JP2003145389A - Cutting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the deposition and drying of mist and contaminants inside a mist cover during cutting a workpiece. SOLUTION: After cutting the workpiece, water supplied from a supply tube 44 is delivered to a nozzle 42 mounted at the top inside the mist cover 40. The delivered water is blown from a plurality of holes provided in the nozzle 42 toward arrowmarks for a given short time. Then, air supplied from the supply tube 44 is blown from the nozzle 44 to the inside of the mist cover 40. Thus, mist and contaminants deposited inside the mist cover 40 are washed away.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cutting device, and more particularly to a cutting device for grooving or cutting a work such as a semiconductor or an electronic component material.

[0002]

2. Description of the Related Art In a cutting apparatus for grooving or cutting a work such as a semiconductor or an electronic component material, a work is processed by applying cutting water with a thin grindstone called a blade which rotates at a high speed. Therefore, the processing part of the cutting device is full of water spray and mist. For this reason, a mist cover for covering the processed portion is attached to the processed portion to block splashes of water and mist from the outside. This mist cover is adapted to be opened and closed by rotating in the vertical direction in terms of operability and space saving.

[0003]

By the way, at the time of cutting the work, the work is processed by spraying cutting water with a thin grindstone that rotates at a high speed, so that the mist or contamination (when cutting work A generic term for deposits that adhere to the inside of the work or the mist cover, etc. (hereinafter referred to as "contamination"). In addition, this contaminant has a property that it is hard to be easily removed if it is dried after being attached. Since the mist cover is not provided with a cleaning function, there is a problem that the processed portion inside the mist cover becomes invisible due to the attached mist or contamination.

The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a cutting device for preventing mist, contamination, etc. from adhering to the inside of the mist cover and drying during the cutting work of a work. To aim.

[0005]

In order to achieve the above-mentioned object, the invention according to claim 1 is a cutting device having a processing portion for performing groove processing and cutting processing of semiconductors, electronic component materials, etc. by a rotary blade, It is characterized in that it has a mist cover which is provided in the processing section and is opened and closed by rotating in the vertical direction, and a cleaning means for cleaning the contamination adhering to the inside is provided inside the mist cover.

In the cutting device according to a second aspect of the present invention, the cleaning means is a nozzle that blows out water for cleaning toward the inner surface of the mist cover and blows out air for drying the inner surface of the mist cover after cleaning. It has a feature.

A cutting device according to a third aspect of the present invention is characterized in that the cleaning means is configured to blow out water when the cutting work is started.

A cutting device according to a fourth aspect of the present invention is characterized in that the cleaning means is configured to blow out water at regular intervals during cutting work.

The cutting device according to a fifth aspect of the present invention is characterized in that the cleaning means is configured to blow out water by turning on a cleaning command switch as necessary.

The cutting device according to a sixth aspect is characterized in that the mist cover is inclined so that water and air blown out from the cleaning means flow along the inside.

According to the present invention, the cleaning means for blowing out water and air is provided inside the mist cover. Therefore, when the work is cut, the contamination adhering to the inside of the mist cover is cleaned with water, and the cleaning is performed. After that, since the water is blown off by air, it is easy to observe the inside of the processed portion.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of a cutting apparatus according to the present invention will be described in detail below with reference to the accompanying drawings.

FIG. 1 is an external perspective view of a cutting device 10 according to the present invention. FIG. 2 is a detailed view of the processing unit 20 of the cutting device 10 according to the present invention.

As shown in FIG. 1, the cutting apparatus 10 according to the present invention mainly includes an operation / display section 11, an image pickup section 12, and
A monitor TV 13, an indicator light 14, a processing unit 20,
It is composed of a controller 15 for controlling each component.

As shown in FIG. 2, the processing section 20 has a rotary blade 21 for grooving and cutting the work W attached to a spindle having a high-frequency motor (not shown) built therein and 30,000 rpm. In addition to rotating at a high speed of -60,000 rpm, a feed mechanism (not shown) performs index feed in the Y direction (direction orthogonal to the paper surface) and cut feed in the Z direction (vertical direction).

The rotary blade 21 is formed in a thin disk shape, and the periphery thereof is covered by a flange cover 22 which is open on the front side and the lower side. The rotary blade 21 is, for example, an electrodeposition blade in which diamond abrasive grains, CBN abrasive grains are electrodeposited with nickel, or a resin blade in which resin is bonded. The cutting nozzle 23 is provided on the flange cover 22 and supplies cutting water to the processing points of the rotary blade 21 and the work W. The cleaning nozzle 24 is provided on the right side of the rotary blade 21 and supplies cleaning water to the work W during cutting work.

The X table 27 is guided by an X guide 28 provided on a machine base 29 and moved in the X direction by a drive mechanism (not shown). X table 27
The work table 25 is connected to the upper portion of the θ table 26 mounted on the table, and the θ table 26 rotates in the clockwise and counterclockwise directions. The work W processed by the processing unit 20 is held on the upper surface of the work table 25 by vacuum suction or the like, is rotated by θ by the θ table 26, and is cut and fed in the X direction by the X table 27. There is.

The oil pan 30 includes the brackets 30A and 3A.
It is fixed to the machine base 29 via 0B and receives the waste water of the cutting water and the cleaning water supplied by the cutting nozzle 23 and the cleaning nozzle 24. The bellows 31 is the oil pan 30
And the θ table 26, and covers the opening at the center of the oil pan 30.

The mist cover 40, as shown in FIG.
It is provided so as to cover the processing portion 20, and the upper end portion is rotatably supported by the cutting device 10 main body via hinge means (not shown), and is rotated in the vertical direction to be opened and closed. Further, the mist cover 40 has a shape in which the inner side and the lower side are opened, and is formed of a high-performance antistatic plate made of a transparent resin material so that the inside of the processed portion 20 can be observed.

Further, since a large amount of cutting water or cleaning water is supplied to the processing unit 20, the mist cover 4 is prevented so that the generated water droplets or mist will not be scattered outside the processing unit 20.
0 blocks the processing unit 20 from the outside.

FIGS. 3A and 3B are detailed views of the mist cover 40 to which the cleaning means is attached. The cleaning means is composed of a nozzle 42 for blowing out water and air, and a circuit for supplying water and air. Mist cover 40
As shown in FIG. 3 (a), a nozzle 42 for cleaning contaminants and the like adhering to the inside is attached to the apex portion on the inside, and water and air are blown out from a plurality of holes provided in the nozzle 42. It A supply tube 44 for supplying water and air to the nozzle 42 is attached to one end of the nozzle 42 via a joint (not shown).

The circuit for supplying water and air is connected to the tee joint 46 and is composed of a valve 48A for supplying water and a solenoid valve 50A, and a valve 48B for supplying air and a solenoid valve 50B. The valves 48A and 48B are
It is a valve that adjusts the amount of water and air supplied, and is manually operated by the operator. The solenoid valves 50A and 50B are changeover switches for supplying and stopping water and air,
It is designed to operate automatically by a preset program or by an operator's operation.

As shown in FIG. 3B, the side surface of the mist cover 40 is in front of the apex where the nozzle 42 is attached so that water and air blown out from the nozzle 42 can easily flow along the inside. It is formed in an oblique shape toward the side (left side in the drawing) and the back side (right side in the drawing).

As shown in the figure, a partition wall 30C of the oil pan 30 is provided on the back side (right side in the figure) of the mist cover 40 so as to prevent cutting water or cleaning water from splashing outside the processing section 20. ing.

The operation / display section 11 is provided with switches and display means for operating each section of the cutting device 10. The imaging unit 12 is composed of a microscope, an illumination device, a CCD camera, and the like, and images the surface of the work W. The monitor TV 13 displays the captured image, and the operator evaluates the alignment of the work W and the processing state. The indicator light 14 is mounted at a high position so that the operator can see it from a distance, and displays a warning or the like indicating that the cutting device 10 is in operation, is on standby, or is abnormal.

The operation of the cutting device 10 of the present embodiment configured as described above is as follows.

First, the operator rotates the mist cover 40 upward to open it, and the rotary blade 2 is attached to the spindle of the processing section 20.
1 is set, and the mist cover 40 is rotated downward and closed. At this time, the work table 25 is located under the microscope of the imaging unit 12 so as not to interfere with the attachment of the rotary blade 21. Next, the work W is placed on the work table 25 and is vacuum-sucked. Then, under the microscope, the imaging unit 1
2, the pattern formed on the surface of the work W is imaged, and the image is displayed on the monitor television 13. Here, the operator operates the switch of the operation / display unit 11 while watching the image displayed on the monitor TV 13 to align the work W. The work W for which the alignment has been completed is carried into the processing unit 20 by the movement of the X table 27, and is grooved or cut by the rotary blade 21 rotating at high speed and the cutting movement by the X table 27. During processing, cutting water is supplied from the cutting nozzle 23 to the processing point, and cleaning water is supplied from the cleaning nozzle 24. When the processing of one line is completed, the rotary blade 21 is index-fed in the Y direction and positioned on the next line,
This line is also processed by the cutting movement of the X table 27. When such an operation is repeated and the machining of all the lines in one direction of the work W is completed, the θ table 26 rotates the work W by 90 degrees, and the machining is performed in line with the line orthogonal to the previous line. When all the processing is completed, the work W is conveyed to the position of the microscope, and the indicator lamp 14 indicating the completion of the processing blinks. Here, the operator takes an image of the processed portion of the work W by the imaging unit 12 as necessary,
After observing the processing state, the work W is placed on the work table 25.
Remove from. The above is the flow of processing the work W by the cutting device 10.

Next, the operation of the mist cover 40 will be described.

After the alignment is completed, the solenoid valve 50A is turned on at the same time as the cutting operation is started, and the nozzle 42 starts blowing water. During the cutting operation of the work W, as shown in FIG. 3, the operator manually adjusts the valve 48A so that an appropriate amount of water is constantly blown out from the nozzle 42 inside the mist cover 40. By cleaning the inside of the mist cover 40 in this way to prevent adhesion of contaminants and the like, observation of the inside of the processed portion 20 becomes easy, and periodic cleaning of the mist cover 40 becomes unnecessary.

After the work of cutting the work W is completed, the solenoid valve 50
A is turned off, the supply of water from the solenoid valve 50A is stopped, and the blowing of water from the nozzle 42 is stopped. At the same time, the solenoid valve 50B is turned on, and the valve 48B, the tee joint 46, the supply tube 4
Air for drying the inner surface of the mist cover 40 is blown from the nozzle 42 through the nozzle 4. Like this, the mist cover 4
By drying the inside, the inside of the processed portion 20 can be seen more clearly.

Furthermore, in the present embodiment, an example in which water is constantly blown out from the nozzle 42 inside the mist cover 40 during cutting work has been described, but the present invention is not limited to this, and a fixed time interval is provided. A command signal may be output by the controller 15 so as to blow out water from the nozzle 42.

Further, the nozzle 42 is provided inside the mist cover 40.
In order to blow out water at a fixed time interval from the above, a cleaning command switch that blows water and stops it by switching it ON or OFF, or a cleaning command switch that blows out water during pressing, or water for a fixed time after pressing A cleaning command switch that blows out may be provided.

Furthermore, the nozzle 42 is not limited to being attached to the apex of the mist cover 40, but can be routed to a proper place inside the mist cover 40.

[0034]

As described above, according to the cutting apparatus of the present invention, since the cleaning means for blowing water and air is provided inside the mist cover, it adheres to the inside of the mist cover during the cutting work of the work. Since the contamination is washed with water and the water is blown off with air after washing, the inside of the processed portion can be easily observed.

[Brief description of drawings]

FIG. 1 is an external perspective view of a cutting device according to the present invention.

FIG. 2 is a detailed view of a processing portion of the cutting device according to the present invention.

FIG. 3 is a detailed view of a mist cover having a cleaning function.

[Explanation of symbols]

W ... Work, 10 ... Cutting device, 11 ... Operation / display unit, 2
0 ... Processing part, 21 ... Rotating blade, 40 ... Mist cover, 42
... Nozzle, 44 ... Supply tube

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Kazuya Fukuoka             9-7 Shimorenjaku, Mitaka City, Tokyo Stocks             Company Tokyo Seimitsu (72) Inventor Takayuki Asano             9-7 Shimorenjaku, Mitaka City, Tokyo Stocks             Company Tokyo Seimitsu F-term (reference) 3B201 AA47 AB53 BB22 BB92 BB98                       CC12 CD35                 3C011 BB11 BB15 DD03                 3C069 AA01 BA04 CA05 DA05 DA07

Claims (6)

[Claims] 1. A cutting device having a processing portion for performing groove processing and cutting processing of semiconductors, electronic component materials, etc. by a rotary blade, comprising a mist cover provided in the processing portion and opened and closed by rotating in a vertical direction. The cutting device is provided with a cleaning means inside the mist cover for cleaning contamination adhering to the inside. 2. The cleaning means is a nozzle that blows out water for cleaning toward the inner surface of the mist cover and blows out air for drying the inner surface of the mist cover after cleaning. The cutting device described. 3. The cleaning means, when cutting work is started,
The cutting device according to claim 2, wherein the cutting device is configured to blow out water. 4. The cutting device according to claim 2, wherein the cleaning unit is configured to blow out water at regular intervals during cutting work. 5. The cutting device according to claim 2, wherein the cleaning unit is configured to blow out water by turning on a cleaning command switch, which is performed as necessary. 6. The mist cover has an inclined shape so that water and air blown out from the cleaning means can flow along the inner side.
Or the cutting device according to any one of 5 above.