JP2021194752A - Air supply/exhaust system of machine tool - Google Patents

Abstract

To provide an air supply/exhaust system of a machine tool which can inhibit chips etc. from adhering to a cover member while removing mist containing coolant components evaporated by processing heat.SOLUTION: An air supply/exhaust system of a machine tool includes: an exhaust duct which exhausts mist of a coolant drifting in a processing space, which is partitioned by a cover member and in which a workpiece is processed, with air from the processing space; a mist flocculation part which removes the mist included in the air guided in the exhaust duct; an air supply duct which supplies the air that has passed through the mist flocculation part to the processing space; a fan provided in at least any position between the exhaust duct and the air supply duct; and a nozzle mechanism which jets the air guided by the air supply duct from an upper side to a lower side of the processing space to guide chips occurring due to processing of the workpiece to the lower side of the processing space.SELECTED DRAWING: Figure 1

Description

The present invention relates to an air supply / exhaust system for a machine tool that exhausts coolant mist floating in a processing space for processing a work, which is partitioned by a cover member, together with air from the processing space, and supplies air from which the mist has been removed to the processing space. ..

The machine tool is equipped with a coolant nozzle that blows coolant toward the machined part of the work using the tool, and by cooling the machined part with coolant, the temperature rise of the tool and work is suppressed, and the generated chips are discharged from the machined part. It is configured to be removed. Due to the collision and vaporization of the coolant with the processing point, the coolant becomes mist and fills the processing chamber.

Therefore, in order to remove the mist-like coolant that fills the processing space, an exhaust duct is provided, and a mist collector provided with a mist agglomerate portion that separates and removes the mist discharged together with the air through the exhaust duct is installed.

In Patent Document 1, instead of such a conventional large-scale mist removing device, it is possible to collect and collect with high efficiency and low cost only by circulating air in a local space in a predetermined work space. A circulating oil mist component dust collector has been proposed.

The circulation type dust collector is provided above the source of the oil mist component or the like to be collected, and forms an air curtain flow that swirls from above to the bottom around the source of the oil mist component or the like. The means and the oil mist component generated from the source such as the oil mist component by forming an intake swirling flow that rises while swirling from the lower side to the upper side inside the air curtain flow formed by the air blowing means. An air suction means for sucking oil, a grease filter for collecting and liquefying the oil mist component sucked in the air suction portion by the air suction means, and an oil component collected and liquefied by the grease filter. It is equipped with an oil discharge means for discharging to the storage section.

Japanese Unexamined Patent Publication No. 2001-310237

In the above-mentioned circulation type dust collector, an air curtain flow that swirls from the upper side to the lower side is formed by an air blowing means, and an intake air swirling flow that rises while swirling from the lower side to the upper side inside the air curtain flow is formed. However, for that purpose, for example, an air curtain flow or an intake swirling flow is provided on the downstream side of the air curtain flow by providing a guide plate for receiving the air curtain flow and forming an upward swirling air flow. A configuration is required to stably generate.

As a result, the shape of the processing space, the shape and size of the beds, saddles, columns, etc. arranged in the processing space are limited, the degree of freedom in their layout is reduced, and the device cannot be used for various machine tools.

Further, even if the mist can be captured by the air curtain flow, it is difficult to capture even the chips generated by machining, and it is possible to suppress the occurrence of a situation in which the mist jumps out of the air curtain flow and adheres to the wall surface of the cover member. It was very difficult to do so, and in the end, it was not free from the complicated work of manually cleaning the wall surface of the cover member.

In view of the above problems, an object of the present invention is to provide an air supply / exhaust system for a machine tool capable of suppressing adhesion of chips and the like to a cover member while removing mist containing a coolant component vaporized by processing heat. be.

In order to achieve this object, the air supply / exhaust system of the machine tool according to the present invention has an exhaust duct for exhausting the coolant mist floating in the processing space for processing the work, which is partitioned by the cover member, together with air from the processing space, and the exhaust duct. At least one of a mist agglomerate portion that removes the mist contained in the air guided by, an air supply duct that supplies the air that has passed through the mist agglomeration portion to the processing space, and an air supply duct from the exhaust duct to the air supply duct. It is configured with a fan provided in the crab, and blows out the air guided by the air supply duct from above to the bottom of the machining space, and guides the chips generated by the machining of the work to the bottom of the machining space. It is characterized by having a nozzle mechanism.

According to the present invention, it becomes possible to provide an air supply / exhaust system for a machine tool capable of suppressing adhesion of chips and the like to a cover member while removing mist containing a coolant component vaporized by processing heat.

It is explanatory drawing of the front view of the air supply / exhaust system of a machine tool. It is explanatory drawing of the side view of the air supply / exhaust system of a machine tool. It is explanatory drawing of the plane view of the air supply / exhaust system of a machine tool. It is explanatory drawing of the mist collector including the mist agglomeration part. Explanatory drawing of the machine tool arranged in the machining space, (a) is an explanatory diagram showing the basic configuration of the machine tool viewed from the side, and (b) is an explanatory diagram showing the basic configuration of the machine tool viewed from the front. Is. Another embodiment of the nozzle mechanism is shown, (a) is a front view, (b) is a bottom view, and (c) is a sectional view.

[Basic Embodiment of Air Supply / Exhaust System for Machine Tools]
As described above, the first characteristic configuration of the air supply / exhaust system of the machine tool according to the present invention is an exhaust duct that exhausts the mist of coolant floating in the processing space for processing the work, which is partitioned by the cover member, together with air from the processing space. A mist agglomerate portion that removes mist contained in the air guided by the exhaust duct, an air supply duct that supplies air that has passed through the mist agglomeration portion to the processing space, and an air supply duct from the exhaust duct to the air supply duct. A fan provided in at least one of the spaces is provided, and the air guided by the air supply duct is ejected from the upper side to the lower side of the processing space, and the chips generated by the processing of the work are discharged from the processing space. The point is that it is equipped with a nozzle mechanism that guides the air downward.

The coolant mist is guided from the processing space to the exhaust duct together with the air by the fan, the mist is aggregated by the mist agglomerating portion, and the air from which the mist is separated and removed is returned to the processing space through the air supply duct. The air guided by the air supply duct is ejected from above to below in the machining space by the nozzle mechanism, and the chips generated by machining the work are guided to the bottom of the machining space.

In the second feature configuration, in addition to the first feature configuration described above, the nozzle mechanism has a linear spray pattern that ejects air from above to below along the side wall of the cover member that partitions the processing space. At a point containing a single or multiple flat nozzles.

By adopting a single or multiple flat nozzles with a linear spray pattern as the nozzle mechanism, the side wall of the cover member that partitions the processing space even when chips wet with coolant are scattered toward the side wall of the cover member. The air ejected from above to below along the wall effectively suppresses the adhesion to the side wall.

In the third feature configuration, in addition to the second feature configuration described above, the nozzle mechanism is provided on a plurality of side walls of the cover member, and each flat nozzle is provided with a branch duct branching from the air supply duct. It is at the point of being connected.

The air after removing the mist supplied to the processing space via the air supply duct is guided to the plurality of side walls of the cover member via the branch duct, and is guided from the flat nozzles connected via the branch duct to the plurality of side walls of the cover member. It is ejected from above to below along.

In the fourth feature configuration, in addition to any of the first to third feature configurations described above, the nozzle mechanism is a circular spray that ejects air from above to below near the processing point of the work. It is at a point that includes a conical nozzle or a straight nozzle in the pattern.

A circular spray-patterned conical nozzle or a straight-moving nozzle is used as the nozzle mechanism, and air is ejected from above to below near the machining point of the workpiece, so that the chips generated and scattered at the machining point are swiftly lowered. You will be guided.

The fifth characteristic configuration is, in addition to any of the first to fourth characteristic configurations described above, cooling that condenses the vapor contained in the air guided by the exhaust duct on the upstream side of the mist agglomeration portion. It has a mechanism.

Since the coolant component evaporated by the processing heat is condensed when passing through the cooling mechanism and then guided by the mist agglomerate, the coolant component guided to the exhaust duct together with the air is efficiently recovered and removed by the mist agglomerate. ..

In the sixth characteristic configuration, in addition to the fifth characteristic configuration described above, the cooling mechanism cools the air guided by the exhaust duct so as to adjust the atmospheric temperature of the processing space to a predetermined temperature range. It is in the point that it is configured in.

If the atmospheric temperature of the machining space fluctuates abruptly, thermal displacement may occur in the structure of the machine tool such as tools, workpieces, beds, columns, and spindles. Therefore, by cooling the air guided by the exhaust duct by the cooling mechanism, it is possible to adjust the temperature within a predetermined temperature range so that the atmospheric temperature of the processing space does not fluctuate significantly.

[Detailed Embodiment of Machine Tool Air Supply / Exhaust System]
Hereinafter, a detailed embodiment of the air supply / exhaust system of the machine tool will be described with reference to the drawings.

FIGS. 5A and 5B show a machine tool 100 partitioned by a cover member 200 and installed in a processing space for processing a work 10.

The machine tool 100 is vertically installed on a bed 1, a table 2 that moves in the Z-axis direction along a guide surface on the bed 1, a pallet 3 that rotates around the B axis in a vertical posture on the table 2, and a bed 1. It is a horizontal machining center equipped with a column 4 that moves in the X-axis direction along the guide surface on the bed 1 and a spindle head 5 that moves in the Y-axis direction along the guide surface of the column 4. As shown by the chain line, the periphery is covered with the cover member 200, and the cover member 200 is provided with a door (not shown) that can be opened and closed.

When the servomotor MZ is driven, the table 2 moves along the linear drive axis in the Z-axis direction on the bed 1, and when the servomotor MB is driven, the pallet 3 rotates around the B axis on the table 2. When the servomotor MX is driven, the column 4 moves along the linear drive axis in the X-axis direction on the bed 1, and when the servomotor MY is driven, the spindle head 5 is in the Y-axis direction on the column 4. It moves along the linear drive axis.

The tool 7 is held by the spindle 6 provided on the spindle head 5, and when the servomotor MS1 is driven, the tool 7 rotates around the horizontal axis. When the work 10 as a workpiece is held by a jig such as squid provided on the pallet 3, and the servomotor MB is driven, the work 10 held by the jig such as shale is vertical along the B axis together with the pallet 3. Rotate around the axis.

By driving each of the above-mentioned servomotors MX, MY, MZ, MB, and MS1 based on the preset NC program via the servo control unit, the work 10 and the tool 7 move relative to each other, and the work 10 is desired. Machined into the shape of.

A coolant tank 8 for collecting coolant, which is a fluid supplied for cooling and cleaning, is installed below the table 2, and chips generated during machining are collected in the coolant tank 8 together with the coolant. There is. A chip conveyor 9 is arranged at the bottom of the coolant tank 8, and the chips 11 collected in the coolant tank 8 are carried out of the machine by the chip conveyor 9 and collected in the collection container 12.

The coolant collected in the coolant tank 8 is circulated and supplied to the coolant nozzle 20 after foreign matter such as chips is removed through a cyclone filter or the like.

A fluid for cooling and cleaning is provided on the front surface of the spindle 6 in order to suppress a temperature rise due to cutting heat generated in the machined part when the work 10 is machined by the tool 7 and to remove chips adhering to the machined part. A coolant nozzle 20 for injecting the coolant to the machined portion is provided. The reason for using coolant during machining is to reduce the decrease in machining accuracy of the workpiece due to thermal displacement caused by the temperature rise due to cutting heat, to lubricate the machining point to reduce cutting resistance, and to reduce cutting resistance. This is to remove chips.

During machining of the work 10, a part of the coolant injected from the coolant nozzle 20 is vaporized by the cutting heat, becomes fine particles and fills the machining space, and floats as mist. Therefore, the air supply / exhaust system 300 is used to remove the mist. Has been built.

As shown in FIGS. 1 to 3, the air supply / exhaust system 300 of the machine tool exhausts the coolant mist floating in the processing space 210, which is partitioned by the cover member 200 and processes the work 10, from the processing space 210 together with air. A mist collector 360 having a mist agglomerating portion for removing mist contained in the air guided by the exhaust duct 310, an air supply duct 320 for supplying the air passing through the mist collector 360 to the processing space 210, and an exhaust duct. It is equipped with a fan 368 (see FIG. 4) provided in any of the space between the 310 and the air supply duct 320.

A heat exchanger 350 that condenses the coolant vapor contained in the air guided by the exhaust duct is provided at a position closest to the upstream side of the mist agglomeration portion of the exhaust duct 310. The heat exchanger 350 is provided with a plurality of endothermic fins, and a cooling heat medium for cooling the endothermic fins is circulated and supplied from the chiller 330 via the medium circulation path 340. That is, the cooling mechanism is composed of the heat exchanger 350 and the chiller 330.

The air flowing into the exhaust duct 310 from the processing space 210 is heated to about 50 ° C. and contains coolant mist and steam. Such air is cooled by coming into contact with the endothermic fins in the heat exchanger 350, and at the same time, the vapor of the coolant is condensed into mist. The cooling mechanism cools the temperature of about 50 ° C to room temperature of about 25 ° C.

As shown in FIG. 4, the mist collector 360 is a device that removes the mist that flows in with the air from the exhaust duct 310 and discharges it to the air supply duct 320, so that the mist collector 360 descends from the center to the periphery in order from the upstream side. It is provided with a collision plate 361 made of a curved metal plate, a louver-shaped collision plate 362, a drum filter 363, and a HEPA filter (High Efficiency Particulate Air Filter) 365. Inside the drum filter 363, a centrifugal fan 368 and an electric motor 364 for driving the centrifugal fan 368 are provided.

Mist and coarse chips with a relatively large particle size contained in the air sucked from the processing space into the exhaust duct 310 by the centrifugal fan 368 collide with the collision plate 361 and are trapped, and the drain pan installed below the collision plate 361. Dropped and collected at 366. The mist and chips that cannot be completely removed by the collision plate 361 are trapped by the louver-shaped collision plate 362 provided on the downstream side.

The air that has passed through the collision plate 362 is further blown toward the inner surface of the drum filter 363 by the centrifugal fan 368 to remove mist and chips having a small particle size, and then passes through the HEPA filter to 0.3 μm. Most of the above fine particles such as mist are removed. The coolant collected in the drain pan 366 is discharged from the drain port 367.

The coolant discharged from the drain port 367 is collected in the coolant tank 8 in the processing space 210 via the coolant recovery mechanism and reused. Although simplified with a broken line arrow in FIG. 1, the coolant recovery mechanism is configured to include a coolant storage section, a coolant recirculation path, and a recovery pump, and the coolant discharged from the drain port 367 is stored in the coolant storage section. Then, it is collected in the coolant tank 8 by the collection pump via the coolant return path.

The specific configurations of the collision plates 361 and 362, the drum filter 363, the HEPA filter 365, and the like, which are functional parts for removing mist incorporated in the above-mentioned mist collector 360, are not particularly limited to those described above. Needless to say, a known filter or the like that can realize a desired function can be used. For example, a punching metal or the like can be used as the collision plate, and a metal mesh filter or the like can be used as the filter.

The explanation will be continued by returning from FIG. 1 to FIG. The exhaust duct 310 is attached to the upper part of the side wall of the cover member 200, and the air supply duct 320 is attached to the ceiling of the cover member 200.

Of the cover members 200 that partition the processing space 210, the first air supply pipe 321 is arranged in a horizontal posture in the space above the right side wall 200R, and the second air supply pipe 322 is arranged in a horizontal posture in the space above the left side wall 200L. The 1 air supply pipe 321 and the 2nd air supply pipe 322 are connected by a branch pipe 323. A plurality of nozzles Nr and Nl are attached to the first air supply pipe 321 and the second air supply pipe 322 at equal intervals, respectively. The first nozzle mechanism N1 is configured by the plurality of nozzles Nr attached to the first air supply pipe 321 and the first air supply pipe 321. A two-nozzle mechanism N2 is configured.

The air supplied from the air supply duct 320 to the processing space 210 is ejected from above to downward along the right side wall 200R via the first nozzle mechanism N1, and the left side wall 200L is ejected through the second nozzle mechanism N2. It is ejected from above to below along.

The air flowing along the right side wall 200R and the left side wall 200L guides the chips scattered toward the side walls 200R and 200L below the processing space 210, thereby suppressing the adhesion of the chips to the side walls 200R and 200L. To. The chips guided downward fall into the coolant tank 8 along the inclined guide plate arranged around the table 2, and then are carried out of the machine by the chip conveyor 9.

As the nozzles Nr and Nl constituting the first nozzle mechanism N1 and the second nozzle mechanism N2, a flat nozzle having a linear spray pattern is preferably used. The number and size of the nozzles Nr and Nl are not particularly limited, and may be set so that the chips scattered from the machining point can be guided downward. The shape of the flat nozzle is not particularly limited, and it goes without saying that a known air nozzle can be used as appropriate. Further, the installation angles of the nozzles Nr and Nl can be appropriately set.

As shown in FIG. 1, the third air supply pipe 324 is arranged so as to hang down from the central portion in the longitudinal direction of the branch pipe 323, and the nozzle Nc is attached to the tip thereof so as to face the vicinity of the machining point of the work 10. ing. As the nozzle Nc, a conical nozzle or a straight nozzle having a circular spray pattern is preferably used, and air is ejected so as to blow off chips generated at a processing point. The shape of the conical nozzle or the straight nozzle is not particularly limited, and it goes without saying that a known air nozzle can be appropriately used.

In the above-described embodiment, an example in which the first nozzle mechanism N1 is configured by a plurality of nozzles Nr attached to the first air supply pipe 321 and the first air supply pipe 321 has been described. , (C), a single or a plurality of narrow slits SL are formed in the first air supply pipe 321 along the pipe axis direction, and air is blown out from the slit SL along the side wall. May be good. FIG. 6B shows an example in which a single slit SL is formed along the pipe axis direction of the first air supply pipe 321. However, the slit SL is formed along the pipe axis direction of the first air supply pipe 321. It may be divided into a plurality of pieces.

In the above-described embodiment, an example in which the nozzle mechanism for ejecting from the upper side to the lower side is provided on the right side wall 200R and the left side wall 200L has been described, but the processing space is not limited to the right side wall 200R and the left side wall 200L. A nozzle mechanism can be provided on any side wall of the cover member 200 that partitions 210, which needs to suppress the adhesion of chips.

In the above example, the example in which the branch pipe 323 is arranged inside the processing space 210 has been described, but the branch pipe 323 may be installed outside the processing space 210, for example, above the ceiling wall.

The heat exchanger 350 constituting the cooling mechanism is preferably provided on the immediate upstream side of the mist collector 360 in the exhaust duct 310, but the installation position is not limited and the heat exchanger 350 is not limited to any part of the exhaust duct 310. All you have to do is prepare.

Further, the heat exchanger 350 may be provided in any of the circulation paths of the air exhausted from the exhaust duct 310 and supplied from the air supply duct 320, and is not necessarily provided in the exhaust duct 310. When the heat exchanger 350 is provided in the air supply duct 320, the mist condensed by the heat exchanger 350 flows into the processing space 210, but the effect of suppressing the increase in the internal temperature of the processing space 210 is sufficient. Can be demonstrated.

Although the configuration using the chiller 330 and the heat exchanger 350 as the cooling mechanism has been described, the specific structure of the heat exchanger 350 is not particularly limited, and a known structure can be appropriately used.

As a cooling mechanism, it is also possible to use an air cooler equipped with a compressor, a vortex generator and a regulating valve. Further, a cooling mechanism may be provided by using a refrigeration cycle.

Although the configuration including the collision plate and the filter as the mist collector 360 has been described, the specific structure is not limited to the above-mentioned example, and a known collision type mist collector can be appropriately adopted.

Further, a single cyclone mechanism or a cyclone type mist collector 360 in which a plurality of cyclones are arranged may be used.

The processing space 210 is not sealed by the cover member 200, and is in a state of communicating with the outside through a certain gap. Therefore, it is necessary to maintain the machining space at a negative pressure so that the coolant mist generated in the machining space 210 does not leak to the outside through the gap of the cover member 200 or the like.

When the entire amount of air drawn from the processing space 210 through the exhaust duct 310 is returned to the processing space through the air supply duct 320, the processing space 210 becomes positive pressure and air is supplied through the air supply duct 320. Will be difficult.

Therefore, the machining space 210 is maintained at a negative pressure by supplying the residual air that has passed through the mist collector 360 (mist agglomeration portion) to the outside through the air supply duct 320 to the machining space 210. While air can be circulated along the circulation path.

The temperature of the air adjusted by the cooling mechanism is a temperature that can be suppressed so that large thermal displacement does not occur in the structure of the machine tool such as tools, workpieces, beds, columns, spindles, etc. due to the heat generated by machining. Well, it is not particularly limited. In the present embodiment, the temperature that rises when there is no air circulation is about 50 ° C., so that at least the atmospheric temperature of the processing space 210 does not rise from room temperature to about 50 ° C. By cooling to, the processing space 210 is configured to be maintained at about 40 ° C. even if the atmospheric temperature is high.

In the above-described embodiment, an example in which the air in the processing space 210 is circulated along the circulation path composed of the exhaust duct 310 and the air supply duct 320 by the centrifugal fan 368 provided in the mist collector 360 has been described. A fan other than the centrifugal fan 368 provided in 360 may be provided in either or both of the exhaust duct 310 and the air supply duct 320.

In the above-described embodiment, an example in which the machine tool 100 is composed of a horizontal machining center has been described, but the machine tool 100 to which the present invention is applied is not limited to the horizontal machining center, but can be applied to various machining centers and is a lathe. It can also be applied to machine tools that do not have a spindle head to hold tools such as.

Although the embodiments and embodiments of the present invention have been described above, the disclosed contents may be changed in the details of the configuration, and changes in the combinations and orders of the elements in the embodiments and embodiments have been requested. It can be realized without departing from the scope and idea of the present invention.

As described above, according to the present invention, it is possible to realize an air supply / exhaust system for a machine tool capable of suppressing adhesion of chips and the like to a cover member while removing mist containing a coolant component vaporized by processing heat.

1: Bed 2: Table 3: Pallet 4: Column 5: Spindle head 6: Spindle 7: Tool 8: Coolant tank 9: Tip conveyor 10: Work piece (work)
11: Chip 100: Machine tool 200: Cover member 210: Processing space 300: Air supply / exhaust system 310: Exhaust duct 320: Air supply duct 321: First air supply pipe 322: Second air supply pipe 323: Branch pipe 324: Third supply Trachea 330: Chiller (cooling mechanism)
340: Medium circulation path 350: Heat exchanger (cooling mechanism)
360: Mist collector 368: Fan N1: First nozzle mechanism N2: Second nozzle mechanism Nr, Nl, Nc: Nozzle

In order to achieve this object, the air supply / exhaust system of the machine tool according to the present invention has an exhaust duct for exhausting the coolant mist floating in the processing space for processing the work, which is partitioned by the cover member, together with air from the processing space, and the exhaust duct. At least one of a mist agglomerate portion that removes the mist contained in the air guided by, an air supply duct that supplies the air that has passed through the mist agglomeration portion to the processing space, and an air supply duct from the exhaust duct to the air supply duct. It is configured with a fan provided in the crab, and blows out the air guided by the air supply duct from above to the bottom of the machining space, and guides the chips generated by the machining of the work to the bottom of the machining space. e Bei nozzle mechanism, the nozzle mechanism, characterized in that it comprises a single or plurality of flat nozzles linear spray pattern spewing air toward the top to bottom along the side wall of the cover member for partitioning the working space And.

In order to achieve this object, the air supply / exhaust system of the machine tool according to the present invention has an exhaust duct for exhausting the coolant mist floating in the processing space for processing the work, which is partitioned by the cover member, together with air from the processing space, and the exhaust duct. At least one of a mist agglomerate portion that removes the mist contained in the air guided by, an air supply duct that supplies the air that has passed through the mist agglomeration portion to the processing space, and an air supply duct from the exhaust duct to the air supply duct. It is configured with a fan provided in the crab, and blows out the air guided by the air supply duct from above to the bottom of the machining space, and guides the chips generated by the machining of the work to the bottom of the machining space. a nozzle mechanism, the nozzle mechanism, the working space to have a linear spray pattern across the lateral width direction of the side wall of the cover member partitioning the upper from a single or a plurality of the to erupted air downward It is characterized by including a flat nozzle.

Claims (6)

An exhaust duct that exhausts the coolant mist floating in the processing space, which is partitioned by the cover member and processes the work, together with the air from the processing space.
A mist agglomerate portion that removes mist contained in the air guided by the exhaust duct, and
An air supply duct that supplies air that has passed through the mist agglomeration portion to the processing space,
A fan provided in at least one of the space between the exhaust duct and the air supply duct.
Is configured with
An air supply / exhaust system for a machine tool provided with a nozzle mechanism that ejects air guided by the air supply duct from above to below in the machining space and guides chips generated by machining the workpiece to the bottom of the machining space. The machine tool according to claim 1, wherein the nozzle mechanism includes a single or a plurality of flat nozzles having a linear spray pattern that ejects air from above to below along a side wall of a cover member that partitions the processing space. Exhaust system. The air supply / exhaust system for a machine tool according to claim 2, wherein the nozzle mechanism is provided on a plurality of side walls of the cover member and is connected to each flat nozzle via a branch duct branching from the air supply duct. The air supply / exhaust of the machine tool according to any one of claims 1 to 3, wherein the nozzle mechanism includes a conical nozzle or a straight nozzle having a circular spray pattern that ejects air from above to downward in the vicinity of the machining point of the work. system. The air supply / exhaust system for a machine tool according to any one of claims 1 to 4, further comprising a cooling mechanism for condensing steam contained in air guided by the exhaust duct on the upstream side of the mist agglomerating portion. The air supply / exhaust system for a machine tool according to claim 5, wherein the cooling mechanism is configured to cool the air guided by the exhaust duct so as to adjust the atmospheric temperature of the processing space to a predetermined temperature range.

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