JP2003163153A5 - - Google Patents

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Publication number
JP2003163153A5
JP2003163153A5 JP2001361659A JP2001361659A JP2003163153A5 JP 2003163153 A5 JP2003163153 A5 JP 2003163153A5 JP 2001361659 A JP2001361659 A JP 2001361659A JP 2001361659 A JP2001361659 A JP 2001361659A JP 2003163153 A5 JP2003163153 A5 JP 2003163153A5
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JP
Japan
Prior art keywords
pupil
pattern
phase shift
optical system
shift mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2001361659A
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English (en)
Japanese (ja)
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JP4011896B2 (ja
JP2003163153A (ja
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Priority to JP2001361659A priority Critical patent/JP4011896B2/ja
Priority claimed from JP2001361659A external-priority patent/JP4011896B2/ja
Publication of JP2003163153A publication Critical patent/JP2003163153A/ja
Publication of JP2003163153A5 publication Critical patent/JP2003163153A5/ja
Application granted granted Critical
Publication of JP4011896B2 publication Critical patent/JP4011896B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001361659A 2001-11-27 2001-11-27 露光方法 Expired - Fee Related JP4011896B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001361659A JP4011896B2 (ja) 2001-11-27 2001-11-27 露光方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001361659A JP4011896B2 (ja) 2001-11-27 2001-11-27 露光方法

Publications (3)

Publication Number Publication Date
JP2003163153A JP2003163153A (ja) 2003-06-06
JP2003163153A5 true JP2003163153A5 (enExample) 2005-06-16
JP4011896B2 JP4011896B2 (ja) 2007-11-21

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001361659A Expired - Fee Related JP4011896B2 (ja) 2001-11-27 2001-11-27 露光方法

Country Status (1)

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JP (1) JP4011896B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7331676B2 (en) * 2005-02-09 2008-02-19 Coherent, Inc. Apparatus for projecting a reduced image of a photomask using a schwarzschild objective

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