JP2003131116A5 - - Google Patents
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- Publication number
- JP2003131116A5 JP2003131116A5 JP2001324035A JP2001324035A JP2003131116A5 JP 2003131116 A5 JP2003131116 A5 JP 2003131116A5 JP 2001324035 A JP2001324035 A JP 2001324035A JP 2001324035 A JP2001324035 A JP 2001324035A JP 2003131116 A5 JP2003131116 A5 JP 2003131116A5
- Authority
- JP
- Japan
- Prior art keywords
- light
- subject
- irradiates
- measurement light
- reflected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 claims 9
- 238000001514 detection method Methods 0.000 claims 5
- 230000003287 optical effect Effects 0.000 claims 2
- 239000013307 optical fiber Substances 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001324035A JP3944377B2 (ja) | 2001-10-22 | 2001-10-22 | 焦点検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001324035A JP3944377B2 (ja) | 2001-10-22 | 2001-10-22 | 焦点検出装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003131116A JP2003131116A (ja) | 2003-05-08 |
| JP2003131116A5 true JP2003131116A5 (enExample) | 2005-06-30 |
| JP3944377B2 JP3944377B2 (ja) | 2007-07-11 |
Family
ID=19140839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001324035A Expired - Fee Related JP3944377B2 (ja) | 2001-10-22 | 2001-10-22 | 焦点検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3944377B2 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4869727B2 (ja) * | 2006-02-15 | 2012-02-08 | オリンパス株式会社 | 測定顕微鏡装置 |
| JP5424064B2 (ja) * | 2008-07-09 | 2014-02-26 | 株式会社ニコン | 測定装置 |
| WO2010054318A1 (en) * | 2008-11-07 | 2010-05-14 | Hamilton Thorne, Inc. | Modular objective assembly |
| US10247910B1 (en) * | 2018-03-14 | 2019-04-02 | Nanotronics Imaging, Inc. | Systems, devices and methods for automatic microscopic focus |
| US10146041B1 (en) | 2018-05-01 | 2018-12-04 | Nanotronics Imaging, Inc. | Systems, devices and methods for automatic microscope focus |
| JP7219463B2 (ja) * | 2019-04-15 | 2023-02-08 | 大塚電子株式会社 | 光学ユニット、光学測定装置および光学測定方法 |
| KR102368468B1 (ko) | 2020-07-13 | 2022-03-02 | 주식회사 에타맥스 | 자동 광 초점 조절장치 및 이를 포함하는 광학장치 |
-
2001
- 2001-10-22 JP JP2001324035A patent/JP3944377B2/ja not_active Expired - Fee Related
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