JP2003117898A5 - - Google Patents

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Publication number
JP2003117898A5
JP2003117898A5 JP2002221120A JP2002221120A JP2003117898A5 JP 2003117898 A5 JP2003117898 A5 JP 2003117898A5 JP 2002221120 A JP2002221120 A JP 2002221120A JP 2002221120 A JP2002221120 A JP 2002221120A JP 2003117898 A5 JP2003117898 A5 JP 2003117898A5
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JP
Japan
Prior art keywords
microelectromechanical device
flexible member
microelectromechanical
anchor
substrate
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Application number
JP2002221120A
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English (en)
Japanese (ja)
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JP2003117898A (ja
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Priority claimed from US09/923,000 external-priority patent/US6600201B2/en
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Publication of JP2003117898A publication Critical patent/JP2003117898A/ja
Publication of JP2003117898A5 publication Critical patent/JP2003117898A5/ja
Pending legal-status Critical Current

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JP2002221120A 2001-08-03 2002-07-30 マイクロマシンを高密度に収容するシステム Pending JP2003117898A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/923000 2001-08-03
US09/923,000 US6600201B2 (en) 2001-08-03 2001-08-03 Systems with high density packing of micromachines

Publications (2)

Publication Number Publication Date
JP2003117898A JP2003117898A (ja) 2003-04-23
JP2003117898A5 true JP2003117898A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2005-10-06

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JP2002221120A Pending JP2003117898A (ja) 2001-08-03 2002-07-30 マイクロマシンを高密度に収容するシステム

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US (1) US6600201B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP1281665A3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JP2003117898A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TW548776B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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