JP2003164874A - Apparatus for removing object to be removed of fluid, apparatus for making pure water and method of making pure water - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve the following problems with the conventional apparatus for making pure water; the water is heretofore filtered by using sodium hypochlorite and a flocculating agent, but if the mixing of the sodium hypochlorite and the flocculating agent is resulted by accidental force, the evolution of harmful gas occurs. <P>SOLUTION: The raw water 30 containing various germs is introduced into a raw water tank 31. Electric field water is supplied to the raw water by electric field water supplying means 37, by which the various germs are sterilized. Filter equipment 34 immersed into the various germs in the raw water tank 31 has a second filter consisting of solids. The objects to be removed, which contain the various germs are filtered by this second filter. The filtrate water filtered in the manner described above is passed through a fourth pipe 24 and is retreated, by which the pure water is made. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for removing an object to be removed of a fluid, an apparatus for producing pure water, and a method for producing pure water. In particular, the present invention uses a strong sterilizing power of electrolyzed water to sterilize various bacteria in the raw water and removes an object to be removed, and an apparatus for removing an object to be removed of a fluid for producing pure water, an apparatus for producing pure water, and The present invention relates to a method for producing pure water.

[0002]

2. Description of the Related Art Generally, when a plate-like body such as a metal, a semiconductor or a ceramic is ground or polished, the temperature rise of equipment is prevented,
A fluid such as water is supplied in consideration of improvement of lubricity and adhesion of grinding dust or cutting dust to the plate-like body.

For example, when dicing or back-grinding a semiconductor wafer which is a plate-shaped body of semiconductor material,
The method of flowing pure water is taken. In the dicing equipment,
In order to prevent the temperature rise of the dicing blade and to prevent the dicing debris from adhering to the wafer, a water discharge nozzle is attached so that pure water hits the semiconductor wafer and the blade. Also, when the wafer thickness is reduced by back grinding, pure water is flowed for the same reason.

The pure water used here is produced, for example, from raw water taken from the natural world. Since the raw water contains contaminants such as bacteria and sand, it is necessary to remove the contaminants from the raw water by some method.

Referring to FIG. 8, a conventional pure water producing apparatus 10 will be described. In FIG. 8, the portion surrounded by the alternate long and short dash line shows the removed object removing apparatus 10A. Also, in this figure, the solid arrow indicates the transport direction of raw water, and the dotted arrow indicates the transport direction of chemicals.

The pure water producing apparatus 10 has an object removing device 10A, an RO device 18a and an ion exchange device 18b. Specifically, the removal target removal device 10A substantially removes the removal target contained in the raw water, and the RO device 18a and the ion exchange device 18b remove the ions contained in the raw water.

The structure of the object removing device 10A will be described. The removed substance removing device 10A includes a raw water tank 15, a surface water filter 11 for performing primary filtration, a filtered water tank 16 for storing primary filtered water subjected to primary filtration, and a secondary filtered water for primary filtration. It is composed of a UBR filter 12 for filtering and a filter 17 for further filtering the secondary filtered water.

Each component of the removed object removing device 10A is
The method of producing pure water will be described below.

Raw water collected from the natural world is first stored in the raw water tank 15. Here, as the raw water, river water, lake water, groundwater, or the like can be adopted. Then, the raw water in the raw water tank 15 is passed through the pump to the surface water filter 11
Be transported to. The surface water filter 11 is a sand filter and can roughly filter the substances to be removed contained in the raw water. The primary filtered water roughly filtered by the surface water filter 11 is
It is stored in the filtered water tank 16.

The primary filtered water in the filtered water tank 16 is transported to the UBR filter 12 via a pump. The UBR filter 12 is a sand filter, and the basic structure is the surface water filter 1.
Although it is the same as 1, it is possible to remove finer objects to be removed. Then, the secondary filtered water filtered by the UBR filter 12 is transported to the filter 17.

The filter 17 has a filter film provided with holes of 10 μm, for example. Therefore, most of the objects to be removed are removed by the filter 17. From the above, most of the particulate matter can be removed by the removal target removal apparatus 10A.

However, the raw water contains impurities that cannot be removed even by using the filter 17. The contaminants include ions, melts and fine solids. Therefore, the RO device 18a and the ion exchange device 18b are used to remove this impurity.

The RO device 18a is a device for removing impurities contained in the raw water that has passed through the filter 17 using a resin film. The RO device 18a can remove fine solid matter contained in the raw water. Here, fine solid matter can be removed, but ions and dissolved matters are not removed. Therefore, the filtered water that has passed through the RO device 18a is further processed by the ion exchange device 18b.

The ion exchange device 18b is a device for removing ions and dissolved substances contained in the filtered water that has passed through the RO device 18a by using an ion exchange resin. Here, the treated water is passed through a column containing a bead-shaped ion exchange resin to remove the ions and the dissolved matter.

Next, chemicals used for producing pure water will be described.

A conventional pure water producing apparatus 10 uses sodium hypochlorite (NaClO) and PAC (polyaluminum chloride). Both of them are mixed into raw water or filtered water by sodium hypochlorite supply means 13 and PAC supply means 14, respectively.

Sodium hypochlorite (NaClO) is mixed at several points in the route of the raw water by the sodium hypochlorite supply means 13 in order to kill various bacteria in the raw water. Thus, the purpose of mixing sodium hypochlorite into raw water at several places is to leave free chlorine in the treated water at any stage of producing pure water from raw water. Specifically, 1 mg / l or more of free chlorine must remain in the treated water. Therefore, the total amount of sodium hypochlorite used to produce pure water from raw water is about 20 mg / l with respect to the amount of raw water. As a result, it is possible to prevent miscellaneous bacteria from re-propagating in the treated water. Further, in order to measure the concentration of free chlorine remaining in the treated water, measuring devices (not shown) are installed at several places in the route of the treated water. Then, the amount of sodium hypochlorite to be added is determined according to the output of this measuring device.

PAC (polyaluminum chloride) is a coagulant, and has a function of coagulating substances to be removed contained in raw water. Then, the PAC supply means 14 mixes the treated water with the treated water at a stage before flowing into the surface water filter 11 and the UBR filter 12. By agglomerating the substance to be removed, the particle size can be increased, and the sedimentation speed of the substance to be removed can be increased. Furthermore, the filtering effect of the surface water filter 11 and the UBR filter 12 can be improved.

In the above description, the sand filter is mainly used to remove the substances to be removed contained in the raw water, but there is also a method of using a filter (UF module) instead of the sand filter. In this case, the PAC supply means 14 becomes unnecessary.

The pure water producing apparatus 10 has the above-described configuration, but the following components may be added as other components.

Other components of the apparatus 10 for producing pure water include decarbonation means, hydrochloric acid supply means, caustic soda supply means, sodium sulfite supply means and the like. The decarboxylation means has a function of removing carbon dioxide dissolved in raw water. The hydrochloric acid supply means and the caustic soda supply means use hydrochloric acid (HCl) in the RO device 18a and the ion exchange device 18b.
Alternatively, the ion exchange resin is regenerated by supplying caustic soda (NaOH). The sodium sulfite supply means has a function of reducing sodium hypochlorite remaining in the filtered water.

Pure water can be produced by the pure water producing apparatus 10 described above. Specifically, pure water having a specific resistance of 10 MΩ or more can be manufactured.

[0023]

However, in the case of a facility that uses a large amount of pure water, such as a semiconductor factory,
The amount of sodium hypochlorite required is also large. Specifically, assuming that about 4 million tons of raw water is treated annually and 20 mg / l of sodium hypochlorite is used for the treatment of this raw water, it is supplied as a 12% solution. About 100 tons of sodium chlorite is required. Furthermore, the quality of river water in recent years tends to deteriorate. Therefore, the amount of sodium hypochlorite used may increase. Therefore, considering the cost of purchasing sodium hypochlorite and the cost of transporting it with a tank truck, the cost of producing pure water may increase. Such a problem also applies to PAC.

Further, in a facility for producing pure water, a tank for storing sodium hypochlorite and a tank for storing PAC may be adjacent to each other. When sodium hypochlorite and PAC are mixed due to a natural disaster such as an earthquake, harmful chlorine gas is generated, which is extremely dangerous.

Furthermore, since the surface water filter 11 and the UBR filter 12 are sand filters, it is necessary to regularly backwash them. In addition, the raw water used for this back washing is treated as waste water. Therefore, about half of the raw water may be treated as waste water.

On the other hand, in the method for producing pure water using filter filtration, since a filter (called a UF module, which is made of polysulfone fiber or a ceramic filter) is used, the loss of raw water is reduced. You can However, the life of the UF module is short, about 5
It was necessary to replace a high-priced filter of ¥ 0000 / book at least once a year. Moreover, since the UF module is a pressure type filtration method, the load on the motor is large,
The pump had a high capacity.

[0027]

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and a device for removing a substance to be removed of a fluid according to the invention is a tank for storing raw water containing the substance to be removed, and the inside of the tank. A first filter provided on the first filter, a second filter formed on the surface of the first filter, and electrolyzed water supply means for mixing electrolyzed water to sterilize various bacteria contained in the raw water. It is characterized by

According to a second aspect of the invention, there is provided a device for removing an object to be removed of a fluid according to the first aspect, wherein the second filter is
It is characterized in that it is formed of a solid material different from the material to be removed.

In the device for removing an object to be removed of a fluid according to a third aspect of the present invention, the solid matter is produced by a grinding device and / or a polishing device. To do.

In the device for removing an object to be removed of a fluid according to a fourth aspect of the present invention, in the invention according to any one of the second and third aspects, the solid matter is composed of particles of different sizes. The pore size of the No. 1 filter is smaller than the largest particles of the solid matter and larger than the smallest particles of the solid matter.

According to a fifth aspect of the present invention, there is provided an apparatus for removing an object to be removed of a fluid according to any one of the second to fourth aspects, wherein the particle size distribution of the solid has two peaks. However, the size of the pores of the first filter is a size between two peaks of the solid matter.

According to a sixth aspect of the invention, there is provided a device for removing an object to be removed of a fluid according to any one of the first to fifth aspects, wherein an external force is applied to the tank by the second filter. It is characterized in that means for supplying external force is provided.

According to a seventh aspect of the present invention, in the fluid object removal device according to the sixth aspect, the first filter is erected vertically, and the external force supplying means is the first filter. It is characterized in that it is a bubble generating means provided below.

According to an eighth aspect of the invention, there is provided an apparatus for removing an object to be removed of a fluid according to any one of the first to seventh aspects, wherein the first filter is an organic polymer or ceramic. It is characterized by being a system film.

A device for removing a substance to be removed of a fluid according to a ninth aspect of the invention is the device according to any one of the first to eighth aspects, wherein raw water containing the substance to be removed is introduced into the tank. To the first pipe, one end of which is connected to the first filter, and which transports the raw water that has passed through the first filter to the outside of the tank, and the other end of the second pipe. The switching means is connected, one end is connected to the switching means, a third pipe for transporting the raw water having passed through the first filter into the tank again, and one end is connected to the switching means, A fourth pipe for discharging the raw water that has passed through the first filter to the outside of the system, and the electrolyzed water supply means is provided in the first pipe and / or the tank.

According to a tenth aspect of the invention, there is provided an apparatus for removing a substance to be removed of fluid according to any one of the first to ninth aspects, further comprising a detection means for detecting the concentration of the electrolyzed water. Is characterized by.

According to an eleventh aspect of the present invention, in the fluid object removal device according to the tenth aspect, the detection means is the first pipe, the second pipe, and the third pipe. , And is provided in the fourth pipe and / or the tank.

According to a twelfth aspect of the present invention, there is provided a device for removing a substance to be removed of a fluid for sterilizing a tank for containing raw water containing the substance to be removed, a filter provided in the tank, and sterilizing bacteria contained in the raw water. And a means for supplying electrolyzed water to the electrolyzed water.

According to a thirteenth aspect of the present invention, in the fluid object removal device according to the twelfth aspect, the tank is provided with an external force supply means for applying an external force to the second filter. Characterize.

According to a fourteenth aspect of the present invention, in the apparatus for removing an object to be removed of fluid according to the thirteenth aspect, the first filter is erected vertically, and the external force supplying means is the first one. It is characterized in that it is a bubble generating means provided below the filter.

According to a fifteenth aspect of the invention, there is provided a device for removing an object to be removed of a fluid according to any one of the twelfth to fourteenth aspects, wherein the filter is an organic polymer or ceramic membrane. Is characterized in that.

According to a sixteenth aspect of the present invention, there is provided the apparatus for removing a substance to be removed of fluid according to any one of the twelfth to fifteenth aspects, wherein raw water containing the substance to be removed is introduced into the tank. A first pipe, a second pipe, one end of which is connected to the filter, which transports the raw water that has passed through the filter to the outside of the tank, and a switching means which is connected to the other end of the second pipe. , One end is connected to the switching means,
A third pipe for transporting the raw water passing through the filter into the tank again, and a fourth pipe having one end connected to the switching means and discharging the raw water passing through the filter to the outside of the system. However, the electrolyzed water supply means is provided in the first pipe and / or the tank.

According to a seventeenth aspect of the present invention, there is provided a fluid removal object removing device according to any one of the twelfth to sixteenth aspects, further comprising a detection means for detecting the concentration of the electrolyzed water. Is characterized by.

According to an eighteenth aspect of the present invention, in the fluid object removal device according to the seventeenth aspect, the detecting means is the first pipe, the second pipe, and the third pipe. , And is provided in the fourth pipe and / or the tank.

The pure water producing apparatus of claim 19 is the same as that of claim 1.
A device for removing an object to be removed of a fluid according to claim 18 is provided.

The pure water producing apparatus of claim 20 is connected to a raw water tank for storing raw water containing an object to be removed, and is connected to the raw water tank to sterilize various bacteria contained in the raw water and then remove the object to be removed. 19. A device for removing an object to be removed of a fluid according to any one of claims 1 to 18, an apparatus for producing electrolyzed water for producing electrolyzed water to be supplied to the device for removing an object to be removed of the fluid, and the object to be removed. An RO device and an ion exchange device for further treating the filtered water filtered by the removing device.

The method for producing pure water according to the invention of claim 21 uses the apparatus for removing an object to be removed of a fluid according to any one of claims 1 to 18, and contains various bacteria contained in raw water by electrolyzed water. The method is characterized in that pure water is produced by removing the substances to be removed after contaminating bacteria.

In the method for producing pure water according to the twenty-second aspect of the present invention, raw water containing the substance to be removed is prepared, and the apparatus for removing the substance to be removed of the fluid according to any one of claims 1 to 18 is used. Purifying pure water by sterilizing various bacteria contained in raw water, removing the substance to be removed, and removing ions, dissolved substances and fine solids contained in the raw water using an RO device and an ion exchange device. It is characterized by doing.

The method for producing pure water according to the twenty-third aspect of the present invention is a method for producing pure water in which the substances to be removed are removed after sterilizing various bacteria contained in the raw water, and the electrolyzed water is added to the purified water. It is characterized in that the bacteria are sterilized by being mixed with raw water.

In the method for producing pure water according to the twenty-fourth aspect of the present invention, the bacteria are sterilized by mixing electrolyzed water with the raw water in which the substances to be removed such as bacteria are mixed, and a flocculant is added to the raw water. Pure water is produced by passing the raw water through a sand filter and a filter, and further removing the ions, dissolved substances and fine solids contained in the raw water using the RO device and the ion exchange device. It is characterized by

According to the fluid removing object removing device of the first to eleventh aspects, the electrolytic water is mixed into the raw water containing the removing objects such as various bacteria and sand to sterilize the various bacteria and then remove the removing objects. Things can be removed. By sterilizing in this way, it is possible to prevent the second filter from being clogged with various bacteria.

The object to be removed is removed by using the second filter formed on the surface of the first filter. The second filter is formed by stacking a solid substance (for example, polishing / grinding dust) different from the substance to be removed contained in the raw water in the form of a first filter. Since the second filter has fine pores, the substance to be removed in the raw water is removed. Most things can be removed.

Further, by providing an external force supplying means such as a bubble generating means below the first filter and applying an external force to the surface of the second filter, it is possible to prevent clogging of the second filter.

According to the fluid removing object removing device of the twelfth to the eighteenth aspects, the electrolytic water is mixed with the raw water containing the removing object such as the bacteria and the sand to sterilize the removing the bacteria. Things can be removed. By sterilizing in this way, it is possible to prevent the filter from being clogged with various bacteria.

Here, the second filter made of a solid material as described above is not used. Therefore, the object to be removed can be removed by making the pores of the filter smaller than the object to be removed. Further, it is possible to prevent the filter from being clogged by applying an external force to the surface of the filter with a bubble generator or the like.

In the pure water producing apparatus according to the nineteenth to twentieth aspects, the above-mentioned removed object removing device and RO device 18a are provided.
Pure water can be produced by using the ion exchange device 18b and the ion exchange device 18b in combination. In particular,
The substances to be removed such as various bacteria are removed by the substance removing device, and the ions and the like having the atomic level are removed by the RO device 18a and the ion exchange device 18b.

In the method for producing pure water according to claims 21 to 22, first, by mixing the electrolyzed water with the raw water,
It sterilizes various bacteria in raw water. As a result, the viscosity of miscellaneous bacteria can be reduced, and clogging of the second filter and the filter can be prevented. Next, filtration is performed using the second filter or the filter to remove the object to be removed. Finally, pure water can be produced by removing the metal in the ionized state by using the ion exchange device 18b removing device.

In the method for producing pure water according to claims 23 to 24, the sand filter and the RO device 18 used in the conventional example are used.
Pure water can be produced using a and the ion exchange device 18b. In addition, bacteria are sterilized by using electrolyzed water. Therefore, pure water can be produced without using sodium hypochlorite and PAC used in the conventional example.

[0059]

An object of the present invention is to produce pure water from raw water containing a substance to be removed. Here, the substance to be removed can be divided into various bacteria and other impurities. Particularly, when raw water is collected from rivers, lakes and marshes, the amount of various bacteria contained in the raw water increases. Therefore, when producing pure water from the raw water, it is important to sterilize the various bacteria efficiently. Therefore, in the present invention, various bacteria are sterilized by using electrolyzed water. Further, in the present invention, filtration is performed by the second filter made of a solid substance different from the substance to be removed contained in the raw water. (First Embodiment for Explaining Removal Object Removal Device) FIG.
First, referring to FIG.
The structure of is explained.

Reference numeral 31 is a raw water tank. Above the tank 31, the first pipe 2 is provided as a raw water supply means.
1 is provided. The pipe 21 is where the raw water mixed with the substance to be removed passes. This raw water is river water, lake water, groundwater, or the like.

A plurality of filtration devices 34 are installed in the raw water 30 stored in the raw water tank 31. 2 in this figure
Although a single filtering device 34 is illustrated, a large number of devices are actually installed. The filtering device 34 includes a first filter made of a resin sheet or the like and a second filter provided on the surface of the first filter. Here, the second filter is made of a solid substance different from the substance to be removed contained in the raw water. A detailed description of this filtering device 34 will be given later.

A bubble generating device 33 such as a bubbling device is provided below the filtering device 34, for example, a small hole is formed in the pipe, and the position of the hole is just so as to pass through the surface of the first filter membrane. Has been adjusted. 32
Is a blower, and supplies gas to the bubble generator 33.

Second pipe 2 fixed to the filtering device 34
No. 3 is selected for the third pipe 22 through which the filtered water filtered by the filtering device 34 passes and goes to the raw water tank 1 side through the switching means 25, and the fourth pipe 24 for discharging the filtered water to the outside of the system. Be transported. Then, the raw water is transported by the pump P. On the bottom of the raw water tank 31, the raw water tank 3
A pipe 36 for collecting the raw water in 1 is attached.

Further, the raw water tank 31 is provided with electric field water supply means 37 for supplying electrolyzed water to the raw water 30. Further, a detecting means 38 for detecting the concentration of the electric field water contained in the raw water 30 is provided. Electric field water supply means 37
Is designed to mix an appropriate amount of electric field water with the raw water according to the output of the detection means 38. Further, in the figure, the electric field water supply means 37 and the detection means 38 are attached to the raw water tank 31, but a plurality of these may be installed at other locations. For example, it is possible to provide the electric field water supply means 37 and the detection means 38 in the middle of the pipe.

Here, the purpose of mixing the electric field water with the raw water is to sterilize various bacteria in the raw water. Since various bacteria have a very high viscosity, they may block the pores of the filter and cause the filter to be clogged. In the present invention, the viscosity of various bacteria can be reduced by sterilizing them by using electrolyzed water. Then, the sterilized miscellaneous bacteria can be filtered using a filter like other substances to be removed such as sand.

The electric field water used here is, for example, electrolyzed from a high-concentration saline solution, and contains hypochlorite ions (C
lO ^-) and has a sodium ion (Na ^+). In particular, hypochlorite ion has a strong bactericidal action, and in the present invention, the bactericidal action sterilizes various bacteria in raw water.

Further, the sensor 26 constantly senses the substance to be removed mixed in the filtered water. As a sensor, receive light
The amount of silicon debris in the filtered water can be detected by detecting the transparency of the filtered water using an optical sensor equipped with a light emitting element. The light emitting element may be a light emitting diode or a laser. Further, the sensor 26 may be attached in the middle of the pipe 22 or in the middle of the pipe 25.

Next, the specific structure of the filtering device 34 will be described with reference to FIG. 2A is a perspective view of the filtering device 34 provided with the first filter, and FIG. 2B is a view showing the relationship between the resin sheet FT and the spacer.
2C is a sectional view taken along the line AA of FIG.
FIG. 2D is a part of the cross-sectional view taken along the line AA of FIG.

Referring to FIGS. 2A and 2C,
The filtering device 34 has the following components. That is, a resin sheet FT in which two first filters are superposed, and a resin sheet FT provided with a large number of holes HL
A spacer 40a which forms a space 41 inside by separating them, a frame-shaped holding means RG having a function of holding the resin sheet FT and the spacer 40a, and an adhering means for adhering the holding means RG and the resin sheet FT. It is composed of AD1.

The above components will be described below.

Referring to FIG. 2B, the spacer 40a has a cardboard-like shape. Thin resin sheets SHT1 and SHT2 having a thickness of about 0.2 mm are overlapped with each other, and a plurality of sections SC are provided in the longitudinal direction between them.
Space 33 surrounded by HT1, SHT2 and section SC
Is provided. The cross section of this space 33 is 3 mm in length and 4 in width.
In other words, it is a rectangle composed of mm and has a shape in which a number of straws having this rectangular cross section are arranged and integrated.

Thin resin sheet SH of this spacer 40a
A large number of holes HL having a diameter of 1 mm are formed on the surfaces of T1 and SHT2, and a filter film FT is attached to the surfaces thereof. Therefore, the filtered water filtered by the filter membrane FT passes through the hole HL, the space 33, and finally the pipe 34.
Get out of.

The filter film FT is attached to both surfaces SHT1 and SHT2 of the spacer 40a. On both surfaces SHT1 and SHT2 of the spacer 40a, there is a portion in which the hole HL is not formed, and the filter film FT1 is directly provided there.
When attached, the filter film FT1 corresponding to the portion where the holes HL are not formed does not have a filtering function and drainage does not pass therethrough, so that there is a portion where the substance to be removed is not captured. In order to prevent this phenomenon, a plurality of filter films FT are attached. Frontmost filter film FT1
Is a filter film for capturing the object to be removed, and a plurality of filter films having pores larger than the pores of the filter film FT1 are provided from the filter film FT1 toward the surface SHT1 of the spacer 40a. Here, the filter film FT
Two pieces are stuck together. Hole HL of spacer 40a
The filter film F with large pores even in the area where the film is not formed
Since the filter film FT1 is attached after T2 is provided, the entire surface of the filter film FT1 has a filtering function, the object to be removed is captured on the entire surface of the filter film FT1, and the second filter film is the front and back surfaces. It will be formed on the entire surface of SH1 and SH2. Although the filter films SHT1 and SHT2 are illustrated as rectangular sheets for convenience of drawing, they may be formed in a bag shape.

Next, bag-shaped filter films SHT1 and SHT
2, how the spacer 30a and the pressing means RG are attached will be described.

Referring to FIGS. 5C and 5D,
The spacer 40a is inserted into the bag-shaped filter FT, and the four sides including the filter film FT are sandwiched by the holding means RG. Then, the three side edges and the remaining one side edge that are bound in a bag shape are fixed by the adhesive agent AD1 applied to the pressing means RG. In addition, the remaining one side (opening of the bag) and the pressing means R
A space SP is formed between G and G, and the filtered water generated in the space 41 is sucked into the second pipe 23 via the space SP. Further, the adhesive AD2 is provided over the entire circumference of the opening OP of the press fitting RG and is completely sealed so that the fluid cannot enter through a portion other than the filter.

Therefore, the space 41 and the second pipe 23 communicate with each other. Therefore, when sucking through the second pipe 23, the fluid passes toward the space 41 through the hole of the filter film FT and the hole HL of the spacer 30a, and the fluid flows from the space 41 to the outside via the second pipe 23. It has a structure that can transport filtered water to. Further, in the sheet SHT that constitutes the spacer 40a, except the region where the holes HL are formed, since it is a flat surface, it becomes a supporting member of the filter FT,
The filter FT can maintain a flat surface at all times and has a structure that prevents the second filter film from being broken.

Further, the shape of the filtering device 34 is not limited to the structure described above, and it is possible to construct a filtering device having a cylindrical shape, for example.

Next, the operating principle of the filtering device 34 will be described with reference to FIG. Note that FIG. 3A is a schematic view of a cross section of the filtering device 34, and FIG. 3B is the first filter 45.
FIG. 3 is an enlarged view of a portion of FIG.

Reference numeral 45 is a first filter having a large number of filter holes. Further, the film formed in layers on the exposed portion of the filter hole and the surface of the first filter 45 is the solid substance 47. The solids 47 are divided into large solids that cannot pass through the filter holes 11 and small solids that can pass through the filter holes 11. In the drawing, the object 48 is indicated by a black circle.

As the first filter, either an organic polymer type or a ceramic type can be adopted in principle. However, here, a polyolefin-based polymer film is used. An enlarged view of a portion of this polyolefin-based polymer film is shown in FIG.

As a result of pressurizing or sucking the raw water through the filter membrane, the raw water passes through the first filter 45. At that time, the large solid matter 47 that cannot pass through the filter holes remains on the surface of the first filter 45. Further, in the present invention, the solid matter 47 laminated on the surface of the first filter is used as the second filter. As a result, it becomes possible to remove an object to be removed that is smaller than the holes of the first filter 45.

Solid matters generated by mechanical processing such as grinding, polishing or crushing are distributed within a range having a size (particle diameter), and the shapes of the respective solid matters are different. Further, solid matters are randomly positioned in the wastewater in which the first filter membrane 10 is immersed. Then, the large solids to the small solids move irregularly to the filter holes of the first filter. At this time, solids smaller than the filter holes pass, but solids larger than the filter holes 11 are captured. Then, the captured large solid matter becomes a first-stage layer of the second filter 46, and this layer forms a filter hole smaller than the filter hole 11 of the first filter 45, and the large solid matter passes through the small filter hole. Small solids are captured from 47. At this time, since the shapes of the solids are different from each other, gaps of various shapes are formed between the solids, and water moves through the gaps as passages and is finally filtered. This is very similar to the good drainage of a beach.

The second filter 46 gradually grows while randomly capturing small solids from large solids, and traps the small solids while securing a passage for water (fluid). Moreover, in the second filter 46, since the solid matter can be easily moved only by remaining in a layered form, air bubbles can pass through the vicinity of the layer, a water flow can be given,
The surface layer of the second filter 46 can be easily peeled off by applying sound waves or ultrasonic waves, mechanical vibration, or rubbing with a squeegee or the like.

That is, even if the filter performance of the second filter 46 is lowered, there is an advantage that the performance can be easily restored by applying an external force to the second filter 46. In other words, the cause of the deterioration of the filter performance is mainly clogging, and the clogging can be eliminated by moving the causative substance causing the clogging again into the fluid.

In the above description, suction is adopted as a method of passing the wastewater through the filter, but other than that, natural fall,
There is a method to pressurize the drainage 22 side.
The ability to filter can be improved.

As described above, in view of the principle of the present invention, as long as the second filter 46 is formed on the first filter film 45, the first filter 45 may be a sheet-like polymer film or a ceramic film. But good. The method of transporting the fluid may be a suction type or a pressure type. However, when actually adopted, the first filter 45 is preferably a polymer membrane, and the suction method is preferable as the method of transporting the fluid. The reason will be described below.

First, if a sheet-shaped ceramic filter is produced, the cost will increase considerably, and if a crack occurs, a leak occurs and filtration cannot be performed. Further, if it is a pressure type, it is necessary to pressurize the drainage. For example, taking the raw water tank 31 of FIG. 1 as an example, in order to apply pressure, the upper part of the tank must be closed type rather than open type. However, if it is a closed type, it is difficult to generate bubbles.

On the other hand, as the polymer film, various sizes of sheets and bag-shaped filters are available at low cost. Further, since it has flexibility, cracks do not occur, and it is easy to form unevenness on the sheet. By forming the unevenness, the second filter 46 can bite the sheet and suppress the peeling in the drainage. Moreover, if it is a suction type, the tank may remain open.

If it is a pressure type, it is difficult to form the second filter film. Assuming that the pressure in the space 41 is 1 in FIG. 4, it is necessary to apply a pressure of 1 or more for drainage. Therefore, it is considered that the load is applied to the filter membrane, the captured object to be removed is fixed at a high pressure, and the object to be removed does not easily move.

Next, referring to FIG. 4, the second filter 4
The solid matter constituting 6 will be described. The graph shown in FIG. 4 shows the particle size distribution of cutting chips generated during dicing of a Si wafer.

In the present invention, as described above, the solid substance different from the substance to be removed contained in the raw water is used as the constituent substance of the second filter. Although various substances can be adopted as the solid matter, in the present invention, as an example, cutting waste (Si
Solid) is used.

Referring to FIG. 4, the solid Si content is 0.1 μm.
Is distributed in the range of about 200 μm. Since the particle size distribution measuring device could not detect particles smaller than 0.1 μm, the distribution of Si solid particles smaller than 0.1 μm is not shown. In fact, we infer that some are smaller than this.

The particle size distribution has one peak near 0.1 μm and another peak near 20 μm. The size of the pores of the first filter on which the Si solid matter is laminated is between these two peaks, and is about 0.25 μm, for example. According to the experiment under such conditions, it was found that even if the second filter is formed by using the Si solid substance, even the object to be removed of 0.1 μm or less can be captured. Therefore, most of the substances to be removed such as bacteria and sand contained in the raw water can be removed by the second filter.

For example, in order to remove an object to be removed up to 0.1 μm, it is a general idea to employ a filter having pores smaller than this size. However, it is understood from the above description that, when a large particle size and a small particle size are distributed, if filter holes having sizes in between are adopted, cutting chips of 0.1 μm or less can be captured.

Here, a filter having an average pore size of 0.25 μm was adopted as the first filter film 10. However, if the distribution deviates to the right or left in the figure, the pore size of the first filter may be changed according to the distribution. For example, if it shifts to the right, a hole diameter larger than 0.25 μm may be adopted. In general, if the pore size is increased, the amount of solids passing through the filter membrane increases, but if the time for returning the filtered water to the drainage is increased, finally, most of it can be trapped by the second filter. As a matter of course, if the pore size of the filter is reduced, the time required to capture a small solid substance becomes shorter.

Next, a method for removing the substances to be removed such as various bacteria contained in the raw water by using the substances to be removed device 20 will be described.

In the present invention, after the germs contained in the raw water are sterilized by using the electric field water, the substances to be removed contained in the raw water are removed by using the filtering device 34 including the first filter and the second filter. is doing. The second filter is made of a solid material different from the material to be removed. As the solid matter, polishing dust, excavation dust, or the like can be considered. For example, Si scraps or the like generated from a semiconductor factory can be adopted as a solid material forming the second filter.

From the above, it is necessary to form the second filter on the surface of the first filter before removing the substance to be removed contained in the raw water. That is, the present embodiment has a first processing step of forming the second filter on the surface of the first filter and a second processing step of removing the substance to be removed in the raw water. These processing steps are described below.

First Processing Step (Formation of Second Filter) A method of forming the second filter will be described with reference to FIG. First, raw water is stored in the raw water tank 31, and a Si solid material is added as a solid material. Here, the amount of raw water to be stored needs to be such that the filtering device 34 is completely immersed in the raw water. In addition, electrolyzed water is supplied to the raw water using the electric field water supply means 37 in order to sterilize various bacteria in the raw water. By mixing electrolyzed water with raw water in this way,
It is possible to sterilize various bacteria in the raw water and prevent clogging of the filter due to various bacteria.

The ratio of the electric field water in the raw water is monitored by the detecting means 38. According to the output of the detection means 38, the electric field water supply means 37 adds the electric field water to the raw water, so that the ratio of the electric field water contained in the raw water can be made to be equal to or higher than a certain level, and the micropropagation of various bacteria can be prevented. .

Next, the raw water mixed with the Si solid matter is circulated by sucking the raw water using the pump 25.
A second filter is formed. In this case, the switching means 25
The raw water transported by the second pipe 23 to the third
It has been switched to transport to the pipe 22. Therefore, raw water is circulated through the following routes. Raw water tank 3
1 → filtration device 34 → second pipe 23 → switching means 25 →
Third pipe 22 → raw water tank 31.

By circulating the raw water in this way,
A second filter made of Si solid matter is formed on the surface of the first filter, and the filtering device 34 can capture even minute objects to be removed.

The sensor 26 monitors the mixing ratio of the substances to be removed and the Si solids contained in the filtered water that has passed through the filtering device 34. Therefore, the second filter is sufficiently formed when the mixing ratio falls below a certain value. At this point, the first processing step is ended and the second processing step is performed.

Second Processing Step (Removal of Object to be Removed) Referring to FIG. 1, the second processing step formed in the first processing step
A method of removing the object to be removed in the raw water by using the filter of No. 1 will be described. First, the raw water 30 is transported to the raw water tank by the first pipe 21. Since the raw water contains not only impurities such as sand but also other bacteria as the substance to be removed, the electric water supply means 37 sterilizes the bacteria by mixing the electric water with the raw water. In this step, the filtered water that has passed through the filtering device 34 is transported to the outside of the system for removing the object to be removed 20, so that the amount of mixed electric field water is larger than that in the first step. Also in this step, the detection means 38 monitors the ratio of the electric field water contained in the raw water.

In this processing step, the switching means 2
5 discharges the filtered water transported through the second pipe 23 to the outside of the removal target removal device 20 through the fourth pipe 24. Then, the discharged filtered water is the RO device 1
8a and the ion exchange device 18b (not shown) and the like, and becomes pure water, which is then used in, for example, a semiconductor factory. Therefore, raw water is circulated through the following routes.
Raw water tank 31-> filtration device 34-> second pipe 23-> switching means 25-> fourth pipe 24-> discharged outside the system (used as pure water).

Moreover, clogging can be prevented by applying an external force to the second filter. That is, by applying an external force, the constituent material (the object to be removed or fine Si solid matter) of the second filter located at the outermost surface is removed, and the thickness of the second filter is kept constant and the filtering ability is maintained. be able to.

Here, also in this processing step, the substances to be removed and Si contained in the filtered water that has passed through the filtering device 34 are removed.
The sensor 26 monitors the mixing ratio of solids. Then, when the filtered water contains a certain amount or more of the substance to be removed or the Si solid substance due to some cause such as peeling of the second filter, the sensor 26 recognizes this. The switching means 25 linked to the sensor 26 changes the transportation method of the filtered water so that the filtered water transported through the second pipe is circulated to the raw water tank through the third pipe 22. . Then, when the second filter is sufficiently formed and the mixing ratio of the substances to be removed and the Si solids contained in the filtered water that has passed through the filtering device 34 is below a certain value, the sensor detects this. Then, the switching means 25 discharges the filtered water to the outside of the system.

On the other hand, the raw water tank becomes concentrated over time. When the desired concentration is reached, the filtration operation is stopped and the particles are aggregated and precipitated. Alternatively, the raw water having the desired concentration is passed through a filter press or the like to treat the substance to be removed.

Further, since the filtration device 34 performs suction filtration at a low flow rate and a low pressure as shown in FIG. 1, fine particles do not enter the pores of the filter membrane, and the second filter is formed. It is possible to further prevent the fine particles from entering the pores of the first filter membrane described above and improve the filtration performance. In addition, external force generating means such as air bubbling enables continuous filtration. The filtration (suction) speed here is 0.3 to 0.5 m / Day, the filtration (suction) pressure is 0.2 to 0.5 kg / cm2, and the life of the filtration membrane is 5 years or more. Can be expected. In addition, the filtration speed and filtration pressure are as follows because the first filter membrane is broken or deformed.
It is set within the range where the second filter is not destroyed, the filtration speed is 0.01 to 5 meters / Day, and the filtration pressure is 0.01 kg / cm 2 to 1.03 Kgf / cm 2 (1
Up to atmospheric pressure) is practically possible.

In addition, when suctioned at 0.3 m / Day, 252 liters / (one filter membrane) of raw water can be treated in one day, and when suctioned at 0.5 m / Day, 450 liters / day. / (1 filter membrane) raw water can be treated. The size of the filter frame is, for example, about 100 cm × 50 cm × 10 mm. This size can be changed at any time. (Second Embodiment for Explaining Another Removed Object Removal Device) Referring to FIG. 5, another removed object removal device 2
0A will be described. FIG. 5 (A) is a view showing the mechanism of the removed object removing device 20A, and FIG. 5 (B) is a sectional view showing the operating principle of the filtering device 55.

The basic mechanism of the removed object removing device 20A is the removed object removing device 20 described in the first embodiment.
Is the same as. The point of the removed object removing device 20A is
It is in the structure of the filtering device 55.

The structure and operating principle of the filtering device 55 will be described with reference to FIG.

The shape of the filtering device 55 is similar to the structure of the filtering device 34 described with reference to FIG. 2, but differs with respect to the filter membrane for filtering. In the filtering device 34, the first
The object to be removed was removed by using the second filter made of the solid matter formed on the surface of the filter membrane in (1). On the other hand, the filtering device 55 according to the present embodiment filters only the first filter 51 without using the second filter made of a solid material.

This filtration device 55 is the first as a filtration membrane.
It has a structure having only the filter 51. That is, the first filter 5 is provided on the surface of the filtration device 55 on which filtration is performed.
Only the filter 1 is provided, and the raw water is sucked through the second pipe 23, so that the object 48 to be removed is captured and filtered only by this filter. Here, as the material of the first filter, a resin-based material or a ceramic-based material can be adopted as in the first embodiment.

The point of this embodiment is that the holes of the first filter 51 are smaller than the object 48 to be removed.
As a result, the removal target 48 can be captured by the first filter 51, and the mixing ratio of the removal target contained in the filtered water passing through the filtering device 55 can be kept below a certain level.

Also in this embodiment, the electric field water supply means 37 is used to mix the electric field water with the raw water to sterilize the various bacteria contained in the raw water. By virtue of miscellaneous bacteria in the raw water, the viscosity of the miscellaneous bacteria can be reduced and clogging of the first filter 51 can be prevented. Further, by providing the detecting means 38 for detecting the concentration of the electric field water in the raw water and keeping the concentration of the limiting water in the raw water at a certain level or higher, the sterilizing action of the electric field water can be maintained.

Furthermore, referring to FIG. 5A, in the present embodiment as well, by applying an external force to the surface of the first filter 51, the holes of the first filter 51 are removed.
8 prevents clogging. Here, an external force is applied by passing bubbles through the surface of the first filter using the bubble generator 33. Further, the external force is not limited to only bubbles, and other external forces can be used. (Third Part Explaining Pure Water Production Apparatus and Pure Water Production Method
Embodiment) With reference to FIG. 6, the structure of a pure water producing apparatus 60 and a pure water producing method will be described. FIG. 6 is a view showing the mechanism of the pure water manufacturing apparatus 60.

The pure water producing apparatus 60 includes the object-to-be-removed removing apparatus 20 described in the first embodiment and the electrolytic water producing apparatus 5.
0, an RO device 18a and an ion exchange device 18b. In this figure, an object-to-be-removed device 20 for removing an object-to-be-removed contained in raw water using a second filter made of solid matter is shown, but instead of this, a second embodiment will be described. The removed object removing device 20A may be used. Therefore, it is also possible to use the filtering device 55 as described with reference to FIG. Detailed description of the removed object removing device 20 and the removed object removing device 20A has been given in the first embodiment and the second embodiment, and therefore will be omitted here.

Hereinafter, the electric field water producing apparatus 50, the RO apparatus 18a and the ion exchange apparatus 18b which are the components of the pure water producing apparatus 60 will be described.

The electrolyzed water producing apparatus 50 is an apparatus for producing electrolyzed water, and in the present invention, electrolyzed water is electrolyzed to produce electrolyzed water. Specifically, electrolyzed water is produced by electrolyzing a solution of sodium chloride (NaCl), potassium chloride (KCl), etc., dissolved in water. In the present invention, sodium chloride (salt) is adopted as an electrolyte, and salt water mixed with this is electrolyzed to produce electrolyzed water. As a result, the hypochlorite ion (ClO) has a strong bactericidal action.
^- ) Can be generated.

Further, in the present invention, in order to produce the electrolyzed water having a concentration as high as possible, the electrolyzed water is produced by using the saline solution in which the salt is mixed in the water until it becomes saturated. Further, although the electrolyzed water has poor storability, the electrolyzed water produced by the electrolyzed water producing apparatus 50 as shown in the figure is immediately used in the removal target object removing apparatus 20 so that the electrolyzed water can be sterilized. The decrease can be prevented. Furthermore, this electrolysis water production apparatus 5
Zero is not always necessary, and it is possible to use electrolyzed water manufactured in other facilities.

As the substances to be removed contained in the raw water, various substances are mixed in addition to various bacteria and sand. Specific examples include ions, melts, and fine solids. In particular, since the size of ions is at the atomic level, it may not be possible to completely remove them by the filtering device 34.
Furthermore, when the salt solution is electrolyzed, sodium ions (N
a ⁺ ) is generated, but since it is also a metal ion, it may not be removed by the filtering device 34. So RO
Equipment 18a and ion exchange equipment 18b are used to remove these materials.

The RO device 18a is a device for removing impurities contained in the raw water that has passed through the filter 17 by using a resin film. The RO device 18a can remove fine solid matter contained in the raw water. Here, fine solid matter can be removed, but ions and dissolved matters are not removed. Therefore, the filtered water that has passed through the RO device 18a is further processed by the ion exchange device 18b.

The ion exchange device 18b is a device for removing ions and dissolved substances contained in the filtered water that has passed through the RO device 18a by using an ion exchange resin. Here, the treated water is passed through a column containing a bead-shaped ion exchange resin to remove the ions and the dissolved matter.

A method for producing pure water from raw water using the pure water producing apparatus 60 described above will be described.

First, raw water containing substances to be removed such as bacteria is introduced into the raw water tank 31. Here, river water is used as raw water,
Lake water or groundwater can be used. Further, tap water or the like can be adopted as raw water.

Then, the electrolyzed water producing apparatus 50 is used to produce electrolyzed water, and the electrolyzed water supply means 37 mixes the electrolyzed water with the raw water. This makes it possible to sterilize various bacteria in the raw water, and the sterilized various bacteria can be treated in the same manner as other substances to be removed such as sand. At the same time, the viscosity of various bacteria can be reduced, so that the filter of the filtering device 34 can be prevented from being clogged. Further, a detector 38 is provided to monitor the concentration of the electric field water in the raw water, and the concentration of the electric field water in the raw water is kept above a certain level.

Subsequently, the substances to be removed contained in the raw water are removed by using the filtration device 34. As the filtering device 34, FIG.
It is possible to use a filtering device 34 having a second filter made of solid material provided on the surface of the first filter as shown in FIG. Alternatively, the first filter 5 shown in FIG.
You may use the filtration apparatus 55 which filters using only 1. Here, polishing / grinding waste can be adopted as the solid material forming the second filter, and the Si solid material is used in the present invention. This makes it possible to produce filtered water in which most of the particulate matter to be removed has been removed.

Subsequently, the RO device 18a and the ion exchange device 18b are used to remove the ions and the like contained in the filtered water filtered by the filtering device 34. Ions contained in filtered water include those originally contained in raw water collected from the natural world and those contained in electrolyzed water. Here, pure water with high purity can be manufactured by removing ions and the like.

As described above, the pure water producing apparatus 60 according to the present embodiment is provided with the removal target object removal apparatus 2
0, the electrolyzed water producing apparatus 50, the RO apparatus 18a and the ion exchange apparatus 18b removing apparatus 18, but the following constituent elements may be added as other constituent elements.

Other components of the apparatus 60 for producing pure water may include decarbonation means, hydrochloric acid supply means and caustic soda supply means. The decarboxylation means has a function of removing carbon dioxide dissolved in raw water. The hydrochloric acid supply means and the caustic soda supply means are used to supply hydrochloric acid (HCl) or caustic soda (Na) to the RO device 18a and the ion exchange device 18b.
OH) is supplied to regenerate the ion exchange resin.

The resistivity of pure water manufactured using the pure water manufacturing apparatus 60 described above has a specific resistance of 10 M, for example.
Ω or more. Then, this pure water can be used in a semiconductor factory or the like. (Fourth Embodiment Explaining Another Pure Water Production Apparatus and Pure Water Production Method) With reference to FIG. 7, another pure water production apparatus 61 structure and pure water production method will be described. explain.

Pure water manufacturing apparatus 61 according to the present embodiment
Has a configuration similar to that of the pure water manufacturing apparatus 10 of the conventional example. That is, the pure water manufacturing apparatus 61 is provided with the raw water tank 15
And a surface water filter 11 for performing primary filtration, a filtered water tank 16 for storing the primary filtered water subjected to the primary filtration, a UBR filter 12 for performing secondary filtration of the primary filtered water, and a secondary It is composed of a filter 17 for further filtering the filtered water, and an RO device 18a and an ion exchange device 18b for treating the filtered water that has passed through the filter 17.

Surface water filter 11 and UBR filter 12
In terms of filtering the substance to be removed contained in the raw water using the sand filter of No. 3, the pure water producing apparatus 61 according to the present invention is
It is similar to the conventional pure water manufacturing apparatus 10.

The feature of the pure water producing apparatus 60 is that the electric field water supply means 37 is used in place of the conventional hypochlorite soda supply means 13 to sterilize the various bacteria contained in the raw water. By treating miscellaneous bacteria with electrolyzed water, the viscosity unique to miscellaneous bacteria can be reduced. Therefore, it is possible to prevent the surface water filter 11 and the UBR filter 12 from being clogged due to the viscosity of various bacteria.

Further, here, before the raw water flows into the raw water tank 15, the surface water filter 11 and the UBR filter 12,
It supplies electric field water. As described above, by supplying the electric field water to the raw water at several places, it is possible to prevent the germs from re-propagating in the process of producing pure water from the raw water.

The pure water producing apparatus 60 according to the present embodiment may have the following components added as other components.

Other components of the apparatus 60 for producing pure water may include decarbonation means, hydrochloric acid supply means and caustic soda supply means. The decarboxylation means has a function of removing carbon dioxide dissolved in raw water. The hydrochloric acid supply means and the caustic soda supply means are used to supply hydrochloric acid (HCl) or caustic soda (Na) to the RO device 18a and the ion exchange device 18b.
OH) is supplied to regenerate the ion exchange resin.

[0139]

EFFECTS OF THE INVENTION According to the apparatus for removing an object to be removed of a fluid, the apparatus for producing pure water and the method for producing pure water according to the present invention, the following effects can be obtained.

First, by sterilizing the various bacteria contained in the raw water with the electric field water, it is possible to prevent the various bacteria from adhering to the filter and prevent the filter from being clogged. it can.

Secondly, by removing the substance to be removed contained in the raw water by using the second filter made of solid matter formed on the surface of the first filter made of resin or the like, P
The object to be removed can be removed without using AC (aggregating agent), and the purchase cost of the PAC can be saved.

Thirdly, the electrolyzed water used for the purpose of various bacteria in the present invention has a lower oxidizing action than sodium hypochlorite which has been used in the past. Therefore, due to force majeure, PAC and sodium hypochlorite are combined as in the conventional case, so that no harmful gas is generated.

Fourth, since the object to be removed is removed using one tank, it is possible to omit the sand filter and the plurality of filtered water tanks which have been required in the past, and to produce pure water. The equipment used can be made compact.

Fifth, since it is possible to maintain the function of the filtering device by applying an external force to the surface of the filter by air bubbles or the like, it is necessary to carry out the back washing which is required in the conventional sand filter. There is no. Therefore, it is possible to continuously produce pure water.

[Brief description of drawings]

FIG. 1 is a diagram illustrating a mechanism of an object to be removed device of the present invention.

FIG. 2 is a diagram illustrating a detailed structure of a filtration device used in the present invention.

FIG. 3 is a diagram (A) for explaining the operation principle of the filtration device used in the present invention and an enlarged diagram (B) of the first filter.

FIG. 4 is a graph illustrating a particle size distribution of a solid material (Si solid material) that constitutes the second filter in the present invention.

FIG. 5 is a diagram (A) illustrating the mechanism of another removal target removal device and a diagram (B) illustrating the operation principle of the filtration device used here.

FIG. 6 is a diagram illustrating a mechanism of the pure water producing apparatus of the present invention.

FIG. 7 is a diagram illustrating another apparatus for producing pure water.

FIG. 8 is a diagram illustrating a mechanism of a conventional pure water manufacturing apparatus.

[Explanation of symbols]

20 Removal object removal device 34 Filtration device 37 Electric field water supply means 38 Detection means 30 raw water 45 First Filter 46 Second filter 50 Electrolyzed water production equipment 18a RO device 18a 18b Ion exchange device 60 Pure water production equipment

Front page continuation (51) Int.Cl. ⁷ Identification code FI theme code (reference) B01D 39/00 B01D 39/16 C 4D061 39/20 D 4D066 39/16 61/08 39/20 C02F 1/42 A 61 / 08 1/44 J C02F 1/42 1/50 510A 1/44 520B 1/50 510 531M 520 540B 531 550C 540 550D 550 560D 560E 560 560F 560Z 1/52 Z 9/00 502D 9/52 502 502 502J 502M 502P 502Z 503B 504B 503 B01D 29/38 580A 504 23/16 (72) Inventor Hirofumi Iinuma 1-1-1, Sakata, Oizumi-cho, Gunma Prefecture Sanyo Aqua Techno Co., Ltd. (72) Inventor Koichi Hara 1-1 1-1 Sakata, Oizumi-cho, Ora-gun, Gunma Sanyo Aqua Techno Co., Ltd. F-term (reference) 4D006 GA03 HA95 KA01 KA12 KA72 KB11 KB13 KB14 KB15 KB16 MB02 PA01 PB04 PB05 PB06 P B27 PB28 PB70 PC02 4D015 BA19 CA14 EA02 FA01 FA02 FA15 FA17 FA22 FA23 4D019 AA03 BA05 BA13 BB08 BB10 BB11 BB18 BD06 CA04 CB03 CB04 4D025 AA04 AB02 AB05 AB18 DA07 CA08 40403 EA03 EB37 ED12 ED13 FA08 FA09 FA13 FA14 4D066 BA01 BB12 BB20 CA01 CB11 CB15 FA03

Claims (24)

[Claims] 1. A tank for storing raw water containing a substance to be removed, a first filter provided in the tank, a second filter formed on a surface of the first filter, and a raw water An electrolyzed water supply means for mixing electrolyzed water to sterilize contained bacteria, and a device for removing an object to be removed of a fluid. 2. The second filter is formed of a solid material different from that of the object to be removed.
An object removal device for a fluid described. 3. The fluid removing object removing device according to claim 2, wherein the solid matter is produced by a grinding device and / or a polishing device. 4. The solids are composed of particles of different sizes, and the pore size of the first filter is smaller than the largest particles of the solids and larger than the smallest particles of the solids. The removal object removal device of the fluid according to any one of claims 2 and 3 characterized by things. 5. The particle size distribution of the solid matter has two peaks, and the pore size of the first filter is a size between the two peaks of the solid matter. The removed object removal device for fluid according to any one of claims 2 to 4. 6. The removal object of fluid according to claim 1, wherein the tank is provided with an external force supply means for applying an external force to the second filter. apparatus. 7. The first filter is erected vertically, and the external force supplying means is a bubble generating means provided below the first filter.
An object removal device for a fluid described. 8. The first filter is an organic polymer or ceramic film.
An apparatus for removing an object to be removed of a fluid according to claim 7. 9. A first pipe for introducing raw water containing the substance to be removed into the tank, one end of which is connected to the first filter, and the raw water passing through the first filter is taken out of the tank. Second to transport to
A pipe, a switching means connected to the other end of the second pipe, one end connected to the switching means, and a third water transporting the raw water that has passed through the first filter into the tank again. A pipe and a fourth pipe having one end connected to the switching means and discharging the raw water that has passed through the first filter to the outside of the system, wherein the electrolyzed water supply means is the first pipe or / The object to be removed of a fluid according to any one of claims 1 to 8, which is provided in the tank. 10. The fluid removal target removal device according to claim 1, further comprising a detection unit that detects the concentration of the electrolyzed water. 11. The detecting means is the first pipe,
The fluid removal object removing device according to claim 10, wherein the removal object is a fluid provided in the second pipe, the third pipe, the fourth pipe and / or the tank. 12. A tank for storing raw water containing a substance to be removed, a filter provided in the tank, and electrolyzed water supply means for mixing electrolyzed water to sterilize various bacteria contained in the raw water. An object-to-be-removed removal device for fluid. 13. The fluid removing object removing device according to claim 12, wherein the tank is provided with an external force supply means for applying an external force to the second filter. 14. The fluid according to claim 13, wherein the first filter is erected in a vertical direction, and the external force supplying means is a bubble generating means provided below the first filter. Removal device. 15. The filter according to claim 12, wherein the filter is an organic polymer or ceramic film.
The fluid removal object removal device according to claim 14. 16. A first pipe for introducing raw water containing the substance to be removed into the tank, and a second pipe having one end connected to the filter for transporting the raw water passing through the filter to the outside of the tank. A pipe, a switching means connected to the other end of the second pipe, one end connected to the switching means, and a third pipe for transporting the raw water passing through the filter into the tank again, A fourth pipe that has one end connected to the switching means and discharges the raw water that has passed through the filter to the outside of the system; and the electrolyzed water supply means is provided in the first pipe and / or the tank. 13. The method according to claim 12, wherein
The fluid removal object removal device according to claim 15. 17. The fluid removal target removal device according to claim 12, further comprising a detection unit that detects the concentration of the electrolyzed water. 18. The detecting means is the first pipe,
The fluid removal object removal device according to claim 17, which is provided in the second pipe, the third pipe, the fourth pipe and / or the tank. 19. An apparatus for producing pure water, comprising the object-to-be-removed removal apparatus for fluid according to claim 1. Description: 20. A raw water tank for storing raw water containing a substance to be removed, and a raw water tank, which is connected to the raw water tank and removes the substance to be removed after sterilizing various bacteria contained in the raw water.
The removal object removal device of the fluid according to any one of, the electrolytic water production apparatus for producing electrolytic water to be supplied to the removal object removal device of the fluid, filtered water filtered by the removal object removal device An apparatus for producing pure water, characterized by an RO apparatus and an ion exchange apparatus for further treating the water. 21. Use of the fluid removal target removal device according to any one of claims 1 to 18 to remove contaminants after electrolyzed water has carried out germs contained in raw water. A method for producing pure water, which comprises producing pure water by 22. Prepare raw water containing a substance to be removed, and sterilize various bacteria contained in the raw water by using the device for removing a substance to be removed according to any one of claims 1 to 18; A method for producing pure water, which comprises removing an object to be removed, and producing pure water by removing ions, dissolved substances and fine solids contained in the raw water using an RO device and an ion exchange device. . 23. A method for producing pure water by sterilizing bacteria contained in raw water and then removing an object to be removed, wherein the bacteria are sterilized by mixing electrolyzed water with the raw water. A method for producing pure water characterized by the above. 24. In raw water in which substances to be removed such as bacteria are mixed,
The bacteria are sterilized by mixing electrolyzed water, a flocculant is added to the raw water, the raw water is further passed through a sand filter and a filter, and the raw water is treated with an RO device and an ion exchange device. A method for producing pure water, characterized in that pure water is produced by removing ions, dissolved substances and fine solids contained in raw water.