereinafter referred to as conventional coated carbide drill) 1
8 were each produced. Next, the above-described coated carbide drills 1 to 8 of the present invention will be described.
And, among the conventional coated carbide drills 1 to 8, the coated
Hard drills 1-3 and conventional coated carbide drills 1-3
The Work material: Plane dimensions: 100 mm x 250 mm, thickness: 5
0mm JIS S50C plate, Cutting speed: 140 m / min. , Feed: 0.18 mm / rev, High-speed wet drilling test of carbon steel under the following conditions
Bright coated carbide drills 4-6 and conventional coated carbide drills 4 ~
About 6, Work material: Plane dimensions: 100 mm x 250 mm, thickness: 5
0mm JIS SCM440 plate, Cutting speed: 100 m / min. , Feed: 0.18 mm / rev, High speed drilling cutting test of alloy steel under the conditions of
Bright coated carbide drills 7, 8 and conventional coated carbide drills 7,
For 8, Work material: Plane dimensions: 100 mm x 250 mm, thickness: 5
0mm JIS FC250 plate material, Cutting speed: 90 m / min. , Feed: 0.27 mm / rev, Wet high speed drilling cutting test of cast iron under the conditions of it,
Each of the wet high-speed drilling cutting tests (Izu
The flank surface of the cutting edge of the tip, even when using water-soluble cutting oil
Measure the number of holes drilled until the wear width reaches 0.3 mm.
Was. The measurement results are shown in Tables 10 and 11, respectively. [0032] [Table 10] [0033] [Table 11] The resulting coated cemented carbide according to the present invention
Coated carbide tips 1-16 as tools, coated with the present invention
Carbide end mills 1 to 8, and coated carbide drill of the present invention 1
To 8 as well as conventional coated carbide tools as conventional coated carbide tools
1 to 16, conventional coated carbide end mills 1 to 8, and
Composition and Layer of Hard Coating Layer of Conventional Coated Carbide Drills 1 to 8
Regarding the thickness, the center in the thickness direction of each constituent layer is
Energy dispersion type X-ray measuring device and Auger spectroscopic analyzer
When measured using a scanning electron microscope,
A set substantially the same as the target composition and the target layer thickness in Tables 3 to 11
Composition and average layer thickness (comparison with the average value of measurement at five arbitrary locations)
And for the organization, also the thickness of the constituent layers
When the central part was observed with a transmission electron microscope,
In any of the coated carbide tools of the present invention, the lower layer (Ti-A
l-Si) N crystal fine particles with skeleton structure (skeleton structure)
The structure surrounded by the amorphous SiN and the upper layer is (Al-
Si) Amorphous Si having skeleton structure with N crystal fine particles
N shows a structure surrounded by N, and further comprises the conventional coated carbide tool
Means that the lower layer is crystalline (Ti, Al) N and the upper layer is
The layer showed a texture consisting of crystalline AlN as well. [0035] According to the results shown in Tables 3 to 11, the present invention
All coated carbide tools are capable of cutting steel and cast iron.
Even at high speeds with heat, the hard coating layer has excellent resistance
Despite the fact that the hard coating layer is heated to high temperature due to thermal properties
And the progress of wear is remarkably suppressed, resulting in chipping and chipping of the cutting edge.
It has excellent abrasion resistance without
In the case of conventional coated carbide tools,
The hard coating layer, whose temperature has risen due to the high heat generated during
Since it does not have thermal properties, wear progresses significantly.
Progress in a relatively short time,
You. As described above, the coated carbide tool of the present invention
Not only cutting under normal conditions such as steel and cast iron,
Excellent wear resistance, especially in high-speed cutting
, Which saves labor and energy in cutting.
Further, it is possible to sufficiently satisfy cost reduction.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic explanatory view of an arc ion plating apparatus. FIG. 2A is a schematic perspective view of a coated carbide tip, and FIG.
1 is a schematic vertical sectional view of a coated carbide tip. FIG. 3 (a) is a schematic front view of a coated carbide end mill,
(B) is a schematic transverse sectional view of the cutting blade portion. FIG. 4A is a schematic front view of a coated carbide drill, and FIG.
FIG. 3 is a schematic cross-sectional view of the groove forming portion.

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification FI theme coat ゛ (Reference) C23C 14/16 C23C 14/16 B (72) Inventor Yusuke Tanaka 179 Kanegasaki Nishi-Oike, Uozumi-cho, Akashi-shi, Hyogo Prefecture 1 FMC Term Co., Ltd. F term (reference) 3C037 CC02 CC04 CC09 CC11 3C046 FF03 FF05 FF10 FF13 FF16 FF19 FF25 4K029 AA02 AA04 BA58 BB02 BC10 BD05 CA04 DD06 EA01

Claims (1)

Claims: 1. A surface of a tungsten carbide-based cemented carbide substrate or a titanium carbonitride-based cermet substrate, comprising: (a) an average layer thickness of 0.5 to 5 μm;
i _{1- (X + Y)} Al _X Si _Y ) N, when measured by an Auger spectrometer at the center in the thickness direction, the atomic ratio is:
It has a composition satisfying X: 0.20 to 0.50 and Y: 0.15 to 0.30, and the ultra-fine crystalline Ti-Al-Si composite nitride particles are skeletonized by observation with a transmission electron microscope. A lower layer made of a Ti-Al-Si composite nitride exhibiting a structure surrounded by amorphous silicon nitride having a structure (skeleton structure); (b) having an average layer thickness of 0.5 to 5 µm, and a composition formula: (A
l _1-Z Si _Z ) N, similarly measured by an Auger spectrometer at the center in the thickness direction, and expressed by atomic ratio:
It has a composition that satisfies 0.15 to 0.30, and is also observed by a transmission electron microscope to find that the ultrafine crystal Al-Si
An upper layer made of Al-Si composite nitride showing a structure in which the composite nitride particles are surrounded by amorphous silicon nitride having a skeleton structure (skeleton structure), and a lower layer and an upper layer of (a) and (b) Surface-coated cemented carbide cutting tool with a hard coating layer exhibiting excellent heat resistance, obtained by physical vapor deposition of the formed hard coating layer.